Photovoltaic silicon wafer degumming, inserting and cleaning all-in-one machine

Abstract

The utility model discloses a photovoltaic silicon wafer degumming, inserting and cleaning all-in-one machine, which comprises a workbench and a hydraulic cylinder, the output end of the hydraulic cylinder is fixedly provided with a moving frame, the middle end of the moving frame is fixedly provided with a driving motor, and the output end of the driving motor is fixedly provided with a rotating frame. According to the single crystal silicon wafer degumming device, through the arrangement of the placing frame, single crystal silicon wafers for photovoltaic use can be conveniently placed, and through the arrangement of the hydraulic cylinder, the moving frame, the driving motor, the rotating frame, the cross-shaped rotating plate, the placing frame, the working box, a first conveying pump, a liquid storage box, a first one-way valve and an annular spraying pipe, the effect of rapidly degumming the single crystal silicon wafers for photovoltaic use is achieved; and meanwhile, through the arrangement of a control valve, a backflow pipe, a filter cartridge and a filter plate, the degumming liquid can flow back into the liquid storage tank to be collected, so that the effect of recycling the degumming liquid is achieved, and the cleanliness of recycling of the degumming liquid is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer degumming and cleaning, in particular to a degumming and inserting cleaning integrated machine for photovoltaic silicon wafers. Background Technique

[0002] As a relatively active non-metallic element crystal, monocrystalline silicon is an important part of crystal materials and is at the forefront of the development of new materials. The manufacturing of monocrystalline silicon materials goes through the following processes: quartz sand - metallurgical grade silicon - purification and refining - deposition of polycrystalline silicon ingots - monocrystalline silicon - silicon wafer cutting. Its main uses are as semiconductor materials and for solar photovoltaic power generation, heating, etc. Currently, when degumming and cleaning the monocrystalline silicon wafers used in photovoltaics, degumming liquids are mostly used to soften and remove the colloids on the surface of the monocrystalline silicon wafers.

[0003] For example, the Chinese invention provides a "degumming and inserting cleaning integrated machine for monocrystalline silicon wafer production", publication number: CN116779495B. This application includes a support type side-changing mechanism. The outer wall of the support type side-changing mechanism is provided with an inserting mechanism. The top of the support type side-changing mechanism is rotatably installed with a degumming mechanism. The top of the support type side-changing mechanism is fixedly installed with a cleaning mechanism. The inside of the inserting mechanism is inserted with a scraping mechanism. The support type side-changing mechanism includes a bottom plate. The top of the bottom plate is rotatably installed with a first rotating seat. The top of the first rotating seat is rotatably installed with a threaded lead screw. By making the first liquid storage barrel and the connecting rod rotate in opposite directions as a whole, multiple monocrystalline silicon wafers are impacted in the inner cavity of the first liquid storage barrel by the reversely rotating first liquid storage barrel and the degumming liquid in its inner cavity, so that the monocrystalline silicon wafers and the degumming liquid are fully contacted, collided and rubbed, improving the degumming effect of the silicon wafers, and thus enhancing the degumming efficiency and degumming quality.

[0004] Although the degumming and inserting cleaning integrated machine for monocrystalline silicon wafer production in the above technology can perform degumming and cleaning operations on the monocrystalline silicon wafers used in photovoltaics, due to the lack of the function of cleaning the colloids remaining in the degumming liquid inside the first liquid storage barrel during use, a large amount of colloids remain in the degumming liquid after long-term use, affecting subsequent recycling. At the same time, it often requires personnel to frequently replace the degumming liquid, greatly increasing the labor cost. Content of the Utility Model

[0005] The purpose of the utility model is to provide a degumming and inserting cleaning integrated machine for photovoltaic silicon wafers, which has the advantages of being able to perform effective degumming operations while effectively filtering and removing the colloids in the degumming liquid, avoiding too many colloids in the degumming liquid from affecting recycling, and reducing the replacement frequency of the degumming liquid.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a photovoltaic silicon wafer degumming and inserting cleaning integrated machine, comprising a workbench and a hydraulic cylinder, the output end of the hydraulic cylinder is fixedly installed with a moving frame, the middle end of the moving frame is fixedly installed with a driving motor, the output end of the driving motor is fixedly installed with a rotating frame, the bottom of the rotating frame is fixedly connected with a cross-shaped rotating plate, the lower end of the rotating frame is fixedly connected with a placing frame, the middle end of the top of the workbench is fixedly connected with a working box, the middle end of the bottom of the working box is movably connected with a rotating shaft through a bearing, the bottom of the rotating shaft is fixedly installed with a first synchronous wheel, the top of the rotating shaft is provided with a cross-shaped slot, the right end of the bottom of the inner cavity of the workbench is fixedly connected with a liquid storage tank, and the lower end of the right side of the liquid storage tank is fixedly installed with a first output through a pipeline. A delivery pump, a first one-way valve is fixedly installed on the output end of the first delivery pump through a pipeline, an annular nozzle is fixedly installed between the output end of the first one-way valve and the inner cavity of the working box through a pipeline, a filter cartridge is fixedly connected to the left end of the top of the liquid storage tank, a partition frame is fixedly connected to the middle end of the inner cavity of the filter cartridge, a filter plate is fixedly installed on the top of the partition frame, a return pipe is movably connected between the middle end of the top of the filter cartridge and the right end of the bottom of the working box through a bearing, a control valve is fixedly installed on the upper end of the return pipe, a second synchronous wheel is fixedly installed on the middle end of the return pipe, a synchronous belt is transmission-connected between the middle end of the second synchronous wheel and the middle end of the first synchronous wheel, a cleaning scraper is fixedly connected to the lower end of the return pipe, and the bottom of the cleaning scraper is movably connected to the top of the filter plate.

[0007] As a preferred solution, the number of the annular nozzles is three, and the distance between two adjacent annular nozzles is equal.

[0008] As a preferred solution, a water tank is fixedly connected to the left end of the bottom of the inner cavity of the workbench, a second delivery pump is fixedly installed on the lower end of the left side of the water tank through a pipeline, a second one-way valve is fixedly installed on the output end of the second delivery pump through a pipeline, and the output end of the second one-way valve is fixedly installed on the left side of the annular nozzle through a pipeline.

[0009] As a preferred solution, a discharge pipe is fixedly connected to the middle end of the right side of the filter cartridge, and a sealing cap is threadedly connected to the right side of the discharge pipe.

[0010] As a preferred solution, the top of the outer surface of the workbench is fixedly connected to a fixed frame, the middle end of the hydraulic cylinder is fixedly installed on the middle end of the top of the fixed frame, both ends of the top of the inner cavity of the fixed frame are fixedly connected to sliding rods, and the surface of the movable frame is movably connected to the surface of the sliding rod.

[0011] As a preferred solution, a discharge valve is fixedly mounted on the lower end of the front surface of the working box, and a discharge pipe is fixedly mounted on the front surface of the discharge valve.

[0012] As a preferred solution, the number of the placement frames is ten, and the included angles between adjacent two placement frames are equal.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0014] 1. Through the arrangement of the placement frames, the present utility model facilitates the storage of single-crystalline silicon wafers used in photovoltaics. Through the arrangement of the hydraulic cylinder, the moving frame, the driving motor, the rotating frame, the cross-shaped rotating plate, the placement frames, the working box, the first delivery pump, the liquid storage tank, the first one-way valve and the annular spray pipe, the effect of quickly degumming the single-crystalline silicon wafers used in photovoltaics is achieved. At the same time, through the arrangement of the control valve, the return pipe, the filter cylinder and the filter plate, the degumming liquid can flow back into the interior of the liquid storage tank for collection, thereby achieving the effect of recycling the degumming liquid. Moreover, the cleanliness of the recycled degumming liquid is effectively improved, avoiding the need for frequent replacement of the degumming liquid. Meanwhile, through the arrangement of the driving motor, the rotating frame, the placement frames and the cross-shaped rotating plate, the single-crystalline silicon wafers can be driven to rotate, so that the single-crystalline silicon wafers can fully contact with the degumming liquid under the action of rotation, thereby effectively improving the quality of the degumming operation. And under the combined action of the cross-shaped rotating plate, the cross-shaped slots, the rotating shaft, the first synchronous pulley, the synchronous belt, the second synchronous pulley, the return pipe and the cleaning scraper, the colloid attached to the top of the filter plate can be cleaned, thereby effectively avoiding the influence of the blockage of the filter plate by the colloid on the filtering effect of the degumming liquid and being beneficial for personnel to use.

[0015] 2. Through the arrangement of the water tank, the second delivery pump and the second one-way valve, under the action of the second delivery pump, the water in the water tank can be extracted, and after passing through the second one-way valve and the pipeline, it is conveyed to the annular spray pipe and then sprayed from the annular spray pipe onto the surface of the single-crystalline silicon wafers after degumming, thereby achieving the effect of cleaning the degumming liquid attached to the surface of the single-crystalline silicon wafers. Through the arrangement of the discharge pipe and the sealing cover, it is convenient for personnel to discharge the colloid collected on the partition frame. Through the arrangement of the fixing frame, the purpose of supporting and fixing the hydraulic cylinder is achieved. Through the arrangement of the sliding rod, the purpose of guiding the moving frame is achieved, avoiding the inclination of the moving frame during the moving process. Through the arrangement of the discharge valve and the discharge pipe, it is convenient to discharge the water washed and dropped inside the working box. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a three-dimensional view of the present utility model;

[0017] Figure 2 is another three-dimensional view of the present utility model from a different perspective;

[0018] Figure 3 is a schematic cross-sectional structure view of the moving frame of the present utility model;

[0019] Figure 4 This is a schematic cross-sectional view of the working box of the present utility model;

[0020] Figure 5 This is a schematic cross-sectional view of the filter cartridge of the present utility model.

[0021] In the figure: 1. Working box; 2. Discharge valve; 3. Water tank; 4. Workbench; 5. Liquid storage tank; 6. First delivery pump; 7. First check valve; 8. Fixed frame; 9. Hydraulic cylinder; 10. Moving frame; 11. Slide bar; 12. Second check valve; 13. Second delivery pump; 14. Placing frame; 15. Cross-shaped rotating plate; 16. Rotating frame; 17. Driving motor; 18. Annular spray pipe; 19. Cross-shaped slot; 20. Rotating shaft; 21. First synchronous pulley; 22. Timing belt; 23. Return pipe; 24. Filter cartridge; 25. Second synchronous pulley; 26. Filter plate; 27. Partition frame; 28. Control valve; 29. Discharge pipe; 30. Cleaning scraper. Specific embodiments

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0023] Secondly, the so-called "one embodiment" or "embodiment" herein refers to a specific feature, structure or characteristic that can be included in at least one implementation manner of the present utility model. The "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that excludes other embodiments.

[0024] Embodiment 1:

[0025] Please refer to Figures 1 - 5As shown, the utility model provides a photovoltaic silicon wafer degumming and inserting cleaning all-in-one machine, including a workbench 4 and a hydraulic cylinder 9, the output end of the hydraulic cylinder 9 is fixedly installed with a moving frame 10, the middle end of the moving frame 10 is fixedly installed with a driving motor 17, the output end of the driving motor 17 is fixedly installed with a rotating frame 16, the bottom of the rotating frame 16 is fixedly connected with a cross-shaped rotating plate 15, the lower end of the rotating frame 16 is fixedly connected with a placing frame 14, the middle end of the top of the workbench 4 is fixedly connected with a working box 1, the middle end of the bottom of the working box 1 is movably connected with a rotating shaft 20 through a bearing, the bottom of the rotating shaft 20 is fixedly installed with a first synchronous wheel 21, and the top of the rotating shaft 20 is provided with a cross-shaped slot 19, the right end of the bottom of the inner cavity of the workbench 4 is fixedly connected with a liquid storage tank 5, the lower end of the right side of the liquid storage tank 5 is fixedly installed with a first delivery pump 6 through a pipeline, and the first delivery pump 6 The output end of the first one-way valve 7 is fixedly installed with a first one-way valve 7 through a pipeline, and an annular nozzle 18 is fixedly installed between the output end of the first one-way valve 7 and the inner cavity of the working box 1 through a pipeline. The left end of the top of the liquid storage tank 5 is fixedly connected with a filter cartridge 24, and the middle end of the inner cavity of the filter cartridge 24 is fixedly connected with a partition frame 27, and the top of the partition frame 27 is fixedly installed with a filter plate 26. A return pipe 23 is movably connected between the middle end of the top of the filter cartridge 24 and the right end of the bottom of the working box 1 through a bearing, and a control valve 28 is fixedly installed on the upper end of the return pipe 23. A second synchronous wheel 25 is fixedly installed on the middle end of the return pipe 23, and a synchronous belt 22 is transmission-connected between the middle end of the second synchronous wheel 25 and the middle end of the first synchronous wheel 21. A cleaning scraper 30 is fixedly connected to the lower end of the return pipe 23, and the bottom of the cleaning scraper 30 is movably connected to the top of the filter plate 26.

[0026] In this technical solution, through the setting of the placement frame 14, it is convenient to hold the monocrystalline silicon wafers used in photovoltaics. Through the settings of the hydraulic cylinder 9, the moving frame 10, the driving motor 17, the rotating frame 16, the cross-shaped rotating plate 15, the placement frame 14, the working box 1, the first delivery pump 6, the liquid storage tank 5, the first one-way valve 7, and the annular spray pipe 18, the effect of quickly degumming the monocrystalline silicon wafers used in photovoltaics is achieved. At the same time, through the settings of the control valve 28, the return pipe 23, the filter cylinder 24, and the filter plate 26, the degumming liquid can flow back into the interior of the liquid storage tank 5 for collection, thereby achieving the effect of recycling the degumming liquid, and effectively improving the cleanliness of the recycled degumming liquid, avoiding the need for frequent replacement of the degumming liquid. At the same time, through the settings of the driving motor 17, the rotating frame 16, the placement frame 14, and the cross-shaped rotating plate 15, the monocrystalline silicon wafers can be driven to rotate, so that the monocrystalline silicon wafers can fully contact with the degumming liquid under the action of rotation, thereby effectively improving the quality of the degumming operation. And under the cooperation of the cross-shaped rotating plate 15, the cross-shaped slot 19, the rotating shaft 20, the first synchronous pulley 21, the synchronous belt 22, the second synchronous pulley 25, the return pipe 23, and the cleaning scraper 30, the colloid attached to the top of the filter plate 26 can be cleaned, thereby effectively avoiding the filter plate 26 from being blocked by the colloid and affecting the filtering effect of the degumming liquid, which is beneficial for personnel to use.

[0027] Embodiment 2:

[0028] On the basis of Embodiment 1, as shown in the present utility model Figures 1 - 5 shown, the number of the annular spray pipes 18 is three, and the distance between two adjacent annular spray pipes 18 is equal. The left end of the inner cavity bottom of the workbench 4 is fixedly connected with a water tank 3. The lower end of the left side of the water tank 3 is fixedly installed with a second delivery pump 13 through a pipeline. The output end of the second delivery pump 13 is fixedly installed with a second one-way valve 12 through a pipeline. The output end of the second one-way valve 12 is fixedly installed on the left side of the annular spray pipe 18 through a pipeline. The middle end of the right side of the filter cylinder 24 is fixedly connected with a discharge pipe 29. The right side of the discharge pipe 29 is threadedly connected with a sealing cover. The top of the outer surface of the workbench 4 is fixedly connected with a fixing frame 8. The middle end of the hydraulic cylinder 9 is fixedly installed at the middle end of the top of the fixing frame 8. Both ends of the inner cavity top of the fixing frame 8 are fixedly connected with sliding rods 11. The surface of the moving frame 10 is movably connected to the surface of the sliding rods 11. The lower end of the front surface of the working box 1 is fixedly installed with a discharge valve 2. The front surface of the discharge valve 2 is fixedly installed with a discharge pipe. The number of the placement frames 14 is ten, and the included angle between two adjacent placement frames 14 is equal.

[0029] In this technical solution, through the settings of the water tank 3, the second delivery pump 13 and the second one-way valve 12, the water in the water tank 3 can be pumped under the action of the second delivery pump 13, and after being delivered through the second one-way valve 12 and the pipeline to the annular nozzle 18, it is sprayed from the annular nozzle 18 onto the surface of the single crystal wafer after degumming, thereby achieving the effect of cleaning the degumming liquid attached to the surface of the single crystal wafer. Through the settings of the discharge pipe 29 and the sealing cover, it is convenient for personnel to discharge the colloid collected on the partition frame 27. Through the setting of the fixing frame 8, the purpose of supporting and fixing the hydraulic cylinder 9 is achieved. Through the setting of the slide rod 11, the purpose of guiding the moving frame 10 is achieved, avoiding the inclination of the moving frame 10 during the movement. Through the settings of the discharge valve 2 and the discharge pipe, it is convenient to discharge the water falling during the cleaning inside the working box 1.

[0030] The working principle of the present utility model is as follows: Through the setting of the placement frame 14, it is convenient to hold the single-crystal silicon wafers used in photovoltaics. By controlling the hydraulic cylinder 9 to extend, it can push the moving frame 10, the driving motor 17, the rotating frame 16, the cross-shaped rotating plate 15 and the placement frame 14 to move downward, so that the placement frame 14 can extend into the working box 1. At the same time, until the cross-shaped rotating plate 15 can be inserted into the cross-shaped slot 19 on the rotating shaft 20, by starting the first delivery pump 6 to work, the degumming liquid in the liquid storage tank 5 can be extracted, and after passing through the first one-way valve 7, it is conveyed to the annular spray pipe 18 and quickly sprayed onto the surface of the single-crystal silicon wafer from the annular spray pipe 18, so that the sprayed degumming liquid can contact the colloid on the surface of the single-crystal silicon wafer, enabling the colloid to quickly separate from the single-crystal silicon wafer, thus achieving the effect of quickly degumming the single-crystal silicon wafers used in photovoltaics. At the same time, by controlling the control valve 28 to open, the degumming liquid sprayed inside the working box 1 can enter the inside of the filter cylinder 24 through the return pipe 23, and after the colloid in the degumming liquid is effectively filtered by the filter plate 26, the degumming liquid can flow back into the liquid storage tank 5 for collection, thus achieving the effect of recycling the degumming liquid, and effectively improving the cleanliness of the recycled degumming liquid, avoiding the need for frequent replacement of the degumming liquid. At the same time, by starting the driving motor 17 to work, it can drive the rotating frame 16, the placement frame 14 and the cross-shaped rotating plate 15 to rotate. The rotation of the placement frame 14 can drive the single-crystal silicon wafers to rotate, so that the single-crystal silicon wafers can fully contact with the degumming liquid under the action of rotation, thus effectively improving the quality of the degumming operation. And under the action of the rotation of the cross-shaped rotating plate 15, it can drive the rotating shaft 20 and the first synchronous wheel 21 to rotate through the cross-shaped slot 19. The rotation of the first synchronous wheel 21 can drive the second synchronous wheel 25, the return pipe 23 and the cleaning scraper 30 to rotate through the synchronous belt 22, so that the cleaning scraper 30 can clean the colloid attached to the top of the filter plate 26 under the action of rotation, thus effectively avoiding the filter plate 26 being blocked by the colloid and affecting the filtering effect of the degumming liquid, which is convenient for personnel to use.

[0031] Importantly, it should be noted that the construction and arrangement of the present application shown in multiple different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who refer to this disclosure should easily understand that many modifications are possible without substantially departing from the novel teachings and advantages of the subject matter described in this application (for example, the dimensions, scales, structures, shapes and proportions of various elements, and parameter values (such as temperature, pressure, etc.), installation arrangements, use of materials, color, orientation changes, etc.). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature, number or position of discrete elements may be changed or altered. Accordingly, all such modifications are intended to be included within the scope of the present utility model. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any clause of "means plus function" is intended to cover the structure that performs the recited function herein, and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present utility model. Therefore, the present utility model is not limited to specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0032] In addition, in order to provide a concise description of the exemplary embodiments, all features of the actual embodiments may not be described (i.e., those features that are not relevant to the currently considered best mode of implementing the present utility model, or those features that are not relevant to the implementation of the present utility model).

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit the protection scope of the present utility model. Although the present utility model has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present utility model can be modified or equivalently replaced without departing from the essence and scope of the technical solutions of the present utility model.

Claims

1. A photovoltaic silicon wafer debonding and wafer cleaning integrated machine, comprising a workbench (4) and a hydraulic cylinder (9), characterized in that: A moving frame (10) is fixedly mounted on the output end of the hydraulic cylinder (9), a driving motor (17) is fixedly mounted on the middle end of the moving frame (10), a rotating frame (16) is fixedly mounted on the output end of the driving motor (17), a cross-shaped rotating plate (15) is fixedly connected to the bottom of the rotating frame (16), a placing frame (14) is fixedly connected to the lower end of the rotating frame (16), a working box (1) is fixedly connected to the middle end of the top of the workbench (4), a rotating shaft (20) is movably connected to the middle end of the bottom of the workbench (1) through a bearing, a first synchronous wheel (21) is fixedly mounted on the bottom of the rotating shaft (20), a cross-shaped slot (19) is provided on the top of the rotating shaft (20), a liquid storage tank (5) is fixedly mounted on the right end of the bottom of the inner cavity of the workbench (4), a first delivery pump (6) is fixedly mounted on the lower end of the right side of the liquid storage tank (5) through a pipeline, and a first one-way valve is fixedly mounted on the output end of the first delivery pump (6) through a pipeline. (7), an annular nozzle (18) is fixedly installed between the output end of the first one-way valve (7) and the inner cavity of the working box (1) through a pipeline, a filter cartridge (24) is fixedly connected to the left end of the top of the liquid storage box (5), a partition frame (27) is fixedly connected to the middle end of the inner cavity of the filter cartridge (24), a filter plate (26) is fixedly installed on the top of the partition frame (27), and a bearing is movable between the middle end of the top of the filter cartridge (24) and the right end of the bottom of the working box (1). A return pipe (23) is connected, a control valve (28) is fixedly installed at the upper end of the return pipe (23), a second synchronous wheel (25) is fixedly installed at the middle end of the return pipe (23), a synchronous belt (22) is transmission-connected between the middle end of the second synchronous wheel (25) and the middle end of the first synchronous wheel (21), and a cleaning scraper (30) is fixedly connected at the lower end of the return pipe (23), and the bottom of the cleaning scraper (30) is movably connected to the top of the filter plate (26).

2. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: The number of the annular nozzles (18) is three, and the distance between two adjacent annular nozzles (18) is equal.

3. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: The left end of the bottom of the inner cavity of the workbench (4) is fixedly connected to a water tank (3), a second delivery pump (13) is fixedly installed at the lower end of the left side of the water tank (3) via a pipeline, a second check valve (12) is fixedly installed at the output end of the second delivery pump (13) via a pipeline, and the output end of the second check valve (12) is fixedly installed on the left side of the annular nozzle (18) via a pipeline.

4. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: The middle end of the right side of the filter cartridge (24) is fixedly connected to a discharge pipe (29), and the right side of the discharge pipe (29) is threadedly connected to a sealing cover.

5. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: The top of the outer surface of the workbench (4) is fixedly connected to a fixed frame (8), the middle end of the hydraulic cylinder (9) is fixedly installed on the middle end of the top of the fixed frame (8), both ends of the top of the inner cavity of the fixed frame (8) are fixedly connected to a sliding rod (11), and the surface of the movable frame (10) is movably connected to the surface of the sliding rod (11).

6. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: A discharge valve (2) is fixedly mounted on the lower end of the front surface of the working box (1), and a discharge pipe is fixedly mounted on the front surface of the discharge valve (2).

7. The photovoltaic silicon wafer degumming and wafer cleaning integrated machine according to claim 1, characterized in that: The number of the placement frames (14) is ten, and the angles between two adjacent placement frames (14) are equal.

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