Hoisting device and semiconductor processing equipment

Abstract

The utility model provides a hoisting device and semiconductor processing equipment, and solves the problem of fragment caused by difficulty in realizing accurate insertion after position deviation occurs. The lifting lug comprises a lifting lug and a lifting rod, a lifting hole is formed in the lifting lug, an inner chamfer is arranged at a hole opening in at least one side of the lifting hole, the hole diameter of the inner chamfer is reduced from outside to inside, one end of the lifting rod is a plug-in mounting end, the plug-in mounting end is provided with an outer chamfer, the plug-in mounting end is connected with the lifting hole in a plug-in mode, and the outer chamfer and the inner chamfer are matched in a lead-in mode. According to the utility model, the inner chamfer of the lifting hole and the outer chamfer of the lifting rod are used for lead-in matching, so that the precise butt joint between the lifting rod and the lifting lug in the inserting process can be ensured. The guide inclined plane of the inner chamfer and the guide inclined plane of the outer chamfer are gradually shrunk and expanded, so that the suspender can be self-guided in the insertion process and is finally in accurate butt joint with a lifting hole. According to the structural design, the positioning accuracy is remarkably improved, and installation errors caused by inaccurate butt joint are prevented.

Description

Technical Field

[0001] The utility model belongs to the technical field of machinery, and relates to an ear component, in particular to a hoisting device and semiconductor processing equipment. Background Technique

[0002] In the atomic layer deposition stage of the film sealing process in the field of semiconductor silicon-based OLED displays, the product needs to move up and down, resulting in a slight deviation between the device after the up and down movement and the initial position. When the suspension rod needs to be reinserted into the ear on the device, due to the position deviation, the suspension rod cannot be accurately inserted into the ear, and thus cannot firmly support the device, resulting in a fragment accident when it falls.

[0003] For example, Chinese Patent Document No. 202222982595.8 discloses an exhaust muffler ear for an automobile, which includes an ear body. Two mounting holes are opened on one side of the ear body, and the two mounting holes are symmetrically distributed. Two fixing sleeves are fixedly connected to both sides of the ear body, and a chamfer is opened on one side of each of the four fixing sleeves. Four damping holes are opened on one side of the ear body, and a damping sleeve is fixedly connected to the inner surface of each of the four damping holes. A protective sleeve is fixedly connected to the outer surface of the ear body. The advantages of the utility model are as follows: the damping sleeve is provided to achieve a damping effect. During installation, the ear body is installed through the two mounting holes, and the inner surfaces of the four damping holes are sleeved with the external fixing rods. When the ear body shakes, the damping sleeve can play a role in damping and buffering, and can ensure the relative stability of the ear body. The protective sleeve is provided to resist external impacts.

[0004] In the above technical solution, although the structure of the mounting hole is disclosed, since the orifice of the mounting hole is in a straight-mouth shape, when the position deviates slightly from the initial position after movement, the end face of the suspension rod is difficult to align and insert into the mounting hole of the ear, resulting in a failure of the support connection and a falling accident of the device in the subsequent process. Summary of the Utility Model

[0005] The purpose of the present utility model is to address the above problems existing in the prior art and propose a hoisting device and semiconductor processing equipment.

[0006] The purpose of the present utility model can be achieved by the following technical solutions: A hoisting device includes an ear and a suspension rod. A hoisting hole is opened on the ear, and an inner chamfer is provided at least on one side orifice of the hoisting hole. The inner chamfer reduces the hole diameter from outside to inside. One end of the suspension rod is an insertion end head, which has an outer chamfer. The insertion end head is inserted into the hoisting hole so that the outer chamfer and the inner chamfer form an insertion fit.

[0007] In the above-mentioned hoisting device, the lug has a plate body, and the hoisting hole penetrates vertically along the thickness direction of the plate body.

[0008] In the above-mentioned hoisting device, a plurality of mounting holes are opened on the plate body, and the mounting holes are specifically countersunk holes, and the plurality of mounting holes surround the periphery of the hoisting hole.

[0009] In the above-mentioned hoisting device, the outer diameter of the inner chamfer is larger than the inner diameter of the inner chamfer, and a first guiding inclined surface is gradually formed by shrinking from the outer edge to the inner edge; the outer diameter of the outer chamfer is smaller than the inner diameter of the inner end edge, and a second guiding inclined surface is gradually formed by expanding from the outer end edge to the inner end edge.

[0010] In the above-mentioned hoisting device, the inner diameter of the inner edge is equal to the outer diameter of the outer end edge, the outer diameter of the outer edge is equal to the inner diameter of the inner end edge, and the chamfering angle of the first guiding inclined surface is equal to the chamfering angle of the second guiding inclined surface.

[0011] In the above-mentioned hoisting device, the hoisting hole is a T-shaped hole, and the inner chamfer is a T-shaped profile hole; the insertion end is a T-shaped end, and the outer chamfer is a T-shaped profile edge.

[0012] In the above-mentioned hoisting device, the hoisting hole is a round hole, and the inner chamfer is a conical hole; the insertion end is a cylindrical end, and the outer chamfer is a conical end.

[0013] A semiconductor processing device includes the above-mentioned hoisting device.

[0014] In the above-mentioned semiconductor processing device, a loading box is further included. The top side of the loading box has an open mouth, and the open mouth communicates with the box cavity. On two opposite sides of the box cavity are mounting side walls, and at least a pair of the lugs are fixedly installed on the mounting side walls in a left-right symmetry manner.

[0015] Compared with the prior art, the present hoisting device and semiconductor processing device have the following beneficial effects:

[0016] 1. Precise positioning and cooperation: The hoisting device uses the inner chamfer of the hoisting hole and the outer chamfer of the hanging rod for guiding and matching, which can ensure the precise docking between the hanging rod and the lug during the insertion process. The guiding inclined surface of the inner chamfer and the guiding inclined surface of the outer chamfer ensure that the hanging rod can be self-guided during the insertion process and finally accurately dock with the hoisting hole through gradual contraction and expansion. This structural design significantly improves the positioning accuracy and prevents installation errors caused by inaccurate docking.

[0017] 2. Adapt to position offset: In practical applications, especially in semiconductor processing equipment, due to the slight movement and offset of the cassette, the position of the lifting lug may shift slightly. By designing external and internal chamfers with relative gaps, the lifting rod can still be smoothly inserted even when the position of the lifting lug is offset and finally achieve precise docking. This design effectively compensates for the position offset, ensures the stability and reliability during the lifting process, and prevents the risk of the cassette falling or being damaged.

[0018] 3. Enhance structural stability: The internal chamfer of the lifting hole matches the external chamfer of the insertion end, so that after the lifting rod is inserted in place, the formed guiding fit can effectively reduce vibration and movement errors. This precise fit improves the structural stability of the entire lifting device and ensures safety during the lifting process.

[0019] 4. Application of special-shaped holes and end structures: The application of the T-shaped holes, round holes and special-shaped holes mentioned in the design makes the fit between the lifting hole and the insertion end more diverse and flexible. The design of these special-shaped structures can prevent relative rotation of the lifting rod during the insertion process, increase the stability of the device, and improve the safety and precision during the lifting process.

[0020] 5. Wide applicability: The design of this lifting device is applicable to different hole types and end structures, enabling it to be widely used in various semiconductor processing equipment and other occasions that require precise lifting. Its versatility and flexibility enhance the practicality and market competitiveness of the device.

[0021] In summary, the present utility model provides a stable, safe and easy-to-operate lifting device through a clever structural design and precise fitting mechanism. Its high docking accuracy, strong adaptability and maintenance convenience make it perform excellently in practical applications, especially suitable for semiconductor processing equipment that requires high precision and high stability. Brief Description of the Drawings

[0022] Figure 1 It is a three-dimensional structure diagram of the lifting lug of the first embodiment of the present utility model.

[0023] Figure 2 It is a bottom view structure diagram of the lifting rod of the first embodiment of the present utility model.

[0024] Figure 3 It is a three-dimensional structure diagram of the lifting lug of the second embodiment of the present utility model.

[0025] Figure 4 It is a three-dimensional structure diagram of the lifting rod of the second embodiment of the present utility model.

[0026] Figure 5 It is a pre-assembly schematic diagram of the second embodiment of the present utility model.

[0027] In the figure, 1. lifting lug; 2. T-shaped hole; 3. round hole; 4. internal chamfer; 5. counterbore; 6. suspension rod; 7. T-shaped end; 8. external chamfer. Detailed implementation mode

[0028] The following are specific embodiments of the present invention and, in combination with the attached drawings, further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.

[0029] Embodiment 1

[0030] As Figures 1 to 2 shown, this hoisting device includes a lifting lug 1 and a suspension rod 6. A hoisting hole is opened on the lifting lug 1, and an internal chamfer 4 is provided on at least one side orifice of the hoisting hole. The internal chamfer 4 reduces the hole diameter from outside to inside. One end of the suspension rod 6 is an insertion end, and the insertion end has an external chamfer 8. The insertion end is inserted into the hoisting hole so that the external chamfer 8 and the internal chamfer 4 form an insertion fit.

[0031] As Figure 1 shown, the lifting lug 1 has a plate body, and the hoisting hole vertically penetrates along the thickness direction of the plate body. The installation with other components is realized through the plate body, and the vertical angle of the hoisting hole can facilitate the insertion of the suspension rod 6.

[0032] A number of installation holes are opened on the plate body. The installation holes are specifically counterbores 5, and a number of installation holes surround the circumference of the hoisting hole. Screws can be inserted into the installation holes, and the lifting lug 1 is fixed on other components through a number of screws, which is convenient for disassembly and assembly operations.

[0033] The diameter of the outer edge of the internal chamfer 4 is larger than the diameter of the inner edge, and a guiding inclined surface 1 is gradually formed by shrinking from the outer edge to the inner edge; the diameter of the outer end edge of the external chamfer 8 is smaller than the diameter of the inner end edge, and a guiding inclined surface 2 is gradually formed by expanding from the outer end edge to the inner end edge.

[0034] As Figures 1 to 2 shown, during the process of inserting the suspension rod 6 into the hoisting hole, first enter from the outer end edge into the outer edge. At this time, the gap between the two is the largest to facilitate the insertion fit. As the suspension rod 6 gradually extends, the gap between the two gradually becomes smaller, and finally the guiding inclined surface 2 and the guiding inclined surface 1 are closely fitted to form precise positioning.

[0035] The diameter of the inner edge is equal to the diameter of the outer end edge, the diameter of the outer edge is equal to the diameter of the inner end edge, and the chamfer angle of the guiding inclined surface 1 is equal to the chamfer angle of the guiding inclined surface 2. The internal chamfer 4 of the hoisting hole is consistent with the external chamfer 8 of the insertion end, and the chamfer angle is specifically 45°. Thus, after the insertion is in place, the two are completely fitted, thereby improving the precision of positioning.

[0036] The suspension hole is a T-shaped hole 2, and the inner chamfer 4 is a T-shaped contour hole; the insertion end is a T-shaped end 7, and the outer chamfer 8 is a T-shaped contour edge. The suspension hole can be set as a special-shaped hole structure, and the insertion end is correspondingly set as a special-shaped structure so that the two are in a matching fit. The special-shaped structure can prevent relative rotation between the suspension rod 6 and the suspension hole after the suspension rod 6 is inserted into the suspension hole.

[0037] Embodiment 2

[0038] This embodiment is basically the same as Embodiment 1, and the difference lies in:

[0039] As Figures 3 to 5 shown, the suspension hole is a round hole 3, and the inner chamfer 4 is a conical hole; the insertion end is a cylindrical end, and the outer chamfer 8 is a conical end.

[0040] Embodiment 3

[0041] A semiconductor processing device includes the above-mentioned hoisting device.

[0042] In the above-mentioned semiconductor processing device, a loading cassette is further included. The top side of the loading cassette has an opening, and the opening communicates with the cassette cavity. On two opposite sides of the cassette cavity are installation side walls, and at least a pair of lifting lugs 1 are fixedly installed on the installation side walls in a left-right symmetric manner.

[0043] In the atomic layer deposition stage of the thin film sealing process, the left and right lifting lugs 1 are respectively fixed on the left and right sides of the loading cassette. The loading cassette drives the left and right lifting lugs 1 to move up and down synchronously. The up and down movement will cause a slight deviation in the positions of the left and right lifting lugs 1. During the process of inserting the suspension rod 6 into the lifting lug 1, first, the outer edge of the insertion end enters the outer edge of the suspension hole. At this time, the gap between the two is the largest to facilitate the insertion fit. As the suspension rod 6 gradually extends, the gap between the two gradually becomes smaller, and finally, the guiding inclined surface 2 of the outer chamfer 8 is in close fit with the guiding inclined surface 1 of the inner chamfer 4 to form precise positioning. Thus, even in the case of position deviation, it can still be ensured that the suspension rod 6 accurately inserts into the lifting lug 1, completely supports the loading cassette to complete the flipping, and prevents the loading cassette from falling and causing fragmentation.

[0044] The specific embodiments described herein are merely illustrative of the spirit of the present utility model. Those skilled in the art to which the present utility model pertains may make various modifications or supplements to the described specific embodiments or use similar ways for substitution, but will not deviate from the spirit of the present utility model or exceed the defined scope. Although the present utility model has been described in detail in the drawings and the foregoing description, such description is considered to be illustrative or exemplary rather than restrictive. It should be understood that within the scope of the following claims, those of ordinary skill in the art may make changes and modifications. Specifically, the present utility model encompasses additional embodiments having any combination of features from the different embodiments described above. With respect to the use of the expressions "generally" or "substantially", this patent application should be understood to disclose that the same fully meets these features and values, i.e., without the foregoing being characterized as "generally" or "substantially".

[0045] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected" and "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model may be understood according to specific circumstances.

Claims

1. A lifting device, comprising a lifting lug and a lifting rod, characterized in that: A lifting hole is opened on the lifting ear, and an inner chamfer is set on at least one side of the hole of the lifting hole. The inner chamfer reduces the hole diameter from the outside to the inside. One end of the lifting rod is a plug-in end head, and the plug-in end head has an outer chamfer. The plug-in end head is plugged into the lifting hole so that the outer chamfer and the inner chamfer form an introduction fit.

2. The lifting device according to claim 1, characterized in that: The lifting ear has a plate body, and the lifting hole vertically penetrates along the thickness direction of the plate body.

3. The lifting device according to claim 2, characterized in that: A plurality of mounting holes are opened on the plate body, and the mounting holes are specifically countersunk holes, and the plurality of mounting holes surround the peripheral side of the hanging hole.

4. The lifting device according to claim 1, characterized in that: The outer edge diameter of the inner chamfer is larger than the inner edge diameter, and the outer edge gradually shrinks and transitions to the inner edge to form a guide slope 1; the outer end edge diameter of the outer chamfer is smaller than the inner end edge diameter, and the outer end edge gradually expands and transitions to the inner end to form a guide slope 2.

5. The lifting device according to claim 4, characterized in that: The inner edge diameter is equal to the outer end diameter, the outer edge diameter is equal to the inner end diameter, and the angle of the first guide slope is equal to the angle of the second guide slope.

6. The lifting device according to claim 1, characterized in that: The hanging hole is a T-shaped hole, and the inner chamfer is a T-shaped hole; the plug-in end is a T-shaped end, and the outer chamfer is a T-shaped edge.

7. The lifting device according to claim 1, characterized in that: The hanging hole is a round hole, and the inner chamfer is a conical hole; the insertion end is a cylindrical end, and the outer chamfer is a conical end.

8. A semiconductor processing equipment, characterized in that: Comprising a lifting device as claimed in any one of claims 1 to 7.

9. The semiconductor processing equipment according to claim 8, characterized in that It also includes a material loading box, wherein the top side of the material loading box has an opening, the opening is connected to the box cavity, and the two opposite sides of the box cavity are mounting side walls, and at least one pair of the lifting ears are fixedly mounted on the mounting side walls in a left-right symmetrical manner.

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