Auxiliary device for testing nanoimprint mold

Abstract

The utility model relates to the technical field of nanoimprint, in particular to an auxiliary device for testing a nanoimprint mold, which comprises a workbench, a support frame is mounted on the surface of the workbench, a nanoimprint plate is arranged on the support frame, a placement groove is formed in the surface of the workbench, a plurality of vacuum chucks are mounted in the placement groove at equal intervals, and the vacuum chucks are arranged on the surface of the workbench. The inner bottom end of the working table is further provided with a vacuum cavity, the side wall of the vacuum cavity is communicated with a vacuum pipe, and one end of the vacuum pipe penetrates through the side wall of the working table and is provided with a vacuum pump. The multi-point adsorption mode can effectively adsorb and fix the mold substrate, the vacuum pump is connected with the vacuum cavity and the vacuum suction cup through the vacuum pipe, and an operator only needs to control a switch of the vacuum pump to achieve rapid fixing and releasing of the mold substrate, so that the operation process is simplified, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of nanoimprinting, in particular to an auxiliary device for testing a nanoimprinting mold. Background Art

[0002] Nanoimprinting technology uses pure mechanical replication to replicate the micro-nano structure on the template onto the substrate to achieve the transfer of the desired micro-nano structure. Since its proposal, this technology has attracted widespread attention from the scientific community due to its advantages of high resolution, high efficiency and low cost. It has been widely used in high-precision storage, optics, electronics, solar cells, sensors and other fields. With the development of science and technology, new requirements have been put forward for nanoimprinting. Nanoimprinting molds are not only circular, but also have other shapes, such as rectangles, squares or other irregular shapes.

[0003] After searching, the Chinese patent document application number: 202020089156.2 discloses a mold substrate positioning auxiliary device for nanoimprinting equipment, including a V-shaped plate and a supporting frame, support columns are fixedly installed on the rear ends of both sides of the V-shaped plate, and the supporting frame is provided with positioning holes. The positioning holes are arranged in pairs, and the two support columns are respectively inserted in the two positioning holes. A substrate tray is fixedly installed on the supporting frame, and fixing parts are provided on the top left and right sides of the supporting frame. The utility model sets a V-shaped plate and a supporting frame with positioning holes. When the V-shaped plate is fixed to a certain position of the supporting frame through the positioning hole, the fixed radius center of a mold substrate can be determined, thereby accurately positioning the center position of the mold substrate of this size. When the V-shaped plate is fixed to other positioning holes, the position of another size of mold can be accurately positioned.

[0004] However, the above mold substrate positioning auxiliary device for nanoimprinting equipment still has the following defects:

[0005] The substrate positioning auxiliary device relies on the positioning holes on the V-shaped plate and the supporting base to fix the mold substrate, and may only be suitable for mold substrates with specific shapes (such as round) and size ranges. For mold substrates with non-circular or special shapes, the applicability of the device may be limited. Therefore, we need an auxiliary device for nanoimprint mold testing to solve the above problems. Utility Model Content

[0006] The utility model aims to provide an auxiliary device for testing a nanoimprint mold, which mainly places a plurality of vacuum suction cups equidistantly installed inside a groove. No matter how complex or non-circular their shapes are, this multi-point adsorption method can effectively adsorb and fix the mold substrate, thereby ensuring the stability of the mold substrate during the imprinting process and avoiding imprinting errors caused by mold movement or shaking. The vacuum pump is connected to the vacuum chamber and the vacuum suction cup through a vacuum tube, so that the fixation and release of the mold substrate become simple and quick. The operator only needs to control the switch of the vacuum pump to realize the rapid fixation and release of the mold substrate, thereby simplifying the operation process and improving work efficiency.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an auxiliary device for testing a nanoimprint mold, comprising a workbench, a support frame is installed on the surface of the workbench, a moving component is installed inside the support frame, a cylinder is connected to one side of the moving component, a connecting block is connected to the piston rod end of the cylinder, a through hole is provided at the bottom end of the connecting block, a nanoimprint plate is arranged inside the connecting block, a placement groove is provided on the surface of the workbench, a plurality of vacuum suction cups are equidistantly installed inside the placement groove, a vacuum cavity is also provided at the inner bottom end of the workbench, the bottom end of the vacuum suction cup passes through the placement groove and is connected to the top of the vacuum cavity, the side wall of the vacuum cavity is connected to a vacuum tube, one end of the vacuum tube passes through the side wall of the workbench and is installed with a vacuum pump.

[0008] Preferably, the moving assembly includes a driving motor, a threaded rod and a moving block, the support frame is arranged in an inverted U shape, a moving groove is opened on one side of the top of the support frame, the output shaft of the driving motor is fixedly connected to one end of the threaded rod, the other end of the threaded rod is rotatably installed on one side inner wall of the moving groove, and one end of the moving block is threadedly connected to the outer wall of the threaded rod.

[0009] Preferably, the piston rod end of the cylinder is provided with an external thread, the top end of the connecting block is provided with an internal thread groove, and the external thread is threadedly connected in the internal thread groove.

[0010] Preferably, limit bars are installed at both ends of the nanoimprint plate, and the inner wall of the through hole is provided with limit grooves for connection of the limit bars, and both ends of the nanoimprint plate are embedded in the limit grooves.

[0011] Preferably, an inner wall on one side of the vacuum chamber is also connected to an air outlet pipe, one end of the air outlet pipe passes through the interior of the workbench and extends to the outside of one end of the workbench, and an air outlet valve is installed on the surface of one end of the air outlet pipe.

[0012] Preferably, fixed blocks are fixedly installed on all four sides of the workbench, a mounting bar is fixedly installed between two of the fixed blocks, an electric push rod is fixedly installed on the inner wall of one of the fixed blocks, and the piston rod end of the electric push rod is connected to the side wall of the support frame.

[0013] Preferably, sliding grooves are provided at the bottom ends of both sides of the support frame, and the bottom ends of both sides of the support frame are slidably connected to the mounting bars through the sliding grooves. A control panel is fixedly installed on the surface of one side of the support frame, and the control panel is electrically connected to the drive motor, electric push rod, cylinder, vacuum pump and exhaust valve.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model mainly places multiple vacuum suction cups equidistantly installed inside the groove. No matter how complex or non-circular the shape is, this multi-point adsorption method can effectively adsorb and fix the mold substrate, ensuring the stability of the mold substrate during the imprinting process and avoiding the imprinting error caused by mold movement or shaking. The vacuum pump is connected to the vacuum chamber and the vacuum suction cup through a vacuum tube, making the fixation and release of the mold substrate simple and quick. The operator only needs to control the switch of the vacuum pump to achieve rapid fixation and release of the mold substrate, thereby simplifying the operation process and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0017] Figure 2 It is a cross-sectional view of the interior of the workbench of the utility model;

[0018] Figure 3 This is a schematic diagram of the exploded structure of the connecting block of the utility model;

[0019] Figure 4 It is a schematic diagram of the internal structure of the connecting block of the utility model.

[0020] In the figure: 1. workbench; 2. support frame; 3. drive motor; 301. moving groove; 302. threaded rod; 303. moving block; 4. fixed block; 5. mounting bar; 501. sliding groove; 6. electric push rod; 7. control panel; 8. cylinder; 801. external thread; 802. internal thread groove; 9. connecting block; 901. through hole; 902. limit bar; 903. limit groove; 10. nanoimprinting plate; 11. placement groove; 12. vacuum suction cup; 13. vacuum chamber; 14. vacuum tube; 15. vacuum pump; 16. exhaust pipe; 17. exhaust valve. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4 The utility model provides a technical solution: an auxiliary device for testing a nanoimprint mold, comprising a workbench 1, a support frame 2 is installed on the surface of the workbench 1, a moving component is installed inside the support frame 2, a cylinder 8 is connected to one side of the moving component, a piston rod end of the cylinder 8 is connected to a connecting block 9, a through hole 901 is provided at the bottom end of the connecting block 9, a nanoimprint plate 10 is arranged inside the connecting block 9, a placement groove 11 is provided on the surface of the workbench 1, a plurality of vacuum suction cups 12 are equidistantly installed inside the placement groove 11, a vacuum cavity 13 is also provided at the inner bottom end of the workbench 1, the bottom end of the vacuum suction cup 12 passes through the placement groove 11 and is connected to the top end of the vacuum cavity 13, a vacuum tube 14 is connected to the side wall of the vacuum cavity 13, one end of the vacuum tube 14 passes through the side wall of the workbench 1 and is installed with a vacuum pump 15;

[0023] When in use, by placing multiple vacuum suction cups 12 equidistantly installed inside the groove 11, no matter how complex or non-circular their shapes are, this multi-point adsorption method can effectively adsorb and fix the mold substrate, ensuring the stability of the mold substrate during the imprinting process and avoiding imprinting errors caused by mold movement or shaking. The vacuum pump 15 is connected to the vacuum chamber 13 and the vacuum suction cup 12 through the vacuum tube 14, making the fixing and releasing of the mold substrate simple and quick. The operator only needs to control the switch of the vacuum pump 15 to achieve rapid fixing and releasing of the mold substrate, thereby simplifying the operating process and improving work efficiency.

[0024] The moving assembly includes a driving motor 3, a threaded rod 302 and a moving block 303. The support frame 2 is arranged in an inverted U shape. A moving groove 301 is opened on one side of the top of the support frame 2. The output shaft of the driving motor 3 is fixedly connected to one end of the threaded rod 302. The other end of the threaded rod 302 is rotatably installed on one side inner wall of the moving groove 301. One end of the moving block 303 is threadedly connected to the outer wall of the threaded rod 302. The driving motor 3 is used as a power source, and its output shaft is directly connected to the threaded rod 302, which reduces energy loss during power transmission and improves energy utilization efficiency.

[0025] An external thread 801 is provided at the piston rod end of the cylinder 8, and an internal thread groove 802 is provided at the top of the connecting block 9. The external thread 801 is threadedly connected in the internal thread groove 802. The close fit between the external thread 801 and the internal thread groove 802 ensures a firm connection between the piston rod of the cylinder 8 and the connecting block 9. The mutual engagement of the threads provides a strong tightening force, which prevents the connecting parts from loosening or falling off during operation, thereby ensuring the stability and reliability of the device.

[0026] Limiting bars 902 are installed at both ends of the nanoimprint plate 10, and the inner wall of the through hole 901 is provided with limiting grooves 903 for connecting the limiting bars 902. The two ends of the nanoimprint plate 10 are embedded in the limiting grooves 903. Through the precise design of the limiting grooves 903 and the embedding of the limiting bars 902, the nanoimprint plate 10 can be accurately aligned with the mold substrate to achieve high-precision imprinting operations.

[0027] An inner wall on one side of the vacuum chamber 13 is also connected to an air outlet pipe 16, one end of the air outlet pipe 16 passes through the interior of the workbench 1 and extends to the outside of one end of the workbench 1, and an air outlet valve 17 is installed on the surface of one end of the air outlet pipe 16. The combination of the air outlet pipe 16 and the air outlet valve 17 allows the pressure in the vacuum chamber 13 to be effectively regulated and released. After the imprinting operation is completed, the gas in the vacuum chamber 13 can be smoothly discharged by opening the air outlet valve 17, thereby quickly reducing the pressure in the chamber and facilitating subsequent operations or removal of the mold.

[0028] Fixed blocks 4 are fixedly installed on all four sides of the workbench 1, and a mounting bar 5 is fixedly installed between the two fixed blocks 4. An electric push rod 6 is fixedly installed on the inner wall of one of the fixed blocks 4. The piston rod end of the electric push rod 6 is connected to the side wall of the support frame 2. The electric push rod 6 can accurately control the position of the support frame 2 through the telescopic movement of the piston rod, thereby realizing accurate positioning and fixation of the nanoimprinting plate 10 or the mold.

[0029] Sliding grooves 501 are provided at the bottom ends of both sides of the support frame 2, and the bottom ends of both sides of the support frame 2 are slidably connected to the mounting strip 5 through the sliding grooves 501. A control panel 7 is fixedly installed on the surface of one side of the support frame 2, and the control panel 7 is electrically connected to the drive motor 3, the electric push rod 6, the cylinder 8, the vacuum pump 15 and the exhaust valve 17. The support frame 2 is slidably connected to the mounting strip 5 through the sliding grooves 501, so that the support frame 2 can move and adjust its position freely within a certain range. Through the electrical connection between the control panel 7 and various components, real-time monitoring and intelligent management of the equipment operation status can be achieved.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An auxiliary device for testing a nanoimprint mold, comprising a workbench (1), characterized in that: A support frame (2) is installed on the surface of the workbench (1), a moving component is installed inside the support frame (2), one side of the moving component is connected to a cylinder (8), the piston rod end of the cylinder (8) is connected to a connecting block (9), the bottom end of the connecting block (9) is provided with a through hole (901), a nanoimprinting plate (10) is arranged inside the connecting block (9), a placement groove (11) is opened on the surface of the workbench (1), a plurality of vacuum suction cups (12) are equidistantly installed inside the placement groove (11), a vacuum cavity (13) is also opened at the inner bottom end of the workbench (1), the bottom end of the vacuum suction cup (12) passes through the placement groove (11) and is connected to the top of the vacuum cavity (13), the side wall of the vacuum cavity (13) is connected to a vacuum tube (14), one end of the vacuum tube (14) passes through the side wall of the workbench (1) and is installed with a vacuum pump (15).

2. The auxiliary device for nanoimprint mold testing according to claim 1, characterized in that: The moving assembly comprises a driving motor (3), a threaded rod (302) and a moving block (303); the support frame (2) is arranged in an inverted U shape; a moving groove (301) is provided on one side of the top end of the support frame (2); an output shaft of the driving motor (3) is fixedly connected to one end of the threaded rod (302); the other end of the threaded rod (302) is rotatably mounted on an inner wall of one side of the moving groove (301); and one end of the moving block (303) is threadedly connected to an outer wall of the threaded rod (302).

3. The auxiliary device for nanoimprint mold testing according to claim 2, characterized in that: The piston rod end of the cylinder (8) is provided with an external thread (801), the top end of the connecting block (9) is provided with an internal thread groove (802), and the external thread (801) is threadedly connected in the internal thread groove (802).

4. The auxiliary device for nanoimprint mold testing according to claim 3, characterized in that: Limiting strips (902) are installed at both ends of the nanoimprint plate (10), and the inner wall of the through hole (901) is provided with limiting grooves (903) for connecting the limiting strips (902), and the two ends of the nanoimprint plate (10) are embedded in the limiting grooves (903).

5. The auxiliary device for nanoimprint mold testing according to claim 4, characterized in that: An inner wall on one side of the vacuum chamber (13) is also connected to an air outlet pipe (16), one end of the air outlet pipe (16) passes through the interior of the workbench (1) and extends to the outside of one end of the workbench (1), and an air outlet valve (17) is installed on the surface of one end of the air outlet pipe (16).

6. The auxiliary device for nanoimprint mold testing according to claim 5, characterized in that: Fixed blocks (4) are fixedly installed on all four sides of the workbench (1), a mounting strip (5) is fixedly installed between two of the fixed blocks (4), an electric push rod (6) is fixedly installed on the inner wall of one of the fixed blocks (4), and the piston rod end of the electric push rod (6) is connected to the side wall of the support frame (2).

7. The auxiliary device for nanoimprint mold testing according to claim 6, characterized in that: The bottom ends of both sides of the support frame (2) are provided with sliding grooves (501), and the bottom ends of both sides of the support frame (2) are slidably connected to the mounting strip (5) through the sliding grooves (501). A control panel (7) is fixedly mounted on the surface of one side of the support frame (2), and the control panel (7) is electrically connected to the drive motor (3), the electric push rod (6), the cylinder (8), the vacuum pump (15) and the air outlet valve (17).

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