Gas monitoring equipment

Abstract

The utility model relates to gas monitoring equipment. The gas monitoring equipment comprises a body; the plurality of sampling assemblies are detachably assembled on the body, each sampling assembly comprises a plurality of sampling inlets, an electromagnetic valve assembly and a sampling outlet, the plurality of sampling inlets are respectively communicated with a plurality of to-be-detected gas sources, the electromagnetic valve assembly is communicated between the plurality of sampling inlets and the sampling outlet, and the sampling outlets are communicated with the plurality of to-be-detected gas sources. The electromagnetic valve assembly can selectively control the communication between the plurality of sampling inlets and the sampling outlet; therefore, maintenance and replacement of each sampling assembly are facilitated.

Description

Technical Field

[0001] The utility model relates to a gas monitoring device, in particular to an improved technical structure of a gas monitoring device for detecting multiple environments. Background Art

[0002] In the semiconductor manufacturing process, the air quality of the clean room environment has a significant impact on the semiconductor yield. However, the factory area is extremely large. If only multiple machines or moving the machines to various areas of the factory for inspection, it will consume a large amount of manpower and time. And the conventional fixed-point gas monitoring device has a detection module fixedly installed on it. Once the detection module fails and needs to be repaired, the entire device must interrupt the detection of the environmental gas until the repair is completed before continuing the detection operation, resulting in low detection efficiency.

[0003] Therefore, it is necessary to provide a novel and progressive gas monitoring device to solve the above problems. Summary of the Utility Model

[0004] The main object of the utility model is to provide a gas monitoring device which is conducive to the repair and replacement of each sampling component and can provide multi-environment point detection.

[0005] To achieve the above object, the utility model provides a gas monitoring device, including: a body; and a plurality of sampling components, the plurality of sampling components are detachably assembled to the body, each sampling component includes a plurality of sampling inlets, a solenoid valve assembly and a sampling outlet, the plurality of sampling inlets are respectively communicated with a plurality of gas sources to be detected, the solenoid valve assembly is communicated between the plurality of sampling inlets and the sampling outlet, and the solenoid valve assembly can selectively control the communication between the plurality of sampling inlets and the sampling outlet.

[0006] Preferably, the plurality of sampling inlets are exposed outside the body, and the sampling outlet is hidden inside the body.

[0007] Preferably, each sampling component further includes a purge inlet, the purge inlet is communicated with the solenoid valve assembly, and the purge inlet is communicated with a purge gas source.

[0008] Preferably, each sampling component is detachably slidably arranged on the body.

[0009] Preferably, each sampling component further includes a flow splitting unit, the solenoid valve assembly is arranged between the plurality of sampling inlets and the flow splitting unit, the flow splitting unit is provided with a plurality of flow splitting inlets, the sampling outlet and a purge inlet, the plurality of flow splitting inlets are communicated between the solenoid valve assembly and the sampling outlet, and between the solenoid valve assembly and the purge inlet, and the purge inlet is communicated with a purge gas source.

[0010] Preferably, each sampling component further includes a base, and the solenoid valve component and the flow dividing unit are respectively disposed on a first side surface of the base; wherein, when each sampling component is in an open position and the first side surface is outside the main body, the solenoid valve component and the flow dividing unit of each sampling component are in an exposed state; wherein, when each sampling component is in the open position, each sampling component is outside the main body.

[0011] Preferably, at least one slide rail component is further included, and the at least one slide rail component is disposed between the main body and at least one of the sampling components. Each slide rail component includes a first slide rail and a second slide rail. The first slide rail is provided on the main body, and the second slide rail is provided on at least one of the sampling components and slides on the first slide rail with the second slide rail.

[0012] Preferably, the first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit. Each sampling component can move relative to the main body from a closed position to an open position outside the main body in a first direction; wherein, when at least one of the sampling components is in the open position, the second limiting unit can abut against the first limiting unit in the first direction.

[0013] Preferably, the second limiting unit can move between a locked position and a released position; wherein, when the second limiting unit is in the locked position, the second limiting unit can abut against the first limiting unit in the first direction; when the second limiting unit is in the released position, the second limiting unit can be non-abutting against the first limiting unit in the first direction.

[0014] Preferably, each sampling component can move relative to the body in a first direction; each sampling component further includes a plurality of communication outlets that communicate between the plurality of sampling inlets and the solenoid valve assembly, and the plurality of communication outlets, the solenoid valve assembly, and the shunt unit are respectively spaced apart in the first direction; the plurality of sampling inlets are exposed outside the body, and the sampling outlet is hidden inside the body; each sampling component is slidably and detachably arranged on the body; when the first side surface of each sampling component is inside the body, the solenoid valve assembly and the shunt unit of each sampling component are hidden inside the body; the gas monitoring device further includes at least one slide rail assembly arranged between the body and at least one sampling component, each slide rail assembly includes a first slide rail and a second slide rail, the body is provided with the first slide rail, and at least one sampling component is provided with the second slide rail and is slidably arranged on the first slide rail with the second slide rail; the first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit. Each sampling component can move relative to the body from a closed position to the open position outside the body in the first direction; wherein, when at least one sampling component is in the open position, the second limiting unit can abut against the first limiting unit in the first direction; the second limiting unit can move between a locked position and a released position; wherein, when the second limiting unit is in the locked position, the second limiting unit can abut against the first limiting unit in the first direction; when the second limiting unit is in the released position, the second limiting unit can be non-abutting against the first limiting unit in the first direction; further included are a detection unit, a processing unit, and a warning device. The detection unit and the processing unit are respectively arranged on the body, the warning device is arranged outside the body and is communicatively connected with the processing unit. The detection unit communicates with the sampling outlet to detect the gas of each gas source to be detected. The processing unit transmits the value detected by the detection unit to the processing unit for arithmetic analysis, and when an abnormal value appears, the warning device issues a warning reminder; each sampling component can move relative to the processing unit and the detection unit in the first direction.

[0015] The advantages of the present utility model are as follows:

[0016] The gas monitoring device provided by the present utility model facilitates the maintenance and replacement of each sampling component and can provide multi-environment point detection. Description of the Drawings

[0017] Figure 1 It is a perspective view of a preferred embodiment of the present utility model.

[0018] Figure 2 It is Figure 1 the perspective enlarged view of

[0019] Figure 3Schematic diagram of a second limiting unit of a preferred embodiment of the present utility model in a locked position.

[0020] Figure 4 Schematic diagram of a second limiting unit of a preferred embodiment of the present utility model in a released position.

[0021] Figure 5 Schematic diagram of a sampling component of a preferred embodiment of the present utility model detached from a main body.

[0022] Figure 6 Another perspective view of a preferred embodiment of the present utility model.

[0023] Figure 7 Perspective view of a preferred embodiment of the present utility model.

[0024] Figure 8 Exploded view of a sampling component and a slide rail component of a preferred embodiment of the present utility model. Detailed implementation manners

[0025] The following only uses embodiments to illustrate possible implementation modes of the present utility model, but is not intended to limit the scope of protection of the present utility model. The "a" or "at least one" prefixed to the nouns mentioned in the text does not limit the quantity. According to requirements, it can also be "a plurality" of, and this change in quantity is also within the scope of protection, which is hereby stated first.

[0026] Please refer to Figures 1 to 8 , which shows a preferred embodiment of the present utility model. The gas monitoring device 1 of the present utility model includes a main body 10 and a plurality of sampling components 20.

[0027] The plurality of sampling components 20 are detachably assembled to the main body 10. Each sampling component 20 includes a plurality of sampling inlets 21, a solenoid valve assembly 22 and a sampling outlet 23. The plurality of sampling inlets 21 are respectively connected to a plurality of gas sources to be detected. In this embodiment, the plurality of gas sources to be detected are the ambient gases in different working areas. The solenoid valve assembly 22 is connected between the plurality of sampling inlets 21 and the sampling outlet 23. The solenoid valve assembly 22 can selectively control the connection between the plurality of sampling inlets 21 and the sampling outlet 23. Thereby, the plurality of sampling components 20 can be independently maintained and replaced, improving the maintainability and high efficiency of the overall device; and multi-region and multi-point environmental detection can be performed, with high detection efficiency. In addition, the solenoid valve assembly 22 can quickly rotate the gases to be detected in different working areas into the sampling outlet 23 for subsequent detection.

[0028] Each of the sampling components 20 is detachably slidably disposed on the main body 10. Specifically, the gas monitoring device 1 further includes at least one slide rail assembly 30 disposed between the main body 10 and at least one of the sampling components 20. Each slide rail assembly 30 includes a first slide rail 31 and a second slide rail 32. The main body 10 is provided with the first slide rail 31, and at least one of the sampling components 20 is provided with the second slide rail 32 and is slidably disposed on the first slide rail 31 with the second slide rail 32. In this embodiment, the main body 10 is provided with a plurality of the slide rail assemblies 30, and each of the slide rail assemblies 30 is disposed between each sampling component 20 and the main body 10. Therefore, it is convenient to disassemble and assemble the plurality of sampling components 20 to save time and enable smooth sliding relative to the main body 10. In addition, a ball structure may be provided between the first slide rail and the second slide rail for smooth relative sliding.

[0029] The first slide rail 31 is provided with a first limiting unit 33, and the second slide rail 32 is provided with a second limiting unit 34. Each sampling component 20 can move relative to the main body 10 in a first direction L1 from a retracted position to an open position outside the main body 10 (such as Figure 2 ). Among them, when at least one of the sampling components 20 is in the open position, the second limiting unit 34 can abut against the first limiting unit 33 in the first direction L1. Among them, when each sampling component 20 is in the retracted position, each sampling component 20 is retracted into the main body 10. Specifically, the second limiting unit 34 can move between a locked position and a released position. Among them, when the second limiting unit 34 is in the locked position, the second limiting unit 34 can abut against the first limiting unit 33 in the first direction L1. When the second limiting unit 34 is in the released position, the second limiting unit 34 can be non-abutting against the first limiting unit 33 in the first direction L1. In this embodiment, the second limiting unit 34 is an elastic member. Therefore, when each sampling component 20 is pulled out relative to the main body 10, it will be first limited by the first limiting unit 33 and the second limiting unit 34 to prevent the sampling component 20 from coming off, and the plurality of sampling components 20 can be detached when the second limiting unit 34 is adjusted to the released position, so as to achieve quick installation, detachment and anti-disengagement.

[0030] The plurality of sampling inlets 21 are exposed outside the main body 10, and the sampling outlet 23 is hidden inside the main body 10, making it simpler and more convenient to connect the plurality of gas sources to be detected, and at the same time protecting the sampling outlet 23 from damage or contamination.

[0031] Each of the sampling components 20 further includes a purge inlet 24, which is communicated with the solenoid valve assembly 22 and is communicated with a purge gas source (such as an inert gas such as clean air or nitrogen). Specifically, each of the sampling components 20 further includes a flow splitting unit 25. The solenoid valve assembly 22 is disposed between the plurality of sampling inlets 21 and the flow splitting unit 25. The flow splitting unit 25 is provided with a plurality of flow splitting inlets 26, the sampling outlet 23 and the purge inlet 24. The plurality of flow splitting inlets 26 are communicated between the solenoid valve assembly 22 and the sampling outlet 23, and between the solenoid valve assembly 22 and the purge inlet 24. The purge inlet 24 is communicated with the purge gas source. Thereby, the plurality of sampling components 20 can be cleaned to avoid detection distortion caused by mixing of different detection gases, and the structure is simple and beneficial to installation.

[0032] Each of the sampling components 20 can move relative to the body 10 in the first direction L1; each of the sampling components 20 further includes a plurality of communication outlets 28, which are communicated between the plurality of sampling inlets 21 and the solenoid valve assembly 22. The plurality of communication outlets 28, the solenoid valve assembly 22 and the flow splitting unit 25 are respectively arranged at intervals in the first direction L1. Accordingly, it is convenient to connect a plurality of pipelines between the plurality of communication outlets 28 and the solenoid valve assembly 22, and between the solenoid valve assembly 22 and the plurality of sampling outlets 23, so that the plurality of pipelines are arranged neatly and do not interfere with each other, enabling the gas to flow smoothly therein.

[0033] Each of the sampling components 20 further includes a base 27. The solenoid valve assembly 22 and the sampling outlet 23 are respectively arranged on a first side surface 271 of the base 27. Wherein, when each of the sampling components 20 is in the open position and the first side surface 271 is outside the body 10, the solenoid valve assembly 22 and the flow splitting unit 25 of each of the sampling components 20 are in an exposed state; wherein, when each of the sampling components 20 is in the open position, each of the sampling components 20 is outside the body 10. In addition, when the first side surface 271 of each of the sampling components 20 is inside the body 10, the solenoid valve assembly 22 and the flow splitting unit 25 of each of the sampling components 20 are hidden inside the body 10. Therefore, by pulling out each of the sampling components 20 and without the sampling components 20 detaching from the body 10, the states of the solenoid valve assembly 22 and the flow splitting unit 25 can be directly observed, and the pipelines between them can be directly disassembled and assembled, which is beneficial to maintenance.

[0034] The gas monitoring device 1 further includes a detection unit 40, a processing unit 50 and a warning device 60. The detection unit 40 and the processing unit 50 are respectively arranged on the main body 10. The warning device 60 is arranged outside the main body 10 and is communicatively connected to the processing unit 50. The detection unit 40 is communicated with the sampling outlet 23 to detect the gases of each gas source to be detected. The processing unit 50 transmits the values detected by the detection unit 40 to the processing unit 50 for arithmetic analysis. When abnormal values occur, the warning device 60 issues a warning reminder; each sampling component 20 can move relative to the processing unit 50 and the detection unit 40 in the first direction L1. In this embodiment, the warning device 60 is a light-emitting device to achieve an eye-catching reminder effect.

[0035] During use, after one of the sampling components 20 is detached (such as for maintenance or replacement), another sampling component 20 can be quickly replaced immediately to reduce the time when gas detection is interrupted, thereby improving the detection efficiency and facilitating maintenance and replacement.

[0036] The above is the preferred embodiment of the present invention and the technical principles applied. For those skilled in the art, any obvious changes such as equivalent transformation and simple replacement based on the technical solution of the present invention without departing from the spirit and scope of the present invention shall fall within the protection scope of the present invention.

Claims

1. A gas monitoring device, characterized in that: include: a body; and A plurality of sampling components are detachably assembled to the main body, each of the sampling components includes a plurality of sampling inlets, a solenoid valve component and a sampling outlet, the plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlet, and the solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlet.

2. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling inlets are exposed from the main body, and the sampling outlet is hidden in the main body.

3. The gas monitoring device according to claim 1, characterized in that: Each of the sampling components further comprises a cleaning inlet, which is connected to the solenoid valve component and connected to a cleaning gas source.

4. The gas monitoring device according to claim 1, characterized in that: Each sampling assembly is detachably slidably mounted on the main body.

5. The gas monitoring device according to claim 1, characterized in that: Each of the sampling components further includes a shunt unit. The solenoid valve component is arranged between the multiple sampling inlets and the shunt unit. The shunt unit is provided with multiple shunt inlets, the sampling outlet and a purge inlet. The multiple shunt inlets are connected between the solenoid valve component and the sampling outlet, and between the solenoid valve component and the purge inlet. The purge inlet is connected to a purge gas source.

6. The gas monitoring device according to claim 5, characterized in that: Each of the sampling components further includes a base, and the solenoid valve component and the diversion unit are respectively arranged on a first side of the base; wherein, when each of the sampling components is located in an open position and the first side is located outside the body, the solenoid valve component and the diversion unit of each of the sampling components are exposed; wherein, when each of the sampling components is located in the open position, each of the sampling components is located outside the body.

7. The gas monitoring device according to any one of claims 1 to 6, characterized in that: It also includes at least one slide rail assembly, which is arranged between the main body and at least one sampling assembly. Each slide rail assembly includes a first slide rail and a second slide rail. The main body is provided with the first slide rail, and at least one sampling assembly is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail.

8. The gas monitoring device according to claim 7, characterized in that: The first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit. Each sampling component can be moved from a folded position to an open position outside the body in a first direction relative to the body; wherein, when at least one of the sampling components is located in the open position, the second limiting unit can be clamped against the first limiting unit in the first direction.

9. The gas monitoring device according to claim 8, characterized in that: The second limiting unit can move between a locking position and a releasing position; wherein, when the second limiting unit is located at the locking position, the second limiting unit can be clamped against the first limiting unit in the first direction; when the second limiting unit is located at the releasing position, the second limiting unit can be free from being clamped against the first limiting unit in the first direction.

10. The gas monitoring device according to claim 6, characterized in that: Each of the sampling components can move in a first direction relative to the body; each of the sampling components further includes a plurality of communication outlets, the plurality of communication outlets are connected between the plurality of sampling inlets and the solenoid valve component, and the plurality of communication outlets, the solenoid valve component and the diversion unit are respectively arranged in the first direction at intervals; the plurality of sampling inlets are exposed to the body, and the sampling outlets are hidden in the body; each of the sampling components can be detachably slidably arranged on the body; when the first side surface of each of the sampling components is located in the body, the solenoid valve of each of the sampling components The valve assembly and the diversion unit are hidden in the body; the gas monitoring device further includes at least one slide rail assembly, which is arranged between the body and at least one sampling assembly, each of which includes a first slide rail and a second slide rail, the body is provided with the first slide rail, at least one of the sampling assemblies is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail; the first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit, and each of the sampling assemblies can be moved from a retracted position to a closed position relative to the body in the first direction. The device is configured to move to the open position outside the body; wherein, when at least one of the sampling components is located at the open position, the second limiting unit can be clamped against the first limiting unit in the first direction; the second limiting unit can move between a locking position and a releasing position; wherein, when the second limiting unit is located at the locking position, the second limiting unit can be clamped against the first limiting unit in the first direction; when the second limiting unit is located at the releasing position, the second limiting unit can be not clamped against the first limiting unit in the first direction; it also includes a detection unit, a processing unit and a warning device, the detection unit and the processing unit are respectively arranged on the body, the warning device is arranged on the outside of the body and is communicatively connected with the processing unit, the detection unit is connected to the sampling outlet for detecting the gas of each gas source to be detected, the processing unit transmits the value detected by the detection unit to the processing unit for calculation and analysis, and the warning device issues a warning reminder when an abnormal value appears; each of the sampling components can move in the first direction relative to the processing unit and the detection unit.

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