Light beam verticality detection device

Abstract

A light beam verticality detection device provided by the present application comprises a spectroscope assembly and a retroreflector assembly, the spectroscope assembly comprises a spectroscope base, a spectroscope protection member, a spectroscope and a focusing optical element, a first inclined surface of the spectroscope base is attached to a second inclined surface of the spectroscope protection member, and the spectroscope base and the spectroscope protection member are detachably connected. The spectroscope is arranged in a first mounting groove of the spectroscope base, and the focusing optical element is arranged on the spectroscope protection piece; the retroreflector assembly comprises a lens base, a reflector base, a lens and a reflector, the lens base is detachably connected with the reflector base and the spectroscope base, the lens is arranged on the lens base, and the reflector is arranged on the reflector base. According to the light beam perpendicularity detection device, all optical elements are fixed in a modularized mode, assembly and adjustment of the detection device are simplified, and operation simplicity and measurement consistency are improved; the optical elements are relatively fixed, so that the measurement precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser measurement, in particular to a light beam verticality detection device. Background Art

[0002] The beam verticality detection device is a precision instrument used to measure and ensure the verticality of the laser beam relative to the surface of the object being measured or a specific reference plane. This device is very important in situations where high-precision alignment is required, such as in laser interferometry, precision engineering, optical system calibration, semiconductor manufacturing, aerospace, and medical equipment calibration.

[0003] The beam verticality detection device in the prior art is usually composed of multiple independently arranged optical elements, each of which needs to be adjusted separately to achieve the orthogonality of the beam. The adjustment of independent optical elements requires extremely high precision, and any slight error may affect the overall measurement result, increasing the complexity of the operation; at the same time, in the process of adjusting the optical element, other optical elements may be accidentally touched, resulting in repeated adjustment of each optical element.

[0004] Therefore, in order to simplify the operation process and improve the measurement accuracy, the present application provides a light beam verticality detection device. Utility Model Content

[0005] In view of the problem that the operation of the beam verticality detection device in the prior art is complicated and the individual adjustment of each optical element may lead to a decrease in measurement accuracy, the present application provides a beam verticality detection device. The beam verticality detection device includes a detachably connected beam splitter assembly and a retroreflector assembly, the beam splitter assembly includes a detachably connected beam splitter base and a beam splitter protective member, the beam splitter is arranged on the beam splitter base, and the focusing optical element is arranged on the beam splitter protective member; the retroreflector assembly includes a detachably connected lens base and a reflector base, the lens is arranged on the lens base, and the reflector is arranged on the reflector base; by adopting a modular design of each optical element, the assembly and adjustment of the beam verticality detection device are simplified, the simplicity of operation and the consistency of measurement are improved; the optical elements are relatively fixed, and can be aligned more accurately, thereby improving the measurement accuracy.

[0006] An embodiment of the present application provides a light beam verticality detection device, comprising at least:

[0007] A beam splitter assembly, the beam splitter assembly comprising a beam splitter base, a beam splitter protective member, a beam splitter and a focusing optical element; the beam splitter base comprises a first inclined surface, an incident light channel and a first reflected light channel; the beam splitter protective member comprises a second inclined surface, a transmitted light channel and a focusing channel; the first inclined surface is fitted with the second inclined surface, and the beam splitter base is detachably connected to the beam splitter protective member; a first mounting groove is arranged on the first inclined surface, the beam splitter is arranged in the first mounting groove, and the first mounting groove is connected with the first reflected light channel, the incident light channel, the transmitted light channel and the focusing channel; the focusing optical element is arranged on the beam splitter protective member and is located in the focusing channel;

[0008] A retroreflector assembly, the retroreflector assembly comprising a lens base, a reflector base, a lens and a reflector; the lens base is detachably connected to the beam splitter base and the reflector base; the lens base comprises a second reflective light channel connected to the first reflective light channel, the lens is arranged on the lens base, and the lens is located in the second reflective light channel; the reflector base is provided with a second mounting groove, the second mounting groove is connected to the second reflective light channel, and the reflector is arranged in the second mounting groove.

[0009] As an embodiment, the first mounting groove is adapted to the shape of the spectroscope, and a plurality of first glue injection holes are arranged along the circumference of the first mounting groove. The plurality of first glue injection holes are evenly spaced, and the first glue injection holes are opened from the side wall of the first mounting groove and penetrate to the outer surface of the spectroscope base.

[0010] As an implementation manner, the beam splitter base is connected to the beam splitter protective member via a first screw;

[0011] The lens base is connected to the beam splitter base via a second screw;

[0012] The lens base is connected to the reflector base via a third screw.

[0013] As an implementation manner, the lens base and the reflector base are respectively provided with a matching first pin hole and a first pin.

[0014] As an implementation manner, a step is provided in the lens base, the step is provided around the second reflected light channel and is adapted to the lens; the lens is provided at the step.

[0015] As an implementation manner, a plurality of second glue injection holes are arranged along the circumference of the step, the plurality of second glue injection holes are evenly spaced, and the second glue injection holes open from the side wall of the step and penetrate to the outer surface of the lens base.

[0016] As an embodiment, the second mounting groove is adapted to the shape of the reflector, and a plurality of third glue injection holes are arranged along the circumference of the second mounting groove. The plurality of third glue injection holes are evenly spaced, and the third glue injection holes open from the side wall of the second mounting groove and penetrate to the outer surface of the reflector base.

[0017] As an implementation manner, the light beam verticality detection device further includes a light beam blocking component, and the light beam blocking component is detachably disposed between the beam splitter and the lens.

[0018] As an embodiment, the beam blocking assembly includes a beam blocking plate, a first groove is provided on the beam splitter base, a second groove is provided on the lens base, the first groove and the second groove form a accommodating cavity, and the beam blocking plate can slide in the accommodating cavity.

[0019] As an implementation manner, a guide rail groove is provided on the beam shielding plate, and the length direction of the guide rail groove is the same as the sliding direction of the beam shielding plate;

[0020] It also includes a second pin, which passes through the retroreflector assembly, the guide groove and the beam splitter assembly in sequence.

[0021] As described above, the light beam verticality detection device of the present application has the following beneficial effects:

[0022] The light beam verticality detection device of the present application is provided with a detachably connected spectrometer assembly and a reflector assembly, the spectrometer assembly includes a detachably connected spectrometer base and a spectrometer protective member, the spectrometer is arranged on the spectrometer base, and the focusing optical element is arranged on the spectrometer protective member; the reflector assembly includes a detachably connected lens base and a reflector base, the lens is arranged on the lens base, and the reflector is arranged on the reflector base, and each optical element is fixed in a modular manner, which simplifies the assembly and adjustment of the light beam verticality detection device, reduces the need for adjustment of individual optical elements, and improves the ease of operation and the consistency of measurement; the optical elements are more accurately aligned and fixed, which improves the overall measurement accuracy; the maintenance and calibration process is made simpler and faster, and the cost of long-term operation is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Shown is a schematic structural diagram of a light beam verticality detection device according to an embodiment of the utility model;

[0024] Figure 2 It is a schematic cross-sectional view of a light beam verticality detection device according to an embodiment of the utility model;

[0025] Figure 3 A schematic structural diagram showing another perspective of the light beam verticality detection device according to an embodiment of the utility model;

[0026] Figure 4 It is a cross-sectional structural schematic diagram of a retroreflector assembly of a light beam verticality detection device according to an embodiment of the utility model;

[0027] Figure 5 It is a schematic cross-sectional view of the structure of the retroreflector assembly of the light beam verticality detection device according to an embodiment of the utility model without the lens and the reflector installed;

[0028] Figure 6 It is a schematic structural diagram of a lens base and a reflector base in a retroreflector assembly of a light beam verticality detection device according to an embodiment of the utility model;

[0029] Figure 7 A schematic diagram showing the structure of the surface connected to the lens base in the reflector base of the retroreflector assembly of the light beam verticality detection device according to an embodiment of the utility model;

[0030] Figure 8 It is a schematic diagram showing the structure of a beam shielding component of a beam verticality detection device according to an embodiment of the utility model;

[0031] Fig. 9 It is a schematic structural diagram of the surface connected to the lens base in the beam splitter base of the beam splitter assembly of the light beam verticality detection device according to an embodiment of the utility model.

[0032] Component number description

[0033] 10, beam splitter assembly; 20, retroreflector assembly; 30, beam blocking assembly; 40, measured reflector; 110, beam splitter base; 111, incident light channel; 112, first reflected light channel; 113, first glue injection hole; 120, beam splitter protection piece; 121, transmitted light channel; 122, focusing channel; 130, beam splitter; 140, focusing optical element; 150, first screw; 160, second screw; 210, lens base; 211, second reflected light channel; 212, step; 213, second glue injection hole; 220, reflector base; 221, third glue injection hole; 230, lens; 240, reflector; 250, third screw; 260, first pin hole; 270, first pin; 310, beam blocking plate; 320, guide rail groove; 330, second pin. DETAILED DESCRIPTION

[0034] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0035] See also Figures 1 to 9 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the utility model in a schematic manner, and the illustrations only show the components related to the utility model rather than the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0036] In the field of high-precision alignment, such as laser interferometry, precision engineering, optical system calibration, semiconductor manufacturing, aerospace, and medical equipment calibration, accurate measurement of beam verticality is crucial. The beam verticality detection device in the prior art is usually composed of multiple independently arranged optical components, including but not limited to reflectors, lenses, beam splitters, etc., which work together to achieve the measurement of laser beam verticality.

[0037] Although the existing technology can achieve a certain degree of measurement accuracy, its operation process is complicated and requires each optical element to be adjusted individually to ensure the orthogonality of the light beam. This adjustment process is not only time-consuming, but also requires a high level of technical skills from the operator. In addition, any slight adjustment error may lead to deviations in the measurement results, affecting the accuracy and reliability of the measurement.

[0038] In view of the above defects, the present application provides a light beam verticality detection device, which is now described in detail through the following embodiments.

[0039] This embodiment provides a light beam verticality detection device, such as Figure 1 As shown, the light beam verticality detection device at least includes a beam splitter assembly 10 and a retroreflector assembly 20.

[0040] Among them, Figure 1 and Figure 2 As shown, the spectroscope assembly 10 includes a spectroscope base 110, a spectroscope protection member 120, a spectroscope 130, and a focusing optical element 140. The spectroscope 130 can split the laser beam into a measuring light and a reference light. The measuring light is the light beam transmitted by the spectroscope 130, and the reference light is the light reflected by the spectroscope 130. The focusing optical element 140 can be, for example, a focal length lens. Figure 2As shown, the beam splitter base 110 includes a first inclined surface (not marked in the figure), an incident light channel 111 and a first reflected light channel 112; the beam splitter protective member 120 includes a second inclined surface (not marked in the figure), a transmitted light channel 121 and a focusing channel 122. The first inclined surface is in contact with the second inclined surface, and the beam splitter base 110 and the beam splitter protective member 120 are detachably connected, for example, the beam splitter base 110 and the beam splitter protective member 120 can be connected by bolts, and after connection, a rectangular parallelepiped or cube structure can be formed. A first mounting groove is provided on the first inclined surface, and the beam splitter 130 is provided in the first mounting groove, and the first mounting groove is connected with the incident light channel 111, the first reflected light channel 112, the transmitted light channel 121 and the focusing channel 122; the focusing optical element 140 is provided on the beam splitter protective member 120, and is located in the focusing channel 122. Since optical instruments are relatively fragile, for example, the beam splitter 130 and the focusing optical element 140 are fragile components, the provision of the beam splitter base 110 and the beam splitter protective member 120 is beneficial for providing protection for the beam splitter 130 and the focusing optical element 140, which is superior to the structure in the prior art in which the beam splitter 130 and the focusing optical element 140 are exposed to the outside, and avoids the risk of dust on the surface or even scratches on the surface that may be caused by long-term exposure of the beam splitter 130 and the focusing optical element 140.

[0041] like Figure 2 As shown, the retroreflector assembly 20 includes a lens base 210, a reflector base 220, a lens 230 and a reflector 240. The lens 230 may be, for example, a convex lens; and the reflector 240 may be, for example, a concave reflector. The lens base 210 is detachably connected to the reflector base 220, and the lens base 210 is detachably connected to the beam splitter base 110, wherein the detachable connection method is preferably bolt connection; the light-transmitting mirror base 210 may be a rectangular parallelepiped structure or a cube structure; the reflector base 220 may be a rectangular parallelepiped structure or a cube structure; the light-transmitting mirror base 210 and the reflector base 220 may form a rectangular parallelepiped structure or a cube structure after being combined. The lens base 210 includes a second reflected light channel 211 connected to the first reflected light channel 112; the lens 230 is disposed on the lens base 210, and the lens 230 is located in the second reflected light channel 211. The reflector base 220 is provided with a second mounting groove, the second mounting groove is connected to the second reflected light channel 211, and the reflector 240 is arranged in the second mounting groove. The retroreflector assembly in the light beam verticality detection device provided in this embodiment abandons the structure of using a single corner pyramid reflector, and uses a combination of lens 230 and reflector 240 to ensure that the reference light can be reflected along the original path, and avoid the light spot separation phenomenon caused by the reference light passing through the single corner pyramid reflector, thereby avoiding the measurement error caused by the light spot separation, further improving the test accuracy, and improving the use efficiency.

[0042] The light beam verticality detection device provided in this embodiment is provided with a detachably connected spectrometer assembly 10 and a reflector assembly 20. The spectrometer assembly 10 includes a detachably connected spectrometer base 110 and a spectrometer protective member 120. The spectrometer 130 is arranged on the spectrometer base 110, and the focusing optical element 140 is arranged on the spectrometer protective member 120. The reflector assembly 20 includes a detachably connected lens base 210 and a reflector base 220. The lens 230 is arranged on the lens base 210, and the reflector 240 is arranged on the reflector base 220. The optical elements are fixed in a modular manner, which simplifies the assembly and adjustment of the light beam verticality detection device, reduces the need for adjusting individual optical elements, and improves the ease of operation and measurement consistency. The optical elements are more accurately aligned and fixed, which improves the overall measurement accuracy, makes the maintenance and calibration process simpler and faster, and reduces the cost of long-term operation.

[0043] The working principle of the light beam verticality detection device provided in this embodiment is as follows:

[0044] The laser is incident from the incident light channel 111, and forms a reference light after being reflected by the beam splitter 130. The reference light passes through the first reflected light channel 112, passes through the lens 230 in the second reflected light channel 211, enters the second mounting groove, and enters the second reflected light channel 211 again after being reflected by the reflector 240. It enters the first reflected light channel 112 after being transmitted through the lens 230 again, and enters the focusing channel 122 after being transmitted through the beam splitter 130, and reaches the focusing optical element 120. The laser is incident from the incident light channel 111, and forms a measuring light after being transmitted through the beam splitter 130. The measuring light passes through the transmitted light channel 121, enters the transmitted light channel 121 again after being reflected by the measured reflector 40, and enters the focusing channel 122 after being reflected by the beam splitter 130, and reaches the focusing optical element 120. According to the focusing principle of the focusing optical element 120, mutually parallel light beams will converge at one point when passing through the same focusing optical element 120. Therefore, when the measuring light is reflected by the measured reflector 40, if the reflector 40 is deflected, that is, it is not vertical, the measuring light beam will not be able to be reflected along the original path, and will not be able to focus at one point with the reference light through the focusing optical element 120. At this time, it can be concluded that the measured reflector 40 is not vertical to the laser beam, and the measurement purpose is achieved.

[0045] In an optional embodiment, if Figure 1 As shown, the first mounting groove is adapted to the shape of the spectroscope 130. For example, the cross section of the spectroscope 130 is circular, and the cross section of the first mounting groove is also circular. A plurality of first glue injection holes 113 ( Figure 1(not fully shown in the figure), the multiple first glue injection holes 113 are evenly spaced, and the first glue injection holes 113 are opened from the side wall of the first mounting groove and penetrate to the surface of the beam splitter base 110, and glue is injected through the first glue injection holes 113 to make the first mounting groove bonded to the beam splitter 130. As an embodiment, for example, four first glue injection holes 113 can be set along the circumference of the first mounting groove, and the four first glue injection holes 113 are centrally symmetrically distributed. The first glue injection holes 113 are used for spot glue bonding to the beam splitter 130. The bonding angle of the beam splitter 130 will deflect the reflected light. In order to ensure the bonding angle, the bonding surface of the beam splitter base 110 and the beam splitter 130 is constrained by the processing accuracy to reduce the error generated when bonding the beam splitter 130.

[0046] In an optional embodiment, if Figure 3 As shown, the beam splitter base 110 and the beam splitter protection member 120 are connected by first screws 150. For example, the beam splitter base 110 and the beam splitter protection member 120 are both provided with four first threaded holes (not marked in the figure) which are centrally symmetrical. The first screws 150 penetrate through the first threaded holes to fasten the beam splitter base 110 and the beam splitter protection member 120, so as to achieve the purpose of stable installation and convenient disassembly.

[0047] In an optional embodiment, if Figure 6 and Fig. 9 As shown, the lens base 210 is connected to the beam splitter base 110 via a second screw 160. It can be understood that Figure 6 and Fig. 9 The marked second screw 160 can also be considered as the second threaded hole. The marking in the figure is only for illustrating the location of the second screw 160. The third screw 250 marked below is the same as the above idea and will not be repeated. The second screw 160 passes through the second threaded hole to fasten the lens base 210 and the beam splitter base 110.

[0048] In an optional embodiment, a third threaded hole is disposed on both the lens base 210 and the reflector base 220 , and a third screw 250 passes through the third threaded hole to fasten the lens base 210 and the reflector base 220 .

[0049] In an optional embodiment, if Figure 6 and Figure 7 As shown, the lens base 210 and the reflector base 220 are respectively provided with matching first pin holes 260 and first pins 270. For example, the first pin hole 260 can be provided on the lens base 210, and the first pin 270 can be provided on the reflector base 220. Of course, the first pin 270 can also be provided on the lens base 210, and the first pin 270 can be provided on the reflector base 220. The first pin hole 260 and the first pin 270 can ensure the coaxiality when the lens base 210 and the reflector base 220 are installed.

[0050] In an optional embodiment, if Figure 2 , Figure 4 and Figure 5 As shown, a step 212 is provided in the lens base 210, and the step 212 is provided around the second reflected light channel 211, and the step 212 is adapted to the lens 230, and the lens 230 is provided at the step 212. The step 212 is used to position and bond the lens 230.

[0051] In an optional embodiment, a plurality of second glue injection holes 213 are arranged along the circumference of the step 212, and the plurality of second glue injection holes 213 are evenly spaced, and the second glue injection holes 213 are opened from the side wall of the step 212 and penetrate to the outer surface of the lens base 210. Glue is injected through the second glue injection holes 213 to bond the step 212 to the lens 230. Since stress is generated when the glue solidifies, the coaxiality of the lens 230 and the lens base 210 will inevitably deviate. In order to ensure that the lens 230 and the lens base 210 maintain coaxiality, it is necessary to ensure that the stress on the four sides of the lens 230 is as similar as possible when bonding the lens 230. To achieve this purpose, a plurality of evenly spaced second glue injection holes 213 can be arranged around the step 212 of the lens base 210, for example, four second glue injection holes 213 are arranged along the circumference of the step 212, and the four second glue injection holes 213 are symmetrically distributed in the center, which can be used to compensate for the stress generated when the lens 230 is glued and solidified, so as to prevent the coaxiality from changing during the point glue bonding.

[0052] In an optional embodiment, if Figure 4 and Figure 5 As shown, the second mounting groove is adapted to the shape of the reflector 240, and a plurality of third glue injection holes 221 are arranged along the circumference of the second mounting groove, and the plurality of third glue injection holes 221 are evenly spaced, and the third glue injection holes 221 are opened from the side wall of the second mounting groove and penetrate the outer surface of the reflector base 220. As mentioned above, the lens 230 and the lens base 210 are ensured to maintain coaxiality, and similarly, in order to ensure that the coaxiality of the reflector 240 and the lens 230 is consistent, the plurality of third glue injection holes 221 of the second mounting groove of the reflector base 220 are evenly spaced, for example, four third glue injection holes 221 are arranged around the second mounting groove, and the four third glue injection holes 221 are symmetrically distributed around the center, so as to prevent the coaxiality of the reflector 240 and the lens 230 from deviating due to different adhesive stresses on the reflector 240 when the glue is solidified.

[0053] In an optional embodiment, if Figure 1 and Figure 2As shown, the light beam verticality detection device also includes a light beam shielding component 30, which is detachably arranged between the beam splitter 130 and the lens 230. In the prior art, a polarizing plate is usually used to shield part of the light outside each optical element. The shielding component 30 of the light beam verticality detection device of this embodiment only needs to have a light-proof property, which can effectively reduce the cost. The light beam verticality detection device in this embodiment makes the positions of the optical elements except the measured reflector 40 relatively fixed, which is more convenient to operate, and it is not easy to accidentally touch the optical elements, thereby avoiding repeated adjustments caused by accidentally touching the optical elements.

[0054] In an optional embodiment, if Figure 2 and 8 As shown, the beam shielding assembly 30 includes a beam shielding plate 310, a first groove (not marked in the figure) is provided on the beam splitter base 110, and a second groove (not marked in the figure) is provided on the lens base 210. The first groove and the second groove form a receiving cavity, and the beam shielding plate 310 can slide in the receiving cavity. The beam shielding assembly 30 provided in this embodiment provides a shielding object inside the device. Since the measuring light and the reference light are in a separated state inside the device, the situation such as measurement error caused by shielding errors in the prior art is solved.

[0055] In an optional embodiment, if Figure 8 As shown, the beam shielding plate 310 is provided with a guide groove 320, and the length direction of the guide groove 320 is the same as the sliding direction of the beam shielding plate 310; it also includes a second pin 330, and the second pin 330 is sequentially penetrated through the reflector assembly 20, the guide groove 320 and the beam splitter assembly 10. The beam shielding plate 310 is provided with a long strip of guide groove 320. During subsequent installation, the second pin 330 penetrates the guide groove 320 as a sliding guide rail to facilitate the movement of the beam shielding plate 310 in and out; and the guide groove 320 is adapted to the second pin 330, so that the beam shielding plate 310 will not loosen during the movement in and out; the second pin 330 penetrates the guide groove 320 to limit the beam shielding plate 310, so as to prevent the beam shielding plate 310 from excessive movement in and out, so as to achieve the purpose of precise positioning.

[0056] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A light beam verticality detection device, characterized in that: At least: A beam splitter assembly (10), the beam splitter assembly (10) comprising a beam splitter base (110), a beam splitter protective member (120), a beam splitter (130) and a focusing optical element (140); the beam splitter base (110) comprising a first inclined surface, an incident light channel (111) and a first reflected light channel (112); the beam splitter protective member (120) comprising a second inclined surface, a transmitted light channel (121) and a focusing light channel (122); the first inclined surface is bonded to the second inclined surface, and the beam splitter base (110) and the beam splitter protective member (120) are detachably connected; a first mounting groove is provided on the first inclined surface, the beam splitter (130) is arranged in the first mounting groove, and the first mounting groove is connected to the first reflected light channel (112), the incident light channel (111), the transmitted light channel (121), and the focusing light channel (122) The focusing optical element (140) is arranged on the beam splitter protection element (120) and is located in the light focusing channel (122); A retroreflector assembly (20), the retroreflector assembly (20) comprising a lens base (210), a reflector base The invention relates to a light-emitting diode (LED) system comprising a light-emitting diode (LED) and a reflector (240); the lens base (210) is detachably connected to the beam splitter base (110) and the reflector base (220); the lens base (210) comprises a second reflective light channel (211) connected to the first reflective light channel (112); the lens (230) is arranged on the lens base (210), and the lens (230) is located in the second reflective light channel (211); the reflector base (220) is provided with a second mounting groove, the second mounting groove is connected to the second reflective light channel (211), and the reflector (240) is arranged in the second mounting groove.

2. The light beam verticality detection device according to claim 1, characterized in that: The first mounting groove is adapted to the shape of the beam splitter (130), and a plurality of first glue injection holes (113) are arranged along the circumference of the first mounting groove. The plurality of first glue injection holes (113) are evenly spaced, and the first glue injection holes (113) are opened from the side wall of the first mounting groove and penetrate to the outer surface of the beam splitter base (110).

3. The light beam verticality detection device according to claim 1, characterized in that: The beam splitter base (110) and the beam splitter protection member (120) are connected via a first screw (150); The lens base (210) is connected to the beam splitter base (110) via a second screw (160); The lens base (210) and the reflector base (220) are connected via a third screw (250).

4. The light beam verticality detection device according to claim 1, characterized in that: The lens base (210) and the reflector base (220) are respectively provided with a matching first pin hole (260) and a first pin (270).

5. The light beam verticality detection device according to claim 1, characterized in that: A step (212) is provided in the lens base (210); the step (212) is arranged around the second reflective light channel (211) and is adapted to the lens (230); and the lens (230) is arranged at the step (212).

6. The light beam verticality detection device according to claim 5, characterized in that: A plurality of second glue injection holes (213) are arranged along the circumference of the step (212), the plurality of second glue injection holes (213) are evenly spaced, and the second The glue injection hole (213) opens from the side wall of the step (212) and penetrates to the outer surface of the lens base (210).

7. The light beam verticality detection device according to claim 1, characterized in that: The second mounting groove is adapted to the shape of the reflector (240), a plurality of third glue injection holes (221) are arranged along the circumference of the second mounting groove, the plurality of third glue injection holes (221) are evenly spaced, and the third glue injection holes (221) are opened from the side wall of the second mounting groove and penetrate to the outer surface of the reflector base (220).

8. The light beam verticality detection device according to any one of claims 1 to 7, characterized in that: The light beam verticality detection device further comprises a light beam shielding component (30), and the light beam shielding component (30) is detachably arranged between the beam splitter (130) and the lens (230).

9. The light beam verticality detection device according to claim 8, characterized in that: The beam blocking assembly (30) comprises a beam blocking plate (310), the beam splitter base (110) is provided with a first groove, the lens base (210) is provided with a second groove, the first groove and the second groove form a receiving cavity, and the beam blocking plate (310) can slide in the receiving cavity.

10. The light beam verticality detection device according to claim 9, characterized in that: The beam shielding plate (310) is provided with a guide rail groove (320), and the length direction of the guide rail groove (320) is the same as the sliding direction of the beam shielding plate (310); It also includes a second pin (330), which is sequentially inserted through the retroreflector assembly (20), the guide groove (320) and the beam splitter assembly (10).

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