Heating device of crystal growth furnace
By designing a heating device with multiple heating parts and driving devices on the crystal growth furnace, the problem of low temperature adjustment accuracy of the existing crystal growth furnace is solved, and the precise control of the local temperature of the crystal growth furnace is achieved.
Patent Information
- Application Number
- CN202421932662.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The existing crystal growth furnace has low temperature adjustment accuracy, making it difficult to achieve accurate control of the local temperature of the crystal growth furnace.
A heating device including a plurality of heating parts and a driving device is designed. Through the spacing arrangement of the heating parts and the driving of the driving device, the movement of the end of the heating part is close to or away from the outer wall of the crystal furnace, thereby improving the accuracy of temperature control.
By controlling the position of the heating element, the local temperature of the crystal growth furnace can be accurately adjusted, significantly improving the accuracy of temperature control.
Smart Images
Figure CN222893295U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide crystal growth equipment, in particular to a heating device for a crystal growth furnace. Background Art
[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.
[0003] The inventors have found through research that the temperature adjustment accuracy of the existing crystal growth furnace is low. Utility Model Content
[0004] The utility model aims to provide a heating device for a crystal growth furnace, which can improve the accuracy of temperature regulation of the crystal growth furnace.
[0005] The embodiment of the utility model is achieved as follows:
[0006] In a first aspect, the utility model provides a heating device for a crystal growth furnace, comprising:
[0007] Crystal growth furnace;
[0008] A heating assembly, the heating assembly comprising a plurality of heating elements, the plurality of heating elements being arranged at intervals outside the crystal growth furnace;
[0009] A driving device, the driving device comprising a plurality of driving members, the plurality of driving members being connected to the heating member in a one-to-one correspondence;
[0010] The driving member is used to drive the heating member to move so that the end of the heating member can be close to or away from the outer wall of the crystal growth furnace.
[0011] In an optional embodiment, the plurality of heating elements include a plurality of first heating elements, the first heating elements are arranged outside the outer peripheral wall of the crystal growth furnace, and the plurality of first heating elements are arranged at intervals along the axial direction of the crystal growth furnace;
[0012] The first heating element can be close to or far away from the crystal growth furnace in the radial direction of the crystal growth furnace, and / or one end of the first heating element can be far away from or close to the outer wall of the crystal growth furnace relative to the other end.
[0013] In an optional embodiment, the multiple first heating elements are divided into multiple groups, the multiple groups of first heating elements are arranged at intervals along the axial direction of the crystal growth furnace, and the multiple first heating elements in each group are arranged at intervals around the circumference of the crystal growth furnace.
[0014] In an optional embodiment, a side of the first heating element close to the crystal growth furnace is a curved surface matched with an outer peripheral wall of the crystal growth furnace.
[0015] In an optional embodiment, the plurality of heating elements include a second heating element, and the second heating element is disposed on one side of the top of the crystal growth furnace;
[0016] The second heating element can be close to or away from the crystal growth furnace in the height direction of the crystal growth furnace, and / or one end of the second heating element can be away from or close to the top wall of the crystal growth furnace relative to the other end.
[0017] In an optional embodiment, there are multiple second heating elements, and the multiple second heating elements are arranged at intervals on the top of the crystal growth furnace.
[0018] In an optional embodiment, the plurality of heating elements include a third heating element, and the third heating element is disposed on one side of the bottom of the crystal growth furnace;
[0019] The third heating element can be close to or away from the crystal growth furnace in the height direction of the crystal growth furnace, and / or one end of the third heating element can be away from or close to the bottom wall of the crystal growth furnace relative to the other end.
[0020] In an optional embodiment, there are multiple third heating elements, and the multiple third heating elements are arranged at intervals at the bottom of the crystal growth furnace.
[0021] In an optional embodiment, the driving member is connected to the middle portion of the heating member.
[0022] In an optional embodiment, a first heat-insulating member is disposed on the top of the crystal growth furnace, and / or a second heat-insulating member is disposed on the peripheral wall of the crystal growth furnace.
[0023] The beneficial effect of the embodiment of the utility model is as follows: the heating device of a crystal growth furnace provided by the embodiment of the utility model includes a crystal growth furnace, a heating assembly and a driving device. The heating assembly includes a plurality of heating elements, and the plurality of heating elements are arranged at intervals on the outside of the crystal growth furnace. The driving device includes a plurality of driving elements, and the plurality of driving elements are connected to the heating elements one by one. The driving element is used to drive the heating element to move so that the end of the heating element can move close to or away from the outer wall of the crystal growth furnace. Since the heating assembly includes a plurality of heating elements, and the plurality of heating elements are arranged at intervals on the outside of the crystal growth furnace, when temperature control is performed, when a certain part of the crystal growth furnace needs to be heated up or cooled down, one or more heating elements corresponding to the part of the crystal growth furnace can be controlled, thereby improving the accuracy of temperature control of the crystal growth furnace. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0025] Figure 1 A schematic structural diagram of a heating device for a crystal growth furnace provided in an embodiment of the utility model.
[0026] Icons: 1- heating device of crystal growth furnace; 100- crystal growth furnace; 200- heating assembly; 210- first heating element; 220- second heating element; 230- third heating element; 240- connecting part; 300- first heat-insulating element; 400- second heat-insulating element. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0030] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0031] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0032] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0033] The specific structure of a heating device for a crystal growth furnace provided by an embodiment of the utility model and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.
[0034] Please refer to Figure 1 The heating device 1 of a crystal growth furnace provided by the embodiment of the utility model comprises a crystal growth furnace 100, a heating assembly 200 and a driving device. The heating assembly 200 comprises a plurality of heating elements, which are arranged at intervals outside the crystal growth furnace 100. The driving device comprises a plurality of driving elements, which are connected to the heating elements one by one. The driving element is used to drive the heating element to move so that the end of the heating element can move close to or away from the outer wall of the crystal growth furnace 100.
[0035] It can be understood that, compared with the heating structure of the existing crystal growth furnace 100, most of them are heating coils in a hollow cylindrical shape. When the heating coil is heated, since it is a whole coil, it is impossible to accurately control the temperature of each position of the crystal growth furnace 100. In this embodiment, since the heating assembly 200 includes a plurality of heating elements, and the plurality of heating elements are arranged at intervals on the outside of the crystal growth furnace 100, when temperature control is performed, when a certain part of the crystal growth furnace 100 needs to be heated up or cooled down, one or more heating elements corresponding to the part of the crystal growth furnace 100 can be controlled, thereby improving the accuracy of temperature control of the crystal growth furnace 100.
[0036] Furthermore, the driving member in this embodiment can drive the end of the heating member to be close to or away from the outer wall of the crystal growth furnace 100 , and can also adjust the heat transfer distance of the heating member to the crystal growth furnace 100 , thereby further improving the accuracy of temperature control of the crystal growth furnace 100 .
[0037] It should be noted that the driving member can drive the end of the heating member to be close to or away from the outer wall of the crystal growth furnace 100, which can be understood as the driving member drives the entire heating member to be close to or away from the outer wall of the crystal growth furnace 100. It can also be understood that the heating member has a first end and a second end relative to each other. When the driving member drives the first end of the heating member to be close to the outer wall of the crystal growth furnace 100, the second end of the heating member is away from the outer wall of the crystal growth furnace 100 relative to the first end. When the driving member drives the second end of the heating member to be close to the outer wall of the crystal growth furnace 100, the first end of the heating member is away from the outer wall of the crystal growth furnace 100 relative to the second end.
[0038] It should be noted that the driving member can be understood as a robotic arm, which is a conventional prior art, and the specific structure of the robotic arm will not be described in detail herein.
[0039] In detail, the plurality of heating elements include a first heating element 210, which is disposed outside the outer peripheral wall of the crystal growth furnace 100, and the plurality of first heating elements 210 are arranged at intervals along the axial direction of the crystal growth furnace 100. It can be understood that the plurality of first heating elements 210 are arranged at intervals along the axial direction, and the temperature gradient in the axial direction of the crystal growth furnace 100 can be controlled by the first heating elements 210 arranged at intervals along the axial direction.
[0040] The first heating element 210 can be close to or away from the crystal growth furnace 100 in the radial direction of the crystal growth furnace 100, and one end of the first heating element 210 in this embodiment can be close to the outer wall of the crystal growth furnace 100 relative to the other end. Figure 1 For reference, the first heating element 210 has an upper end and a lower end in the axial direction of the crystal growth furnace 100. Under the action of the driving element connected to the first heating element 210, the upper end of the first heating element 210 can be closer to the outer peripheral wall of the crystal growth furnace 100 relative to the lower end, and at this time, the lower end is farther away from the outer peripheral wall of the crystal growth furnace 100 relative to the upper end. Conversely, the upper end of the first heating element 210 can also be farther away from the outer peripheral wall of the crystal growth furnace 100 relative to the lower end. In this way, the inclination angle of the first heating element 210 relative to the crystal growth furnace 100 can be controlled to adjust the heating direction of the first heating element 210 on the crystal growth furnace 100, and further improve the accuracy of temperature control of the crystal growth furnace 100.
[0041] Optionally, the multiple first heating elements 210 are divided into multiple groups, and the multiple groups of first heating elements 210 are arranged at intervals along the axial direction of the crystal growth furnace 100 , and the multiple first heating elements 210 in each group are arranged at intervals around the circumference of the crystal growth furnace 100 .
[0042] It can be understood that the control accuracy of axial heating of the crystal growth furnace 100 can be improved by using multiple groups of first heating elements 210, and the control accuracy of radial heating of the crystal growth furnace 100 can be improved by using multiple first heating elements 210 in each group, that is, the accuracy of the radial temperature gradient of the crystal growth furnace 100 can be improved.
[0043] In this embodiment, the first heating elements 210 are divided into two groups, and the two groups of first heating elements 210 are arranged at intervals along the axis direction of the crystal growth furnace 100 .
[0044] In some optional embodiments, in order to better heat the crystal growth furnace 100, the side of the first heating element 210 close to the crystal growth furnace 100 is a curved surface that matches the outer wall of the crystal growth furnace 100. It can be understood that the appearance of the crystal growth furnace 100 is generally curved. Since the side of the first heating element 210 close to the crystal growth furnace 100 is a curved surface that matches the outer wall of the crystal growth furnace 100, the crystal growth furnace 100 can better transfer heat.
[0045] In this embodiment, the multiple heating elements include a second heating element 220, and the second heating element 220 is arranged on one side of the top of the crystal growth furnace 100. The second heating element 220 can be close to or away from the crystal growth furnace 100 in the height direction of the crystal growth furnace 100. That is, the second heating element 220 can be close to or away from the crystal growth furnace 100 as a whole under the action of the driving element, and one end of the second heating element 220 can be away from or close to the top wall of the crystal growth furnace 100 relative to the other end.
[0046] It can be understood that, compared with only providing a heating element outside the outer peripheral wall of the crystal growth furnace 100 , the second heating element 220 provided on the top of the crystal growth furnace 100 enables the operator to accurately control the temperature of the top of the crystal growth furnace 100 .
[0047] And similarly to the first heating element 210, Figure 1 For reference, the second heating element 220 has a left end and a right end opposite to each other. Under the action of the driving element connected to the second heating element 220, the left end of the second heating element 220 can be closer to the top wall of the crystal growth furnace 100 relative to the right end. At this time, the right end is farther away from the top wall of the crystal growth furnace 100 relative to the left end. Conversely, the left end of the second heating element 220 can also be farther away from the top wall of the crystal growth furnace 100 relative to the right end. In this way, the inclination angle of the second heating element 220 relative to the crystal growth furnace 100 can be controlled to adjust the heating direction of the second heating element 220 to the crystal growth furnace 100, and further improve the accuracy of temperature control of the crystal growth furnace 100.
[0048] In some optional embodiments, there are multiple second heating elements 220, and the multiple second heating elements 220 are arranged at intervals on the top of the crystal growth furnace 100. It can be understood that since there are multiple second heating elements 220, the temperature accuracy of each part of the top of the crystal growth furnace 100 can be better controlled by controlling the multiple second heating elements 220 separately.
[0049] In this embodiment, the number of the second heating elements 220 is two. Of course, in some other embodiments, the number of the second heating elements 220 may also be three, four or five.
[0050] In the present embodiment, the plurality of heating elements further include a third heating element 230, which is disposed on one side of the bottom of the crystal growth furnace 100. The third heating element 230 can be close to or away from the crystal growth furnace 100 in the height direction of the crystal growth furnace 100. That is, the third heating element 230 can be close to or away from the crystal growth furnace 100 as a whole under the action of the driving element, and one end of the third heating element 230 can be away from or close to the bottom wall of the crystal growth furnace 100 relative to the other end.
[0051] And similarly to the second heating element 220, Figure 1 For reference, the third heating element 230 has a left end and a right end opposite to each other. Under the action of the driving element connected to the third heating element 230, the left end of the third heating element 230 can be closer to the bottom wall of the crystal growth furnace 100 relative to the right end. At this time, the right end is farther away from the bottom wall of the crystal growth furnace 100 relative to the left end. Conversely, the left end of the third heating element 230 can also be farther away from the bottom wall of the crystal growth furnace 100 relative to the right end. In this way, the inclination angle of the third heating element 230 relative to the crystal growth furnace 100 can be controlled to adjust the heating direction of the third heating element 230 to the crystal growth furnace 100, and further improve the accuracy of the temperature control of the bottom wall of the crystal growth furnace 100.
[0052] It can be understood that in order to facilitate the driving of the driving member, the driving member is connected to the middle part of the heating member, that is, the middle part of the heating member is provided with a connecting portion 240 connected to the driving member.
[0053] It should be noted that, in this embodiment, the middle part should not be limited to the middle part in a strict sense, as long as the connecting part 240 is roughly located in the middle of the heating element.
[0054] In some optional embodiments, a first heat preservation member 300 is disposed on the top of the crystal growth furnace 100, and a second heat preservation member 400 is disposed on the peripheral wall of the crystal growth furnace 100. It should be noted that the heating members are located on the side of the first heat preservation member 300 and the second heat preservation member 400 away from the crystal growth furnace 100.
[0055] In summary, a heating device 1 for a crystal growth furnace provided by an embodiment of the utility model includes a crystal growth furnace 100, a heating assembly 200 and a driving device. The heating assembly 200 includes a plurality of heating elements, and the plurality of heating elements are arranged at intervals on the outside of the crystal growth furnace 100, and the driving device includes a plurality of driving elements, and the plurality of driving elements are connected to the heating elements one by one. The driving element is used to drive the heating element to move so that the end of the heating element can move close to or away from the outer wall of the crystal growth furnace 100. Since the heating assembly 200 includes a plurality of heating elements, and the plurality of heating elements are arranged at intervals on the outside of the crystal growth furnace 100, when temperature control is performed, when a certain part of the crystal growth furnace 100 needs to be heated up or cooled down, one or more heating elements corresponding to the part of the crystal growth furnace 100 can be controlled, thereby improving the accuracy of temperature control of the crystal growth furnace 100.
[0056] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A heating device for a crystal growth furnace, characterized in that: include: Crystal growth furnace (100); A heating assembly (200), the heating assembly (200) comprising a plurality of heating elements, the plurality of heating elements being arranged at intervals outside the crystal growth furnace (100); A driving device, the driving device comprising a plurality of driving members, wherein the plurality of driving members are connected to the heating member in a one-to-one correspondence; The driving member is used to drive the heating member to move so that the end of the heating member can approach or move away from the outer wall of the crystal growth furnace (100).
2. The heating device for a crystal growth furnace according to claim 1, characterized in that: The plurality of heating elements include a plurality of first heating elements (210), the first heating elements (210) being arranged outside an outer peripheral wall of the crystal growth furnace (100), and the plurality of first heating elements (210) being arranged at intervals along an axial direction of the crystal growth furnace (100); The first heating element (210) can be close to or away from the crystal growth furnace (100) in the radial direction of the crystal growth furnace (100), and / or one end of the first heating element (210) can be away from or close to the outer wall of the crystal growth furnace (100) relative to the other end.
3. The heating device for a crystal growth furnace according to claim 2, characterized in that: The multiple first heating elements (210) are divided into multiple groups, and the multiple groups of first heating elements (210) are arranged at intervals along the axial direction of the crystal growth furnace (100), and the multiple first heating elements (210) in each group are arranged at intervals around the circumference of the crystal growth furnace (100).
4. The heating device for a crystal growth furnace according to claim 2, characterized in that: A side of the first heating element (210) close to the crystal growth furnace (100) is a curved surface adapted to the outer peripheral wall of the crystal growth furnace (100).
5. The heating device for a crystal growth furnace according to claim 2, characterized in that: The plurality of heating elements include a second heating element (220), wherein the second heating element (220) is arranged on one side of the top of the crystal growth furnace (100); The second heating element (220) can be close to or away from the crystal growth furnace (100) in the height direction of the crystal growth furnace (100), and / or one end of the second heating element (220) can be away from or close to the top wall of the crystal growth furnace (100) relative to the other end.
6. The heating device for a crystal growth furnace according to claim 5, characterized in that: There are a plurality of the second heating elements (220), and the plurality of the second heating elements (220) are arranged at intervals on the top of the crystal growth furnace (100).
7. The heating device for a crystal growth furnace according to claim 2, characterized in that: The plurality of heating elements include a third heating element (230), and the third heating element (230) is arranged on one side of the bottom of the crystal growth furnace (100); The third heating element (230) can be close to or away from the crystal growth furnace (100) in the height direction of the crystal growth furnace (100), and / or one end of the third heating element (230) can be away from or close to the bottom wall of the crystal growth furnace (100) relative to the other end.
8. The heating device for a crystal growth furnace according to claim 7, characterized in that: There are a plurality of the third heating elements (230), and the plurality of the third heating elements (230) are arranged at intervals at the bottom of the crystal growth furnace (100).
9. The heating device for a crystal growth furnace according to claim 1, characterized in that: The driving member is connected to the middle portion of the heating member.
10. The heating device for a crystal growth furnace according to claim 1, characterized in that: The top of the crystal growth furnace (100) is provided with a first heat-insulating member (300), and / or the peripheral wall of the crystal growth furnace (100) is provided with a second heat-insulating member (400).