Safety interlocking circuit and semiconductor process equipment

Abstract

The utility model provides a safety interlocking circuit and semiconductor process equipment. The safety interlocking circuit comprises an air supply valve control loop and a power supply control loop. In the air supply valve control loop, a first control device is electrically connected to a power supply, and a second control device is electrically connected to an electric control valve to control on-off of an air supply pipeline; in the power supply control loop, an interlocking input end is used for inputting a process pressure signal, a first interlocking output end is used for outputting a first process signal to control opening and closing of the first control device, a third process input end is used for inputting the process pressure signal, and a first process input end is used for inputting the first process signal; the first process output end is used for outputting a second process signal to control opening and closing of the second control device. The semiconductor process equipment comprises the safety interlock circuit. By means of the arrangement, bidirectional safe interlocking can be achieved, a dangerous source is cut off from the source, and the reliability of process gas interlocking control is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a safety interlocking circuit and semiconductor process equipment. Background Art

[0002] Plasma enhanced chemical vapor deposition (PECVD) is a commonly used chemical deposition system. It is a new preparation technology that uses glow discharge plasma to make the gaseous substances containing thin film components undergo chemical reactions under low vacuum, thereby achieving the growth of thin film materials. The advantages of PECVD make it widely used in the fields of ultra-large-scale integrated circuits, optoelectronic devices and MEMS (Micro-Electro-Mechanical System). During the process, a variety of special gases are introduced into the process chamber, such as O 2 、SIH 4 NF 3 、N 2 O, H 2 , C 4 H 12 Si and NH 3 However, there is a strict mutual exclusion relationship between some special gases, such as O 2 and NF 3 With SIH 4 , H 2 NH 3 and C 4 H 12 Si are mutually exclusive. Chemical reactions between mutually exclusive special gases will produce harmful by-products, which can easily cause equipment damage or even endanger personnel lives. Therefore, interlocking control of the mutually exclusive special gases entering the process chamber is very necessary.

[0003] The related special gas safety interlock control technology usually only controls the power on and off of the valves on specific special gas pipelines based on the chamber pressure. The wiring is complicated and it is impossible to control the entry and shutdown of the chamber gas from the source. When the vacuum pipeline leaks, the leaked special gas will cause harm to personnel, resulting in low reliability of special gas interlock control. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a safety interlock circuit and semiconductor process equipment, which can prevent leakage of vacuum pipelines from causing harm to personnel, cut off the source of danger from the source, and improve the reliability of special gas interlock control.

[0005] In order to achieve the above purpose, the technical solution adopted by the embodiment of the utility model is as follows:

[0006] In a first aspect, an embodiment of the utility model provides a safety interlock circuit, comprising: a gas supply valve control circuit and a power supply control circuit;

[0007] The gas supply valve control circuit includes a first control device and a second control device electrically connected in series, the first control device is electrically connected to a power supply, the second control device is electrically connected to an electric control valve, and the electric control valve is configured to: control the on-off of a gas supply pipeline, and the gas supply pipeline is used to introduce process gas into the process chamber;

[0008] The power supply control loop includes: a pressure sensor, an interlock controller and a process controller; the pressure sensor is used to sense the process pressure;

[0009] The interlock controller has an interlock input terminal and a first interlock output terminal, wherein the interlock input terminal is connected to the pressure sensor and is used to input a process pressure signal; the first interlock output terminal is used to output a first process signal, and the first interlock output terminal is connected to the first control device and is used to control the opening and closing of the first control device;

[0010] The process controller has a first process input terminal and / or a third process input terminal; the third process input terminal is connected to a pressure sensor for inputting the process pressure signal; the first process input terminal is connected to the first interlock output terminal for inputting the first process signal; the process controller has a first process output terminal for outputting a second process signal, and the first process output terminal is connected to the second control device for controlling the opening and closing of the second control device.

[0011] Optionally, the pressure sensor includes a chamber pressure sensor and a pipeline pressure sensor, the chamber pressure sensor is used to sense the process chamber pressure, and the pipeline pressure sensor is used to sense the vacuum pipeline pressure connected to the process chamber;

[0012] The interlock input end includes a chamber pressure input end and a pipeline pressure input end; the chamber pressure input end is connected to the chamber pressure sensor for inputting a process chamber pressure signal; the pipeline pressure input end is connected to the pipeline pressure sensor for inputting the pipeline pressure signal.

[0013] Optionally, the pressure sensor includes a chamber pressure sensor and a pipeline pressure sensor, the chamber pressure sensor is used to sense the process chamber pressure, and the pipeline pressure sensor is used to sense the pipeline pressure connected to the process chamber;

[0014] The third process input end includes a chamber pressure input end and a pipeline pressure input end; the chamber pressure input end is connected to the chamber pressure sensor for inputting a process chamber pressure signal; the pipeline pressure input end is connected to the pipeline pressure sensor for inputting the pipeline pressure signal.

[0015] Optionally, the electric control valve comprises a pilot valve, and the pilot valve is configured to: be connected to an air supply valve through a pipeline, and the air supply valve is arranged on the air supply pipeline;

[0016] The air supply valve control circuit also includes an electrically connected air source electric control valve and an air source on-off control device; the air source electric control valve is connected to the electric control valve through a pipeline, and is used to control the on-off of the air source, so that the air source can enter and open the air supply valve corresponding to the electric control valve through the air source electric control room and the air source channel of the electric control valve in turn; the air source on-off control device is electrically connected to the power supply, and is used to control the on-off of the air source electric control valve.

[0017] Optionally, the gas source on-off control device includes a third control device, and the third control device is electrically connected to the power supply; the interlock controller has a second interlock output terminal for outputting a third process signal, and the second interlock output terminal is connected to the third control device for controlling the on-off of the third control device;

[0018] Or, the gas source on-off control device includes a fourth control device, and the fourth control device is electrically connected to the power supply; the interlock controller has a second interlock output terminal for outputting a third process signal, and the process controller has a second process input terminal and a second process output terminal, and the second process input terminal is connected to the second interlock output terminal for inputting the third process signal; the second process output terminal is used to output a fourth process signal, and the second process output terminal is connected to the fourth control device for controlling the on-off of the fourth control device;

[0019] Or, the gas source on-off control device includes a third control device and a fourth control device, the third control device is electrically connected to the power supply, and the third control device and the fourth control device are electrically connected in series; the interlock controller has a second interlock output terminal for outputting a third process signal, and the second interlock output terminal is connected to the third control device for controlling the on-off of the third control device; the process controller has a second process input terminal and a second process output terminal, the second process input terminal is connected to the second interlock output terminal for inputting the third process signal, the second process output terminal is used to output the fourth process signal, and the second process output terminal is connected to the fourth control device for controlling the on-off of the fourth control device.

[0020] Optionally, the first control device includes a first intermediate relay, and the first interlock output terminal is electrically connected to a coil of the first intermediate relay;

[0021] The second control device comprises a second intermediate relay, and the first process output terminal is electrically connected to a coil of the second intermediate relay;

[0022] The third control device comprises a third intermediate relay, and the second interlock output terminal is electrically connected to the coil of the third intermediate relay;

[0023] The fourth control device includes a fourth intermediate relay, and the second process output end is electrically connected to a coil of the fourth intermediate relay.

[0024] Optionally, the air source electric control valve includes a CDA (Clean Dry Air) solenoid valve, which is used to control the on-off of the CDA air source. The air source on-off control device is electrically connected in series with the CDA solenoid valve to power the CDA solenoid valve.

[0025] Optionally, the electric control valve has a plurality of independent points, each point has a valve core, and each point is connected to a plurality of independent air supply valves through pipelines;

[0026] The process controller further comprises a third process output terminal, and the third process output terminal is used to send an instruction on whether to conduct to a point of the electric control valve.

[0027] Optionally, the interlock controller includes an interlock control circuit board or an interlock control chip;

[0028] And / or, the process controller includes a PLC (Programmable Logic Controller) input module and a PLC output module.

[0029] Optionally, the chamber pressure sensor includes a first chamber pressure sensor and a second chamber pressure sensor;

[0030] The first chamber pressure sensor and the second chamber pressure sensor have different measuring ranges. The first chamber pressure sensor is used to detect a first pressure value of the process chamber, and the second chamber pressure sensor is used to detect a second pressure value of the process chamber. When the first pressure value and the second pressure value are both less than a preset pressure threshold, the first control device is controlled to be closed through the interlock controller, and / or the second control device is controlled to be closed through the process controller.

[0031] In the second aspect, an embodiment of the utility model also provides a semiconductor process equipment, including: a process chamber, a gas supply pipeline, a gas supply valve and the above-mentioned safety interlock circuit, the gas supply valve is arranged on the gas supply pipeline, and is used to control the on-off of the gas supply pipeline; the gas supply pipeline is connected to the process chamber, and is used to introduce process gas into the process chamber; the electric control valve of the safety interlock circuit is connected to the gas supply valve, and is used to control the on-off of the gas supply valve.

[0032] The safety interlock circuit and semiconductor process equipment provided by the embodiment of the utility model have the following features:

[0033] Beneficial effects:

[0034] In the safety interlock circuit provided by the embodiment of the utility model, the pressure sensor transmits the process pressure signal it senses to the interlock controller to generate a first process signal, and the first process signal controls the opening and closing of the first control device; the pressure sensor transmits the process pressure signal it senses to the process controller, and at the same time, the first process signal is input into the process controller, and the process controller generates a second process signal, and the second process signal controls the opening and closing of the second control device. During the process, the first process signal is used to control the opening and closing of the first control device, and the second process signal is used to control the opening and closing of the second control device. Only when the first process signal meets the closing condition of the first control device and the second process signal meets the closing condition of the second control device, so that the first control device and the second control device are both closed, can the power supply and the circuit where the electric control valve is located be turned on, so that the electric control valve can be powered on to control the on and off of the gas supply pipeline, thereby realizing two-way safety interlocking control; when either the first process signal or the second process signal does not meet the corresponding closing condition, the power supply and the circuit where the electric control valve is located cannot be turned on, and the on and off of the gas supply pipeline cannot be controlled; in addition, when one of the first control device and the second control device has a sticking fault, that is, a normally closed conduction state, the other one can be used to control whether the power supply and the circuit where the electric control valve is located are turned on or not, thereby improving the reliability of on and off control of the gas supply pipeline.

[0035] Other features and advantages of the embodiments of the present utility model will be described in the subsequent description, or some features and advantages can be inferred or determined without doubt from the description, or can be learned by implementing the above-mentioned technology of the embodiments of the present utility model.

[0036] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 A schematic diagram of a special gas safety interlock circuit in the related art is shown;

[0039] Figure 2 A schematic diagram of a safety interlock circuit provided by an embodiment of the utility model is shown;

[0040] Figure 3 Another safety interlock circuit schematic diagram provided by an embodiment of the utility model is shown;

[0041] Figure 4 A schematic diagram of a power supply control circuit of another safety interlock circuit provided in an embodiment of the utility model is shown;

[0042] Figure 5 A schematic diagram of an air supply control circuit of another safety interlock circuit provided in an embodiment of the utility model is shown.

[0043] Attached Figure 2-Figure 5 In the figure, the dotted line represents the control circuit, the thin solid line represents the electrical connection line, and the thick solid line represents the gas pipeline.

[0044] Reference numerals:

[0045] 100-gas supply valve control circuit;

[0046] 110-a first control device; 120-a second control device; 130-a third control device;

[0047] 140-a fourth control device; 150-a power supply; 160-an electric control valve;

[0048] 170-gas source control valve; 171-gas source pipeline

[0049] 200-power supply control circuit;

[0050] 210-pressure sensor;

[0051] 220-interlock controller;

[0052] 221 - first interlock output terminal; 222 - second interlock output terminal; 223 - interlock input terminal;

[0053] 230-process controller;

[0054] 231 - first process input terminal; 232 - second process input terminal; 233 - third process input terminal;

[0055] 235 - first process output terminal; 236 - second process output terminal; 237 - third process output terminal;

[0056] 300-gas supply pipeline;

[0057] 310-Air supply valve. DETAILED DESCRIPTION

[0058] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments.

[0059] At present, semiconductor process equipment such as PECVD equipment will introduce a variety of special gases during the process, including O 2 、SIH 4 NF 3 、N 2 O, H 2 , C 4 H 12 Si and NH 3 Gases such as H 2 、SIH 4 and C 4 H 12 Si is a flammable gas, NF 3 It is a strong oxidizing gas, NF 3 and N 2 O is a toxic gas. In addition to the characteristics of the gas itself, there is a strict mutual exclusion relationship between some special gases. If the mutual exclusion relationship between the special gases is not handled properly, harmful by-products will be produced when chemical reactions occur between the special gases, which will not only cause damage to equipment but also endanger people's lives. See the table of mutual exclusion relationships of special gases shown in Table 1 below:

[0060] Table 1 Special Gas Mutual Exclusion Relationship Table

[0061] <![CDATA[O 2 ]]> <![CDATA[SIH 4 ]]> <![CDATA[NF 3 ]]> <![CDATA[H 2 ]]> <![CDATA[NH 3 ]]> <![CDATA[N 2 The]]> <![CDATA[C 4 H 12 You]]> <![CDATA[O 2 ]]> Mutual Exclusion Mutual Exclusion Mutual Exclusion Mutual Exclusion <![CDATA[SIH 4 ]]> Mutual Exclusion Mutual Exclusion <![CDATA[NF 3 ]]> Mutual Exclusion Mutual Exclusion Mutual Exclusion Mutual Exclusion <![CDATA[H 2 ]]> Mutual Exclusion Mutual Exclusion Mutual Exclusion <![CDATA[NH 3 ]]> Mutual Exclusion Mutual Exclusion <![CDATA[N 2 The]]> Mutual Exclusion Mutual Exclusion <![CDATA[C 4 H 12 You]]> Mutual Exclusion Mutual Exclusion Mutual Exclusion

[0062] For related special gas safety interlock control technology, see Figure 1The schematic diagram of the relevant special gas safety interlock circuit is shown in the figure. GUAGE01.SP and GUAGE02.SP are the 10Torr pressure value signal trigger points provided by the two vacuum gauges in the chamber. The signal trigger logic is that when the chamber pressure is less than 10Torr, the contacts are energized, otherwise they are disconnected. The output end of the 24V power supply module is connected to one end of the coil of the intermediate relay KA01~KA04 through the pressure trigger point of the gauge, and the other end of the coil is connected to the 0V end to form a control loop; see the corresponding connection relationship table of the PLC output module and the solenoid valve coil shown in Table 2 below. The output end of the PLC output module is connected to the control NF through two sets of normally open contacts (NO) of the intermediate relay. 3 and O 2 Solenoid valves PV03~PV06 of the pipeline.

[0063] Table 2 Corresponding connection relationship between PLC output module and solenoid valve coil

[0064]

[0065]

[0066] The special gas safety interlock circuit can control the NF through the safety interlock circuit when the chamber pressure is greater than 10Torr. 3 and O 2 (Oxidizing gas) is stopped from entering to ensure the safety of personnel and equipment. For example, when the chamber is carrying out SiO2 process, the chamber pressure is 2.5Torr, which is less than the 10Torr trigger point of the vacuum gauge. The trigger points of the two vacuum gauges in the chamber, GUAGE01.SP and GUAGE02.SP, are both energized, the coils of the intermediate relays KA01 to KA04 are energized, KA01-NO1&2, KA02-NO1&2, KA03-NO1&2 and KA04-NO1&2 are all energized, and the special gas SIH 4 NF 3 , O 2 , H 2 and BDEAS (bis(diethylamino)silane) can be introduced into the chamber according to the host computer instructions. Since the chamber pressure is small enough at this time, the mixing of the above special gases in the chamber will not react, meeting the safety requirements.

[0067] NF is required to be introduced into the chamber during the Clean operation. 3 , O 2 At this time, the chamber pressure required by SiO and SiN processes is 2Torr, and the NF 3 , O 2 Access to the chamber is allowed, meeting practical use and safety interlock requirements.

[0068] However, the above-mentioned special gas safety interlock control technology only takes into account the chamber pressure. When a leak occurs in the pipeline, the leaked special gas will cause harm to personnel. The hardware interlock circuit for opening the special gas valve is too simple and cannot be expanded. The related special gas safety interlock control technology can only cut off the power to the solenoid valves PV03-PV06, and cannot control the closure of each solenoid valve from the source, reducing the reliability of the interlock control.

[0069] In order to improve the above problems, the embodiments of the present utility model provide a safety interlock circuit and an air intake control system for semiconductor process equipment. The embodiments of the present utility model are introduced in detail below.

[0070] The present embodiment provides a safety interlock circuit and semiconductor process equipment, wherein the semiconductor process equipment includes: a process chamber, a gas supply pipeline 300, a gas supply valve 310 and the safety interlock circuit, the gas supply valve 310 is arranged on the gas supply pipeline 300, and is used to control the on-off of the gas supply pipeline 300; the gas supply pipeline 300 is connected to the process chamber, and is used to introduce process gas into the process chamber; the electric control valve 160 of the safety interlock circuit is connected to the gas supply valve 310, and is used to control the on-off of the gas supply valve 310.

[0071] Specifically, the gas supply valve 310 is selected as a pneumatic valve. Among them, the pneumatic valve can be provided with a primary pneumatic valve and a secondary pneumatic valve. That is, two pneumatic valves are provided on the air inlet pipeline of each process gas connected to the process chamber, namely, the primary pneumatic valve (G11, G21, G31, G41, G51, G61) and the secondary pneumatic valve (G12, G22, G32, G42, G52, G62), so as to achieve redundant protection. Even if the primary pneumatic valve fails, the secondary pneumatic valve still has a protective effect, and the safety interlock is still effective.

[0072] like Figure 2 As shown, the safety interlock circuit provided in this embodiment includes: a gas supply valve control circuit 100 and a power supply control circuit 200.

[0073] The gas supply valve control circuit 100 includes a first control device 110 and a second control device 120 electrically connected in series, the first control device 110 is electrically connected to a power supply 150, the second control device 120 is electrically connected to an electric control valve 160, and the electric control valve 160 is configured to: control the on-off of a gas supply pipeline 300, the gas supply pipeline 300 is used to introduce process gas into a process chamber, for example, the electric control valve 160 is connected to a gas supply valve 310 through a pipeline, the gas supply valve 310 is used to control the on-off of the gas supply pipeline 300, and a gas source is introduced into the gas supply valve 310 to push open the valve core of the gas supply valve 310, thereby opening the gas supply valve 310 and introducing the required process gas, i.e., special gas, into the process chamber.

[0074] The power supply control circuit 200 includes: a pressure sensor 210, an interlock controller 220 and a process controller 230; the pressure sensor 210 is used to sense the process pressure; the interlock controller 220 has an interlock input terminal 223 and a first interlock output terminal 221, the interlock input terminal 223 is connected to the pressure sensor 210, and is used to input a process pressure signal; the first interlock output terminal 221 is used to output a first process signal, and the first interlock output terminal 221 is connected to the first control device 110, and is used to control the opening and closing of the first control device 110.

[0075] The process controller 230 has a first process input terminal 231 and a third process input terminal 233; the third process input terminal 233 is connected to the pressure sensor 210 for inputting a process pressure signal; the first process input terminal 231 is connected to the first interlock output terminal 221 for inputting a first process signal; the process controller 230 has a first process output terminal 235 for outputting a second process signal, and the first process output terminal 235 is connected to the second control device 120 for controlling the opening and closing of the second control device 120.

[0076] In this embodiment, the pressure sensor 210 transmits the process pressure signal it senses to the interlock controller 220 through the interlock input terminal 223. The interlock controller 220 generates a first process signal from the process pressure signal through its internal control logic. The first process signal is output through the first interlock output terminal 221. The first process signal is fed back to the first control device 110 to control the opening and closing of the first control device 110. The pressure sensor 210 transmits the process pressure signal it senses to the process controller 230 through the third process input terminal 233. At the same time, the first process signal is input from the first process input terminal 231 to the process controller 230. The process controller 230 generates a second process signal from the process pressure signal and the first process signal through its internal control logic. The second process signal is output through the first process output terminal 235. The second process signal is fed back to the second control device 120 to control the opening and closing of the second control device 120.

[0077] In short, the interlock controller 220 outputs a first process signal according to the process pressure signal to control the opening and closing of the first control device 110, and the process controller 230 outputs a second process signal according to the process pressure signal and the first process signal to control the opening and closing of the second control device 120; during the process, the first process signal is used to control the opening and closing of the first control device 110, and the second process signal is used to control the opening and closing of the second control device 120. Only when the first process signal meets the closing condition of the first control device 110 and the second process signal meets the closing condition of the second control device 120, so that the first control device 110 and the second control device 120 are both closed, can the power supply 150 and the circuit where the electric control valve 160 is located be turned on, so that the electric control valve 160 is powered on to control the gas supply pipe. The on-off of the circuit 300 can be controlled, thereby realizing two-way safety interlock control; when any one of the first process signal and the second process signal does not meet the corresponding closing condition, the circuit where the power supply 150 and the electric control valve 160 are located cannot be turned on, and the on-off of the gas supply pipeline 300 cannot be controlled, which will block the gas supply pipeline 300 from entering the process chamber, thereby cutting off the source of danger from the source and improving the reliability of the special gas interlock control; in addition, when one of the first control device 110 and the second control device 120 has a adhesion failure, that is, a normally closed conduction state, the other one can be used to control whether the circuit where the power supply 150 and the electric control valve 160 are located is turned on or not, which can also ensure the reliability of the on-off control of the gas supply pipeline 300, cut off the source of danger from the source, and improve the reliability of the special gas interlock control.

[0078] In this embodiment, the interlock controller 220 and the process controller 230 respectively perform logical judgments on the process pressure signals sensed by the pressure sensor. Only when the process pressures meet the process signal control requirements output by the interlock controller 220 and the process controller 230 can the first controller device 110 and the second controller device 120 be closed. If any one of them does not meet the process signal control requirements, the gas supply pipeline 300 cannot be turned on, thereby achieving reliable control of the on and off of the gas supply pipeline 300.

[0079] In this embodiment, the first process input terminal 231 and the third process input terminal 233 can be set and work at the same time as described above. In addition, one of them can be set, or they can be set at the same time but one of them can be made to work. For example, when only the first process input terminal 231 works, the interlock controller 220 outputs the first process signal according to the process pressure signal to control the opening and closing of the first control device 110, and the process controller 230 outputs the second process signal according to the first process signal to control the opening and closing of the second control device 120. When the first control device 110 and the second control device 120 are both closed, the power supply 150 and The circuit where the electric control valve 160 is located enables the electric control valve 160 to be powered on and work, and control the on and off of the gas supply pipeline 300; when only the third process input end 233 is working, the interlock controller 220 outputs a first process signal according to the process pressure signal to control the opening and closing of the first control device 110, and the process controller 230 outputs a second process signal according to the process pressure signal to control the opening and closing of the second control device 120. When the first control device 110 and the second control device 120 are both closed, the power supply 150 and the circuit where the electric control valve 160 is located are turned on, so that the electric control valve 160 is powered on and works, and controls the on and off of the gas supply pipeline 300. In this embodiment, the process gas (special gas) can be prevented from entering the process chamber from the root through the interlock circuit with simple wiring, the source of danger is cut off from the root, and the reliability of the special gas interlock control is improved.

[0080] It should be noted that the internal control logic of the interlock controller 220 and the internal control logic of the process controller 230 in this embodiment can adopt the existing control logic. This part of the content is not an improvement point of the present utility model, so it will not be repeated here.

[0081] In this embodiment, the pressure sensor 210 includes a chamber pressure sensor and a pipeline pressure sensor. The chamber pressure sensor is used to sense the process chamber pressure, and the pipeline pressure sensor is used to sense the vacuum pipeline pressure connected to the process chamber. For example, the pipeline pressure sensor is used to sense the vacuum pipeline pressure between the air pump (such as a dry pump) and the process chamber. The interlock input end 223 includes a chamber pressure input end and a pipeline pressure input end. The chamber pressure input end is connected to the chamber pressure sensor for inputting the process chamber pressure signal. The pipeline pressure input end is connected to the pipeline pressure sensor for inputting the vacuum pipeline pressure signal. The pressure required for the vacuum pipeline between the air pump and the process chamber is small. When it is close to vacuum, the measured pipeline pressure at this time is the pressure of the vacuum pipeline. The process chamber is connected to the vacuum pipeline. During the process, the vacuum pipeline is evacuated to control the pressure. For example, a dry pump arranged outside the process chamber is used to evacuate and control the pressure of the vacuum pipeline, and the pressure of the vacuum pipeline is detected by the pipeline pressure sensor.

[0082] The process chamber is connected to the vacuum pipeline. During the process, in order to control the pressure of the process chamber, it is necessary to evacuate the process chamber. During the evacuation process, the process gas in the process chamber will be discharged through the vacuum pipeline. The evacuation can be performed by using a dry pump arranged outside the process chamber. Since the process chamber is connected to the vacuum pipeline, when the pressure of the vacuum pipeline is abnormal, there is not only a risk that the pressure of the process chamber cannot meet the pressure value required by the process environment, but also a risk of leakage of process gas (such as special gas). This embodiment is provided with a pipeline pressure sensor for detecting the pressure of the vacuum pipeline, thereby realizing the detection / monitoring of the vacuum pipeline. When the pressure of the vacuum pipeline is abnormal, for example, due to air leakage in the vacuum pipeline, the vacuum pipeline pressure exceeds the preset safety pressure threshold, the pipeline pressure sensor can promptly feed back the abnormal pressure signal to the interlock controller 220 and the process controller 230, thereby respectively controlling the first control device 110 and the second control device 120 to be in the open state, and then making the electric control valve 160 lose power and open, so as to control the gas supply pipeline 300 to be in the disconnected state, that is, stop introducing process gas into the process chamber, so as to control the concentration of process gas in the process chamber and the vacuum pipeline, reduce or even avoid leakage of process gas to the atmospheric environment outside the process chamber, reduce or even avoid air pollution to the atmosphere, and effectively ensure the health safety of the staff; at the same time, each gas supply pipeline 300 is disconnected from the source, so as to avoid the mixing of mutually exclusive process gases to produce harmful substances by chemical reaction.

[0083] Specifically, when the pressure detection value of the chamber pressure sensor or the pipeline pressure sensor is greater than the preset pressure threshold, the interlock controller 220 will control the first control device 110 to be in an open state, and the process controller 230 will control the second control device 120 to be in an open state, thereby ensuring that the electric control valve 160 is in a power-off state, so as to disconnect each gas supply pipeline 300 and prevent the process gas from entering the process chamber. Among them, the preset pressure threshold is the pressure threshold that can cause mutually exclusive process gases (special gases) to produce chemical reactions. For example, the pressure threshold can be selected as 10Torr. Of course, other pressure values ​​can also be selected, which are not limited here.

[0084] In this embodiment, a safety interlock circuit with simple wiring can prevent gas from entering the process chamber at the source. By detecting the pressure of the vacuum pipeline, leakage of the vacuum pipeline can be prevented to cause personal injury, thus cutting off the source of danger at the source and improving the reliability of special gas interlock control.

[0085] In this embodiment, the third process input terminal 233 includes a chamber pressure input terminal and a pipeline pressure input terminal; the chamber pressure input terminal is connected to the chamber pressure sensor for inputting a process chamber pressure signal; the pipeline pressure input terminal is connected to the pipeline pressure sensor for inputting a pipeline pressure signal.

[0086] In this embodiment, the electric control valve 160 includes a pilot valve, which is connected to the air supply valve 310, and the air supply valve 310 is arranged on the air supply pipeline 300; specifically, the pilot valve is an electromagnetic pilot valve; Figure 3 As shown, the air supply valve control circuit 100 also includes an electrically connected air source electric control valve 170 and an air source on-off control device; the air source electric control valve 170 is connected to the electric control valve 160 through a pipeline, and is used to control the on-off of the air source, so that the air source can enter and open the air supply valve 310 corresponding to the electric control valve 160 through the air source electric control valve 170 and the air source channel of the electric control valve 160 in sequence; the air source on-off control device is electrically connected to the power supply 150, and is used to control the on-off of the air source electric control valve 170. Specifically, after the air source electric control valve 170 is energized, the air source is introduced into the pilot valve. For example, the air source is CDA. When the air source electric control valve 170 and the pilot valve are both energized, the air source pipeline 171 is opened, and the air source is introduced into the air supply valve 310 of the air supply pipeline 300, and the valve core of the air supply valve 310 is pushed open to open the valve of the air supply valve 310, thereby opening the air supply pipeline 300.

[0087] In this embodiment, Figure 3 As shown, the electric control valve 160 has a plurality of independent points, each of which has a valve core, and each of which is connected to an independent gas supply valve 310 through a pipeline (gas source pipeline 171); the process controller 230 also includes a third process output terminal 237, which is used to send a command of whether to conduct to the point of the electric control valve 160. When the point receives the "conduction" command, the electric control valve 160 is obtained, and the valve core of the point is opened to pass the gas source to the gas supply valve 310 corresponding to the point. During the process, the electric control valve 160 is powered, and the upper computer sends a gas supply command of the process gas to the process controller 230. The process controller 230 sends the control command to the corresponding point of the electric control valve 160 to indicate that the valve core of the point can be opened to pass the gas source to the gas supply valve 310 connected to the point. In other words, the on-off control of the gas supply valve 310 can also be combined with the upper computer and the process controller 230. Specifically, the process controller 230 includes a PLC input module and a PLC output module. When the electric control valve 160 is powered, the host computer sends the control instruction to the PLC control module, and the PLC output module sends the control instruction to the corresponding point of the pilot valve. When the point receives the "connection" control instruction, the valve core of the point can be opened to pass the gas source to the corresponding gas supply valve 310, push open the valve core of the gas supply valve 310, open the valve of the gas supply valve 310, and pass the corresponding process gas into the process chamber. Otherwise, the valve core of the gas supply valve 310 connected to the corresponding point cannot be pushed open, and the corresponding process gas cannot be passed into the process chamber. Such a setting can further ensure the reliability of the on-off control of the gas supply pipeline 300.

[0088] In this embodiment, in addition to sending the on-off instruction to the point of the electric control valve 160 through the third process output terminal 237 as mentioned above, the on-off instruction can also be sent to the gas supply valve 310 through the third process output terminal 237. In this setting, during the process, the upper computer sends the gas supply instruction of the process gas to the process controller 230, and the process controller 230 sends the control instruction to the corresponding gas supply valve 310 to indicate that the valve core of the gas supply valve 310 can be opened, and the electric control valve 160 is energized to open its valve core by introducing the gas source to the gas supply valve 310. That is to say, the on-off control of the gas supply valve 310 can also be combined with the host computer and the process controller 230. Specifically, the host computer sends the control instruction to the PLC control module, and the PLC output module sends the control instruction to the corresponding gas supply valve 310. When the gas supply valve receives the "connect" control instruction, the valve core of the gas supply valve 310 can be opened by the gas source. The valve of the gas supply valve 310 is opened to introduce the corresponding process gas into the process chamber. Otherwise, the valve core of the gas supply valve 310 cannot be pushed open, and the corresponding process gas cannot be introduced into the process chamber. Such a setting can further ensure the reliability of the on-off control of the gas supply pipeline 300.

[0089] In this embodiment, please continue to refer to Figure 3 The gas source on-off control device includes a third control device 130 and a fourth control device 140. The third control device 130 is electrically connected to the power supply 150, and the third control device 130 and the fourth control device 140 are electrically connected in series; the interlock controller 220 has a second interlock output terminal 222 for outputting a third process signal, and the second interlock output terminal 222 is connected to the third control device 130 for controlling the on-off of the third control device 130; the process controller 230 has a second process input terminal 232 and a second process output terminal 236, and the second process input terminal 232 is connected to the second interlock output terminal 222 for inputting the third process signal, and the second process output terminal 236 is used to output the fourth process signal, and the second process output terminal 236 is connected to the fourth control device 140 for controlling the on-off of the fourth control device 140.

[0090] In this embodiment, in addition to including the third control device 130 and the fourth control device 140 at the same time, the gas source on-off control device can also be set in other ways, for example, the gas source on-off control device is only provided with one control device, that is, only the third control device 130 or the fourth control device 140 is provided. When the gas source on-off control device is only provided with the third control device 130, the third control device 130 is electrically connected to the power supply 150; the interlock controller 220 has a second interlock output terminal 222 for outputting the third process signal, and the second interlock output terminal 222 is connected to the third control device 130, and is used to control the on and off of the third control device 130. When the gas source on-off control device only includes the fourth control device 140, the fourth control device 140 is electrically connected to the power supply 150; the interlock controller 220 has a second interlock output terminal 222 for outputting a third process signal, and the process controller 230 has a second process input terminal 232 and a second process output terminal 236, and the second process input terminal 232 is connected to the second interlock output terminal 222 for inputting the third process signal; the second process output terminal 236 is used to output the fourth process signal, and the second process output terminal 236 is connected to the fourth control device 140 for controlling the on-off of the fourth control device 140.

[0091] The on and off of the third control device 130 or the third control device 140 can control whether the gas source electric control valve 170 is energized. Only when the electric control valve 160 and the gas source electric control valve 170 are both energized can the gas supply valve 310 on the gas supply pipeline 300 be opened. This arrangement further improves the safety and reliability of the two-way safety interlock circuit.

[0092] In this embodiment, specifically, the first control device 110 includes a first intermediate relay, such as Figure 4 As shown, the first interlock output terminal 221 is electrically connected to the first intermediate relay coil KA01; the second control device 120 includes a second intermediate relay, and the first process output terminal 235 is electrically connected to the second intermediate relay coil KA02; the third control device 130 includes a third intermediate relay, and the second interlock output terminal 222 is electrically connected to the third intermediate relay coil KA03; the fourth control device 140 includes a fourth intermediate relay, and the second process output terminal 236 is electrically connected to the fourth intermediate relay coil KA04.

[0093] Specifically, the first intermediate relay can be a normally open relay. When the pressure detection value of the chamber pressure sensor or the pipeline pressure sensor is greater than the preset pressure threshold, the first intermediate relay coil KA01 loses power, so that the first intermediate relay switch KA′01 remains in a normally open state, so that the electric control valve 160 is in a de-energized state. The first intermediate relay can also be a normally closed relay. When the pressure detection value of the chamber pressure sensor or the pipeline pressure sensor is greater than the preset pressure threshold, the first intermediate relay coil KA01 is energized, so that the first intermediate relay switch KA′01 is actuated and changes from a closed state to an open state, so that the electric control valve 160 is in a de-energized state. Similarly, the second intermediate relay, the third intermediate relay, and the fourth intermediate relay can be normally open relays or normally closed relays, and their working principles are the same as those of the first intermediate relay, which will not be repeated here.

[0094] In this embodiment, the gas source electric control valve 170 includes a CDA solenoid valve, which is used to control the on-off of the CDA gas source. The gas source on-off control device is electrically connected in series with the CDA solenoid valve to power the CDA solenoid valve. The CDA solenoid valve is connected to a pilot valve (e.g., a pilot solenoid valve) through a pipeline, and the pilot valve is connected to a gas supply valve 310 (special gas valve) of a gas supply pipeline 300. When the CDA solenoid valve and the pilot valve are electrically connected, according to the instruction of the process controller 230, the gas source opens the corresponding gas supply valve 310, so that the corresponding gas supply pipeline 300 passes the corresponding process gas (special gas) into the process chamber.

[0095] In this embodiment, the interlock controller 220 includes an interlock control circuit board or an interlock control chip. For example, the interlock controller 220 uses a safety interlock PCB board (Printed Circuit Board). The safety interlock PCB board is integrated with safety relay contacts and can be regarded as an internally integrated safety relay board. Such a setting can not only reduce wiring, but also expand the hardware input conditions of the safety interlock PCB board according to actual needs. For example, the upper limit of the hardware access point is set to 30 input points to make up for the defects of the related art that the safety interlock hardware input is limited and the wiring is complicated, thereby improving the reliability of the safety interlock. Specifically, in this embodiment, the safety interlock PCB board includes a first pressure value signal trigger point GUAGE1.SP, a second pressure signal trigger point GUAGE2.SP and a third pressure signal trigger point GUAGE3.SP.

[0096] In this embodiment, the chamber pressure sensor includes a first chamber pressure sensor and a second chamber pressure sensor; the first chamber pressure sensor and the second chamber pressure sensor have different ranges, the first chamber pressure sensor is used to detect the first pressure value of the process chamber, and the second chamber pressure sensor is used to detect the second pressure value of the process chamber. When the first pressure value and the second pressure value are both less than the preset pressure threshold, the first control device 110 / the third control device 130 are controlled to be closed by the interlock controller 220, and the second control device 120 / the fourth control device are controlled to be closed by the process controller 230. By arranging pressure sensors of different ranges in the process chamber, the pressure value of the process chamber under different working conditions can be detected. Assuming that the range of the first chamber pressure sensor is smaller than the range of the second chamber pressure sensor, for example, the range of the first chamber pressure sensor is 10Torr, and the range of the second chamber pressure sensor is 1000Torr, at this time, when the working condition is process, the process chamber pressure is mainly detected by the first chamber pressure sensor, and when the working condition is inflation, the process chamber pressure is mainly checked by the second chamber pressure sensor.

[0097] In this embodiment, the chamber pressure and the line pressure of the vacuum line are detected by setting corresponding vacuum gauges. For example, the first vacuum gauge GUAGE1 is set to detect the first pressure value, the second vacuum gauge GUAGE2 is set to detect the second pressure value, and the third vacuum gauge GUAGE3 is set to detect the vacuum line pressure value. The range of the first chamber pressure sensor corresponding to the first vacuum gauge GUAGE1 is P1, taking P1=10Torr as an example, the range of the second chamber pressure sensor corresponding to the second vacuum gauge GUAGE2 is P2, taking P2=1000Torr as an example, and the range of the line pressure sensor corresponding to the third vacuum gauge GUAGE3 is P3, taking P3=10Torrr as an example; each vacuum gauge corresponds to a pressure value signal trigger point corresponding to its range.

[0098] Continuing with P1 = 10Torr, P2 = 1000Torr, P3 = 10Torrr as an example, Figure 4-Figure 5As shown, when the chamber pressure and the vacuum line pressure are both less than 10Torr, based on the pressure values ​​of each vacuum gauge detected by the chamber pressure sensor and the line pressure sensor, the safety interlock PCB board collects the pressure signals corresponding to each vacuum gauge, which are the first pressure value signal input1, the second pressure value signal input2, and the line pressure value signal input3, respectively. The safety relay contacts of the safety interlock PCB board itself will be energized, and two groups of signals will be output, namely the first process signal output1 and the third process signal output2. These two groups of signals will serve as the energizing conditions of the contacts of the first intermediate relay and the third intermediate relay. Specifically, the first intermediate relay coil KA01 and the third intermediate relay coil KA03 are both energized, respectively making the contacts C1 and C2 of the first intermediate relay switch KA′01 and the third intermediate relay switch KA′03 energized, wherein the first intermediate relay is used to power the electric control valve 160, and the third intermediate relay is used to power the CDA solenoid valve. In this embodiment, the power supply 150 outputs a voltage of 24V as an example.

[0099] Please continue to see Figure 4-Figure 5 The first pressure value signal input1 inside the first vacuum gauge GUAGE1, the second pressure value signal input2 inside the second vacuum gauge GUAGE2, the pipeline pressure value signal input3 inside the third vacuum gauge GUAGE3, and the first process signal Output1 and the third process signal Output2 output by the safety interlock PCB board are all input to the PLC input module as the closing conditions of the second intermediate relay and the fourth intermediate relay contacts C1 and C2 respectively. Specifically, when the chamber pressure and the vacuum pipeline pressure are both less than 10Torr, and the two groups of signals Output1 and Output2 output by the safety interlock PCB board, the above signals are judged by the internal interlock logic of the PLC, and then the enable signals are output through the PLC output module, which are the second process signal and the fourth process signal respectively. The second process signal makes the second intermediate relay coil KA02 form a control loop with the D0V terminal, and the fourth process signal makes the fourth intermediate relay coil KA04 form a control loop with the D0V terminal, so as to control the closing of the contacts C1 and C2 of the second intermediate relay electrical switch KA′02 and the fourth intermediate relay switch KA′04 respectively.

[0100] Based on the above embodiments, the control method of the safety interlock circuit provided in this embodiment is further described in detail below:

[0101] Taking the PECVD chamber to perform oxygen-doped silicon nitride (ODC) and nitrogen-doped silicon nitride (NDC) processes as an example, during the process, the process gas (special gas) introduced into the process chamber and the chamber pressure are shown in Table 3 below:

[0102] Table 3 Comparison of process gases and chamber pressures introduced into the process chamber under different processes

[0103]

[0104] As shown in Table 3, PECVD equipment can be used for both ODC and NDC processes: The gases used in the ODC process include SiH 4 , H 2 , 4MS, the pressure control requirement during the process is 2.2 / 2Torr; the process gases used in the NDC process include N 2 O、SiH 4 , 4MS, the pressure control requirement during the process is 1.6 / 2.3Torr; both processes use NF 3 and O 2 , the chamber pressure control requirement during Clean is 2.5Torr. At the same time, according to process application experience, when the chamber pressure is less than 10Torr, it is safe for the above process gases to mix in the chamber because the pressure is small enough.

[0105] When the chamber is performing the ODC or NDC process, when the first pressure value is less than the trigger point pressure value of the first vacuum gauge, the second pressure value is less than the trigger point pressure value of the second vacuum gauge, and the pipeline pressure value is less than the trigger point pressure value of the third vacuum gauge, and all three are satisfied, the safety interlock PCB board collects the first pressure value signal input1 of the first vacuum gauge trigger point GUAGE01.SP, the second pressure value signal input2 of the second vacuum gauge trigger point GUAGE02.SP, and the pipeline pressure value signal input3 of the third vacuum gauge trigger point GUAGE03.SP, and the safety interlock PCB board performs internal logic operations to output the first process signal output1 and the third process signal output2. Among them, the first process signal output1 energizes the first intermediate relay coil KA01, thereby closing the two contacts C1 and C2 of the first intermediate relay switch KA′01, and the third process signal output2 energizes the third intermediate relay coil KA03, thereby closing the two contacts C1 and C2 of the third intermediate relay switch KA′03; at the same time, the PLC input module collects the first pressure value signal input1 of the first vacuum gauge trigger point GUAGE01.SP, the second pressure value signal input2 of the second vacuum gauge trigger point GUAGE02.SP, the pipeline pressure value signal input3 of the third vacuum gauge trigger point GUAGE03.SP, and the first process signal output1, the third process signal output2, the PLC module performs internal logic operations to output the second process signal and the fourth process signal. The second process signal energizes the second intermediate relay coil KA02, thereby closing the two contacts C1 and C2 of the second intermediate relay switch KA′02. The fourth process signal energizes the fourth intermediate relay coil KA04, thereby closing the two contacts C1 and C2 of the fourth intermediate relay switch KA′04. After the contacts C1 and C2 of the first intermediate relay switch KA′01 and the second intermediate relay switch KA′02 are closed, the electromagnetic pilot valve is connected to the power supply, that is, the electromagnetic pilot valve is energized and the main valve is opened. At the same time, the third intermediate relay switch K After A′03 and the fourth intermediate relay switch KA′04 are both energized, the CDA solenoid valve is connected to the power supply, that is, the CDA solenoid valve is energized and opened, that is, the gas source pipeline 171 is connected. At this time, the gas source of the gas source pipeline 171 will be passed into the pilot solenoid valve through the CDA solenoid valve; after the solenoid pilot valve is energized, it can be sent to the PLC module according to the upper computer instruction, and the PLC output module sends the control instruction to the corresponding point of the solenoid pilot valve, opens the valve core of the point, and introduces the gas source to the gas supply valve 310 connected to the point. The gas source pushes open the valve of the gas supply valve 310, connects the corresponding gas supply pipeline 300, and allows the corresponding process gases SiH4, NF3, 4MS, H2, N2O, and NH3 to enter the process chamber.In this process, since the chamber pressure is small enough, less than 10Torr, according to process application experience, it is safe to mix the above-mentioned process gases in the chamber, and it is possible to simultaneously introduce mutually exclusive process gases (special gases) into the process chamber and achieve safe mixing of the mutually exclusive process gases.

[0106] In summary, in this embodiment, the main logic or purpose of the safety interlock circuit is: when the chamber pressure or pipeline pressure is greater than the preset pressure value, for example, greater than 10 Torr, the solenoid pilot valve and the CDA solenoid valve are de-energized and disconnected, thereby disconnecting the gas supply pipeline 300, thereby avoiding safety risks at the source and ensuring the safety of operators and equipment. In addition, in the control loop of the safety interlock circuit, the first control device 110 and the second control device 120 meet the single fault tolerance requirement. If one of the two devices fails and is normally closed, the other device can be disconnected to make the pilot valve lose power. For example, when the open contacts of the intermediate relay switch of one of them have a contact adhesion failure due to electric shock, the open contacts of the other intermediate relay switch are disconnected; the third control device 130 and the fourth control device 140 meet the single fault tolerance requirement. If one of the two devices fails and is normally closed, the other device can be disconnected to make the CDA solenoid valve lose power. For example, when the open contacts of the intermediate relay switch of one of them have a contact adhesion failure due to electric shock, the open contacts of the intermediate relay switch of the other are disconnected; in this way, all the air supply valves 310 are controlled to be in the disconnected state, a double interlocking circuit is realized, and the reliability of the safety interlocking circuit is improved.

[0107] It can be seen that, compared with the above-mentioned related technologies, the safety interlock circuit provided in this embodiment has the following beneficial effects:

[0108] First, a double interlocking circuit is implemented, and the safety interlocking reliability is higher;

[0109] Furthermore, a safety interlock PCB board is used to realize interlock signal acquisition (chamber pressure signal acquisition, vacuum pipeline pressure signal acquisition, process signal acquisition), which improves the reliability of safety interlock; the safety interlock PCB board is integrated with a safety relay board, which not only reduces wiring, but also can expand the safety interlock hardware input conditions according to actual needs;

[0110] Furthermore, the vacuum pipeline pressure collection is added to prevent the damage to the external environment and personnel caused by process gas leakage in the vacuum pipeline.

[0111] Furthermore, when the chamber pressure or vacuum line pressure is abnormal, the safety interlock circuit will cut off the CDA solenoid valve, and the air supply valve will lose the gas power for valve operation (no gas source to push the valve of the air supply valve open). Even if the upper computer command is sent to the PLC to control the opening / closing action of the pilot valve, the air supply valve 310 cannot be operated. At the same time, when the pressure is abnormal, the power supply of the electromagnetic pilot valve connected to all the air supply valves is directly cut off, fundamentally cutting off the danger source and improving the reliability of the safety interlock.

[0112] In addition, in each gas supply pipeline 300, the gas supply valve 310 includes a primary pneumatic valve and a secondary pneumatic valve connected in series, thereby achieving redundant protection, that is, when the primary valve fails, the secondary valve still has a protective function and the safety interlock is still effective.

[0113] In addition, in the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0114] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0115] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the utility model, which are used to illustrate the technical solution of the utility model, rather than to limit it. The protection scope of the utility model is not limited thereto. Although the utility model is described in detail with reference to the above-mentioned embodiments, ordinary technicians in this field should understand that any technician familiar with the technical field can still modify the technical solution recorded in the above-mentioned embodiments within the technical scope disclosed by the utility model, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solution deviate from the spirit and scope of the technical solution of the embodiment of the utility model, and should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. A safety interlock circuit, characterized in that: include: A gas supply valve control circuit (100) and a power supply control circuit (200); The gas supply valve control circuit (100) comprises a first control device (110) and a second control device (120) which are electrically connected in series, wherein the first control device (110) is electrically connected to a power source (150), and the second control device (120) is electrically connected to an electric control valve (160), wherein the electric control valve (160) is configured to: control the on-off of a gas supply pipeline (300), wherein the gas supply pipeline (300) is used to introduce a process gas into a process chamber; The power supply control loop (200) comprises: a pressure sensor (210), an interlock controller (220) and a process controller (230); the pressure sensor (210) is used to sense the process pressure; The interlock controller (220) has an interlock input terminal (223) and a first interlock output terminal (221), wherein the interlock input terminal (223) is connected to the pressure sensor (210) and is used to input a process pressure signal; the first interlock output terminal (221) is used to output a first process signal; and the first interlock output terminal (221) is connected to the first control device (110) and is used to control the opening and closing of the first control device (110); The process controller (230) has a first process input terminal (231) and / or a third process input terminal (233); the third process input terminal (233) is connected to the pressure sensor (210) for inputting the process pressure signal; the first process input terminal (231) is connected to the first interlock output terminal (221) for inputting the first process signal; the process controller (230) has a first process output terminal (235) for outputting a second process signal, and the first process output terminal (235) is connected to the second control device (120) for controlling the opening and closing of the second control device (120).

2. The safety interlock circuit according to claim 1, characterized in that: The pressure sensor (210) comprises a chamber pressure sensor and a pipeline pressure sensor, wherein the chamber pressure sensor is used to sense the pressure of the process chamber, and the pipeline pressure sensor is used to sense the pressure of the pipeline connected to the process chamber; The interlock input end (223) comprises a chamber pressure input end and a pipeline pressure input end; the chamber pressure input end is connected to the chamber pressure sensor for inputting a process chamber pressure signal; the pipeline pressure input end is connected to the pipeline pressure sensor for inputting the pipeline pressure signal.

3. The safety interlock circuit according to claim 1, characterized in that: The pressure sensor (210) comprises a chamber pressure sensor and a pipeline pressure sensor, wherein the chamber pressure sensor is used to sense the pressure of the process chamber, and the pipeline pressure sensor is used to sense the pressure of the vacuum pipeline connected to the process chamber; The third process input end (233) includes a chamber pressure input end and a pipeline pressure input end; the chamber pressure input end is connected to the chamber pressure sensor for inputting a process chamber pressure signal; the pipeline pressure input end is connected to the pipeline pressure sensor for inputting the pipeline pressure signal.

4. The safety interlock circuit according to any one of claims 1 to 3, characterized in that: The electric control valve (160) comprises a pilot valve, wherein the pilot valve is configured to be connected to an air supply valve (310) via a pipeline, wherein the air supply valve (310) is arranged on the air supply pipeline (300); The air supply valve control circuit (100) further comprises an electrically connected air source electric control valve (170) and an air source on-off control device; the air source electric control valve (170) is connected to the electric control valve (160) via a pipeline and is used to control the on-off of the air source, so that the air source can enter and open the air supply valve (310) corresponding to the electric control valve (160) through the air source channels of the air source electric control valve (170) and the electric control valve (160) in sequence; the air source on-off control device is electrically connected to the power supply (150) and is used to control the on-off of the air source electric control valve (170).

5. The safety interlock circuit according to claim 4, characterized in that: The gas source on-off control device comprises a third control device (130), and the third control device (130) is electrically connected to the power supply (150); the interlock controller (220) has a second interlock output terminal (222) for outputting a third process signal, and the second interlock output terminal (222) is connected to the third control device (130) for controlling the on-off of the third control device (130); Or, the gas source on-off control device includes a fourth control device (140), and the fourth control device (140) is electrically connected to the power supply; the interlock controller (220) has a second interlock output terminal (222) for outputting a third process signal, and the process controller (230) has a second process input terminal (232) and a second process output terminal (236), and the second process input terminal (232) is connected to the second interlock output terminal (222) for inputting the third process signal; the second process output terminal (236) is used to output a fourth process signal, and the second process output terminal (236) is connected to the fourth control device (140) for controlling the on-off of the fourth control device (140); Alternatively, the gas source on-off control device comprises a third control device (130) and a fourth control device (140), the third control device (130) is electrically connected to the power supply (150), and the third control device (130) and the fourth control device (140) are electrically connected in series; the interlock controller (220) has a second interlock output terminal (222) for outputting a third process signal, the second interlock output terminal (222) is connected to the third control device (130), and is used to control the on-off of the third control device (130); the process controller (230) has a second process input terminal (232) and a second process output terminal (236), the second process input terminal (232) is connected to the second interlock output terminal (222), and is used to input the third process signal, the second process output terminal (236) is used to output the fourth process signal, and the second process output terminal (236) is connected to the fourth control device (140), and is used to control the on-off of the fourth control device (140).

6. The safety interlock circuit according to claim 5, characterized in that: The first control device (110) comprises a first intermediate relay, and the first interlock output terminal (221) is electrically connected to a coil of the first intermediate relay; The second control device (120) comprises a second intermediate relay, and the first process output terminal (235) is electrically connected to a coil of the second intermediate relay; The third control device (130) comprises a third intermediate relay, and the second interlock output terminal (222) is electrically connected to a coil of the third intermediate relay; The fourth control device (140) comprises a fourth intermediate relay, and the second process output terminal (236) is electrically connected to a coil of the fourth intermediate relay.

7. The safety interlock circuit according to claim 4, characterized in that: The gas source electric control valve (170) comprises a CDA solenoid valve, the CDA solenoid valve is used to control the on and off of the CDA gas source, and the gas source on and off control device is electrically connected in series with the CDA solenoid valve, and is used to supply power to the CDA solenoid valve.

8. The safety interlock circuit according to claim 5, characterized in that: The electric control valve (160) has a plurality of mutually independent points, each point having a valve core, and each point is connected to a plurality of mutually independent air supply valves (310) via pipelines; The process controller (230) further comprises a third process output terminal (237), and the third process output terminal (237) is used to send an instruction on whether to conduct to a point of the electric control valve (160).

9. The safety interlock circuit according to any one of claims 1 to 3, characterized in that: The interlocking controller (220) comprises an interlocking control circuit board or an interlocking control chip; And / or, the process controller (230) includes a PLC input module and a PLC output module.

10. The safety interlock circuit according to any one of claims 2 to 3, characterized in that: The chamber pressure sensor includes a first chamber pressure sensor and a second chamber pressure sensor; The first chamber pressure sensor and the second chamber pressure sensor have different measuring ranges. The first chamber pressure sensor is used to detect a first pressure value of the process chamber, and the second chamber pressure sensor is used to detect a second pressure value of the process chamber. When the first pressure value and the second pressure value are both less than a preset pressure threshold, the first control device (110) is controlled to be closed through the interlock controller (220), and / or the second control device (120) is controlled to be closed through the process controller (230).

11. A semiconductor process equipment, characterized in that: include: A process chamber, a gas supply pipeline (300), a gas supply valve (310) and a safety interlock circuit as described in any one of claims 1 to 10, wherein the gas supply valve (310) is arranged on the gas supply pipeline (300) for controlling the on-off of the gas supply pipeline (300); the gas supply pipeline (300) is connected to the process chamber for introducing process gas into the process chamber; the electric control valve (160) of the safety interlock circuit is connected to the gas supply valve (310) for controlling the on-off of the gas supply valve (310).

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