Composite flange structure and furnace tube equipment

Abstract

The utility model relates to the field of semiconductor preparation technology, in particular to a composite flange structure and furnace tube equipment. A first air inlet pipe opening of a first flange in the composite flange structure is communicated with the interior of the furnace tube cavity through a first air inlet pipeline; a second air inlet pipe opening of the second flange is communicated with the interior of the furnace tube cavity through a second air inlet pipeline; an annular air inlet structure is arranged on the inner circumference of the third flange; the third air inlet pipe opening is communicated with the interior of the furnace tube cavity through the annular air inlet structure; the flanges are detachably connected through fastening assemblies. And the gas inlet angle relative to the furnace tube equipment is adjusted by rotating the first flange, the second flange or the third flange. In this way, the air inlet angle can be adjusted at will in a repeated disassembly and assembly mode, the customization cost is greatly reduced, the experiment optimization period is greatly shortened, and the research and development efficiency is improved; reaction gas enters the furnace tube cavity through the annular gas inlet structure of the third flange, accumulation of by-products on the inner walls of the flanges can be reduced, and generation of particles is reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor preparation technology, in particular to a composite flange structure and furnace tube equipment. Background Art

[0002] Furnace tube equipment is widely used in semiconductor processes due to its high efficiency. In the process of factory production optimization and R&D, for different processes, in order to study the reasonable distribution of various gases in the cavity, engineering and technical personnel need to adjust the air intake angle of the furnace tube equipment to achieve the effect of optimizing process capabilities. In order to design the best air intake angle, the airflow model is usually simulated by software, and furnace tube structures of various layouts are processed multiple times. By testing the processed wafer film quality data, it is judged whether there is still room for optimization in the furnace tube cavity design during the R&D process. Due to the more stringent requirements on the rationality of gas distribution in advanced processes, a complete process may require the processing of multiple furnace tube structures, and it is still difficult to design the optimal gas effect field distribution, resulting in a great waste of manpower, material resources and time in the R&D process. In addition, the inner wall of the flange body is prone to the accumulation of particles and by-products, which affects the process effect. Utility Model Content

[0003] In order to solve the technical problems of low efficiency, high cost, long cycle in adjusting the air intake angle of furnace tube equipment and accumulation of by-products on the flange body in the above-mentioned prior art during equipment research and development and process optimization, the utility model discloses a composite flange structure and furnace tube equipment.

[0004] On the one hand, the utility model discloses a composite flange structure, which is applied to furnace tube equipment, and includes a first flange, a second flange, and a third flange;

[0005] The first flange has a first air inlet opening; the first air inlet opening is connected to the interior of the furnace tube cavity through a first air inlet pipeline; the first flange is circumferentially connected to the port edge of the furnace tube cavity;

[0006] The second flange has a second air inlet opening; the second air inlet opening is connected to the interior of the furnace tube cavity through a second air inlet pipeline;

[0007] An annular air intake structure is provided on the inner periphery of the third flange; the annular air intake structure is connected to the third air intake pipe opening; the third air intake pipe opening is connected to the interior of the furnace tube cavity through the annular air intake structure; the third flange is fastened to the base of the furnace tube equipment;

[0008] The first flange and the second flange, as well as the second flange and the third flange are detachably connected via a fastening assembly; the air intake angle relative to the furnace tube device is adjusted by rotating the first flange, the second flange or the third flange.

[0009] Furthermore, the outer circumferences of the first flange, the second flange and the third flange are all provided with rotation scales of preset accuracy.

[0010] Furthermore, the annular air intake structure includes an annular chamber; the annular chamber is provided with a plurality of through holes, so that the gas in the annular chamber enters into the interior of the furnace tube cavity through the plurality of through holes.

[0011] Furthermore, the annular chamber is arranged on the inner circumference of the third flange; the longitudinal cross-sectional side length of the annular chamber is 4 to 6 mm; and the longitudinal cross-sectional area of ​​the annular chamber is smaller than the longitudinal cross-sectional area of ​​the third flange.

[0012] Furthermore, the plurality of through holes are evenly distributed on the inner side of the annular chamber; and the plurality of through holes are oriented in a horizontal direction.

[0013] Furthermore, the first port of the second flange and the first port of the third flange are both provided with a step groove.

[0014] Furthermore, the first port of the first flange is closed and connected to the open end of the furnace tube cavity; and an annular protrusion structure is provided at the second port of the first flange and the second port of the second flange.

[0015] Furthermore, the annular protrusion structure of the first flange matches with the step groove of the second flange and is fixedly connected by the fastening assembly;

[0016] The annular protrusion structure of the second flange matches with the step groove of the third flange and is fixedly connected by the fastening assembly.

[0017] Further, the fastening assembly includes a fastening screw, a first buckle and a second buckle;

[0018] The first buckle is movably mounted on the annular protrusion structure of the first flange and the second flange;

[0019] The second buckle is movably mounted on the step grooves of the second flange and the third flange;

[0020] The fastening screw is inserted through the first buckle and the second buckle.

[0021] Furthermore, the step grooves of the second flange and the third flange are both sleeved with sealing rings.

[0022] On the other hand, the utility model provides a furnace tube device, including the composite flange structure as described above.

[0023] Furthermore, the furnace tube cavity of the furnace tube equipment is provided with an exhaust pipe opening at a preset position.

[0024] By adopting the above technical solution, the splash-proof device provided by the utility model has the following beneficial effects:

[0025] The utility model decomposes the traditional single flange into a multi-layer composite flange, which are respectively a first flange, a second flange, and a third flange. The multi-layer composite flange is detachably connected by a fastening assembly. When the position of the air duct or the air intake angle needs to be adjusted, the air intake port that needs to be adjusted can be determined first, and then the flange corresponding to the air intake port can be determined, the fastening assembly of the fixed flange can be removed, and then the flange can be rotated to adjust the angle of its air intake port. In this way, the air intake angle relative to the furnace tube equipment can be adjusted. After the adjustment is completed, the fastening assembly can be installed to achieve the sealing of the furnace tube equipment. The composite flange structure provided by the embodiment of the utility model is customized once in this way, and the air intake angle can be adjusted arbitrarily by repeated disassembly and assembly, which greatly reduces the customization cost and experimental optimization cycle, and improves the R&D efficiency.

[0026] In addition, the third flange is provided with an annular air intake structure, and the reaction gas enters the furnace tube cavity through the annular air intake structure, which reduces the residence of the reaction gas at the flange position, can reduce the accumulation of by-products on the inner wall of the flange, reduce particle generation, and extend the maintenance cycle. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 It is a schematic diagram of a furnace tube device in the prior art;

[0029] FIG2 is a schematic diagram of flange interfaces with various air intake angles in the prior art;

[0030] Figure 3 This is a schematic diagram of a composite flange structure provided by an embodiment of the utility model;

[0031] Figure 4 It is a schematic cross-sectional view of a composite flange structure connection provided by an embodiment of the utility model.

[0032] The following is a supplementary description of the attached drawings:

[0033] 1. First flange; 11. First air inlet opening; 12. First air inlet pipeline; 2. Second flange; 21. Second air inlet opening; 22. Second air inlet pipeline; 3. Third flange; 31. Third air inlet opening; 32. Annular chamber; 33. Through hole; 4. Furnace tube cavity; 5. Fastening assembly; 51. Fastening screw; 52. First buckle; 53. Second buckle; 6. Sealing ring; 7. Exhaust pipe opening. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present invention. In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are used only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. Moreover, the terms "first", "second", etc. are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here.

[0036] Since furnace tube equipment can process dozens or even hundreds of silicon wafers at a time, its high efficiency is widely recognized, so furnace tube equipment is widely used in semiconductor processes. Figure 1, which shows a common furnace tube device in the prior art, which is provided with a flange, the flange is provided with an air inlet, and the furnace tube cavity is provided with an exhaust port. The bottom-pressure furnace tube is generally a device that deposits a certain film thickness by a reaction of multiple gases on the surface of the silicon wafer. The furnace tube equipment used in advanced processes uses more and more gas guide tubes. The reaction gas enters the furnace tube cavity through the flange air inlet interface and the air guide tube nozzle. During the research and development process, the position, air intake angle, and exhaust angle of the air guide tube have a great influence on the entire process. In order to make the gas distribution in the furnace tube equipment cavity more and more conducive to the process, the adjustment of the air intake angle of the air guide tube becomes a necessary task.

[0037] In order to study the reasonable distribution of various gases in the cavity for different processes, a large number of air intake structures are usually designed to verify the influence of the air intake angle on the air flow field in the cavity and the influence on the process indicators. The common technical means at present is to simulate the air flow model through software and adjust the air intake angle of the air guide pipe multiple times. Therefore, it is necessary to customize flange interfaces with different air intake angles, such as reference Figure 2a , 2b 2c shows flange interfaces with various air inlet angles. By testing the processed wafer film quality data, it is determined whether there is still room for optimization in the furnace tube cavity design during the R&D process. Advanced processes have stricter requirements on the rationality of gas distribution. The R&D process of a prototype may require the processing of multiple furnace tube cavities, and it is still difficult to design the optimal gas effect field distribution, resulting in a huge waste of manpower, material resources, and time during the R&D process. In addition, the inner wall of the flange body is prone to the accumulation of particles and by-products, which affects the process effect.

[0038] In order to achieve arbitrary adjustment of the air intake angle of the furnace tube equipment and shorten the cycle of process optimization and equipment research and development, the utility model provides a composite flange structure and furnace tube equipment to better adapt to production needs, improve the process stability and production efficiency of the furnace tube equipment, and reduce the accumulation of by-products on the flange body.

[0039] refer to Figure 1, which is a structural schematic diagram of the composite flange structure of the utility model, comprising a first flange 1, a second flange 2, and a third flange 3; the first flange 1 has a first air inlet pipe opening 11; the first air inlet pipe opening 11 is connected to the interior of the furnace tube cavity 4 through a first air inlet pipeline 12; the first flange 1 is circumferentially connected to the port edge of the furnace tube cavity 4; the second flange 2 has a second air inlet pipe opening 21; the second air inlet pipe opening 21 is connected to the interior of the furnace tube cavity 4 through a second air inlet pipeline 22; an annular air inlet structure is provided on the inner periphery of the third flange 3; the annular air inlet structure is connected to the third air inlet pipe opening 31; the third air inlet pipe opening 31 is connected to the interior of the furnace tube cavity 4 through the annular air inlet structure; the third flange 3 is fastened to the base of the furnace tube device; the first flange 1 and the second flange 2, and the second flange 2 and the third flange 3 are detachably connected through a fastening assembly 5; the air inlet angle relative to the furnace tube device is adjusted by rotating the first flange 1, the second flange 2 or the third flange 3.

[0040] Specifically, in the embodiment of the utility model, the traditional single flange is decomposed into a multi-layer composite flange, including a first flange 1, a second flange 2, and a third flange 3. The first flange 1 is directly connected to the furnace tube cavity 4, and a first air inlet pipe opening 11 is provided on the side wall of the first flange 1, and the position of the first air inlet pipe opening 11 is not limited. The furnace tube equipment is provided with two air inlet pipelines, namely a first air inlet pipeline 12 and a second air inlet pipeline 22. The first air inlet pipe opening 11 is connected to one end of the first air inlet pipeline 12, and the other end of the first air inlet pipeline 12 leads to the interior of the furnace tube cavity 4, so the first air inlet pipe opening 11 is connected to the interior of the furnace tube cavity 4 through the first air inlet pipe opening 12, and the reaction gas can enter the furnace tube cavity 4 through the first air inlet pipe opening 11 to the first air inlet pipeline 12.

[0041] The first flange 1 is circumferentially connected to the port edge of the furnace tube cavity 4. For example, the connection between the first flange 1 and the furnace tube cavity 4 can be a detachable connection. In some embodiments, the portion of the first flange 1 that contacts the port edge of the furnace tube cavity 4 is provided with at least one mounting hole, and the port edge of the furnace tube cavity 4 is also provided with a screw hole that matches the mounting hole. The first flange 1 circumferentially surrounds the port edge of the furnace tube cavity 4, and the first flange 1 is fixedly connected to the port edge of the furnace tube cavity 4 by fastening screws that penetrate the mounting holes and the screw holes. In other embodiments, the inner circumference of the first flange 1 has a slot for accommodating the furnace tube cavity 4, and the port edge of the furnace tube cavity 4 is snapped into the slot of the first flange 1 and pressed by external force, so that the first flange 1 is fixedly connected to the port edge of the furnace tube cavity 4.

[0042] The second flange 2 is detachably connected to the first flange 1 through a fastening assembly 5, and a second air inlet port 21 is provided on the side wall of the second flange 2, and the position of the second air inlet port 21 is not limited. The second air inlet port 21 is connected to one end of a second air inlet pipeline 22, and the other end of the second air inlet pipeline 22 leads to the inside of the furnace tube cavity 4, so the second air inlet port 21 is connected to the inside of the furnace tube cavity 4 through the second air inlet pipeline 22, and the reaction gas can enter the furnace tube cavity 4 through the second air inlet port 21 to the second air inlet pipeline 22.

[0043] The inner diameters of the first air intake pipe 12 and the second air intake pipe 22 can be set according to actual needs. For example, in one exemplary embodiment, the inner diameters of the first air intake pipe 12 and the second air intake pipe 22 are set to one-half inch. In another exemplary embodiment, the inner diameters of the first air intake pipe 12 and the second air intake pipe 22 are set to three-eighths of an inch.

[0044] The third flange 3 and the second flange 2 are also detachably connected via the fastening assembly 5; an annular air intake structure is provided on the inner periphery of the third flange 3; a third air intake pipeline is provided on the outer wall of the third flange 3; the annular air intake structure is connected to the third air intake pipeline; the third air intake pipeline is connected to the inside of the furnace tube cavity 4 via the annular air intake structure; the reaction gas can enter the furnace tube cavity 4 via the third air intake pipe opening 31 to the annular air intake structure.

[0045] In a possible implementation, the annular air intake structure includes an annular chamber 32 ; the annular chamber 32 is provided with a plurality of through holes 33 , so that the gas in the annular chamber 32 enters the furnace tube cavity 4 through the plurality of through holes 33 .

[0046] Specifically, the annular chamber 32 is connected to the third air inlet pipeline. A plurality of through holes 33 are provided on the inner side of the annular chamber 32. The third air inlet pipeline is connected to the interior of the furnace tube cavity 4 through the annular chamber 32 and the through holes 33. The reaction gas can reach the annular chamber 32 through the third air inlet pipe port 31. After the reaction gas is redistributed in the annular cavity, it is diffused into the furnace tube cavity 4 through the through holes 33 based on the external air pressure difference and the negative pressure generated by the gas reaction inside the furnace tube wall. In this way, the reaction gas can be carried into the upper cavity, reducing the residence of the reaction gas in the flange part, so as to reduce the accumulation of by-products in the flange body and reduce the generation of reaction particles.

[0047] In a possible implementation, the annular chamber 32 is disposed on the inner circumference of the third flange 3 ; the longitudinal cross-sectional side length of the annular chamber 32 is 4 to 6 mm; and the longitudinal cross-sectional area of ​​the annular chamber 32 is smaller than the longitudinal cross-sectional area of ​​the third flange 3 .

[0048] Specifically, the annular chamber 32 surrounds the inner circumference of the third flange 3, and the longitudinal section length of the annular chamber 32 is smaller than the longitudinal section length of the third flange 3. Further, the longitudinal cross-sectional area of ​​the annular chamber 32 is smaller than the longitudinal cross-sectional area of ​​the third flange 3. In the embodiment of the utility model, the longitudinal cross-sectional side length of the annular chamber 32 is 4 to 6 mm; for example, in one embodiment, the longitudinal cross-sectional side length of the annular chamber 32 is 4 mm, and in another embodiment, the longitudinal cross-sectional side length of the annular chamber 32 is 6 mm.

[0049] In a possible implementation, the plurality of through holes 33 are evenly distributed on the inner side of the annular chamber 32 ; the plurality of through holes 33 are oriented in a horizontal direction.

[0050] Specifically, a plurality of through holes 33 are evenly formed inside the annular chamber 32, and each through hole 33 is oriented horizontally, that is, toward the inside of the third flange 3, so that the reaction gas flows from the third air inlet 31 to the annular chamber 32, and then diffuses horizontally from the through holes 33 from bottom to top into the furnace tube cavity 4. In this way, the accumulation of by-products on the inner wall of the flange can be reduced, the generation of particles can be reduced, and the maintenance cycle can be extended.

[0051] The third flange 3 is fastened to the base of the furnace tube equipment. For example, the third flange 3 is circumferentially provided with at least one mounting hole, and the base is provided with a screw hole matching the mounting hole of the third flange. A connecting ear is fitted to the mounting hole of the third flange 3 and the screw hole on the base, and then a fastening screw is passed through the connecting ear and the mounting hole, and the connecting ear and the screw hole, so as to realize the fastening connection between the third flange 3 and the base of the furnace tube equipment.

[0052] The first flange 1 and the second flange 2, as well as the second flange 2 and the third flange 3 are detachably connected via a fastening assembly 5; the air intake angle relative to the furnace tube device is adjusted by rotating the first flange 1, the second flange 2 or the third flange 3.

[0053] Specifically, the utility model decomposes the traditional single flange into a multi-layer composite flange. When the position of the air duct or the air intake angle needs to be adjusted, the air intake pipe opening that needs to be adjusted can be determined first, and then the flange corresponding to the air intake pipe opening can be determined, the fastening assembly 5 of the fixed flange can be removed, and then the flange can be rotated to adjust the angle of its air intake pipe opening.

[0054] Thus, the air intake angle relative to the furnace tube device is adjusted, and after the adjustment is completed, the fastening assembly 5 is installed to achieve the sealing of the furnace tube device. In this way, the composite flange structure provided by the embodiment of the utility model is customized once, and the air intake angle can be adjusted arbitrarily by repeated disassembly and assembly, which greatly reduces the customization cost and experimental optimization cycle, and improves the research and development efficiency.

[0055] The materials of the first flange 1, the second flange 2 and the third flange 3 include but are not limited to carbon steel, stainless steel, alloy steel, etc. For example, the materials of the first flange 1, the second flange 2 and the third flange 3 are alloy steel, which has the characteristics of high temperature and high pressure resistance and corrosion resistance, and can cope with the complex gas reaction in the furnace tube equipment. In a possible embodiment, the outer circumference of the first flange 1, the second flange 2 or the third flange 3 is provided with a rotation scale of preset accuracy.

[0056] Specifically, the outer circumferences of the first flange 1, the second flange 2 and the third flange 3 are marked with rotation scales of preset accuracy. The preset accuracy can be centimeters, millimeters, etc., which can be determined according to actual needs. In the embodiment of the utility model, a scale is marked 360 degrees on the outer circumferences of the first flange 1, the second flange 2 and the third flange 3. When the corresponding flange is rotated, the relative change of the rotation scale can be read to achieve measurement and recording of any rotation angle.

[0057] For example, in the initial position, the rotation scales of the first flange 1, the second flange 2 and the third flange 3 are aligned at zero degrees. If the air intake angle of the first air intake pipe opening 11 needs to be adjusted, the fastening assembly 5 between the first flange 1 and the second flange 2 is removed, and then the first flange 1 is rotated to the required position, and the scale change of the first flange 1 relative to the initial position is read and recorded; if the air intake angle of the second air intake pipe opening 21 needs to be adjusted, the fastening assembly 5 between the first flange 1 and the second flange 2 and between the second flange 2 and the third flange 3 is removed, and then the second flange 2 is rotated to the required position, and the scale change of the second flange 2 relative to the initial position is read and recorded, and so on.

[0058] In this way, each time the flange is adjusted, the adjustment angle can be recorded digitally, which is convenient for the process optimization process. The intake angle data of each intake pipeline can be recorded digitally, so as to compare the optimal intake angle.

[0059] Next, the connection between the first flange 1, the second flange 2 and the third flange 3 is introduced. In a possible embodiment, the first port of the second flange 2 and the first port of the third flange 3 are both provided with a step groove. Furthermore, the first port of the first flange 1 is closed and connected to the open end of the furnace tube cavity 4; the second port of the first flange 1 and the second port of the second flange 2 are provided with an annular protrusion structure. In a possible embodiment, the annular protrusion structure of the first flange 1 cooperates with the step groove of the second flange 2 and is fixedly connected by a fastening assembly 5; the annular protrusion structure of the second flange 2 cooperates with the step groove of the third flange 3 and is fixedly connected by a fastening assembly 5.

[0060] Specifically, starting from the furnace tube cavity 4, from top to bottom are the first flange 1, the second flange 2 and the third flange 3, the first flange 1, the second flange 2 and the third flange 3 all have a first port and a second port, the first port of the first flange 1 is closed and connected to the open end of the furnace tube cavity 4, the second port of the first flange 1 is connected to the first port of the second flange 2 through a fastening assembly 5, the second port of the second flange 2 is connected to the first port of the third flange 3 through the fastening assembly 5, and the second port of the third flange 3 is connected to other external equipment.

[0061] The first port ring of the second flange 2 is provided with a step groove, and the step groove has a first step. The plane of the first step is lower than the plane where the first port of the second flange 2 is located. The outer diameter of the first step is larger than the diameter of the first port of the second flange 2. The first step is used to support the second port of the first flange 1, and the first step leaves an installation space for installing the fastening component 5 to achieve a sealed connection with the first flange 1.

[0062] The first port of the third flange 3 is provided with a step groove toward the outer ring, and the step groove also has a first step. The plane of the first step is lower than the plane where the first port of the third flange 3 is located. The outer diameter of the first step is larger than the diameter of the first port of the third flange 3. The first step is used to support the second port of the second flange 2, and the first step leaves an installation space for installing the fastening component 5 to achieve a sealed connection with the second flange 2.

[0063] The second port of the first flange 1 is provided with an annular protrusion structure outward, and the outer diameter of the annular protrusion structure is larger than the diameter of the second port of the first flange 1. In some embodiments, the outer diameter of the annular protrusion structure is consistent with the outer diameter of the first step of the step groove of the second flange 2. In addition, the diameter of the first port of the second flange 2 is smaller than the diameter of the second port of the first flange 1, so that the first port of the second flange 2 can be sleeved on the second port of the first flange 1, and the annular protrusion structure of the first flange 1 falls on the plane where the first step of the step groove of the second flange 2 is located. The fastening assembly 5 fastens the annular protrusion structure of the first flange 1 and the first step of the step groove of the second flange 2, so that the first flange 1 and the second flange 2 can be sealed. Connection.

[0064] The second port of the second flange 2 is also provided with an annular protrusion structure outward, and the outer diameter of the annular protrusion structure is larger than the diameter of the second port of the second flange 2. In some embodiments, the outer diameter of the annular protrusion structure is consistent with the outer diameter of the first step of the step groove of the third flange 3. In addition, the diameter of the first port of the third flange 3 is smaller than the diameter of the second port of the second flange 2, so that the first port of the third flange 3 can be sleeved on the second port of the second flange 2, and the annular protrusion structure of the second flange 2 falls on the plane where the first step of the step groove of the third flange 3 is located. The fastening assembly 5 fastens the annular protrusion structure of the second flange 2 and the first step of the step groove of the third flange 3, so that the second flange 2 and the third flange 3 can be sealed. Connection.

[0065] In a possible embodiment, the fastening assembly 5 includes a fastening screw 51, a first clip 52 and a second clip 53; the first clip 52 can be movably installed on the annular protrusion structure of the first flange 1 and the second flange 2; the second clip 53 can be movably installed on the step groove of the second flange 2 and the third flange 3; the fastening screw 51 is passed through the first clip 52 and the second clip 53.

[0066] Specifically, as can be seen from the above, the annular protrusion structure of the first flange 1 cooperates with the step groove of the second flange 2 and is fixedly connected by the fastening assembly 5; the annular protrusion structure of the second flange 2 cooperates with the step groove of the third flange 3 and is fixedly connected by the fastening assembly 5. In the embodiment of the utility model, the fastening assembly 5 includes a fastening screw 51, a first clip 52 and a second clip 53. The first clip 52 and the second clip 53 have a clip portion and a mounting portion. For the installation between the first flange 1 and the second flange 2, the clip portion of the first clip 52 is clipped to the annular protrusion structure of the first flange 1, and the position of the first clip 52 is adjustable, that is, it can be installed at any position of the annular protrusion structure of the first flange 1; the mounting portion of the first clip 52 is provided with a screw hole; the clip portion of the second clip 53 is clipped to the first step of the step groove of the second flange 2, and the position of the second clip 53 is adjustable, that is, it can be installed at any position of the step groove of the second flange 2, the second clip 53 cooperates with the position of the first clip 52, and the mounting portion of the second clip 53 is provided with a screw hole, the fastening screw 51 is passed through the screw hole of the first clip 52 and the screw hole of the second clip 53, so as to realize the sealed connection between the first flange 1 and the second flange 2. When the first flange 1 or the second flange 2 needs to be adjusted, the fastening screws 51 are removed to release the sealing connection between the first flange 1 and the second flange 2 .

[0067] For the installation between the second flange 2 and the third flange 3, the snap part of the first snap 52 is snapped on the annular protrusion structure of the second flange 2, and the position of the first snap 52 is adjustable, so that it can be installed at any position of the annular protrusion structure of the second flange 2; the mounting part of the first snap 52 is provided with a screw hole; the snap part of the second snap 53 is snapped on the first step of the step groove of the third flange 3, and the position of the second snap 53 is adjustable, so that it can be installed at any position of the step groove of the third flange 3, the second snap 53 matches the position of the first snap 52, and the mounting part of the second snap 53 is provided with a screw hole, and the fastening screw 51 is passed through the screw hole of the first snap 52 and the screw hole of the second snap 53 to realize the sealing connection between the second flange 2 and the third flange 3. When the second flange 2 or the third flange 3 needs to be adjusted, the fastening screw 51 is removed to release the sealing connection between the second flange 2 and the third flange 3.

[0068] The longitudinal cross-sectional diagram after the first flange 1, the second flange 2 and the third flange 3 are connected can be referred to Figure 4 shown.

[0069] The number of groups of the fastening components 5 can be determined according to actual needs. For example, in one embodiment, two groups of sealing components are provided, and in another embodiment, three groups of sealing components are provided, and the multiple groups of sealing components are equidistantly distributed.

[0070] In other possible implementations, at least one screw hole can be directly opened in the annular protrusion structure of the first flange 1 and the second flange 2, and at least one screw hole can be opened in the corresponding position of the step groove of the second flange 2 and the third flange 3. The fastening assembly 5 only includes a fastening screw 51, and the fastening screw 51 is inserted through the screw hole of the annular protrusion structure of the first flange 1 and the corresponding screw hole of the step groove of the second flange 2 to achieve a sealed connection between the first flange 1 and the second flange 2; the fastening screw 51 is inserted through the screw hole of the annular protrusion structure of the second flange 2 and the corresponding screw hole of the step groove of the third flange 3 to achieve a sealed connection between the second flange 2 and the third flange 3. The connection method between the first flange 1, the second flange 2 and the third flange 3 can be selected according to actual conditions. The utility model provides some connection methods by way of example, which are not limited here.

[0071] In a possible implementation manner, the step grooves of the second flange 2 and the third flange 3 are both sleeved with sealing rings 6 .

[0072] Specifically, the sealing ring 6 provided in the step groove of the second flange 2 is used to seal the connection between the first flange 1 and the second flange 2; the sealing ring 6 provided in the step groove of the third flange 3 is used to seal the connection between the second flange 2 and the third flange 3. The material of the sealing ring 6 can be rubber. For example, the material of the sealing ring 6 is fluororubber, which has the characteristics of high temperature and high pressure resistance and can ensure the sealing between the composite flange structures when the furnace tube equipment is working.

[0073] On the other hand, the utility model provides a furnace tube device, comprising the composite flange structure as described above. In a possible implementation, the furnace tube cavity 4 of the furnace tube device is provided with an exhaust pipe port 7 at a preset position.

[0074] Specifically, the exhaust pipe mouth 7 is used to discharge the waste gas, smoke, etc. generated in the furnace. The exhaust pipe mouth 7 is connected to one end of the exhaust pipe, and the other end of the exhaust pipe is connected to other equipment. The position design of the exhaust pipe mouth 7 needs to consider factors such as gas flow rate, pressure loss, temperature, and corrosiveness to ensure smooth gas discharge. For example, it is set in the middle and lower position of the furnace tube cavity 4. The connection between the exhaust pipe and other equipment should ensure sealing to prevent gas leakage.

[0075] The inner diameter of the exhaust pipe can be set according to actual needs. For example, in one exemplary embodiment, the inner diameter of the exhaust pipe is set to four inches, and in another exemplary embodiment, the inner diameter of the exhaust pipe is set to six inches.

[0076] Through the above implementation, the utility model decomposes the traditional single flange into a multi-layer composite flange, and the multi-layer composite flange is detachably connected through the fastening assembly 5. When the position of the air duct or the air intake angle needs to be adjusted, the air intake port that needs to be adjusted can be determined first, and then the flange corresponding to the air intake port can be determined, and the fastening assembly 5 of the fixed flange can be removed, and then the flange can be rotated to adjust the angle of its air intake port. In this way, the air intake angle relative to the furnace tube equipment can be adjusted. After the adjustment is completed, the fastening assembly 5 is installed to achieve the sealing of the furnace tube equipment. In this way, the composite flange structure provided by the embodiment of the utility model is customized once, and the air intake angle can be adjusted arbitrarily by repeated disassembly and assembly, which greatly reduces the customization cost and experimental optimization cycle, and improves the R&D efficiency.

[0077] In addition, the outer circumference of the first flange 1, the second flange 2 or the third flange 3 is provided with a rotation scale of preset accuracy. Each time the flange is adjusted, the adjustment angle can be recorded digitally, which is convenient for the process optimization process. The data of the air intake angle through each air intake pipeline is recorded digitally, so as to compare the optimal air intake angle. In addition, the third flange 3 is provided with an annular air intake structure, and the reaction gas enters the furnace tube cavity 4 through the annular air intake structure, which reduces the residence of the reaction gas at the flange part, can reduce the accumulation of by-products on the inner wall of the flange, reduce the generation of particles, and extend the maintenance cycle.

[0078] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A composite flange structure, applied to furnace tube equipment, characterized in that: It comprises a first flange (1), a second flange (2), and a third flange (3); The first flange (1) has a first air inlet opening (11); the first air inlet opening (11) is connected to the interior of the furnace tube cavity (4) through a first air inlet pipeline (12); the first flange (1) is circumferentially connected to the edge of the port of the furnace tube cavity (4); The second flange (2) has a second air inlet opening (21); the second air inlet opening (21) is connected to the interior of the furnace tube cavity (4) through a second air inlet pipeline (22); An annular air intake structure is provided on the inner periphery of the third flange (3); the annular air intake structure is connected to a third air intake pipe opening (31); the third air intake pipe opening (31) is communicated with the interior of the furnace tube cavity (4) through the annular air intake structure; the third flange (3) is firmly connected to the base of the furnace tube equipment; The first flange (1) and the second flange (2), as well as the second flange (2) and the third flange (3) are detachably connected via a fastening assembly (5); and the air intake angle relative to the furnace tube device is adjusted by rotating the first flange (1), the second flange (2) or the third flange (3).

2. The composite flange structure according to claim 1, characterized in that: The outer circumferences of the first flange (1), the second flange (2) and the third flange (3) are all provided with rotation scales of preset accuracy.

3. The composite flange structure according to claim 1, characterized in that: The annular air intake structure comprises an annular chamber (32); the annular chamber (32) is provided with a plurality of through holes (33), so that the gas in the annular chamber (32) enters the interior of the furnace tube cavity (4) through the plurality of through holes (33).

4. The composite flange structure according to claim 3, characterized in that: The annular chamber (32) is arranged on the inner circumference of the third flange (3); the longitudinal cross-sectional side length of the annular chamber (32) is 4 to 6 mm; the longitudinal cross-sectional area of ​​the annular chamber (32) is smaller than the longitudinal cross-sectional area of ​​the third flange (3).

5. The composite flange structure according to claim 3, characterized in that: The multiple through holes (33) are evenly distributed on the inner side of the annular chamber (32); the multiple through holes (33) are oriented in a horizontal direction.

6. The composite flange structure according to claim 1, characterized in that: The first port of the second flange (2) and the first port of the third flange (3) are both provided with a step groove.

7. The composite flange structure according to claim 6, characterized in that: The first port of the first flange (1) is closed and connected to the open end of the furnace tube cavity (4); and an annular protrusion structure is provided at the second port of the first flange (1) and the second port of the second flange (2).

8. The composite flange structure according to claim 7, characterized in that: The annular protruding structure of the first flange (1) matches the step groove of the second flange (2) and is fixedly connected via the fastening assembly (5); The annular protruding structure of the second flange (2) matches the step groove of the third flange (3) and is fixedly connected via the fastening assembly (5).

9. The composite flange structure according to claim 8, characterized in that: The fastening assembly (5) comprises a fastening screw (51), a first buckle (52) and a second buckle (53); The first buckle (52) is movably mounted on the annular protruding structure of the first flange (1) and the second flange (2); The second buckle (53) is movably mounted on the step grooves of the second flange (2) and the third flange (3); The fastening screw (51) is inserted through the first buckle (52) and the second buckle (53).

10. The composite flange structure according to claim 9, characterized in that: The step grooves of the second flange (2) and the third flange (3) are both sleeved with sealing rings (6).

11. A furnace tube device, characterized in that: Comprising the composite flange structure as described in any one of claims 1-10.

12. The furnace tube equipment according to claim 11, characterized in that: The furnace tube cavity (4) of the furnace tube equipment is provided with an exhaust pipe opening (7) at a preset position.

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