Ion chromatography sampling controller

Abstract

The utility model relates to an ion chromatography sampling controller, which is connected between a sampling system and at least one ion chromatography instrument and comprises an input pipeline, a pretreatment unit, a first pump, an output pipeline and a control unit. The input pipeline is connected with the sampling system so as to input gas to be detected; the pretreatment unit is used for collecting at least one detection target in the gas to be detected by using a liquid medium to form an object to be analyzed; the first pump is respectively connected with the input pipeline and the pretreatment unit in a gas communication manner; the output pipeline is connected between the pretreatment unit and the at least one ion chromatograph and is used for outputting the to-be-analyzed object to the at least one ion chromatograph; the control unit is connected with the preprocessing unit and the first pump and is in communication connection with the at least one ion chromatograph.

Description

Technical Field

[0001] The utility model relates to gas analysis, in particular to an ion chromatography sampling controller. Background Art

[0002] With the development of high-end clean room processes, the monitoring of airborne molecular contaminants (AMC) is becoming more and more important. In general, the detection of acid and alkaline substances in clean rooms is to first sample the ambient gas and then perform detection and analysis using an ion chromatograph (IC).

[0003] However, gas samples need to be captured and processed with a liquid medium before detection, and in the existing detection process, manual operation is required, which is time-consuming and labor-intensive. It is obviously difficult to achieve the purpose of real-time monitoring in a multi-point air quality monitoring system, and there are shortcomings that need to be improved urgently.

[0004] Therefore, it is necessary to provide a novel and advanced ion chromatography sampling controller to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide an ion chromatography sampling controller which can automatically inject samples and detect.

[0006] To achieve the above-mentioned purpose, the utility model provides an ion chromatography sampling controller for connection between a sampling system and at least one ion chromatograph, comprising: an input pipeline, a pretreatment unit, a first pump, an output pipeline and a control unit. The input pipeline is used to connect the sampling system to input a gas to be tested; the pretreatment unit is used to collect at least one detection target in the gas to be tested using a liquid medium to form an analyte; the first pump is connected to the input pipeline and the pretreatment unit in gas communication; the output pipeline is connected between the pretreatment unit and the at least one ion chromatograph and is used to output the analyte to the at least one ion chromatograph; the control unit is connected to the pretreatment unit and the first pump and is connected to the at least one ion chromatograph for communication, and the control unit can control the first pump to pump gas so that the gas to be tested enters the input pipeline and the pretreatment unit, and can send a control signal to control the at least one ion chromatograph to perform analysis to generate analysis data.

[0007] As a preferred embodiment of the above technical solution, preferably, a first liquid pipeline is further included, wherein the first liquid pipeline is connected to the input pipeline for inputting a cleaning liquid.

[0008] As a preferred embodiment of the above technical solution, preferably, a second liquid pipeline is further included, wherein the second liquid pipeline is connected to the pretreatment unit for inputting the liquid medium.

[0009] As a preferred embodiment of the above technical solution, preferably, a gas pipeline is further included, wherein the gas pipeline is connected to the input pipeline for inputting a cleaning gas.

[0010] As a preferred embodiment of the above technical solution, preferably, the control unit includes an access unit, wherein when the at least one ion chromatograph completes the analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data.

[0011] As a preferred embodiment of the above technical solution, it is preferable to further include at least one second pump, wherein the at least one second pump is connected to the at least one ion chromatograph, and the control unit can control the at least one second pump to allow the analyte to enter the at least one ion chromatograph.

[0012] As a preferred embodiment of the above technical solution, preferably, the pretreatment unit includes a plurality of impact components and at least one first switching valve, the at least one first switching valve connects the plurality of impact components with the first pump, and the control unit can control the at least one first switching valve to connect the impact component with the first pump.

[0013] As a preferred embodiment of the above technical solution, preferably, the output pipeline is provided with at least one second switching valve connected to the plurality of impact components, and the control unit can control the at least one second switching valve to connect one of the impact components with the at least one ion chromatograph.

[0014] As a preferred embodiment of the above technical solution, preferably, the control unit includes a timing control module, and the at least one first switching valve and the at least one second switching valve can change the connection status of each impact component with the first pump and the at least one ion chromatograph according to the multiple timing signals of the timing control module.

[0015] As a preferred embodiment of the above technical solution, it is preferred that a first liquid pipeline, a second liquid pipeline and a gas pipeline are further included, wherein the first liquid pipeline is connected to the input pipeline for inputting a clean liquid; the second liquid pipeline is connected to the pretreatment unit for inputting the liquid medium; the gas pipeline is connected to the input pipeline for inputting a clean gas; the first liquid pipeline is provided with a first valve connected to the control unit, and the gas pipeline is provided with a second valve connected to the control unit; the second liquid pipeline is provided with a third valve connected to the control unit, and the control unit can control the third valve to open before inputting the gas to be tested; the control unit includes an access unit, wherein when the at least one ion chromatograph completes the analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data; the pretreatment unit includes a plurality of impact components and at least one first switching valve, the at least one first switching valve connects the plurality of impact components with the first pump, and the control unit can control the at least one first switching valve to connect one of the impact components with the first pump; each of the impact components includes an impact The plurality of impact components are connected to the first pump and the second pump; the output pipeline is provided with at least one second switching valve connected to the plurality of impact components, and the control unit can control the at least one second switching valve to connect the impact component with the at least one ion chromatograph; the control unit includes a timing control module, and the at least one first switching valve and the at least one second switching valve can change the connection between each impact component and the first pump and the at least one ion chromatograph according to the plurality of timing signals of the timing control module. The ion chromatography sampling controller further comprises at least one calibration pipeline connected to the output pipeline, and the at least one calibration pipeline is used to input a calibration liquid to the at least one ion chromatograph; the control unit further comprises a state detection module, and the state detection module is used to receive and store a plurality of actuation signals from the sampling system and the at least one ion chromatograph, and the control unit can determine whether an abnormality occurs in the sampling system and the at least one ion chromatograph according to the plurality of actuation signals; and a gas flow controller is provided between the input pipeline and the first pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a three-dimensional diagram of a preferred embodiment of the utility model.

[0018] Figure 2This is a pipeline configuration diagram of a preferred embodiment of the utility model.

[0019] Figure 3 This is a communication structure block diagram of a preferred embodiment of the utility model.

[0020] Figure 4 This is a control flow chart of a preferred embodiment of the utility model.

[0021] Among them, 1: ion chromatography sampling controller; 2: sampling system; 3: ion chromatograph; 10: input pipeline; 11: gas flow controller; 20: pretreatment unit; 21: impact assembly; 211: impact bottle; 212: buffer bottle; 22: first switching valve; 30: first pump; 40: output pipeline; 41: second switching valve; 42: injection valve; 50: control unit; 51: timing control module; 52: access unit; 53: status detection module; 60: housing; 70: second pump; 80: first liquid pipeline; 81: first valve component; 90: gas pipeline; 91: second valve component; 100: second liquid pipeline; 101: third valve component; 110: calibration pipeline. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0023] The following are only examples of possible implementations of the present invention, but are not intended to limit the scope of protection of the present invention. The "one" or "at least one" preceding the nouns mentioned in the text does not limit the quantity, and it can also be "plural" according to needs. This change in quantity is also within the scope of protection, which is stated in advance.

[0024] Please refer to Figures 1 to 4 , which shows a preferred embodiment of the utility model. The ion chromatography sampling controller 1 of the utility model is connected between a sampling system 2 and at least one ion chromatograph 3, including: an input pipeline 10, a pretreatment unit 20, a first pump 30, an output pipeline 40 and a control unit 50.

[0025] The input pipeline 10 is used to connect the sampling system 2 to input a gas to be tested; the pretreatment unit 20 is used to collect at least one detection target in the gas to be tested using a liquid medium to form an analyte; the first pump 30 is gas-connected to the input pipeline 10 and the pretreatment unit 20 respectively; the output pipeline 40 is connected between the pretreatment unit 20 and the at least one ion chromatograph 3 and is used to output the analyte to the at least one ion chromatograph 3; the control unit 50 is connected to the pretreatment unit 20 and the first pump 30 and is communicatively connected to the at least one ion chromatograph 3, the control unit 50 can control the first pump 30 to pump air so that the gas to be tested enters the input pipeline 10 and the pretreatment unit 20, and can send a control signal to control the at least one ion chromatograph 3 to perform analysis to generate an analysis data. Thus, the ion chromatography sampling controller 1 of the utility model can be used in conjunction with the existing sampling system 2 and the at least one ion chromatograph 3 to directly sample air samples such as sulfuric acid, phosphoric acid, cyanfluoric acid, phosphoric acid, hydrochloric acid, ammonia, etc. in semiconductor factories, and can achieve automatic sampling and real-time detection, and can greatly save manpower and time costs.

[0026] In this embodiment, the ion chromatography sampling controller 1 further includes a housing 60 , and the input pipeline 10 , the pretreatment unit 20 , the output pipeline 40 and the control unit 50 are integrated in the housing 60 , which has a simple structure and is easy to move and convenient to use.

[0027] The ion chromatography sampling controller 1 further includes at least one second pump 70, which is connected to the at least one ion chromatograph 3. The control unit 50 can control the at least one second pump 70 to allow the analyte to enter the at least one ion chromatograph 3. In this embodiment, the number of the at least one ion chromatograph 3 is two and is used for anion analysis and cation analysis of the analyte respectively; each second pump 70 is connected to one ion chromatograph 3, and the control unit 50 can control the second pumps 70 to inject samples simultaneously or only inject samples into one of the ion chromatographs 3 according to the detection requirements, so that the same analyte can be analyzed simultaneously to avoid contamination concerns caused by cross-injection. However, the number of the at least one ion chromatograph can also be changed according to the detection requirements; each second pump can also be connected to a plurality of ion chromatographs and switch the injection by a switching valve.

[0028] Preferably, the pretreatment unit 20 includes a plurality of impact components 21 and at least one first switching valve 22, the at least one first switching valve 22 connects the plurality of impact components 21 and the first pump 30, and the control unit 50 can control the at least one first switching valve 22 to connect one of the impact components 21 and the first pump 30, whereby the plurality of impact components 21 can collect the gas to be tested in turn to achieve a continuous sampling effect. The output pipeline 40 is provided with at least one second switching valve 41 connected to the plurality of impact components 21, and the control unit 50 can control the at least one second switching valve 41 to connect one of the impact components 21 and the at least one ion chromatograph 3 to output the analyte from one of the impact components 21.

[0029] Each impact assembly 21 includes an impact bottle 211 and a buffer bottle 212. The impact bottle 211 is connected to the input pipeline 10, and the buffer bottle 212 is connected between the impact bottle 211 and the first pump 30, which can generate negative pressure in the impact bottle 211 to extract the gas to be tested and prevent liquid from flowing into the first pump 30. Preferably, a gas flow controller 11 is provided between the input pipeline 10 and the first pump 30, and the control unit 50 is connected to the gas flow controller 11 to accurately control the flow of the gas to be tested.

[0030] The ion chromatography sampling controller 1 further comprises a first liquid pipeline 80, which is connected to the input pipeline 10 for inputting a cleaning liquid, such as but not limited to deionized water; the ion chromatography sampling controller 1 further comprises a gas pipeline 90, which is connected to the input pipeline 10 for inputting a cleaning gas, such as but not limited to nitrogen or compressed dry air. The first liquid pipeline 80 is provided with a first valve member 81 connected to the control unit 50, and the gas pipeline 90 is provided with a second valve member 91 connected to the control unit 50. The control unit 50 can control the first valve member 81 and the second valve member 91 to open after each impact assembly 21 completes the collection of the at least one detection target and outputs the analyte to be analyzed, so as to input the cleaning liquid and the cleaning gas to clean the impact bottle 211, so as to facilitate the next gas collection operation. Before inputting the gas to be tested, the cleaning gas can be input first to remove the gas remaining in the impact bottle 211, thereby reducing the possibility of analysis error and contamination.

[0031] The ion chromatography sampling controller 1 further includes a second liquid pipeline 100, which is connected to the pre-processing unit 20 for inputting the liquid medium, and the liquid medium is, for example but not limited to, water or other liquids that can absorb the at least one detection target. The second liquid pipeline 100 is provided with a third valve 101 connected to the control unit 50, and the control unit 50 can control the third valve 101 to open before inputting the gas to be tested to quantitatively input the liquid medium, and the operation is accurate and conducive to automation.

[0032] Preferably, the ion chromatography sampling controller 1 further comprises at least one calibration pipeline 110 connected to the output pipeline 40, and the at least one calibration pipeline 110 is used to input a calibration liquid to the at least one ion chromatograph 3; the output pipeline 40 further comprises at least one injection valve, each of which is connected between one of the impact bottles 211 and one of the ion chromatographs 3 and connected to the control unit 50, and each of the calibration pipelines 110 is connected to one of the injection valves. Thus, the control unit 50 can control the at least one injection valve to connect each of the ion chromatographs 3 with one of the impact bottles 211 or one of the calibration pipelines 110, and can automatically switch to perform the analysis of the analyte or instrument calibration.

[0033] It should be particularly noted that the control unit 50 includes a timing control module 51, and the at least one first switching valve 22 and the at least one second switching valve 41 can change the connection state between each of the impact components 21 and the first pump 30 and the at least one ion chromatograph 3 according to the plurality of timing signals of the timing control module 51. In this way, when one of the plurality of impact components 21 performs the collection operation of the at least one detection target, the other of the plurality of impact components 21 can simultaneously perform the collection operation on another gas to be detected, or perform the cleaning operation to exclude the analyte that has been detected, saving operation time and facilitating continuous sampling. Furthermore, the timing control module 51 can control and set the operating time of the first pump 30 to extract the gas to be tested, the opening and closing sequence and time of the at least one first switching valve 22 and the at least one second switching valve 41, the operating time of the at least one second pump 70, the switching time of the first valve component 81, the second valve component 91 and the third valve component 101 and other time-related setting information according to the needs of the operator to meet different analysis requirements.

[0034] Preferably, the control unit 50 further includes an access unit 52. When the at least one ion chromatograph 3 completes the analysis and sends a feedback signal to the control unit 50, the access unit 52 reads and stores the analysis data (transmitted via Ethernet connection in this embodiment) to achieve automatic access to the analysis data. The control unit 50 can be connected to an external device, such as a computer, by wired or wireless means, and the ion chromatography sampling controller 1 can be controlled and set by the external device, and the content stored in the access unit 52 can be accessed, which is convenient for operation and can achieve remote control.

[0035] The control unit 50 further includes a state detection module 53, which is used to receive and store multiple actuation signals from the sampling system 2 and the at least one ion chromatograph 3. The control unit 50 can determine whether the sampling system 2 and the at least one ion chromatograph 3 have any abnormalities based on the multiple actuation signals. For example, the at least one ion chromatograph 3 does not send the feedback signal or cannot return to the standby state after completing the analysis. In this way, an activity record file can be formed or the abnormal actuation signals can be recorded when an abnormality occurs. The ion chromatography sampling controller 1 can also be further controlled to shut down to wait for the operator to eliminate the problem. The operation is safe and damage to the instrument can be avoided.

[0036] Figure 4 The exemplary control flow of the ion chromatography sampling controller 1 in this embodiment is shown. Specifically, the ion chromatography sampling controller 1, the sampling system 2 and the at least one ion chromatograph 3 can realize signal transmission, for example, through Modbus-TCP. For example, when the analyte is input into the at least one ion chromatograph 3 and the at least one ion chromatograph 3 is in a standby state, the control unit 50 can send the control signal (Digital output, DO) to the at least one ion chromatograph 3 to start analysis; when the at least one ion chromatograph 3 completes the analysis, the control unit 50 receives a feedback signal (Digital Input, DI) from the at least one ion chromatograph 3, and then controls the access unit 52 to obtain the analysis data.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. An ion chromatography sampling controller for connecting between a sampling system and at least one ion chromatograph, characterized in that: include: An input pipeline for connecting the sampling system to input a gas to be tested; A pre-processing unit for collecting at least one detection target in the gas to be detected by using a liquid medium to form an analyte; A first pump, gas-connected to the input pipeline and the pre-processing unit; an output pipeline connected between the pretreatment unit and the at least one ion chromatograph for outputting the analyte to the at least one ion chromatograph; and A control unit is connected to the pretreatment unit and the first pump for communication with the at least one ion chromatograph. The control unit can control the first pump to pump gas so that the gas to be tested enters the input pipeline and the pretreatment unit, and can send a control signal to control the at least one ion chromatograph to perform analysis to generate analysis data.

2. The ion chromatography sampling controller according to claim 1, characterized in that: The invention also comprises a first liquid pipeline, wherein the first liquid pipeline is connected to the input pipeline for inputting a cleaning liquid.

3. The ion chromatography sampling controller according to claim 1, characterized in that: A second liquid pipeline is further included, wherein the second liquid pipeline is connected to the pre-treatment unit for inputting the liquid medium.

4. The ion chromatography sampling controller according to claim 1, characterized in that: The invention also comprises a gas pipeline, wherein the gas pipeline is connected to the input pipeline for inputting a cleaning gas.

5. The ion chromatography sampling controller according to claim 1, characterized in that: The control unit includes an access unit, wherein when the at least one ion chromatograph completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data.

6. The ion chromatography sampling controller according to claim 1, characterized in that: At least one second pump is further included, wherein the at least one second pump is connected to the at least one ion chromatograph, and the control unit can control the at least one second pump to allow the analyte to enter the at least one ion chromatograph.

7. The ion chromatography sampling controller according to any one of claims 1 to 6, characterized in that: The pre-processing unit includes a plurality of impact components and at least one first switching valve. The at least one first switching valve connects the plurality of impact components and the first pump. The control unit can control the at least one first switching valve to connect one of the impact components and the first pump.

8. The ion chromatography sampling controller according to claim 7, characterized in that: The output pipeline is provided with at least one second switching valve connected to the plurality of impact components, and the control unit can control the at least one second switching valve to connect one of the impact components with the at least one ion chromatograph.

9. The ion chromatography sampling controller according to claim 8, characterized in that: The control unit includes a timing control module. The at least one first switching valve and the at least one second switching valve can change the connection state between each impact component and the first pump and the at least one ion chromatograph according to a plurality of timing signals of the timing control module.

10. The ion chromatography sampling controller according to claim 6, characterized in that: It also includes a first liquid pipeline, a second liquid pipeline and a gas pipeline, wherein the first liquid pipeline is connected to the input pipeline for inputting a cleaning liquid; the second liquid pipeline is connected to the pretreatment unit for inputting the liquid medium; the gas pipeline is connected to the input pipeline for inputting a cleaning gas; the first liquid pipeline is provided with a first valve connected to the control unit, and the gas pipeline is provided with a second valve connected to the control unit; the second liquid pipeline is provided with a third valve connected to the control unit, and the control unit can control the third valve to open before inputting the gas to be tested; the control unit includes an access unit, wherein when the at least one ion chromatograph completes the analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data; the pretreatment unit includes a plurality of impact components and at least one first switching valve, the at least one first switching valve connects the plurality of impact components with the first pump, and the control unit can control the at least one first switching valve to connect one of the impact components with the first pump; each of the impact components includes an impact bottle and a buffer bottle, The impact bottle is connected to the input pipeline, and the buffer bottle is connected between the impact bottle and the first pump; the output pipeline is provided with at least one second switching valve connected to the plurality of impact components, and the control unit can control the at least one second switching valve to connect the impact component with the at least one ion chromatograph; the control unit includes a timing control module, and the at least one first switching valve and the at least one second switching valve can change the connection state of each impact component with the first pump and the at least one ion chromatograph according to the plurality of timing signals of the timing control module ; The ion chromatography sampling controller further includes at least one calibration pipeline connected to the output pipeline, and the at least one calibration pipeline is used to input a calibration liquid to the at least one ion chromatograph; the control unit further includes a state detection module, and the state detection module is used to receive and store multiple actuation signals from the sampling system and the at least one ion chromatograph. The control unit can determine whether the sampling system and the at least one ion chromatograph are abnormal based on the multiple actuation signals; and a gas flow controller is provided between the input pipeline and the first pump.

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