Adsorption tower for arsenic hydride and phosphine

Abstract

The utility model belongs to the field of semiconductor material manufacturing, and particularly relates to an arsenic hydride and phosphine adsorption tower, which comprises a tower body and a circulation port at the bottom of the tower body, a sealing box is mounted at the bottom of the tower body, the sealing box is hermetically connected with the circulation port through a filter cartridge, a cleaning groove is mounted in the sealing box, and a push block is mounted at the output end of the cleaning groove; an annular powerful magnet is installed on the push block, a synchronous sleeve is installed on the outer side of the filter cylinder in a sliding mode, an iron sheet is installed in the synchronous sleeve, and the iron sheet and the powerful magnet are attracted. According to the spraying circulating system, manganese crystals are prevented from entering the spraying circulating system in the mode that the filter cylinder is additionally arranged on the circulating opening, the cleaning groove is started to push the powerful magnet to slide in the filter cylinder, the powerful magnet on the push block can attract the powerful magnet in the synchronous sleeve, the push block can drive the synchronous sleeve to move synchronously, and therefore the manganese crystals are prevented from entering the spraying circulating system. And the synchronous sleeve moves to clean manganese crystals blocked on the outer wall of the filter cartridge, so that the circulating efficiency of the spraying liquid is improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor material manufacturing, and particularly relates to an adsorption tower for arsine and phosphine. Background Art

[0002] Phosphine and arsine are widely used in the field of semiconductor manufacturing. Among them, high-purity phosphine is used as a dopant to introduce impurity atoms into silicon wafers to form N-type semiconductors; arsine can be converted into arsenides under certain conditions, such as gallium arsenide and indium arsenide, and these compounds are important semiconductor materials and are widely used in the manufacture of electronic and optoelectronic devices.

[0003] When preparing phosphine and arsine using a reaction kettle in the prior art, waste gas containing arsine / phosphine will be generated. Enterprises often use potassium permanganate solution to treat the waste gas containing arsine / phosphine, spraying the potassium permanganate solution from top to bottom to contact and absorb the waste gas containing arsine / phosphine in a spray tower, and using the potassium permanganate oxidation method to treat the arsenic-containing waste gas. However, when potassium permanganate undergoes an oxidation-reduction reaction with the arsenic-containing waste gas, manganese crystals will be generated to block the packing of the spray system, resulting in the shutdown of the equipment. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an adsorption tower for arsine and phosphine with a simple structure and capable of filtering manganese crystals in view of the deficiencies of the prior art, so as to solve the technical problem of manganese crystals blocking the spray system in the prior art.

[0005] The purpose of the utility model can be realized by the following technical solutions:

[0006] An adsorption tower for arsine and phosphine, which includes a tower body, an air outlet end at the top of the tower body, and a circulation port at the bottom of the tower body. A gas transmission pipe is installed on the side wall of the tower body, a spray head is installed at the top of the tower body, the circulation port is connected to the spray head through a connecting pipe, the connecting pipe is connected to a pump body, a sealed box is installed at the bottom of the tower body, the sealed box and the circulation port are hermetically connected through a filter cartridge, a cleaning groove is installed in the sealed box, and a pushing block is installed at the output end of the cleaning groove;

[0007] An annular strong magnet is installed on the pushing block, a synchronous sleeve is slidably installed on the outer side of the filter cartridge, an iron sheet is installed in the synchronous sleeve, and the iron sheet is adsorbed by the strong magnet.

[0008] As a further optimization or improvement of this solution, inclined surface grooves are respectively arranged at both ends of the synchronous sleeve and are provided with a cleaning groove and a pressing block, and the cleaning groove is arranged as an inclined surface groove.

[0009] As a further optimization or improvement of this solution, a collection box is provided at one end of the filter cartridge close to the sealing box. A moving groove is provided on the filter cartridge, and a reset plate is slidably installed in the moving groove. The reset plate is connected to the side wall of the moving groove through a spring. A pressing plate and a sealing plate are respectively installed on both sides of the reset plate. The sealing plate blocks the input port of the collection box, and the pressing plate is in contact with the pressing block.

[0010] As a further optimization or improvement of this solution, a flexible scraper is installed at one end of the output port of the collection box, and the flexible scraper presses against the side wall of the cleaning groove.

[0011] As a further optimization or improvement of this solution, the synchronous sleeve contacts the filter cartridge through a scraping strip.

[0012] As a further optimization or improvement of this solution, the connecting pipe is connected to the potassium permanganate solution storage tank through a gate valve.

[0013] Advantages of the present utility model:

[0014] (1) In this solution, by installing a filter cartridge at the circulation port, manganese crystals are prevented from entering the spray circulation system. By starting the cleaning groove, the cleaning groove is used to push the strong magnet to slide inside the filter cartridge. Since the strong magnet on the push block will attract the strong magnet inside the synchronous sleeve, the push block can drive the synchronous sleeve to move synchronously. The movement of the synchronous sleeve can clean the manganese crystals blocked on the outer wall of the filter cartridge, improving the circulation efficiency of the spray liquid.

[0015] (2) In this solution, the push block can drive the synchronous sleeve to move along the outer wall of the filter cartridge. When the synchronous sleeve moves, it can scrape the manganese crystals blocked on the outer wall of the filter cartridge into the cleaning groove. As the push block moves in the direction close to the collection box, the pressing block on the synchronous sleeve first contacts and drives the pressing plate to move, causing the pressing plate to compress the spring through the reset plate. At this time, the reset plate drives the sealing plate to move synchronously, and the movement of the sealing plate drives the output port of the collection box to open. At this time, the flexible scraper presses against the side wall of the cleaning groove. As the synchronous sleeve moves, the manganese crystals in the cleaning groove are scraped into the collection box by the flexible scraper, thereby realizing the collection of manganese crystals, reducing the content of manganese crystals in the spray liquid, and reducing the situation of manganese crystal blockage of the filter cartridge. Description of the Drawings

[0016] The following further describes the present utility model with reference to the drawings.

[0017] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0018] Figure 2 It is a sectional view of the tower body structure.

[0019] Figure 3 It is a schematic diagram of the filter cartridge structure.

[0020] Figure 4 It is a sectional view of the filter cartridge structure.

[0021] Figure 5 It is Figure 4 an enlarged view of the structure of part A of

[0022] Figure 6 It is Figure 4 an enlarged view of the structure of part B of

[0023] Figure 7 It is a schematic diagram of the working state of the push block and the synchronous sleeve.

[0024] Figure 8 It is a schematic diagram of the working state of the present utility model.

[0025] In the figure, the markings are: 1. tower body; 2. gas transmission pipe; 3. connecting pipe; 4. pump body; 5. circulation port; 6. air outlet end; 7. spray head; 8. sealing box; 9. filter cartridge; 10. synchronous sleeve; 11. push block; 12. strong magnet; 13. iron sheet; 14. scraping bar; 15. cleaning groove; 16. pressing block; 17. collection box; 18. moving groove; 19. spring; 20. reset plate; 21. pressing plate; 22. sealing plate; 23. flexible scraping plate. Specific embodiments

[0026] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0027] Refer to Figures 1-8 , an adsorption tower for arsine and phosphine, which includes a tower body 1, an air outlet end 6 at the top of the tower body 1 and a circulation port 5 at the bottom of the tower body 1. The side wall of the tower body 1 is provided with a gas transmission pipe 2, the top of the tower body 1 is provided with a spray head 7, the circulation port 5 is connected to the spray head 7 through a connecting pipe 3, the connecting pipe 3 is connected to a pump body 4, the bottom of the tower body 1 is provided with a sealing box 8, the sealing box 8 and the circulation port 5 are hermetically connected through a filter cartridge 9, a cleaning groove 15 is installed in the sealing box 8, and a push block 11 is installed at the output end of the cleaning groove 15;

[0028] An annular strong magnet 12 is installed on the push block 11, a synchronous sleeve 10 is slidably installed outside the filter cartridge 9, and an iron sheet 13 is installed in the synchronous sleeve 10, and the iron sheet 13 is adsorbed by the strong magnet 12.

[0029] It should be noted that the spring 19, the reset plate 20, the filter cartridge 9 and the synchronizing sleeve 10 are sprayed with an antioxidant coating, and the push block 11, the synchronizing sleeve 10 and the filter cartridge 9 are made of non-ferromagnetic materials such as stainless steel to avoid the influence of the strong magnet 12 on the synchronizing sleeve 10 and the filter cartridge 9.

[0030] It should be noted that before treating the arsenic-containing waste gas, the arsenic-containing waste gas is first introduced into the tower body 1 through the gas transmission pipe 2, and then the potassium permanganate solution is sprayed from top to bottom into the tower body 1 by the spray head 7. Then, through the pump body 4, the potassium permanganate solution sprayed in the tower body 1 is extracted through the connecting pipe 3, and the extracted potassium permanganate solution is transported to the spray head 7 to realize the recycling of the potassium permanganate solution; since manganese crystals will be generated when the potassium permanganate undergoes an oxidation-reduction reaction with the arsenic-containing waste gas, by installing a filter cartridge 9 on the circulation port 5, the manganese crystals are prevented from entering the spray circulation system. As the arsenic-containing waste gas is continuously introduced, more and more manganese crystals are generated, which are likely to cause blockage of the filter cartridge 9. Therefore, by starting the cleaning tank 15, the cleaning tank 15 pushes the strong magnet 12 to slide inside the filter cartridge 9. Since the strong magnet 12 on the push block 11 will adsorb the strong magnet 12 inside the synchronizing sleeve 10, the push block 11 can drive the synchronizing sleeve 10 to move synchronously. The movement of the synchronizing sleeve 10 can clean the manganese crystals blocked on the outer wall of the filter cartridge 9, and the movement of the push block 11 can change the passing amount of the potassium permanganate solution through the filter cartridge 9.

[0031] See Figures 6-7 One end of the filter cartridge 9 close to the sealing box 8 is provided with a collection box 17. A moving groove 18 is clamped on the filter cartridge 9. A reset plate 20 is slidably installed in the moving groove 18. The reset plate 20 is connected to the side wall of the moving groove 18 through a spring 19. A pressing plate 21 and a sealing plate 22 are respectively installed on both sides of the reset plate 20. The sealing plate 22 blocks the input port of the collection box 17, and the pressing plate 21 abuts against the pressing block 16.

[0032] Specifically, cleaning grooves 15 and pressing blocks 16 are respectively arranged at both ends of the synchronizing sleeve 10, and the cleaning grooves 15 are arranged as inclined grooves.

[0033] Specifically, a flexible scraper 23 is installed at one end of the output port of the collection box 17, and the flexible scraper 23 abuts against the side wall of the cleaning groove 15.

[0034] It should be noted that the flexible scraper 23 is made of flexible plastic, such as soft silicone.

[0035] It should be noted that see Figure 7The push block 11 can drive the synchronous sleeve 10 to move in contact with the outer wall of the filter cartridge 9. When the synchronous sleeve 10 moves, the manganese crystals blocked on the outer wall of the filter cartridge 9 can be scraped into the cleaning groove 15. As the push block 11 moves toward the collection box 17, the pressing block 16 on the synchronous sleeve 10 first abuts against the pressing plate 21 and drives the pressing plate 21 to move, so that the pressing plate 21 compresses the spring 19 through the reset plate 20. At this time, the reset plate 20 will drive the sealing plate 22 to move synchronously, and the movement of the sealing plate 22 drives the collection box 17 The output port is opened, and the flexible scraper 23 abuts against the side wall of the cleaning groove 15. As the synchronous sleeve 10 moves, the flexible scraper 23 is deformed by force, and the manganese crystals in the cleaning groove 15 are scraped into the collection box 17 through the flexible scraper 23, thereby realizing the collection of the manganese crystals. After the work is completed, the push block 11 drives the synchronous sleeve 10 to move in the opposite direction, the spring 19 rebounds and drives the sealing plate 22 to block the input port of the collection box 17, and then the synchronous sleeve 10 moves to drive the pressing block 16 to break away from the contact with the pressing plate 21.

[0036] See also Figure 6 , the synchronous sleeve 10 contacts the filter cartridge 9 through the scraper strip 14. It should be noted that the scraper strip 14 can avoid the synchronous sleeve 10 from rigidly contacting the outer wall of the filter cartridge 9, thereby reducing the friction of the synchronous sleeve 10 on the filter cartridge 9.

[0037] Specifically, the connecting pipe 3 is connected to the potassium permanganate solution storage tank through a gate valve. It should be noted that by connecting the connecting pipe 3 to the potassium permanganate solution storage tank, potassium permanganate solution can be added in time to keep the amount of potassium permanganate in the circulation system constant.

[0038] The implementation principle of the present utility model is as follows: during use, first, the arsenic-containing waste gas is introduced into the tower body 1 through the gas transmission pipe 2, and then the potassium permanganate solution is sprayed from top to bottom into the tower body 1 by the spray head 7. Then, through the pump body 4, the potassium permanganate solution sprayed in the tower body 1 is extracted through the connecting pipe 3, and the extracted potassium permanganate solution is transported to the spray head 7 to achieve the recycling of the potassium permanganate solution; when the potassium permanganate undergoes an oxidation-reduction reaction with the arsenic-containing waste gas, manganese crystals will be produced. The filter cartridge 9 is used to prevent the manganese crystals from entering the spray circulation system; then, the cleaning tank 15 is started, so that the cleaning tank 15 pushes the strong magnet 12 to slide inside the filter cartridge 9. Since the strong magnet 12 on the push block 11 will adsorb the strong magnet 12 inside the synchronous sleeve 10, the synchronous sleeve 10 fits against the outer wall of the filter cartridge 9, and the push block 11 can drive the synchronous sleeve 10 to move synchronously. When the synchronous sleeve 10 moves, it can scrape the manganese crystals blocked on the outer wall of the filter cartridge 9 into the cleaning tank 15. As the push block 11 moves closer to the collection box 17, the pressing block 16 on the synchronous sleeve 10 first abuts against the pressing plate 21 and drives the pressing plate 21 to move, so that the pressing plate 21 compresses the spring 19 through the reset plate 20. At this time, the reset plate 20 will drive the sealing plate 22 to move synchronously, and the movement of the sealing plate 22 drives the output port of the collection box 17 to open. At this time, the flexible scraper 23 abuts against the side wall of the cleaning tank 15. As the synchronous sleeve 10 moves, the flexible scraper 23 is deformed by the force, and the manganese crystals in the cleaning tank 15 are scraped into the collection box 17 by the flexible scraper 23, thereby realizing the collection of the manganese crystals.

[0039] The above shows and describes the basic principle, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed.

Claims

1. An adsorption tower for arsenic and phosphine, characterized in that: It comprises a tower body (1), an air outlet (6) at the top of the tower body (1) and a circulation port (5) at the bottom of the tower body (1); a gas delivery pipe (2) is installed on the side wall of the tower body (1); a nozzle (7) is installed on the top of the tower body (1); the circulation port (5) is connected to the nozzle (7) via a connecting pipe (3); the connecting pipe (3) is connected to a pump body (4); a sealing box (8) is installed at the bottom of the tower body (1); the sealing box (8) and the circulation port (5) are sealed and connected via a filter cartridge (9); a cleaning tank (15) is installed in the sealing box (8); and a push block (11) is installed at the output end of the cleaning tank (15); The push block (11) is provided with an annular strong magnet (12), a synchronous sleeve (10) is slidably installed on the outer side of the filter cartridge (9), an iron sheet (13) is installed in the synchronous sleeve (10), and the iron sheet (13) is adsorbed by the strong magnet (12).

2. The adsorption tower for arsenic and phosphine according to claim 1, characterized in that: A cleaning groove (15) and a pressing block (16) are respectively provided at both ends of the synchronous sleeve (10), and the cleaning groove (15) is opened in the form of an inclined groove.

3. The adsorption tower for arsenic and phosphine according to claim 1, characterized in that: A collecting box (17) is provided on one end of the filter cartridge (9) close to the sealing box (8). A movable groove (18) is provided on the filter cartridge (9). A reset plate (20) is slidably installed in the movable groove (18). The reset plate (20) is connected to the side wall of the movable groove (18) via a spring (19). A pressing plate (21) and a sealing plate (22) are respectively installed on both sides of the reset plate (20). The sealing plate (22) blocks the input port of the collecting box (17). The pressing plate (21) is in contact with the pressing block (16).

4. The adsorption tower for arsenic and phosphine according to claim 3, characterized in that: A flexible scraper (23) is installed at one end of the output port of the collection box (17), and the flexible scraper (23) presses against the side wall of the cleaning tank (15).

5. The adsorption tower for arsenic and phosphine according to claim 1, characterized in that: The synchronous sleeve (10) is in contact with the filter cartridge (9) via a scraper strip (14).

6. The adsorption tower for arsenic and phosphine according to claim 1, characterized in that: The connecting pipe (3) is connected to the potassium permanganate solution storage tank via a gate valve.

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