Micro macro-micro two-degree-of-freedom piezoelectric driving precision micro-operation platform

Abstract

The utility model discloses a micro macro-micro two-degree-of-freedom piezoelectric driving precision micro-operation platform, and belongs to the technical field of precision operation. Comprising an outer protective shell, a base is arranged at the bottommost end in the outer protective shell, ear edges on the two sides of the base penetrate through the outer protective shell, an amplification type stick-slip mechanism is installed on the upper surface of the base, a Z-axis lifting platform is arranged above the base in a buckled mode, and a symmetrical flexible displacement amplification mechanism is arranged on the Z-axis lifting platform. According to the micro macro-micro two-degree-of-freedom piezoelectric driving precision micro-operation platform provided by the utility model, theoretical infinite-distance rotation of the end face cam can be realized by virtue of the amplification type stick-slip mechanism, and macro millimeter-level movement of a Z axis is realized through the end face cam and the lifting platform; the precise micro-operation platform has the advantages and characteristics of simple and compact structure, small size, stable performance, adjustable movement speed, high precision, capability of realizing Y-axis micron movement and Z-axis millimeter movement and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of precision operation, in particular to a micro macro two-degree-of-freedom piezoelectric-driven precision micro-operation platform. Background Technique

[0002] In recent years, due to the advantages of high resolution, fast response speed, high motion accuracy, large output stiffness, high structural compactness, etc., piezoelectric ceramics have gradually become displacement driving components in the field of micro-nano motion. The current main application scenarios of piezoelectric ceramics include precision positioning, inkjet printing, high-speed manufacturing, etc. The output displacement ability of piezoelectric ceramics comes from the inverse piezoelectric effect of the piezoelectric ceramics themselves, and its main function is to convert the input electrical energy into output mechanical energy. However, the output displacement of piezoelectric ceramics is small, and the output displacement can only meet the requirements of the micron level and cannot cope with the application scenarios of the millimeter level. In the face of precision operation, the macroscopic displacement of the macro-micro two-degree-of-freedom piezoelectric-driven precision micro-operation platform proposed at present mostly uses voice coil motors for driving, which has a large device volume and is not structurally compact. Therefore, in the face of the use scenario of macro-micro two-degree-of-freedom precision operation in a small space, a micro macro two-degree-of-freedom piezoelectric-driven micro-operation platform is currently needed. Content of the Utility Model

[0003] The purpose of the utility model is to provide a micro macro two-degree-of-freedom piezoelectric-driven precision micro-operation platform, which solves the technical problem of how to achieve macro-micro precision operation in a small space and realizes the output of precision motion displacement of macro-micro two degrees of freedom.

[0004] To achieve the above object, the utility model provides a micro macro two-degree-of-freedom piezoelectric-driven precision micro-operation platform, which includes an outer protective shell. The bottom end inside the outer protective shell is provided with a base, and the ears on both sides of the base penetrate through the outer protective shell. An amplified stick-slip mechanism is installed on the upper surface of the base, and a Z-axis lifting platform is buckled above the base. A symmetric compliant displacement amplification mechanism is arranged on the Z-axis lifting platform.

[0005] Preferably, the symmetric compliant displacement amplification mechanism includes a three-stage compliant amplifier, a first positioning screw, a washer, a first adjusting screw, and a first piezoelectric block. The three-stage compliant amplifier includes a lever-type, an SR-type, and a triangular amplification mechanism connected in series symmetrically for amplifying the Y-axis output displacement. The first positioning screw is used for fixing the spatial position of the compliant amplifier. The washer cooperates with the first positioning screw to isolate the Z-axis lifting platform and the compliant amplifier to ensure the normal operation of the amplifier function. The first adjusting screw is connected to the compliant amplifier through a threaded fit and is used for adjusting the pre-tightening force between the first piezoelectric block and the compliant amplifier. The first piezoelectric block is embedded in the compliant amplifier and is the driver for the Y-axis output displacement.

[0006] Preferably, the Z-axis lifting platform includes dowel screws, adjusting springs, and a lifting table. The dowel screws are threadedly connected to the base for positioning the lifting table and providing an operating track for the lifting of the lifting table; the adjusting springs are placed between the dowel screws and the lifting table to provide a restoring force for the lifting table; the end face of the lifting table is used to carry the compliant displacement amplification mechanism, and the bottom surface is provided with a cam push rod in cooperation with the amplified stick-slip mechanism through a raised cylinder. Openings are provided at the four corners of the lifting table, and the dowel screws are installed in the openings through the adjusting springs.

[0007] Preferably, the amplified stick-slip mechanism includes a secondary compliant amplifier, an end face cam, a bearing, a second positioning screw, a second adjusting screw, a support screw, and a second piezoelectric block. The secondary compliant amplifier is fixedly connected to the base by threading the second positioning screw. The secondary compliant amplifier includes a bridge-type and a parallelogram amplification mechanism. The support screw is threadedly connected to the base to support the secondary compliant amplifier and prevent unnecessary deformation of the secondary compliant amplifier; the second piezoelectric block is arranged in the groove of the secondary compliant amplifier; the second adjusting screw is threadedly connected to the secondary compliant amplifier to adjust the pre-tightening force between the second piezoelectric block and the secondary compliant amplifier; the bearing is connected to the base by interference fit; the inner side of the end face cam is connected to the bearing by interference fit, and the side is tangent to the parallelogram amplification mechanism of the secondary compliant amplifier.

[0008] Preferably, a groove is provided on the ear of the base for flexible fixed connection between the precision micro-operation platform and external parts.

[0009] Therefore, the present utility model adopts a micro macro two-degree-of-freedom piezoelectric-driven precision micro-operation platform with the above structure, and has the following beneficial effects:

[0010] (1) By means of the series design of symmetric multi-amplifiers of the compliant amplification mechanism, the present utility model can increase the precision output displacement driven by the Y-axis piezoelectric block and achieve micron-level movement in the Y-axis; on the other hand, by means of the amplified stick-slip mechanism, the theoretical infinite-distance rotation of the end face cam can be achieved, and the macroscopic millimeter-level movement of the Z-axis can be achieved through the end face cam and the lifting table.

[0011] (2) The amplified stick-slip mechanism in the present utility model can achieve reverse locking, ensuring the stability of the platform during operation and avoiding situations such as backward movement during the operation of precision movement.

[0012] (3) The Y-axis and Z-axis motion platforms of the utility model adopt a stacked spatial arrangement and are organically combined with the lifting platform in the middle, so that the spatial volume of the overall precision micro-operation platform is effectively reduced and the device structure is compact. The utility model provides a macro-micro motion precision micro-operation platform with Y-axis micro-nano precision, Z-axis macro-millimeter precision, fast response, high resolution, stable working performance, and high output accuracy.

[0013] (4) The utility model realizes a precision micro-manipulation platform based on the principle of viscous friction and compliant displacement amplification technology, which has a simple and compact structure, small size, stable performance, adjustable motion speed, high precision, and can realize Y-axis micron motion and Z-axis millimeter motion. The precision micro-manipulation platform obtained by the utility model cleverly uses the end face cam to convert circular motion into Z-axis linear motion, realizing the reversal of motion and motion from micron level to millimeter level.

[0014] The technical solution of the utility model is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of a micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform of the utility model;

[0016] Figure 2 It is a schematic diagram of the exploded structure of a compliant displacement amplification mechanism in a micro-macro-micro two-degree-of-freedom piezoelectric-driven precision micro-operation platform of the utility model;

[0017] Figure 3 It is a schematic diagram of the exploded structure of a Z-axis lifting platform in a micro-macro-micro two-degree-of-freedom piezoelectric-driven precision micro-operation platform of the utility model;

[0018] Figure 4 It is a schematic diagram of the enlarged stick-slip mechanism and base structure in a micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform of the utility model;

[0019] Reference numerals

[0020] 1. Outer protective shell; 2. Symmetrical compliant displacement amplification mechanism; 3. Z-axis lifting platform; 4. Amplified stick-slip mechanism; 5. Base; 21. First positioning screw; 22. First piezoelectric block; 23. First adjusting screw; 24. Washer; 25. Three-stage compliant amplifier; 251. Lever-type amplification mechanism; 252. SR-type amplification mechanism; 253. Triangular amplification mechanism; 31. Dowel screw; 32. Adjusting spring; 33. Lifting table; 41. End face cam; 42. Bearing; 43. Second adjusting screw; 44. Second positioning screw; 45. Support screw; 46. Second piezoelectric block; 47. Two-stage compliant amplifier; 471. Bridge-type amplification mechanism; 472. Parallelogram amplification mechanism; 5. Base. Detailed implementation manners

[0021] The technical solutions of the present utility model will be further described below with reference to the accompanying drawings and embodiments.

[0022] Unless otherwise defined, the technical terms or scientific terms used in the present utility model shall have the ordinary meanings understood by those of ordinary skill in the field to which the present utility model belongs. The "first", "second" and similar terms used in the present utility model do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0023] Embodiment

[0024] As Figures 1-4As shown in the figure, the present utility model provides a micro macro two-degree-of-freedom piezoelectric-driven precision micro-operation platform, which comprises an outer protective shell 1, a symmetric compliant displacement amplification mechanism 2, a Z-axis lifting platform 3, an amplified stick-slip mechanism 4, and a base 5. Through applying a voltage excitation to the first piezoelectric block 22 in the present utility model patent, the first piezoelectric block 22 outputs a precisely adjustable small displacement, and through the displacement amplification of the three-stage compliant amplifier 25, the micro-nano level microscopic movement in the Y-axis is realized. Through applying a voltage excitation to the second piezoelectric block 46, the second piezoelectric block 46 outputs a precisely adjustable small displacement, and through the displacement amplification of the two-stage compliant amplifier 47, the process of generating a stick-slip movement between the parallelogram amplification mechanism 472 and the end face cam 41 is realized, thereby driving the end face cam 41 with a bearing 42 to achieve a rotational movement. Through the cooperation of the end face cam 41 and the cam push rod of the lifting platform 33, the millimeter-level macroscopic movement in the Z-axis direction is realized. Thus, the two-degree-of-freedom macro-micro movement operation of the Y-axis and Z-axis of the precision micro-operation platform is realized.

[0025] The symmetric compliant displacement amplification mechanism 2 and the amplified stick-slip mechanism 4 are the core components of this precision micro-operation platform. The symmetric compliant displacement amplification mechanism 2 is composed of two sets of symmetric three-stage compliant amplifiers 25, first positioning screws 21, first piezoelectric blocks 22, first adjusting screws 23, washers 24, etc. The whole symmetric compliant displacement amplification mechanism 2 presents a cuboid shape. The first piezoelectric block 22 provides the input displacement of the symmetric compliant displacement amplification mechanism 2, and the first adjusting screw 23 cooperates with the first piezoelectric block 22 to realize the adjustment of the pre-tightening force. The three-stage compliant amplifier 25 innovatively uses a series arrangement method of three amplification mechanisms, namely a lever-type amplification mechanism 251, an SR-type amplification mechanism 252, and a triangular amplification mechanism 253. At the same time, two sets of symmetric arrangements are presented, thereby ensuring the linearity of the output displacement at the output end.

[0026] The first piezoelectric block 22 serves as the driving element of the symmetric compliant displacement amplification mechanism 2. The first piezoelectric block 22 is placed in the middle empty slot. Utilizing the inverse piezoelectric effect of the piezoelectric material, electrical energy is converted into mechanical energy. After the small displacement change of the first piezoelectric block 22 is amplified by the three-stage compliant amplifier 25, the output displacement realizes amplification at the micro-nano level, making up for the shortcoming of the too small output displacement of the first piezoelectric block 22 and expanding the movement stroke in the Y-axis.

[0027] At the end of the three-stage compliant amplifier 25, there is a flat-end compliant driving foot for operation to realize the two-degree-of-freedom movement operation at the end, which can adapt to scenarios such as micro-assembly.

[0028] The amplified stick-slip mechanism 4 is composed of a two-stage compliant amplifier 47, a second piezoelectric block 46, a second adjusting screw 43, a support screw 45, etc. The two-stage compliant amplifier 47 includes a bridge-type amplification mechanism 471 and a parallelogram amplification mechanism 472, which are connected in series. A driving foot is provided at the end of the parallelogram amplification mechanism 472, and the driving foot is in tangential contact with the side surface of the end face cam 41. A second adjusting screw 43 is provided to adjust the pre-tightening force between the driving foot and the end face cam 41. The driving foot at the end of the parallelogram amplification mechanism 472 can drive the end face cam 41 to rotate circumferentially through the frictional stick-slip action of generating a tangential force through deformation.

[0029] The second piezoelectric block 46 inputs displacement to the bridge-type amplification mechanism 471 by utilizing the inverse piezoelectric characteristic of the piezoelectric material, causing the end of the bridge-type amplification mechanism 471 to deform. The parallelogram amplification mechanism 472 receives the end deformation displacement of the bridge-type amplification mechanism 471. The driving foot of the parallelogram amplification mechanism 472 is squeezed and deformed. Through signal adjustment, stick or slip frictional motion states are generated at different stages of deformation, driving the end face cam 41 and the bearing 42 to rotate.

[0030] The Z-axis lifting platform 3 includes dowel screws 31, adjusting springs 32, a lifting table 33, etc. Four groups of dowel screws 31 and adjusting springs 32 are respectively arranged at the four corners of the lifting table 33. The dowel screws 31 can play a role in positioning and providing a track, and the adjusting springs 32 provide the restoring force for the lifting table. A symmetric compliant displacement amplification mechanism 2 is fixed on the upper surface of the lifting table 33. There are two symmetrically arranged push rods under the lifting table 33, which are used to cooperate with the end face cam 41 to realize the conversion of circumferential rotation and Z-axis upward movement, thereby realizing the millimeter-level macroscopic movement of the Z-axis. The lifting stroke movement distance of the Z-axis is related to the geometric parameters of the end face cam 41, and different lengths of Z-axis movement strokes can be realized by adjusting the geometric parameters.

[0031] Working principle: By combining and adopting the symmetric compliant displacement amplification mechanism 2, the Z-axis lifting platform 3, and the amplified stick-slip mechanism 4, the Y-axis output and Z-axis output of the first piezoelectric block 22 and the second piezoelectric block 46 are realized.

[0032] The entire device of the precision micro-operation platform mainly includes an outer protective shell 1, a symmetric compliant displacement amplification mechanism 2, a Z-axis lifting platform 3, an amplified stick-slip mechanism 4, and a base 5. Among them, the three-stage compliant amplifier 25 in the symmetric compliant displacement amplification mechanism 2 is the key component to realize Y-axis displacement amplification. It is made by integral wire cutting of aluminum alloy. The flexible hinge generated by wire cutting is equivalent to a rotating pair. The integral design improves the actuation accuracy and does not require later lubrication and maintenance. The first piezoelectric block 22 cooperates with the first adjusting screw 23 to provide input displacement and pre-tightening force.

[0033] The three-stage compliant amplifier 25 is integrally processed and manufactured, which integrates a lever-type amplification mechanism 251, an SR-type amplification mechanism 252, and a triangular amplification mechanism 253 to amplify the small displacement of the output of the first piezoelectric block 22. Among them, the circular hinge part adopts a straight-round design, which can effectively provide rotational accuracy and fatigue life. A straight-beam flexible hinge is provided at the end to ensure the linearity of the output displacement of the output end and realize the displacement output in the Y-axis direction.

[0034] The symmetric compliant displacement amplification mechanism 2 and the Z-axis lifting platform 3 are arranged in a stacked manner, saving space. The bottom push rod of the Z-axis lifting platform 3 is affected by the amplified stick-slip mechanism 4, resulting in the lifting movement of the Z-axis. Among them, during the rising stage of the lifting platform 33, it moves along the dowel screw 31 and compresses the adjusting spring 32. During the descending stage of the lifting platform 33, it returns to the initial position under the simultaneous action of gravity and the restoring force of the adjusting spring 32.

[0035] In the amplified stick-slip mechanism 4, the cooperation of the end face cam 41 and the bearing 42 is used to realize the conversion between circular motion and linear motion in the Z-axis direction, which is the core to realize the Z-axis motion. This design is different from the current rotary stick-slip mechanism that only realizes circular motion, expanding the application scenario of the rotary stick-slip mechanism. The pre-tightening and the input displacement of the stick-slip mechanism are realized through the second adjusting screw 43 and the second piezoelectric block 46, so that the magnitude of the interaction force between them can be adjusted according to needs for different motion requirements, so as to adjust the rotation speed of the bearing 42.

[0036] The working process of this piezoelectric-driven precision micro-operation device is as follows: First, the entire mechanical device is in an initial static state, and the first piezoelectric block 22 and the second piezoelectric block 46 are not energized. At this time, the end driving foot of the parallelogram amplification mechanism 472 is in close contact with the side of the end face cam 41. At this time, the first adjusting screw 23 and the second adjusting screw 43 can be adjusted according to needs to adjust the pre-tightening force. Subsequently, a triangular wave voltage is applied to the second piezoelectric block 46, and the second piezoelectric block 46 slowly increases. The bridge-type amplification mechanism 471 and the parallelogram amplification mechanism 472 deform, and the end face cam 41 and the bearing 42 generate a circular rotational motion to drive the lifting platform 33 to realize the Z-axis lifting motion until reaching the Z-axis target position. After reaching the Z-axis target position, a linear signal is applied to the first piezoelectric block 22. After the first piezoelectric block 22 receives the signal, its length slowly changes until reaching the Y-axis target position, completing the working requirements of the precision micro-operation.

[0037] Therefore, the present utility model adopts the above-mentioned micro macro-micro two-degree-of-freedom piezoelectric-driven precision micro-operation platform, which has the advantages and characteristics of simple and compact structure, small volume, stable performance, adjustable movement speed, high precision, and being able to realize precision micro-operation platforms with micron movement in the Y-axis direction and millimeter movement in the Z-axis direction.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform, characterized by: It includes an outer protective shell, a base is arranged at the bottom end inside the outer protective shell, and the ears on both sides of the base pass through the outer protective shell, an amplifying stick-slip mechanism is installed on the upper surface of the base, a Z-axis lifting platform is buckled above the base, and a symmetrical flexible displacement amplifying mechanism is arranged on the Z-axis lifting platform.

2. The micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform according to claim 1, characterized in that: The symmetrical compliant displacement amplification mechanism includes two sets of three-stage compliant amplifiers, two sets of first positioning screws, two sets of first piezoelectric blocks, two sets of first adjusting screws and two sets of washers, and each set of three-stage compliant amplifiers, first positioning screws, first piezoelectric blocks, first adjusting screws and washers are symmetrically arranged.

3. The micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform according to claim 2, characterized in that: The three-stage compliant amplifier includes a lever-type amplifying mechanism, an SR-type amplifying mechanism and a triangle-type amplifying mechanism, and the lever-type amplifying mechanism, the SR-type amplifying mechanism and the triangle-type amplifying mechanism are arranged in series.

4. The micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform according to claim 1, characterized in that: The Z-axis lifting platform includes a lifting platform, and openings are arranged at the four corners of the lifting platform. The plug screws are installed in the openings arranged at the four corners of the lifting platform through adjusting springs.

5. The micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform according to claim 1, characterized in that: The amplified stick-slip mechanism comprises a secondary compliance amplifier, an end face cam, a bearing, a second positioning screw, a second adjusting screw, a supporting screw, and a second piezoelectric block. The second piezoelectric block is arranged on the inner side of the secondary compliance amplifier. The bearing and the base are connected by interference fit. The inner side of the end face cam is connected to the bearing by interference fit. The secondary compliant amplifier comprises a bridge-type amplifying mechanism and a parallelogram amplifying mechanism, and the bridge-type amplifying mechanism is tangent to the side surface of the end face cam through the parallelogram amplifying mechanism.

6. The micro-macro-micro two-degree-of-freedom piezoelectric driven precision micro-operation platform according to claim 1, characterized in that: The ear edge of the base is provided with a groove for fixedly connecting the precision micro-operation platform with external parts.

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