Silicon carbide graphite carrier plate air flotation device

Abstract

The utility model relates to the technical field of graphite carrier plate air flotation devices, in particular to a silicon carbide graphite carrier plate air flotation device which comprises a base body, a cavity is formed in one side, close to the top, of the base body, a vent hole is formed in the top, close to the cavity, of the base body, an adjusting groove is formed in the bottom, close to the cavity, of the base body, and the adjusting groove is communicated with the cavity. An electric push rod is arranged in the adjusting groove, and the output end of the electric push rod is fixedly connected with a top plate. The device has the advantages that when the device is used, the top plate can be moved to the top end of the adjusting groove by positively starting the electric push rod, at the moment, gas can be exhausted only through the vent hole in the cavity, and hydrogen exhausted into the cavity through the gas inlet pipe can be directly exhausted upwards through the vent hole; the top plate can be moved to the bottom of the pipeline by reversely starting the electric push rod, and the graphite powder in the cavity and the top of the top plate can be extracted and cleaned through the pipeline by starting the dust collector, so that the purpose of conveniently cleaning the graphite powder in the cavity is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite carrier plate air floating devices, in particular to a silicon carbide graphite carrier plate air floating device. Background Art

[0002] The graphite plate is a graphite carrier plate used for manufacturing LED epitaxial wafers. The silicon carbide coating can prevent the graphite plate from oxidizing at a high temperature of 1600 °C, further improving its service life. The air floating device at the bottom of the graphite plate can make the graphite plate rotate slowly on its top. Hydrogen is filled into the circular base chamber through the hydrogen inlet, and the hydrogen is discharged through the ventilation holes on the upper surface of the circular base and sprayed onto the graphite plate. The driving force generated by the hydrogen makes the graphite plate rotate slowly on the circular base.

[0003] The existing graphite plate air floating device has a simple structure and consists of a main body, ventilation holes, a chamber and an inlet pipe. Although it can make the graphite plate on its top rotate, due to the relatively high temperature of silicon carbide epitaxial growth, hydrogen has an etching effect on graphite parts at high temperatures. After stopping the output of hydrogen, a part of the graphite powder or debris will enter the interior of the chamber and is difficult to clean. Summary of the Utility Model

[0004] The purpose of the utility model aims to solve at least one of the technical defects.

[0005] The purpose of the utility model is to overcome the shortcomings of the prior art, solve the problems mentioned in the background art, and provide a silicon carbide graphite carrier plate air floating device.

[0006] The purpose of the utility model is realized through the following technical solutions: a silicon carbide graphite carrier plate air floating device, including a base body, a chamber is opened on one side of the base body near the top, ventilation holes are opened on the top of the base body near the chamber, an adjustment groove is opened on the bottom of the base body near the chamber, an electric push rod is arranged inside the adjustment groove, the output end of the electric push rod is fixedly connected with a top plate, and a pipeline is fixedly connected to one side of the base body near the top of the adjustment groove;

[0007] A threaded groove is opened on the inner wall of the adjustment groove near the bottom, a threaded column is fixedly connected to the bottom end of the electric push rod, a baffle is fixedly connected to the bottom of the threaded column, a pinch plate is fixedly connected to the bottom of the baffle, an inlet pipe is fixedly connected to one side of the chamber near the top, and an inclined pipe is fixedly connected to the output end of the inlet pipe.

[0008] Preferably, a cushion layer is fixedly connected to the bottom of the base body, and the number of the cushion layers is three. The three cushion layers are welded to the bottom edge of the base body in a circumferential array.

[0009] By adopting the above technical solutions, the three cushion layers can stably support the base body.

[0010] Preferably, the shape of the chamber is funnel-shaped. The vent hole is in communication with the chamber. The adjustment groove is located at the center of the bottom of the chamber, and the chamber is in communication with the adjustment groove.

[0011] By adopting the above technical solution, the funnel-shaped chamber can cause the graphite powder falling into the chamber to gather at its bottom.

[0012] Preferably, the top plate is a circular plate, the adjustment groove is a circular groove, and the diameter of the top plate is adapted to the diameter of the adjustment groove.

[0013] By adopting the above technical solution, the electric push rod can adjust the height of the top plate. When the electric push rod completely pushes out the top plate, the top plate is located at the top of the adjustment groove. When the electric push rod completely retracts the top plate, the top plate is located at the bottom side of the adjustment groove close to the pipeline, and at this time the pipeline is in communication with the adjustment groove.

[0014] Preferably, the input end of the pipeline is in communication with the adjustment groove, a dust collector is arranged at the output end of the pipeline, and one end of the pipeline is embedded and installed inside the base body.

[0015] By adopting the above technical solution, starting the dust collector can extract the graphite powder gathered in the chamber through the pipeline.

[0016] Preferably, the threaded post is adapted to the threaded groove. The length of the intake pipe is one-third of the diameter of the base body, and the direction of the inclined pipe air outlet is downward.

[0017] By adopting the above technical solution, the setting of the threaded post can facilitate the installation and disassembly of the electric push rod, and the setting of the inclined pipe with the opening downward can prevent the graphite powder from falling into the intake pipe.

[0018] Preferably, the baffle is welded at the center of the bottom of the electric push rod, and a pinch plate is welded at the center of the bottom of the baffle. The pinch plate is a rectangular plate.

[0019] By adopting the above technical solution, the setting of the pinch plate facilitates the threaded installation of the threaded post inside the adjustment groove, and the setting of the baffle can prevent the threaded post from being rotated excessively into the adjustment groove.

[0020] Compared with the prior art, the present utility model has the following advantages:

[0021] 1. The silicon carbide graphite carrier plate air-floating device is provided with a top plate. An electric push rod is arranged inside the adjustment groove, and the output end of the electric push rod is fixedly connected with the top plate. One side of the base body close to the top of the adjustment groove is fixedly connected with a pipeline. During use, when the electric push rod is started forward, the top plate can be moved to the top of the adjustment groove. At this time, only the ventilation holes can discharge gas from the chamber, and the hydrogen gas introduced into the chamber through the intake pipe can directly discharge upward through the ventilation holes. After use, when the electric push rod is started in reverse, the top plate can be moved to the position at the bottom of the pipeline, and then the dust collector is started to extract and clean the graphite powder inside the chamber and on the top of the top plate, achieving the purpose of facilitating the cleaning of the graphite powder in the chamber without affecting the normal use of the air-floating device next time.

[0022] 2. The silicon carbide graphite carrier plate air-floating device is provided with an inclined pipe. One side of the chamber close to the top is fixedly connected with an intake pipe, and the output end of the intake pipe is fixedly connected with the inclined pipe. The outlet direction of the inclined pipe is downward. The setting of the inclined pipe can prevent the graphite powder from directly falling into the inside of the intake pipe, achieving the purpose of protecting the intake pipe. The setting of the pinch plate can facilitate the threaded installation of the threaded column inside the adjustment groove, achieving the purpose of facilitating the installation of the electric push rod. The setting of the baffle can prevent the threaded column from being rotated excessively into the inside of the adjustment groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic structural diagram of the first perspective of the present utility model;

[0024] Figure 2 is a schematic structural diagram of the second perspective of the present utility model;

[0025] Figure 3 is a schematic structural diagram of the inside of the base body of the present utility model;

[0026] Figure 4 is a schematic structural diagram of the top plate of the present utility model;

[0027] Figure 5 is a schematic structural diagram of the inclined pipe of the present utility model.

[0028] In the figure: 1 - base body, 2 - chamber, 3 - ventilation hole, 4 - adjustment groove, 5 - electric push rod, 6 - top plate, 7 - pipeline, 8 - thread groove, 9 - threaded column, 10 - baffle, 11 - intake pipe, 12 - inclined pipe, 13 - cushion layer, 14 - pinch plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] Additional aspects and advantages of the present utility model will be further given in the following description with reference to the drawings, and some will become obvious from the following description or be understood through the practice of the present utility model.

[0030] Such as Figures 1-4As shown in the figure, a gas-floating device for a silicon carbide graphite carrier plate includes a base body 1. A chamber 2 is provided on one side of the base body 1 near the top. An air vent 3 is provided on the top of the base body 1 near the chamber 2. An adjustment groove 4 is provided at the bottom of the base body 1 near the chamber 2. An electric push rod 5 is installed inside the adjustment groove 4. The output end of the electric push rod 5 is welded with a top plate 6. A pipe 7 is embedded and installed on one side of the base body 1 near the top of the adjustment groove 4.

[0031] With the above settings, during use, when the electric push rod 5 is started forward, the top plate 6 can be moved to the top of the adjustment groove 4. At this time, only the air vent 3 in the chamber 2 can discharge gas. The hydrogen gas introduced into the chamber 2 through the inlet pipe 11 can be directly discharged upward through the air vent 3. After use, when the electric push rod 5 is started in reverse, the top plate 6 can be moved to the position at the bottom of the pipe 7. By starting the vacuum cleaner, the graphite powder in the chamber 2 and on the top of the top plate 6 can be extracted and cleaned through the pipe 7, achieving the purpose of facilitating the cleaning of the graphite powder in the chamber 2 without affecting the normal use of the gas-floating device next time.

[0032] As shown in Figures 1-3 and Figure 5 the figure, a threaded groove 8 is provided on the inner wall of the adjustment groove 4 near the bottom. A threaded column 9 is welded to the bottom end of the electric push rod 5. A baffle 10 is welded to the bottom of the threaded column 9. A pinch plate 14 is welded to the bottom of the baffle 10. An inlet pipe 11 is installed on one side of the chamber 2 near the top. The output end of the inlet pipe 11 is connected to an inclined pipe 12 through a pipe.

[0033] With the above settings, the outlet direction of the inclined pipe 12 is downward. The inclined pipe 12 can prevent the graphite powder from directly falling into the inlet pipe 11, achieving the purpose of protecting the inlet pipe 11. The pinch plate 14 can facilitate the threaded installation of the threaded column 9 inside the adjustment groove 4, achieving the purpose of facilitating the installation of the electric push rod 5. The baffle 10 can prevent the threaded column 9 from being rotated excessively into the adjustment groove 4.

[0034] As a preferred technical solution of the present invention, a cushion layer 13 is fixedly connected to the bottom of the base body 1. The number of the cushion layers 13 is three, and the three cushion layers 13 are welded to the bottom edge of the base body 1 in a circumferential array.

[0035] As a preferred technical solution of the present invention, the shape of the chamber 2 is funnel-shaped. The air vent 3 is communicated with the chamber 2. The adjustment groove 4 is located at the central position of the bottom of the chamber 2, and the chamber 2 is communicated with the adjustment groove 4.

[0036] As a preferred technical solution of the present invention, the top plate 6 is a circular plate, the adjustment groove 4 is a circular groove, and the diameter of the top plate 6 is adapted to the diameter of the adjustment groove 4.

[0037] As a preferred technical solution of the present utility model, the input end of the pipeline 7 is communicated with the adjustment groove 4, a dust collector is arranged at the output end of the pipeline 7, and one end of the pipeline 7 is embedded and installed inside the base body 1.

[0038] As a preferred technical solution of the present utility model, the threaded column 9 is adapted to the threaded groove 8. The length of the air inlet pipe 11 is one-third of the diameter of the base body 1, and the direction of the air outlet of the inclined pipe 12 is downward.

[0039] As a preferred technical solution of the present utility model, the baffle 10 is welded to the center of the bottom of the electric push rod 5, and a pinch plate 14 is welded to the center of the bottom of the baffle 10. The pinch plate 14 is a rectangular plate.

[0040] The working process of the present utility model is as follows:

[0041] S1. The threaded column 9 can be threadedly installed inside the adjustment groove 4 by holding the pinch plate 14. The setting of the baffle 10 can prevent the threaded column 9 from being rotated excessively into the adjustment groove 4.

[0042] S2. During use, starting the electric push rod 5 forward can move the top plate 6 to the top of the adjustment groove 4. At this time, only the ventilation hole 3 can discharge gas from the chamber 2, and the hydrogen gas discharged into the chamber 2 through the air inlet pipe 11 can directly discharge upward through the ventilation hole 3.

[0043] S3. After use, starting the electric push rod 5 in reverse can move the top plate 6 to the position at the bottom of the pipeline 7. At this time, the adjustment groove 4 is communicated with the pipeline 7. Starting the dust collector can extract and clean the graphite powder in the chamber 2 and on the top of the top plate 6 through the pipeline 7, achieving the purpose of facilitating the cleaning of the graphite powder in the chamber 2 and not affecting the normal use of the air flotation device next time.

[0044] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide graphite carrier plate flotation device, characterized in that: The invention comprises a base body (1), a chamber (2) is provided on one side of the base body (1) near the top, a vent hole (3) is provided on the top of the base body (1) near the chamber (2), an adjustment groove (4) is provided on the bottom of the base body (1) near the chamber (2), an electric push rod (5) is arranged inside the adjustment groove (4), an output end of the electric push rod (5) is fixedly connected to a top plate (6), and a pipe (7) is fixedly connected on one side of the base body (1) near the top of the adjustment groove (4); The inner wall of the adjustment groove (4) near the bottom is provided with a threaded groove (8); the bottom end of the electric push rod (5) is fixedly connected to a threaded column (9); the bottom of the threaded column (9) is fixedly connected to a baffle (10); the bottom of the baffle (10) is fixedly connected to a pinching plate (14); the side of the chamber (2) near the top is fixedly connected to an air intake pipe (11); the output end of the air intake pipe (11) is fixedly connected to an inclined pipe (12).

2. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: A cushion layer (13) is fixedly connected to the bottom of the base body (1), the number of the cushion layers (13) is three, and the three cushion layers (13) are welded to the bottom edge of the base body (1) in a circumferential array.

3. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: The chamber (2) is funnel-shaped, the vent hole (3) is connected to the chamber (2), the adjustment groove (4) is located at the center of the bottom of the chamber (2), and the chamber (2) is connected to the adjustment groove (4).

4. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: The top plate (6) is a circular plate, the adjustment groove (4) is a circular groove, and the diameter of the top plate (6) is matched with the diameter of the adjustment groove (4).

5. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: The input end of the pipe (7) is connected to the adjustment groove (4), the output end of the pipe (7) is provided with a vacuum cleaner, and one end of the pipe (7) is embedded in the interior of the base body (1).

6. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: The threaded column (9) is matched with the threaded groove (8); the length of the air inlet pipe (11) is one third of the diameter of the base body (1); and the air outlet of the inclined pipe (12) is directed downward.

7. The silicon carbide graphite carrier plate flotation device according to claim 1, characterized in that: The baffle (10) is welded to the center of the bottom of the electric push rod (5), and a pinching plate (14) is welded to the center of the bottom of the baffle (10), and the pinching plate (14) is a rectangular plate.

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