Multi-layer splicing type carbon-carbon crucible edge for single crystal furnace

Abstract

The utility model provides a multi-layer splicing type carbon-carbon crucible edge for a single crystal furnace, which comprises a crucible edge body, the crucible edge body is formed by splicing a crucible edge straight cylinder body and a crucible edge bowl body in sequence from top to bottom, the crucible edge straight cylinder body is a hollow vertical cylinder, and the crucible edge bowl body is of a bowl-shaped structure with an upward bowl opening; a first fixing hole extending towards a bowl opening is vertically formed in the side wall of the crucible edge straight barrel, a second fixing hole corresponding to the first fixing hole is formed in the position, corresponding to the crucible edge straight barrel, of the bowl opening of the crucible edge bowl, and the two ends of a pin are inserted into the first fixing hole and the second fixing hole respectively. And the crucible edge straight cylinder body and the crucible edge bowl body are spliced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing, and specifically designs a multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace. Background Art

[0002] In the monocrystalline silicon manufacturing industry, the damage rate of carbon-carbon crucible bonds is relatively high. The causes of damage to carbon-carbon crucible bonds include R-angle cracks, silicon infiltration, corrosion thinning, transverse / longitudinal cracks in the middle of the straight wall, corrosion thinning of the upper edge of the straight wall due to liquid level line, notches, cracks, etc. At present, carbon-carbon crucible bonds are generally formed as a whole during the production process. The integrally formed carbon-carbon crucible bonds need to be replaced as a whole after being damaged, which greatly increases the production cost. Utility Model Content

[0003] The utility model aims to provide a multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace. The carbon-carbon crucible is easily damaged at the upper straight wall or the lower R corner. The spliced ​​carbon-carbon crucible is divided into a crucible straight cylinder body and a crucible bowl body. When the upper straight wall or the lower R corner is damaged, the spliced ​​carbon-carbon crucible can be subjected to secondary processing, and the corresponding damaged parts can be dismantled and re-spliced ​​to achieve the effect of reuse, which can greatly reduce the production cost.

[0004] In order to solve the above technical problems, the utility model adopts the following solutions:

[0005] A multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace, comprising a crucible body, wherein the crucible body is composed of a crucible straight cylinder and a crucible bowl from top to bottom, wherein the crucible straight cylinder is a vertical cylinder with a hollow interior, and the crucible bowl is a bowl-shaped structure with the mouth of the crucible facing upwards;

[0006] A first fixing hole extending toward the bowl mouth is vertically arranged on the side wall of the Crucible straight cylinder, and a second fixing hole corresponding to the first fixing hole is arranged on the bowl mouth corresponding to the Crucible straight cylinder of the Crucible bowl body. The two ends of the pin are respectively inserted into the first fixing hole and the second fixing hole to splice the Crucible straight cylinder and the Crucible bowl body.

[0007] Furthermore, the Crucible bowl body is composed of a connecting part and a corner part from top to bottom, the connecting part is a vertical cylinder identical to the Crucible straight cylinder, and the inner diameter of the connecting part is the same as the inner diameter of the Crucible straight cylinder, and the connecting part is provided with a second fixing hole corresponding to the first fixing hole on the upper side corresponding to the Crucible straight cylinder.

[0008] Furthermore, the corner portion is a bowl groove structure with the bowl mouth facing upward, and the inner diameter of the bowl mouth of the corner portion decreases from top to bottom, so that the side wall of the corner portion is an arc-shaped side wall.

[0009] Furthermore, a Crusher ring is fixedly provided on the bottom surface of the Crusher straight cylinder, and the inner diameter of the Crusher ring is the same as the inner diameter of the Crusher straight cylinder. A plurality of first fixing holes are vertically penetrated on the Crusher ring, and the two ends of the pin are respectively inserted into the first fixing hole and the second fixing hole, so that the Crusher ring is located between the Crusher straight cylinder and the Crusher bowl body.

[0010] Furthermore, graphite glue is coated between the crucible ring and the crucible bowl body, and the graphite glue is located around the pins to fill the gap between the crucible ring and the crucible bowl body.

[0011] Furthermore, the straight cylinder of the Crucible is a vertical cylinder composed of multiple layers of Crucible rings stacked in sequence, and each layer of Crucible rings is vertically penetrated by a number of corresponding circular holes, so that the corresponding circular holes are connected from top to bottom to form a first fixing hole, and the pin is inserted from the first fixing hole until it is inserted into the second fixing hole.

[0012] Furthermore, graphite glue is coated between the crucible rings to fill the gap between the two crucible rings.

[0013] Beneficial effects of the utility model:

[0014] The utility model provides a multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace. Since the carbon-carbon crucible is easily damaged at the upper straight wall or the lower R corner, the spliced ​​carbon-carbon crucible is divided into a crucible straight cylinder body and a crucible bowl body. When the upper straight wall or the lower R corner is damaged, the spliced ​​carbon-carbon crucible can be subjected to secondary processing, and the corresponding damaged parts can be dismantled and re-spliced ​​to achieve the effect of reuse, which can greatly reduce the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the explosion structure of the spliced ​​carbon-carbon crucible in Example 1 of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the bowl body of the utility model in Example 1;

[0017] Figure 3 It is a schematic diagram of the explosion structure of the spliced ​​carbon-carbon crucible in Example 2 of the utility model;

[0018] Figure 4 This is a schematic diagram of a circular hole in Example 3 of the utility model;

[0019] Figure 5 It is a schematic diagram of the explosion structure of the spliced ​​carbon-carbon crucible in Example 3 of the utility model;

[0020] Explanation of the accompanying drawings: 1- straight cylinder of the Crucible, 2- bowl body of the Crucible, 21- connecting part, 22- corner part, 3- first fixing hole, 4- second fixing hole, 5- pin, 6- Crucible ring, 7- round hole. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods, but the implementation methods of the present invention are not limited thereto.

[0022] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0023] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] The present invention is described in detail below with reference to the accompanying drawings and in combination with embodiments:

[0025] Example 1

[0026] At present, the monolithic silicon manufacturing industry still generally uses an integral carbon-carbon crucible bond, and the damage rate of the carbon-carbon crucible bond is relatively high. The integral carbon-carbon crucible bond needs to be replaced as a whole after being damaged, which greatly increases the production cost. After analyzing the causes of damage to the carbon-carbon crucible bond, it is found that the damage to the carbon-carbon crucible bond usually occurs at the upper straight wall or the lower R corner. Therefore, the utility model provides a multi-layer spliced ​​carbon-carbon crucible bond for a single crystal furnace. The carbon-carbon crucible bond is easily damaged at the upper straight wall or the lower R corner. The spliced ​​carbon-carbon crucible bond is divided into a crucible bond straight cylinder body 1 and a crucible bond bowl body 2. When the upper straight wall or the lower R corner is damaged, the spliced ​​carbon-carbon crucible bond can be processed for secondary processing, and the corresponding damaged part can be removed and re-spliced ​​to achieve the effect of reuse, which can greatly reduce the production cost.

[0027] Specifically, Figure 1 As shown, a multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace includes a crucible body, which is composed of a crucible straight cylinder 1 and a crucible bowl 2 spliced ​​from top to bottom. The crucible straight cylinder 1 is a vertical cylinder with a hollow interior, and the crucible bowl 2 is a bowl-shaped structure with the bowl mouth facing upwards;

[0028] A first fixing hole 3 extending toward the bowl mouth is vertically arranged on the side wall of the Crucible straight cylinder 1, and a second fixing hole 4 corresponding to the first fixing hole 3 is arranged on the bowl mouth corresponding to the Crucible bowl body 2. The two ends of the pin 5 are respectively inserted into the first fixing hole 3 and the second fixing hole 4 to splice the Crucible straight cylinder 1 and the Crucible bowl body 2.

[0029] Preferably, the Crucible bowl body 2 is composed of a connecting portion 21 and a corner portion 22 from top to bottom, the connecting portion 21 is a vertical cylinder identical to the Crucible straight cylinder 1, and the inner diameter of the connecting portion 21 is the same as the inner diameter of the Crucible straight cylinder 1, and the connecting portion 21 is provided with a second fixing hole 4 corresponding to the first fixing hole 3 on the upper side corresponding to the Crucible straight cylinder 1.

[0030] Preferably, the corner portion 22 is a bowl groove structure with the bowl mouth facing upward, and the inner diameter of the bowl mouth of the corner portion 22 decreases from top to bottom, so that the side wall of the corner portion 22 is an arc-shaped side wall.

[0031] In this embodiment, the splicing position between the crucible bowl body 2 and the crucible straight cylinder body 1 adopts the staggered crucible R angle position. Since the crucible R angle position is very prone to R angle cracks and other phenomena, the R angle is very easy to be damaged. If the crucible R angle position is directly used as the splicing position to splice with the crucible straight cylinder body 1, it is very easy to cause the crucible body to crack at the splicing position, increasing the damage rate of the spliced ​​carbon-carbon crucible. Therefore, in this embodiment, the crucible bowl body 2 is composed of the above-mentioned connecting part 21 and the above-mentioned corner part 22, such as Figure 2 As shown, a portion of the side wall of the crucible with straight walls is reserved at the crucible R corner position, that is, the position of the connecting portion 21 above the corner portion 22 is used as the splicing position for splicing the crucible bowl body 2 and the crucible straight cylinder body 1, wherein the corner portion 22 is the crucible R corner, and the connecting portion 21 is a vertical cylinder with straight side walls above the crucible R corner.

[0032] Furthermore, the vertical cylinder may be a part of the original upper vertical cylinder, that is, the connecting portion 21 is a vertical cylinder identical to the crucible straight cylinder body 1, so that corresponding first fixing holes 3 and second fixing holes 4 may be provided on the connecting portion 21 and the crucible straight cylinder body 1, and the crucible straight cylinder body 1 and the crucible bowl body 2 may be spliced ​​together by inserting the two ends of the pin 5 into the first fixing hole 3 and the second fixing hole 4 respectively.

[0033] Example 2

[0034] Based on Example 1, in this embodiment, Figure 3 As shown, a Crusher ring 6 is also fixedly arranged on the bottom surface of the Crusher straight cylinder 1, and the inner diameter of the Crusher ring 6 is the same as that of the Crusher straight cylinder 1. A plurality of first fixing holes 3 are vertically penetrated on the Crusher ring 6, and the two ends of the pin 5 are respectively inserted into the first fixing holes 3 and the second fixing holes 4, so that the Crusher ring 6 is located between the Crusher straight cylinder 1 and the Crusher bowl 2. The purpose is to facilitate the replacement of the damaged Crusher ring 6, so that the staff can reuse the damaged spliced ​​carbon-carbon Crusher, because the Crusher ring 6 is arranged on the bottom surface of the Crusher straight cylinder 1, and the Crusher ring 6 is an annular structure, and a plurality of first fixing holes 3 are penetrated on the annular structure, and the Crusher straight cylinder 1 and the Crusher bowl 2 are spliced ​​through the first fixing holes 3 on the Crusher ring 6.

[0035] Preferably, graphite glue is coated between the crucible ring 6 and the crucible bowl body 2, and the graphite glue is located around the pin 5 to fill the gap between the crucible ring 6 and the crucible bowl body 2. The purpose is to fix the crucible ring 6 and the crucible bowl body 2 so that the pin 5 will not move between the first fixing hole 3 and the second fixing hole 4.

[0036] Example 3

[0037] Based on Example 1, in this example, the Crucible straight cylinder 1 is a vertical cylinder composed of multiple layers of Crucible rings 6 stacked in sequence, and each layer of Crucible rings 6 is vertically penetrated with a number of corresponding circular holes 7, so that the corresponding circular holes 7 are connected from top to bottom to form a first fixing hole 3, and the pin 5 is inserted from the first fixing hole 3 until it is inserted into the second fixing hole 4. The purpose is to facilitate the replacement of the damaged Crucible straight cylinder, so the Crucible straight cylinder 1 is also split into a multi-layer structure, which is composed of multiple layers of Crucible rings 6, and the inner diameter of the Crucible rings 6 is the same as the inner diameter of the Crucible straight cylinder 1, and the Crucible rings 6 are vertically penetrated with a number of circular holes 7, such as Figure 4 As shown, each of the crucible rings 6 has a plurality of circular holes 7 evenly distributed in an annular direction. When the circular holes 7 between each layer of crucible rings 6 are connected up and down, a first fixing hole 3 in the crucible straight cylinder 1 is formed. Then, the crucible straight cylinder 1 and the crucible bowl 2 are spliced ​​through the first fixing hole 3 in the crucible straight cylinder 1. Figure 5 shown.

[0038] Preferably, graphite glue is coated between the two crucible rings 6 to fill the gap between the two crucible rings 6. The purpose is to fix the crucible rings 6 and the crucible rings 6 so that the pin 5 will not move between the first fixing hole 3 and the second fixing hole 4.

[0039] Preferably, graphite glue is coated between the crucible ring 6 and the crucible bowl body 2, and the graphite glue is located around the pin 5 to fill the gap between the crucible ring 6 and the crucible bowl body 2. The purpose is to fix the crucible ring 6 and the crucible bowl body 2 so that the pin 5 will not move between the first fixing hole 3 and the second fixing hole 4.

[0040] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace, characterized in that: It comprises a crucible body, which is composed of a crucible straight cylinder (1) and a crucible bowl body (2) spliced ​​together from top to bottom, wherein the crucible straight cylinder (1) is a vertical cylinder with a hollow interior, and the crucible bowl body (2) is a bowl-shaped structure with the mouth of the bowl facing upwards; A first fixing hole (3) extending toward the bowl mouth is vertically arranged on the side wall of the Crucible straight cylinder (1), and a second fixing hole (4) corresponding to the first fixing hole (3) is arranged on the bowl mouth corresponding to the Crucible straight cylinder (1) of the Crucible bowl (2). The two ends of the pin (5) are respectively inserted into the first fixing hole (3) and the second fixing hole (4), so that the Crucible straight cylinder (1) and the Crucible bowl (2) are spliced.

2. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 1, characterized in that: The bowl body (2) of the pot is composed of a connecting portion (21) and a corner portion (22) from top to bottom. The connecting portion (21) is a vertical cylinder identical to the straight cylinder (1) of the pot, and the inner diameter of the connecting portion (21) is the same as the inner diameter of the straight cylinder (1). The connecting portion (21) is provided with a second fixing hole (4) corresponding to the first fixing hole (3) on the upper surface corresponding to the straight cylinder (1).

3. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 2, characterized in that: The corner portion (22) is a bowl groove structure with the bowl mouth facing upwards, and the inner diameter of the bowl mouth of the corner portion (22) decreases from top to bottom, so that the side wall of the corner portion (22) is an arc-shaped side wall.

4. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 1, characterized in that: A crucible ring (6) is also fixedly arranged on the bottom surface of the crucible straight cylinder (1). The inner diameter of the crucible ring (6) is the same as the inner diameter of the crucible straight cylinder (1). A plurality of first fixing holes (3) are vertically penetrated on the crucible ring (6). The two ends of the pin (5) are respectively inserted into the first fixing hole (3) and the second fixing hole (4), so that the crucible ring (6) is located between the crucible straight cylinder (1) and the crucible bowl body (2).

5. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 4, characterized in that: Graphite glue is coated between the crucible ring (6) and the crucible bowl body (2), and the graphite glue is located around the pin (5) and is used to fill the gap between the crucible ring (6) and the crucible bowl body (2).

6. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 1, characterized in that: The straight cylinder (1) of the crucible is a vertical cylinder composed of multiple layers of crucible rings (6) stacked in sequence, and each layer of the crucible rings (6) is vertically penetrated with a plurality of corresponding circular holes (7), so that the corresponding circular holes (7) are connected from top to bottom to form a first fixing hole (3), and the pin (5) is inserted from the first fixing hole (3) until it is inserted into the second fixing hole (4).

7. The multi-layer spliced ​​carbon-carbon crucible for a single crystal furnace according to claim 6, characterized in that: Graphite glue is coated between the crucible rings (6) and the crucible rings (6) to fill the gap between the two crucible rings (6).

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