Conveying device

Abstract

The utility model discloses a conveying device which comprises an annular guide rail and a plurality of coating carrying tables. The annular guide rail is provided with a first linear guide rail, a second linear guide rail, a first arc-shaped guide rail and a second arc-shaped guide rail, wherein the first linear guide rail and the second linear guide rail are oppositely arranged. The coating carrying table is arranged on the annular guide rail and can circularly move along the annular guide rail. Wherein the coating platform deck is located on the outer side of the annular guide rail, when the coating platform deck is located on the first linear guide rail, the upper surface of the coating platform deck is arranged upwards, and when the coating platform deck is located on the second linear guide rail, the upper surface of the coating platform deck is arranged downwards. The annular guide rail greatly reduces the size of the conveying device, so that the overall size of the coating equipment is reduced, more coating equipment can be arranged, foreign matters on the coating platform deck can fall off from the coating platform deck under the action of gravity, and the surface of a substrate is smoother.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a conveying device. Background Art

[0002] Perovskite solar cells have the advantages of high photoelectric conversion efficiency, long service life, low preparation cost, etc., and are widely used in the fields of photovoltaic power generation, electric vehicles, electronic devices, etc.

[0003] In the prior art, the perovskite battery coating device adopts a single-chip coating method, that is, a single substrate is placed on the coating station, and a coating head is used for coating. After the coating is completed, the coated substrate is taken away, and the cycle is repeated in turn. This not only prolongs the production cycle of perovskite batteries, reduces the production efficiency, and cannot meet the high-throughput production requirements of perovskite batteries. With the rapid development of new energy, the demand for perovskite batteries is increasing. In order to further improve the production capacity of perovskite batteries, without changing the coating efficiency of the coating equipment, only by increasing the number of coating equipment, but the existing coating equipment is large in size, which in turn affects the increase in the number of coating equipment.

[0004] How to reduce the size of the coating equipment is an urgent problem to be solved. Summary of the Invention

[0005] The purpose of the utility model is to provide a conveying device, which not only greatly reduces the size of the conveying device, thereby reducing the overall size of the coating equipment, and then more coating equipment can be set, improving the production capacity of perovskite batteries, but also foreign objects on the coating stage can fall off from the coating stage under the action of gravity, so that the surface of the substrate is smoother, and then the coating of the substrate is more uniform, improving the quality of perovskite batteries.

[0006] The purpose of the utility model is achieved by adopting the following technical solutions:

[0007] A conveying device, comprising:

[0008] An annular guide rail, the annular guide rail has a first linear guide rail and a second linear guide rail arranged oppositely and a first arc guide rail and a second arc guide rail arranged oppositely, and the first linear guide rail is located above the second linear guide rail;

[0009] A plurality of coating stages, the coating stages are arranged on the annular guide rail and can move in a cycle along the annular guide rail, and the coating stages are used for placing substrates and driving the substrates to move;

[0010] Among them, the coating stage is located outside the annular guide rail. When the coating stage is located on the first linear guide rail, the upper surface of the coating stage is arranged upward. When the coating stage is located on the second linear guide rail, the upper surface of the coating stage is arranged downward.

[0011] Preferably, a plurality of magnetic drive sub-sliders are arranged on the annular guide rail, the coating stage is arranged on the magnetic drive sub-sliders, and the magnetic drive sub-sliders drive the coating stage to move cyclically on the annular guide rail.

[0012] Preferably, a chute and a stator module are arranged on the annular guide rail. The magnetic drive sub-slider includes a slider body, a sliding part and a mover module arranged on the slider body. The stator module and the mover module are used to generate a driving force for driving the magnetic drive sub-slider to move, and the sliding part is slidably connected with the chute.

[0013] Preferably, the chute includes a first side wall and a second side wall, the sliding part includes a plurality of rollers, and the plurality of rollers are respectively slidably connected with the first side wall and the second side wall.

[0014] Preferably, the slider body is integrally U-shaped. The slider body includes a bottom wall, a first arm and a second arm arranged at both ends of the bottom wall. The plurality of rollers are respectively arranged at one ends of the first arm and the second arm close to the bottom wall, and the mover module is respectively arranged at one ends of the first arm and the second arm far from the bottom wall.

[0015] Preferably, a control component is further included. The control component includes a first sensor, a controller arranged on the magnetic drive sub-slider, and a second sensor arranged on the annular guide rail. The first sensor and the second sensor are used to detect the position of the magnetic drive sub-slider on the annular guide rail, and the controller is used to control the moving speed of the magnetic drive sub-slider.

[0016] Preferably, the number of the second sensors is multiple, and the multiple sensors are respectively arranged at different positions on the annular guide rail; and / or,

[0017] The control component further includes a third sensor arranged on the coating stage, and the third sensor is used to detect whether a substrate is placed on the coating stage.

[0018] Preferably, the coating stage includes a carrier table, a support seat and a first driving mechanism arranged between the carrier table and the support seat, and the first driving mechanism is used to drive the carrier table to lift.

[0019] Preferably, the number of the first driving mechanisms is two or three. When the number of the first driving mechanisms is two, the two first driving mechanisms are respectively arranged at two ends of the carrier table in the length direction of the substrate, or the two first driving mechanisms are respectively arranged at two ends of the carrier table in the width direction of the substrate;

[0020] When the number of the first driving mechanisms is three, the three first driving mechanisms are distributed in a triangle.

[0021] Preferably, the first driving mechanism is a piezoelectric ceramic actuator; and / or,

[0022] An adsorption device for adsorbing the substrate is arranged on the carrier table.

[0023] Compared with the prior art, the beneficial effects of the present utility model at least include:

[0024] For the conveying device of the present utility model, by arranging the first linear guide rail above the second linear guide rail, that is, the annular guide rail is vertically arranged, the size of the conveying device is greatly reduced, thereby reducing the overall size of the coating equipment. Furthermore, more coating equipment can be arranged, improving the production capacity of the perovskite battery. By arranging the coating carrier table outside the annular guide rail, when the coating carrier table is located on the first linear guide rail, the upper surface of the coating carrier table faces upward, and when the coating carrier table is located on the second linear guide rail, the upper surface of the coating carrier table faces downward. In this way, foreign matters on the coating carrier table can fall off from the coating carrier table under the action of gravity. At the same time, when the coating carrier table moves on the first arc guide rail and the second arc guide rail, a centrifugal force will be generated, and the centrifugal force further promotes the foreign matters on the coating carrier table to fall off from the coating carrier table, so that the surface of the substrate is smoother, and further the coating of the substrate is more uniform, improving the quality of the perovskite battery. Description of the Drawings

[0025] Figure 1 is a three-dimensional structural schematic diagram of the conveying device according to an embodiment of the present utility model.

[0026] Figure 2 is a planar structural schematic diagram of the conveying device according to an embodiment of the present utility model.

[0027] Figure 3 is Figure 2 a sectional schematic diagram along the A-A direction.

[0028] Figure 4 is Figure 3 a partial enlarged view at A in

[0029] Figure 5 is a three-dimensional structural schematic diagram of the magnetic drive sub-slider and the coating carrier table in an embodiment of the present utility model.

[0030] In the figure: 100, conveying device; 1, annular guide rail; 11, magnetic drive sub-slider; 111, slider body; 1111, bottom wall; 1112, first arm; 1113, second arm; 112, sliding part; 1121, roller; 113, mover module; 12, first linear guide rail; 13, second linear guide rail; 14, first arc guide rail; 15, second arc guide rail; 16, chute; 161, first side wall; 162, second side wall; 17, stator module; 2, coating stage; 21, bearing stage; 22, support base; 23, first driving mechanism; 24, adsorption device; 3, control component; 31, second inductor; 200, substrate. Detailed implementation mode

[0031] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this utility model will be more complete and comprehensive, and will fully convey the concept of the example embodiments to those skilled in the art. Like reference numerals in the figures denote the same or similar structures, and thus their repeated description will be omitted.

[0032] In the present utility model, the words expressing position and direction are described by taking the accompanying drawings as examples, but can be changed according to needs, and all changes made are included in the protection scope of the present utility model.

[0033] Refer to Figures 1 to 5 , the present utility model provides a conveying device 100, including: an annular guide rail 1, a plurality of coating stages 2, the coating stages 2 can move cyclically on the annular guide rail 1, the conveying device 100 can further include a control component 3, and the control component 3 can control the moving speed of the magnetic drive sub-slider 11. The conveying device 100 is used in a coating device, and the coating device can further include a coating component (not shown), a loading component (not shown), and an unloading component (not shown). The coating component can be located above the annular guide rail 1, the loading component and the unloading component can be respectively located at both ends of the annular guide rail 1. The loading component is used to transfer the uncoated substrate 200 to the coating stage 2, the coating stage 2 moves the uncoated substrate 200 below the coating component, the coating component coats the uncoated substrate 200, and the unloading component is used to transfer the coated substrate 200 from the coating stage 2. The empty coating stage 2 moves along the annular guide rail 1 to one end of the annular guide rail 1 close to the loading component. The substrate 200 can be a crystalline silicon substrate, a glass substrate, etc. In this application, taking the substrate 200 being a crystalline silicon substrate as an example for description, a crystalline silicon perovskite battery is formed by coating a perovskite solution on the crystalline silicon substrate.

[0034] Specifically, refer to Figure 1 , Figure 2, the entire annular guide rail 1 can be circular, elliptical, or approximately elliptical in shape. As a preferred embodiment, the entire annular guide rail 1 is approximately elliptical, and the annular guide rail 1 can have a first linear guide rail 12 and a second linear guide rail 13 arranged oppositely, as well as a first arc guide rail 14 and a second arc guide rail 15 arranged oppositely. The first arc guide rail 14, the first linear guide rail 12, the second arc guide rail 15, and the second linear guide rail 13 are connected end to end in sequence, that is, the first arc guide rail 14 and the second arc guide rail 15 are respectively arranged at both ends of the first linear guide rail 12, or the first arc guide rail 14 and the second arc guide rail 15 are respectively arranged at both ends of the second linear guide rail 13. The first linear guide rail 12 and the second linear guide rail 13 can form a certain angle, that is, the annular guide rail 1 is arranged at a certain angle with the horizontal plane. The first linear guide rail 12 can be arranged above the second linear guide rail 13, so as to reduce the area occupied by the annular guide rail 1. In this embodiment, the annular guide rail 1 is arranged perpendicular to the horizontal plane, and the first linear guide rail 12 can be arranged above the second linear guide rail 13, so as to further reduce the area occupied by the annular guide rail 1. Compared with the annular guide rail 1 arranged horizontally, when the site area is the same, when the annular guide rail 1 is arranged perpendicular to the horizontal plane, more annular guide rails 1 can be arranged, and thus more coating devices can be arranged.

[0035] As a preferred embodiment, referring to Figure 1 , Figure 2 , a plurality of magnetic drive sub-sliders 11 can be arranged on the annular guide rail 1. The coating stage 2 can be arranged on the magnetic drive sub-sliders 11, and the magnetic drive sub-sliders 11 can drive the coating stage 2 to move in a cycle on the annular guide rail 1. When the magnetic drive sub-slider 11 is located on the first linear guide rail 12, the upper surface of the coating stage 2 is arranged upward. When the magnetic drive sub-slider 11 is located on the second linear guide rail 13, the upper surface of the coating stage 2 is arranged downward. The magnetic drive sub-slider 11 can rotate clockwise or counterclockwise on the annular guide rail 1. In this embodiment, the magnetic drive sub-slider 11 rotates counterclockwise on the annular guide rail 1, that is, the magnetic drive sub-slider 11 drives the coating stage 2 to rotate counterclockwise on the annular guide rail 1.

[0036] The coating stage 2 is arranged on the annular guide rail 1. The coating stage 2 can move in a cycle on the annular guide rail 1. The coating stage 2 is used to place the substrate 200, and the coating stage 2 can drive the substrate 200 to move on the annular guide rail 1. Each coating stage 2 can place one or more substrates 200. In this embodiment, each coating stage 2 places one substrate 200. Each coating stage 2 can operate independently, that is, there is no interference between multiple coating stages 2.

[0037] The coating stage 2 is located outside the annular guide rail 1. When the coating stage 2 is located on the first linear guide rail 12, the upper surface of the coating stage 2 can be set upward. While ensuring that the coating assembly can coat the substrate 200, it can also prevent the substrate 200 from falling off the coating stage 2. When the coating stage 2 is located on the second linear guide rail 13, the upper surface of the coating stage 2 is set downward. In this way, foreign objects on the coating stage 2 can fall off under the action of gravity, avoiding foreign object contamination of the substrate 200 and ensuring the quality of the perovskite battery.

[0038] In the present application, by arranging the first linear guide rail 12 above the second linear guide rail 13, that is, the annular guide rail 1 is vertically arranged, the size of the conveying device 100 is greatly reduced, thereby reducing the overall size of the coating equipment. Furthermore, more coating equipment can be arranged, improving the production capacity of the perovskite battery. By locating the coating stage 2 outside the annular guide rail 1, when the coating stage 2 is located on the first linear guide rail 12, the upper surface of the coating stage 2 is set upward, and when the coating stage 2 is located on the second linear guide rail 13, the upper surface of the coating stage 2 is set downward. In this way, foreign objects on the coating stage 2 can fall off the coating stage 2 under the action of gravity. At the same time, when the coating stage 2 moves on the first arc guide rail 14 and the second arc guide rail 15, a centrifugal force will be generated, and the centrifugal force further promotes the foreign objects on the coating stage 2 to fall off the coating stage 2, making the surface of the substrate 200 flatter, and further making the coating of the substrate 200 more uniform, improving the quality of the perovskite battery.

[0039] In a specific embodiment, referring to Figure 1 、 Figure 3 、 Figure 4 ,the annular guide rail 1 can be provided with a chute 16 and a stator module 17. The chute 16 can be arranged close to the outside of the annular guide rail 1, and the stator module 17 is arranged closer to the inside of the annular guide rail 1 relative to the chute 16. Of course, the stator module 17 can also be arranged close to the outside of the annular guide rail 1, and the chute 16 is arranged closer to the inside of the annular guide rail 1 relative to the stator module 17. The magnetic drive sub-slider 11 can include a slider body 111, a sliding part 112 and a mover module 113 arranged on the slider body 111. The stator module 17 and the mover module 113 are used to generate a driving force for driving the magnetic drive sub-slider 11 to move, and the sliding part 112 is slidably connected to the chute 16. That is to say, the sliding part 112 can be clamped in the chute 16, which not only ensures the connection between the magnetic drive sub-slider 11 and the annular guide rail 1, preventing the magnetic drive sub-slider 11 from falling off the annular guide rail 1, but also enables relative movement between the magnetic drive sub-slider 11 and the annular guide rail 1.

[0040] The stator module 17 can be a magnet, and the rotor module 113 can be a coil. The magnetic drive slider 11 can also be provided with a power supply module (not shown), and the power supply module supplies power to the coil. When the power supply module supplies power to the rotor module 113, the interaction between the stator module 17 and the rotor module 113 can generate a magnetic driving force, and the magnetic driving force can drive the magnetic drive slider 11 to move along the annular guide rail 1.

[0041] As a preferred embodiment, referring to Figure 4 , the chute 16 can include a first side wall 161 and a second side wall 162. The sliding portion 112 can include a plurality of rollers 1121, and the plurality of rollers 1121 are respectively slidably connected to the first side wall 161 and the second side wall 162. This can improve the stability of the connection between the sliding portion 112 and the chute 16, and can also improve the smoothness of the sliding between the sliding portion 112 and the chute 16, ensuring the stability of the movement of the magnetic drive slider 11, avoiding vibration of the magnetic drive slider 11 during movement, thereby avoiding vibration of the substrate 200 during movement, and further ensuring the uniformity of the coating liquid on the surface of the substrate 200. In this embodiment, the plurality of rollers 1121 can be divided into two rows. When one row of rollers 1121 is slidably connected to the first side wall 161, the other row of rollers 1121 is slidably connected to the second side wall 162.

[0042] Referring to Figure 3 、 Figure 4 、 Figure 5, the slider body 111 as a whole can be U-shaped, with the opening of the slider body 111 facing the annular guide rail 1. The slider body 111 can include a bottom wall 1111, a first arm 1112 and a second arm 1113 provided at both ends of the bottom wall 1111. The side of the bottom wall 1111 facing away from the annular guide rail 1 is connected to the coating stage 2. The installation positions of the rollers 1121 and the mover module 113 respectively correspond to the sliding grooves 16 and the stator module 17. In this embodiment, a plurality of rollers 1121 can be respectively provided at one end of the first arm 1112 and the second arm 1113 close to the bottom wall 1111, and the mover module 113 can be respectively provided at one end of the first arm 1112 and the second arm 1113 away from the bottom wall 1111. That is to say, sliding grooves 16 are provided on both sides of the annular guide rail 1. The rollers 1121 on the first arm 1112 and the rollers 1121 on the second arm 1113 are respectively slidably connected to the sliding grooves 16 on both sides of the annular guide rail 1. It is equivalent to that the rollers 1121 on the first arm 1112 and the rollers 1121 on the second arm 1113 respectively clamp the annular guide rail 1 from both sides. In this way, the stability of the connection between the sliding part 112 and the sliding groove 16 can be further improved, and the smoothness of the sliding between the sliding part 112 and the sliding groove 16 can also be improved, ensuring the stability of the movement of the magnetic drive sub-slider 11, avoiding vibration of the magnetic drive sub-slider 11 during movement, thereby avoiding vibration of the substrate 200 during movement, and further ensuring the uniformity of the coating liquid on the surface of the substrate 200.

[0043] In a specific embodiment, referring to Figure 1 , Figure 2 , the conveying device 100 may further include a control component 3. The control component 3 may include a first sensor (not shown) and a controller (not shown) provided on the magnetic drive sub-slider 11 and a second sensor 31 provided on the annular guide rail 1. The first sensor and the second sensor 31 are used to detect the position of the magnetic drive sub-slider 11 on the annular guide rail 1, and the controller is used to control the moving speed of the magnetic drive sub-slider 11. When the magnetic drive sub-slider 11 approaches the second sensor 31, the first sensor and the second sensor 31 can identify each other, that is, the position of the magnetic drive sub-slider 11 on the annular guide rail 1 can be determined through the first sensor and the second sensor 31. The controller and the first sensor and the power supply module can be connected by wire or wirelessly. The controller can control the power supplied by the power supply module to the mover module 113 according to the position information of the magnetic drive sub-slider 11 feedback by the first sensor, so as to control the moving speed of the magnetic drive sub-slider 11.

[0044] In this embodiment, referring to Figure 1 , Figure 2, the number of the second sensors 31 is multiple, and the multiple sensors are respectively arranged at different positions of the annular guide rail 1. When the magnetic drive sub-slider 11 is at different positions of the annular guide rail 1, the controller can control the magnetic drive sub-slider 11 to have different moving speeds as needed. As an example, when the coating stage 2 drives the substrate 200 to move to the coating station, the controller can control the magnetic drive sub-slider 11 to move at a constant speed to ensure the uniformity of coating. After the coated substrate 200 on the coating stage 2 is transferred, the controller can control the magnetic drive sub-slider 11 to accelerate, improve the moving efficiency of the magnetic drive sub-slider 11, ensure that the coating stage 2 can reach one end of the first linear guide rail 12 close to the feeding assembly in time, and at the same time increase the centrifugal force generated by the coating stage 2, thereby promoting the foreign matters on the coating stage 2 to fall off from the coating stage 2, making the surface of the substrate 200 flatter, and further making the coating on the substrate 200 more uniform, improving the quality of the perovskite battery.

[0045] The control component 3 may further include a third sensor (not shown) arranged on the coating stage 2. The third sensor is used to detect whether the substrate 200 is placed on the coating stage 2, so as to avoid the coating stage 2 without the substrate 200 moving to the lower part of the coating assembly, thereby avoiding the coating stage 2 being contaminated by the coating liquid, and also avoiding the coating stage 2 with the substrate 200 moving to one end of the first linear guide rail 12 close to the feeding assembly, and avoiding multiple substrates 200 being stacked on the same coating stage 2.

[0046] In a specific embodiment, referring to Figure 1 , Figure 3 , Figure 5 , the coating stage 2 may include a carrier table 21, a support base 22, and a first driving mechanism 23 arranged between the carrier table 21 and the support base 22. The first driving mechanism 23 can drive the carrier table 21 to move up and down, thereby driving the substrate 200 to move up and down, so that the distances from the upper surfaces of the substrates 200 on different coating stages 2 to the coating assembly are equal. This can not only adjust the thickness of the coating liquid coated on the substrate 200, but also make the coating liquid evenly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the perovskite battery. The first driving mechanism 23 can be a piezoelectric ceramic actuator, so that the first driving mechanism 23 can not only drive the carrier table 21 to move up and down, but also support the carrier table 21.

[0047] Specifically, the number of the first driving mechanisms 23 is two or three. Of course, the number of the first driving mechanisms 23 can also be one or more than three. When the number of the first driving mechanisms 23 is two, the two first driving mechanisms 23 can be respectively arranged at both ends of the carrier table 21 in the length direction of the substrate 200, and the length direction of the substrate 200 is the same as the coating direction. When the number of the first driving mechanisms 23 is two, the two first driving mechanisms 23 can also be respectively arranged at both ends of the carrier table 21 in the width direction of the substrate 200, and the width direction of the substrate 200 is perpendicular to the coating direction.

[0048] The two first driving mechanisms 23 can drive both ends of the carrier table 21 to move in the same direction at the same time, or can drive both ends of the carrier table 21 to move in opposite directions at the same time. It can also be that one of the first driving mechanisms 23 drives one end of the carrier table 21 to move, and the other first driving mechanism 23 remains stationary. That is to say, the two first driving mechanisms 23 are independent of each other, and can drive the carrier table 21 together at the same time, or can drive the carrier table 21 alone. When the carrier table 21 needs to be lifted or lowered as a whole, the two first driving mechanisms 23 can drive the carrier table 21 to rise or fall at the same time, and the relative level of both ends of the carrier table 21 can be maintained. When one end of the carrier table 21 needs to rise and the other end needs to fall, one first driving mechanism 23 can drive one end of the carrier table 21 to rise, and the other first driving mechanism 23 can drive the other end of the carrier table 21 to fall. When only one end of the carrier table 21 needs to rise or fall, only one first driving mechanism 23 is needed to drive the end of the carrier table 21 that needs to rise or fall.

[0049] In this embodiment, the two first driving mechanisms 23 are independently arranged, and the position of the carrier table 21 can be adjusted according to actual needs. When the two first driving mechanisms 23 are respectively arranged at both ends of the carrier table 21 in the length direction of the substrate 200, in the length direction of the substrate 200, problems such as the two ends of the carrier table 21 being at different heights or the two ends of the substrate 200 being at different heights caused by part processing errors, assembly errors, etc. can be eliminated, so as to ensure that the surface of the substrate 200 is parallel to the guiding coating head 32, that is, to ensure that the distances from the upper surfaces of the substrates 200 located on different coating carrier tables 2 to the coating head 32 are equal. This can not only adjust the thickness of the coating liquid coated on the substrate 200, but also make the coating liquid evenly coated on the substrate 200, improving the photoelectric conversion efficiency of the perovskite battery.

[0050] When two first driving mechanisms 23 are respectively arranged at both ends of the carrier table 21 in the width direction of the substrate 200, in the width direction of the substrate 200, problems such as the two ends of the carrier table 21 being at different heights or the two ends of the substrate 200 being at different heights caused by part processing errors, assembly errors, etc. can be eliminated, so as to ensure that the surface of the substrate 200 is parallel to the guide coating head 32, that is, to ensure that the distances from the upper surfaces of the substrates 200 located on different coating carrier tables 2 to the coating head 32 are equal. This can not only adjust the thickness of the coating liquid coated on the substrate 200, but also make the coating liquid evenly coated on the substrate 200, improving the photoelectric conversion efficiency of the perovskite battery.

[0051] When the number of the first driving mechanisms 23 is three, the three first driving mechanisms 23 are triangularly distributed, and the three first driving mechanisms 23 are preferably independent of each other. On the one hand, the three first driving mechanisms 23 can ensure that the carrier table 21 is balanced, making the lifting of the carrier table 21 more stable. On the other hand, it can ensure that the force on each first driving mechanism is uniform, that is to say, the load borne by each first driving mechanism is uniform, making the operation of each first driving mechanism more stable and smooth, and can also prevent the first driving mechanism from affecting the positioning accuracy or causing damage to the first driving mechanism due to excessive load.

[0052] An adsorption device 24 can be arranged on the carrier table 21. When the substrate 200 is placed on the carrier table 21, the adsorption device 24 can fix the substrate 200, prevent the position of the substrate 200 from shifting, and can also prevent the substrate 200 from warping, making the surface of the substrate 200 flatter, thereby improving the coating uniformity. In some embodiments, the carrier table 21 itself is the adsorption device 24.

[0053] As a preferred method, referring to Figure 1 、 Figure 3 、 Figure 5 , the controller can control the adsorption device 24. After the feeding assembly transfers the uncoated substrate 200 to the coating carrier table 2, the controller controls the adsorption device 24 to adsorb and fix the uncoated substrate 200 to prevent the position of the uncoated substrate 200 from shifting. When the substrate 200 is coated and the discharging assembly needs to transfer the coated substrate 200, the controller controls the adsorption device 24 to release the coated substrate 200, facilitating the discharging assembly to transfer the coated substrate 200.

[0054] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Without departing from the principle and purpose of the present invention, those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention, and all these changes should fall within the protection scope of the claims of the present invention.

Claims

1. A conveying device, characterized in that: include: An annular guide rail, the annular guide rail comprising a first linear guide rail and a second linear guide rail arranged opposite to each other and a first arcuate guide rail and a second arcuate guide rail arranged opposite to each other, the first linear guide rail being located above the second linear guide rail; A plurality of coating carriers, each of which is disposed on the annular guide rail and can perform a circular motion along the annular guide rail, and each of which is used to place a substrate and drive the substrate to move; Wherein, the coating platform is located outside the annular guide rail, and when the coating platform is located on the first linear guide rail, the upper surface of the coating platform is set upward, and when the coating platform is located on the second linear guide rail, the upper surface of the coating platform is set downward.

2. The conveying device according to claim 1, characterized in that A plurality of magnetic drive sub-slide blocks are arranged on the annular guide rail, and the coating carrier is arranged on the magnetic drive sub-slide blocks. The magnetic drive sub-slide blocks drive the coating carrier to perform circular motion on the annular guide rail.

3. The conveying device according to claim 2, characterized in that: A slide groove and a stator module are provided on the annular guide rail. The magnetically driven sub-slider includes a slider body, a sliding portion and a mover module provided on the slider body. The stator module and the mover module are used to generate a driving force for driving the magnetically driven sub-slider to move. The sliding portion is slidably connected to the slide groove.

4. The conveying device according to claim 3, characterized in that: The slide groove includes a first side wall and a second side wall, and the sliding portion includes a plurality of rollers, and the plurality of rollers are respectively slidably connected to the first side wall and the second side wall.

5. The conveying device according to claim 4, characterized in that: The slider body is U-shaped as a whole, and includes a bottom wall and a first arm and a second arm arranged at both ends of the bottom wall. The multiple rollers are respectively arranged at one end of the first arm and the second arm close to the bottom wall, and the mover modules are respectively arranged at one end of the first arm and the second arm away from the bottom wall.

6. The conveying device according to claim 2, characterized in that: It also includes a control component, which includes a first sensor and a controller arranged on the magnetic drive sub-slider and a second sensor arranged on the annular guide rail. The first sensor and the second sensor are used to detect the position of the magnetic drive sub-slider on the annular guide rail, and the controller is used to control the speed of movement of the magnetic drive sub-slider.

7. The conveying device according to claim 6, characterized in that There are multiple second sensors, and the multiple sensors are respectively arranged at different positions of the annular guide rail; and / or, The control component further includes a third sensor disposed on the coating stage, and the third sensor is used to detect whether the substrate is placed on the coating stage.

8. The conveying device according to claim 1, characterized in that: The coating platform comprises a bearing platform and a support seat, and a first driving mechanism arranged between the bearing platform and the support seat, wherein the first driving mechanism is used to drive the bearing platform to move up and down.

9. The conveying device according to claim 8, characterized in that: The number of the first driving mechanisms is two or three. When the number of the first driving mechanisms is two, the two first driving mechanisms are respectively arranged at two ends of the carrying platform in the length direction of the substrate, or the two first driving mechanisms are respectively arranged at two ends of the carrying platform in the width direction of the substrate; When the number of the first driving mechanisms is three, the three first driving mechanisms are distributed in a triangle.

10. The conveying device according to claim 8, characterized in that The first driving mechanism is a piezoelectric ceramic actuator; and / or, The carrying platform is provided with an adsorption device for adsorbing the substrate.

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