Connecting structure, gas conveying device and gas reduction system

Abstract

The embodiment of the utility model provides a connecting structure, a gas conveying device and a gas reduction system, the connecting structure is used for the gas reduction system, the connecting structure comprises a disc body and a communicating hole located in the central area of the disc body, and the disc body comprises a connecting part close to the communicating hole and a fixing part away from the communicating hole; the connecting part is used for connecting the preceding-stage pipeline with the corrugated pipe, so that the preceding-stage pipeline is communicated with the corrugated pipe; the fixing part is used for fixing the disc body to the outer side wall of the cabinet body so that the preceding-stage pipeline can be located on the outer side of the cabinet body. The preceding-stage pipeline is fixed to the outer side of the cabinet body through the connecting structure, when maintenance is needed, an operator can disassemble the preceding-stage pipeline and the corrugated pipe from the outside of the cabinet body of the gas reduction equipment under the condition that a side door, a front door and a rear door do not need to be opened, and maintenance of the corrugated pipe and a sealing piece of the corrugated pipe is completed; the gas reduction equipment does not need to be maintained by opening a door, the operation is simple, the risk of damage to gas parts is reduced, the maintenance efficiency is improved, and the maintenance time is saved.

Description

Technical Field

[0001] The embodiments of the present disclosure belong to the technical field of semiconductor equipment, and specifically relate to a connection structure, a gas delivery device, and a gas abatement system. Background Art

[0002] In the semiconductor manufacturing process, gas abatement equipment is involved in specific processes. Gas abatement equipment is mainly used to abatement the gas flowing into the vacuum pump to remove one or more gases. During the vacuum pumping process, the air will be compressed to do work, and the temperature in the vacuum pump will rise. The gas flowing through the vacuum pump will react chemically under high temperature and high pressure to generate harmful gases, liquids or solids. The gas abatement equipment is to treat one or more gases before the gas flows into the vacuum pump.

[0003] The installation space at the client site is relatively limited, and the vacuum pump or the vacuum pump assembly A with gas reduction equipment is basically installed side by side, such as Figure 1 As shown, the left side 1 and the right side 2 of the equipment are close to other equipment, and there is no space for maintenance. Maintenance work cannot be performed on the equipment, and maintenance work can only be performed on the front 4 or the rear 3. The gas reduction equipment is a device with certain consumption, and related parts need to be regularly inspected and maintained.

[0004] In the prior art, the design process does not take into account the maintenance of the front-stage pipeline. During each maintenance process, the abatement equipment must be moved forward or backward as a whole until the left and right sides of the equipment are completely exposed for maintenance. The front-stage pipeline fixing flange bolts are tightened and fixed from the inside of the gas abatement equipment. If maintenance and inspection are required, the bolts need to be disassembled from the inside of the box, and disassembly and operation cannot be performed from the front and back of the box. If the door is opened for maintenance, the equipment needs to be re-debugged, the operation is cumbersome and complicated, and the maintenance time is long. Other components may be touched during maintenance, causing damage to other components.

[0005] In view of the above problems, it is necessary to propose a connection structure, a gas delivery device and a gas reduction system that are reasonably designed and can effectively improve the above problems. Utility Model Content

[0006] The embodiments of the present disclosure aim to solve at least one of the technical problems existing in the prior art and provide a connection structure, a gas delivery device and a gas abatement system.

[0007] One aspect of an embodiment of the present disclosure provides a connection structure for a gas abatement system, the connection structure comprising a disc and a communication hole located in a central area of ​​the disc, the disc comprising a connection portion close to the communication hole and a fixing portion away from the communication hole;

[0008] The connecting portion is used to connect the front-stage pipeline with the bellows so that the front-stage pipeline is communicated with the bellows;

[0009] The fixing portion is used to fix the disk body to the outer side wall of the cabinet body, so that the front-stage pipeline is located outside the cabinet body.

[0010] Optionally, the connecting portion is provided with a plurality of first mounting holes and a plurality of second mounting holes which are distributed in an interlaced manner along the circumference of the connecting hole;

[0011] The fixing portion is provided with a plurality of third mounting holes.

[0012] Optionally, the first mounting hole and the third mounting hole are both bolt holes, and the second mounting hole is a threaded hole.

[0013] Optionally, the first mounting hole is a stepped hole, and the third mounting hole is a smooth hole.

[0014] Another aspect of the disclosed embodiment provides a gas delivery device for a gas abatement system, the gas delivery device comprising a front-stage pipeline, a connection structure, a bellows and an inlet pipeline, wherein the connection structure adopts the connection structure described above;

[0015] The first end of the front-stage pipeline is connected to the first end of the bellows through the connecting portion of the connecting structure, and the second end of the front-stage pipeline is used to communicate with a preset gas source;

[0016] The second end of the bellows is connected to the first end of the inlet pipeline, and the second end of the inlet pipeline is used to connect to the reaction chamber; wherein,

[0017] The fixing portion of the connection structure is used to fix the disk to the outer side wall of the cabinet, so that the front-stage pipeline is located outside the cabinet.

[0018] Optionally, it further includes a plurality of first fasteners and a plurality of second fasteners;

[0019] The first fastener is inserted from the front-stage pipeline end into the first mounting hole corresponding thereto, so as to fix the connection structure to the corrugated pipe;

[0020] The second fastener is inserted into the second mounting hole corresponding to the front-stage pipeline end to connect the front-stage pipeline to the connection structure.

[0021] Optionally, a plurality of third fasteners are also included;

[0022] The third fastener is inserted into the third mounting hole corresponding to the front-stage pipeline end to fix the connection structure to the outer side wall of the cabinet.

[0023] Optionally, the first fastener, the second fastener and the third fastener are all bolts.

[0024] Another aspect of the embodiment of the present disclosure provides a gas abatement system, including a cabinet, a gate valve, a gas delivery device, a reaction chamber and a vacuum pump, wherein the gas delivery device adopts the gas delivery device described above; wherein,

[0025] The first end of the gate valve is used to communicate with a preset gas source, and the second end of the gate valve is connected to the second end of the front-stage pipeline;

[0026] The second end of the inlet pipeline is connected to the gas inlet of the reaction chamber, and the gas outlet of the reaction chamber is connected to the vacuum pump; wherein,

[0027] The gate valve, the front-stage pipeline and the connecting structure are located outside the cabinet, and the bellows, the inlet pipeline, the reaction chamber and the vacuum pump are located inside the cabinet.

[0028] Optionally, a mounting hole is provided on the top wall of the cabinet, and a diameter of the mounting hole is larger than a diameter of the corrugated pipe.

[0029] The connection structure, gas delivery device and gas reduction system of the disclosed embodiments, the connection structure is used for the gas reduction system, the connection structure includes a disk and a connecting hole located in the central area of ​​the disk, the disk includes a connecting portion close to the connecting hole and a fixing portion away from the connecting hole; the connecting portion is used to connect the front-stage pipeline with the bellows so that the front-stage pipeline and the bellows are connected; the fixing portion is used to fix the disk to the outer wall of the cabinet so that the front-stage pipeline is located on the outside of the cabinet. The front-stage pipeline is fixed to the outside of the cabinet by the connection structure. When maintenance is required, the operator can disassemble the front-stage pipeline and the bellows from the outside of the cabinet of the gas reduction equipment without opening the side door and the front and rear doors, and complete the maintenance of the bellows and its seals; the gas reduction equipment does not need to open the door for maintenance, the operation is simple, the risk of damage to gas parts is reduced, the efficiency of maintenance and repair is improved, and the maintenance time is saved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the position relationship of the gas abatement system in the prior art;

[0031] Figure 2 It is a schematic diagram of the position relationship between the front-stage pipeline and the bellows and the cabinet in the prior art;

[0032] Figure 3 This is a structural schematic diagram of a connection structure of an embodiment of the present disclosure;

[0033] Figure 4 It is a schematic diagram of assembling a first mounting hole and a first fastener of another embodiment of the disclosed embodiment;

[0034] Figure 5 It is a structural schematic diagram of a gas delivery device according to another embodiment of the present disclosure;

[0035] Figure 6 It is a structural schematic diagram of a gas abatement system according to another embodiment of the present disclosure;

[0036] Figure 7 It is a structural schematic diagram of a cabinet of another embodiment of the present disclosure. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] like Figure 2 As shown, in the prior art, the lower parts of the inlet pipeline 04, the bellows 05A, and the front-stage pipeline 07A are located inside the sheet metal cabinet 12; the inlet pipeline 04 is connected to the bellows 05A through a first clamp 10A, and the bellows 05A is connected to the front-stage pipeline 07A through a second clamp 11. At the same time, the front-stage pipeline 07A is fixed to the sheet metal cabinet 12 through bolts 09A. It can be understood that the front-stage pipeline 07A is respectively connected to the bellows 05A and the sheet metal cabinet 12.

[0039] In actual use, the bellows 05A and the sealing rings between the bellows 05A and the inlet pipe 04 and the front pipe 07A connected to it will corrode after a certain period of use, and they need to be regularly maintained and replaced. If you want to maintain the bellows 05A and the related sealing rings, you need to disassemble the bellows 05A. Figure 1 In the position where the gas reduction system is located in the embodiment of the present disclosure, the bellows 05A cannot be disassembled from the front door and the rear door, and the doors on the left and right sides cannot be disassembled either. If you want to disassemble the bellows 05A, you can only consider disassembling it from the top. You need to first disassemble the gate valve 08 and the front-stage pipeline 07A. To disassemble the front-stage pipeline 07A, you need to disassemble the bolts 09A and the first caliper 10A and the second caliper 11. To disassemble the first caliper 10A and the second caliper 11, you need to disassemble them from the sheet metal cabinet 12. In fact, the distance at this position is so great that the inside cannot be touched. The side doors on both sides cannot be opened, so the first caliper 10A and the second caliper 11 cannot be reached. Therefore, the front-stage pipeline 07A cannot be disassembled, and maintenance cannot be performed.

[0040] In view of the above-mentioned problems, this solution aims to solve the problem that the front-stage pipeline 07A and the bellows 05A can be disassembled without opening the side door, front and rear doors, and the bellows 05A and the related sealing rings can be maintained.

[0041] like Figure 3 As shown, in order to solve the above problems, an embodiment of the present disclosure provides a connection structure 100 for a gas mitigation system, wherein the connection structure 100 includes a disk body 110 and a connecting hole 120 located in the central area of ​​the disk body 110 , and the disk body 110 includes a connecting portion 111 close to the connecting hole 120 and a fixing portion 112 away from the connecting hole 120 .

[0042] like Figure 3 and Figure 5 As shown, the connection part 111 is used to connect the front-stage pipeline 210 with the bellows 220 so that the front-stage pipeline 210 is connected to the bellows 220. Specifically, the front-stage pipeline 210 is connected to the bellows 220 through the connection part 111 so that the front-stage pipeline 210 is connected to the bellows 220 through the communication hole 120.

[0043] The fixing portion 112 is used to fix the disk body 110 to the outer wall of the cabinet 230 so that the front-stage pipeline 210 is located outside the cabinet 230 .

[0044] Specifically, Figure 3 As shown, in the embodiment, the shape of the disk body 110 is rectangular, and the shape of the connecting hole 120 is circular and located in the central area of ​​the disk body 110. Among them, the fixing part 112 is located on both sides of the disk body 110 along its length direction. The connecting part 111 protrudes from the fixing part 112, that is to say. The thickness of the connecting part 111 is greater than the thickness of the fixing part 112. Further specifically, the connecting structure 100 can be a flange.

[0045] It should be noted that the shape of the disk body 110 is not specifically limited in this embodiment, and it may also be round or square, etc., and can be selected according to the installation size space of the cabinet body 230.

[0046] Specifically, Figure 2 As shown, through the connection structure 100 of the embodiment of the present disclosure, the front-stage pipeline 210 can be connected with the bellows 220, and the front-stage pipeline 210 can also be fixed on the outside of the cabinet 230. In this way, when performing maintenance, the operator can separate the connection structure 100, the front-stage pipeline 210 and the bellows 220 on the outside of the cabinet 230, so as to realize the disassembly of the front-stage pipeline 210 and the bellows 220, and complete the maintenance of the bellows 220 and its sealing parts, without opening the front door, rear door and side door of the cabinet 230, which is simple to operate and saves maintenance time.

[0047] The connection structure of the disclosed embodiment connects the front-stage pipeline and the bellows through the connection part of the disc body, so that the front-stage pipeline and the bellows are connected; the disc body is fixed to the outer wall of the cabinet body through the fixing part of the disc body, so that the front-stage pipeline is located outside the cabinet body. In this way, when maintenance is required, the operator can disassemble the front-stage pipeline and the bellows from the outside of the cabinet body of the gas reduction equipment without opening the side door and the front and rear doors, and complete the maintenance of the bellows and its seals; the gas reduction equipment does not need to open the door for maintenance, the operation is simple, the risk of damage to gas parts is reduced, the efficiency of maintenance and repair is improved, and the maintenance time is saved.

[0048] For example, Figure 3 As shown, the connecting portion 111 is provided with a plurality of first mounting holes 111a and a plurality of second mounting holes 111b which are staggered and distributed along the circumferential direction of the communicating hole 120. The fixing portion 112 is provided with a plurality of third mounting holes 112a.

[0049] Among them, the plurality of first mounting holes 111a cooperate with the corresponding first fasteners to fix the bellows 220 to the disk body 110 of the connection structure 100. The plurality of second mounting holes 111b cooperate with the corresponding second fasteners to fix the front-stage pipeline 210 to the disk body 110 of the connection structure 100, thereby achieving the connection and fixation between the front-stage pipeline 210 and the bellows 220. The plurality of third mounting holes 112a cooperate with the corresponding third fasteners to fix the disk body 110 of the connection structure 100 to the top outer wall of the cabinet 230.

[0050] like Figure 3 As shown, in this embodiment, a plurality of first mounting holes 111a and a plurality of second mounting holes 111b are staggered and distributed at equal intervals along the circumference of the communicating hole 120, so that the front-stage pipe 210 and the corrugated pipe 220 can be fixed more firmly. In addition, in this embodiment, the number of the first mounting holes 111a and the second mounting holes 111b are both 8. The number of the third mounting holes 112a is 4, which are respectively arranged at the four corner ends of the disk body 110. It should be noted that the number and distribution of the first mounting holes 111a, the second mounting holes 111b and the third mounting holes 112a are not specifically limited in this embodiment, and can be selected according to actual needs.

[0051] Exemplarily, the first mounting hole 111a and the third mounting hole 112a are both bolt holes. The second mounting hole 111b is a threaded hole, which can facilitate the disassembly of the front-stage pipeline 210 and the bellows 220.

[0052] For example, in this embodiment, the first mounting hole 111a is a stepped hole, and the third mounting hole 112a is a light hole. The first mounting hole 111a is a stepped hole, that is, its upper portion is a countersunk hole, and its lower portion is a light hole, which can provide space for the fixed connection between the front-stage pipeline 210 and the disk body 110, so that the front-stage pipeline 210 is more firmly fixed to the disk body 110.

[0053] like Figure 5 As shown, another aspect of the embodiment of the present disclosure provides a gas delivery device for a gas abatement system, the gas delivery device comprising a front-stage pipeline 210, a connection structure 100, a bellows 220 and an inlet pipeline 240, wherein the connection structure 100 adopts the connection structure 100 described above. The specific process of the connection structure has been described in detail above and will not be repeated here.

[0054] The first end of the front-stage pipeline 210 is connected to the first end of the bellows 220 through the connecting portion 111 of the connecting structure 100, and the second end of the front-stage pipeline 210 is used to communicate with a preset gas source. Specifically, in this embodiment, the first end of the front-stage pipeline 210 is fixed to the connecting structure 100 through a flat bottom caliper 211.

[0055] The second end of the bellows 220 is connected to the first end of the inlet pipe 240, and the second end of the inlet pipe 240 is used to connect to the reaction chamber 250. Specifically, in this embodiment, the second end of the bellows 220 is connected to the first end of the inlet pipe 240 through a flat-bottom caliper, and of course, a flange can also be used to connect to the first end of the inlet pipe 240. There is no specific limitation on the connection method between the second end of the bellows 220 and the first end of the inlet pipe 240, and it can be selected according to actual needs.

[0056] The fixing portion 112 of the connection structure 100 is used to fix the disk body 110 to the outer wall of the cabinet body 230 so that the front-stage pipeline 210 is located outside the cabinet body.

[0057] Specifically, Figure 5 and Figure 6 As shown, the preset gas source flowing into the vacuum pump 260 enters the reaction chamber 250 through the front-stage pipeline 210, the bellows 220 and the inlet pipeline 240 in sequence. The preset gas undergoes related chemical reactions in the reaction chamber 250, and the target gas is obtained after removing a certain specific gas. The target gas flows into the vacuum pump 260.

[0058] The gas delivery device of the disclosed embodiment realizes the connection between the front-stage pipeline and the bellows through the connection structure, and also fixes the front-stage pipeline to the outside of the cabinet. In this way, when maintenance is needed, the operator can disassemble the front-stage pipeline and the bellows from the outside of the cabinet of the gas reduction equipment without opening the side door and the front and rear doors, and complete the maintenance of the bellows and its seals; the gas reduction equipment does not need to open the door for maintenance, the operation is simple, the risk of damage to gas parts is reduced, the efficiency of maintenance and repair is improved, and the maintenance time is saved.

[0059] For example, Figure 5 and Figure 6 As shown, the gas delivery device further includes a plurality of first fasteners 271 and a plurality of second fasteners 272 .

[0060] The first fastener 271 is inserted from the end of the front-stage pipeline 210 into the first mounting hole 111a corresponding thereto, so as to fix the connection structure 100 to the bellows 220. Specifically, the first fastener 271 is inserted into the first mounting hole 111a of the connection structure 100 and the mounting hole of the flange at the top of the bellows 220 in sequence from top to bottom, so as to fix the connection structure 100 to the bellows 220.

[0061] The second fastener 272 is inserted from the end of the fore-stage pipeline 210 into the second mounting hole 111b corresponding thereto, so as to connect the fore-stage pipeline 210 to the connection structure 100. Specifically, the second fastener 272 is inserted into the mounting hole of the flat-bottom caliper 211 of the fore-stage pipeline 210 and the second mounting hole 111b of the connection structure 100 in sequence from top to bottom, so as to connect the fore-stage pipeline 210 to the connection structure 100 through the flat-bottom caliper 211.

[0062] For example, Figure 5 and Figure 6 As shown, the gas delivery device further includes a plurality of third fasteners 273 .

[0063] The third fastener 273 is inserted into the third mounting hole 112a corresponding to the front-stage pipeline 210 end to fix the connection structure 100 to the outer wall of the cabinet 230. Specifically, the third fastener 273 is inserted into the third mounting hole 112a of the connection structure 100 and the mounting hole of the top wall of the cabinet 230 in sequence from top to bottom to fix the disk body 110 of the connection structure 100 to the outer side of the cabinet 230.

[0064] In this embodiment, the first fastener 271, the second fastener 272 and the third fastener 273 are all inserted into the corresponding mounting holes along the end of the front-stage pipeline 210. The front-stage pipeline 210 and the bellows 220 can be disassembled on the outside of the cabinet 230 by disassembling the first fastener 271, the second fastener 273, which is simple to operate and saves time.

[0065] It should be noted that, in this embodiment, the number of the first fasteners 271, the second fasteners 272 and the third fasteners 273 is not specifically limited and can be selected according to actual needs. For example, it can be 4 in this embodiment, or 6, 8, etc.

[0066] For example, in this embodiment, the first fastener 271, the second fastener 272 and the third fastener 273 are all bolts, namely the first bolt, the second bolt and the third bolt. Accordingly, in this embodiment, the first mounting hole 111a and the third mounting hole 112a are set as bolt holes, and the second mounting hole 111b is a threaded hole. The method of connecting the fasteners with the mounting holes makes it easier to disassemble the front-stage pipeline 210 and the bellows 220.

[0067] like Figure 6 As shown, another aspect of the embodiment of the present disclosure provides a gas abatement system, including a cabinet 230, a gate valve 280, a gas delivery device, a reaction chamber 250 and a vacuum pump 260, wherein the gas delivery device adopts the gas delivery device described above. The specific structure of the gas delivery device has been described in detail above and will not be repeated here.

[0068] The first end of the gate valve 280 is used to communicate with a preset gas source, and the second end of the gate valve 280 is connected to the second end of the front-stage pipeline 210 .

[0069] The second end of the inlet pipe 240 is connected to the gas inlet of the reaction chamber 250, and the gas outlet of the reaction chamber 250 is connected to the vacuum pump 260. Specifically, the gas outlet of the reaction chamber 250 is connected to the vacuum pump through the connecting bellows 290.

[0070] The gate valve 280 , the front-stage pipeline 210 and the connection structure 100 are located outside the cabinet 230 , and the bellows 220 , the inlet pipeline 240 , the reaction chamber 250 and the vacuum pump 260 are located inside the cabinet 230 .

[0071] For example, Figure 7As shown, the top wall of the cabinet 230 is provided with a mounting hole 231, and the diameter of the mounting hole 231 is larger than the diameter of the bellows 220. When disassembling the bellows 220 and the inlet pipe 240, it is necessary to disassemble the bellows 220 and the inlet pipe 240 by entering the mounting hole 231, and take out the bellows 220 from the mounting hole 231, and perform corresponding maintenance on the bellows 220.

[0072] It should be noted that the shape of the flange at one end of the bellows 220 facing the connection structure 100 matches the shape of the mounting hole 231 , so that the bellows 220 can be taken out from the mounting hole 231 .

[0073] Specifically, Figures 3 to 7 As shown, the reaction chamber 250 includes a reaction chamber body 251 and a gas inlet 252, an ion injection port 253 and a monitoring port 254. The reaction chamber 250 provides a chamber. The gas coming from the direction of the gate valve 280 is the client's gas. It passes through the front-stage pipeline 210, the connecting structure 100, the bellows 220 and the inlet pipeline 240 to enter the gas inlet 252 of the reaction chamber 250 and arrive at the reaction chamber body 251. The ion injection port 253 is used to inject certain ions, which also arrive at the reaction chamber 251 and mix with the gas coming from the direction of the gate valve 280 described above to produce related chemical reactions. As the vacuum pump 260 works, the gas will be sucked into the vacuum pump 260 and discharged after being compressed by the vacuum pump 260.

[0074] The connecting bellows 290 is installed between the vacuum pump 260 and the reaction chamber 250. The vacuum pump 260 will vibrate when working, and the connecting bellows 290 mainly plays the role of connection and vibration absorption.

[0075] The inlet pipeline 240 is connected to the reaction chamber 250 and the bellows 220 . There is a gas injection hole 241 on the inlet pipeline 240 . High-purity nitrogen is injected into the gas injection hole 241 to purge the inlet pipeline 240 , the reaction chamber 250 , the connecting bellows 290 and the vacuum pump 260 .

[0076] The bellows 220 is connected to the inlet pipe 240 and the connection structure 100, and plays the role of connection and vibration absorption.

[0077] If you want to remove the bellows 220, you need to remove the gate valve 280 → the front-stage pipeline 210 → the connection structure 100 → the bellows 220 from the outside of the cabinet 230. When removing the front-stage pipeline 210 and the connection structure 100, remove the second bolt to remove the flat-bottomed caliper on the front-stage pipeline 210 to separate the front-stage pipeline 210 and the connection structure 100; remove the first bolt to separate the connection structure 100 and the bellows 220, but the connection structure 100 and the bellows 220 cannot be removed at this time, and the third bolt needs to be removed to separate the connection structure 100 and the cabinet 230. Through the mounting hole 231 on the cabinet 230, remove the flat-bottomed caliper at the bottom of the bellows 220 to separate the bellows 220 and the inlet pipeline 240, and then the bellows 220 can be replaced and maintained.

[0078] When the gas reduction system of the disclosed embodiment needs maintenance, the operator can disassemble the front-stage pipeline and the bellows from the outside of the cabinet in the gas reduction system without opening the side door and the front and rear doors, and complete the maintenance of the bellows and its seals; the gas reduction equipment does not need to be opened for maintenance, the operation is simple, the risk of damage to gas components is reduced, the efficiency of maintenance and repair is improved, and maintenance time is saved.

[0079] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the embodiments of the present disclosure, but the embodiments of the present disclosure are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present disclosure, and these modifications and improvements are also considered to be within the protection scope of the embodiments of the present disclosure.

Claims

1. A connection structure for a gas abatement system, characterized in that: The connection structure includes a disc body and a communication hole located in the central area of ​​the disc body, and the disc body includes a connection part close to the communication hole and a fixing part far away from the communication hole; The connecting portion is used to connect the front-stage pipeline with the bellows so that the front-stage pipeline is communicated with the bellows; The fixing portion is used to fix the disk body to the outer side wall of the cabinet body, so that the front-stage pipeline is located outside the cabinet body.

2. The connection structure according to claim 1, characterized in that: The connecting portion is provided with a plurality of first mounting holes and a plurality of second mounting holes which are staggered and distributed along the circumference of the connecting hole; The fixing portion is provided with a plurality of third mounting holes.

3. The connection structure according to claim 2, characterized in that: The first mounting hole and the third mounting hole are both bolt holes, and the second mounting hole is a threaded hole.

4. The connection structure according to claim 3, characterized in that: The first mounting hole is a stepped hole, and the third mounting hole is a light hole.

5. A gas delivery device for a gas abatement system, characterized in that: The gas delivery device comprises a front-stage pipeline, a connection structure, a bellows and an inlet pipeline, wherein the connection structure adopts the connection structure according to any one of claims 1 to 4; The first end of the front-stage pipeline is connected to the first end of the bellows through the connecting portion of the connecting structure, and the second end of the front-stage pipeline is used to communicate with a preset gas source; The second end of the bellows is connected to the first end of the inlet pipeline, and the second end of the inlet pipeline is used to connect to the reaction chamber; wherein, The fixing portion of the connection structure is used to fix the disk to the outer side wall of the cabinet, so that the front-stage pipeline is located outside the cabinet.

6. The gas delivery device according to claim 5, characterized in that: Also included are a plurality of first fasteners and a plurality of second fasteners; The first fastener is inserted from the front-stage pipeline end into the first mounting hole corresponding thereto, so as to fix the connection structure to the corrugated pipe; The second fastener is inserted into a second mounting hole corresponding to the front-stage pipeline end to connect the front-stage pipeline to the connection structure.

7. The gas delivery device according to claim 6, characterized in that: Also included are a plurality of third fasteners; The third fastener is inserted into the third mounting hole corresponding to the front-stage pipeline end to fix the connection structure to the outer side wall of the cabinet.

8. The gas delivery device according to claim 7, characterized in that: The first fastener, the second fastener and the third fastener are all bolts.

9. A gas abatement system, characterized in that: It comprises a cabinet, a gate valve, a gas delivery device, a reaction chamber and a vacuum pump, wherein the gas delivery device is the gas delivery device according to any one of claims 5 to 8; wherein, The first end of the gate valve is used to communicate with a preset gas source, and the second end of the gate valve is connected to the second end of the front-stage pipeline; The second end of the inlet pipeline is connected to the gas inlet of the reaction chamber, and the gas outlet of the reaction chamber is connected to the vacuum pump; wherein, The gate valve, the front-stage pipeline and the connecting structure are located outside the cabinet, and the bellows, the inlet pipeline, the reaction chamber and the vacuum pump are located inside the cabinet.

10. The gas abatement system of claim 9, wherein: The top wall of the cabinet is provided with a mounting hole, and the diameter of the mounting hole is larger than the diameter of the corrugated pipe.

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