Integrated system
By designing an integrated system and using multiple independent processing modules to share interfaces with the transmission device, the problems of high cost and low integration of existing semiconductor devices are solved, and more efficient equipment integration and cost reduction are achieved.
Patent Information
- Application Number
- CN202420606478.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-26
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-03-26
AI Technical Summary
The existing semiconductor devices need to be configured with multiple transmission devices, resulting in high equipment costs and low integration.
An integrated system is designed, including a transmission device and a plurality of independent processing modules surrounding its side, and each processing module is connected through a detachable interface of the electronic control module to achieve high integration of the shared transmission device.
It improves the integration of the equipment, reduces the overall cost, and allows the processing module to be replaced at any time to adapt to different inspection needs.
Smart Images
Figure CN222914752U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor equipment, and particularly relates to an integrated system. Background Art
[0002] Semiconductor equipment includes semiconductor detection equipment, and various types of detections often need to be performed on a test object. The detection contents include, for example, defect detection, and the defect detection includes edge detection, front detection, back detection, film thickness detection, overlay (alignment accuracy between different layer patterns) detection, and CD (Critical Dimension) detection. The semiconductor equipment also includes a deposition device or an etching device.
[0003] In the related art, different working requirements are achieved by multiple semiconductor devices, which results in the need to configure multiple transfer devices for multiple semiconductor devices, leading to high equipment costs, large volume, and low integration. Summary of the Utility Model
[0004] This application provides an integrated system to solve the problems of high equipment cost and low integration in the prior art.
[0005] To solve the above technical problems, the utility model provides an integrated system, including: a transfer device; a plurality of independent processing modules surrounding the side of the transfer device, the processing module including a processing module main body; an electric control module, the electric control module having a plurality of interfaces, and different interfaces being detachably connected to different processing module main bodies, the electric control module being used to control each processing module main body.
[0006] Optionally, the electric control module is a master controller, and the integrated system further includes: a controller; the controller is used to control the start and end of each processing module main body and perform processing operations, the controller is used to send a processing end signal of the processing module main body to the master controller; the master controller is used to control the order in which the transfer device transfers samples to the processing module main body.
[0007] Optionally, the processing module further includes: a first cabinet; the controller is located inside the first cabinet; the processing module main body is located outside the first cabinet; the processing module main body and the controller are detachably connected.
[0008] Optionally, the controller is integrated inside the processing module main body.
[0009] Optionally, the transfer device includes a transfer chamber and a transfer module located in the transfer chamber, and the transfer module is used to move in the transfer chamber.
[0010] Optionally, the transfer device further includes: a plurality of first isolation doors provided on the side wall of the transfer chamber; the main body of the processing module includes a processing chamber, and a second isolation door is provided on the side wall of the processing chamber; the first isolation door and the second isolation door are arranged opposite to each other; the transfer module transfers the sample to the main body of the processing module or takes the sample away from the main body of the processing module through the first isolation door and the second isolation door.
[0011] Optionally, it further includes: a loading and unloading device located on the side of the transfer device; the transfer device further includes: a third isolation door provided on the side wall of the transfer chamber, and the third isolation door is arranged opposite to the loading and unloading device; the transfer module transfers the sample to the loading and unloading device or takes the sample away from the loading and unloading device through the third isolation door.
[0012] Optionally, it further includes: a setting module, which is communicatively connected to the electric control module, and the setting module is used for the user to set the state of the main body of the processing module and send the state of the main body of the processing module to the electric control module; the electric control module is used to control the opening time or sequence of each main body of the processing module according to the state of the main body of the processing module.
[0013] Optionally, the state of the main body of the processing module includes: whether each main body of the processing module is working, or the position and number of the main bodies of the processing module to be turned on.
[0014] Optionally, the functions of a plurality of independent processing modules are different; the processing module includes any one or a combination of a detection module, a deposition module, and an etching module.
[0015] Optionally, the number of the processing modules is multiple; the multiple processing modules include: a front detection module, a back detection module, and an edge detection module.
[0016] The technical solution of the present utility model has the following technical effects:
[0017] The integrated system provided by the technical solution of the present utility model has several processing modules around the side of the transfer device that are independent of each other, and different interfaces of the electric control module are detachably connected to different main bodies of the processing module. When it is necessary to replace the processing module, the processing module can be disconnected from the interface and a new processing module can be replaced. The several processing modules share one transfer device, which improves the integration degree. Since the processing module can be replaced at any time, the cost of the integrated system is reduced. Description of the Drawings
[0018] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0019] Figure 1 Schematic diagram of an integrated system provided by an embodiment of the present invention. Specific embodiments
[0020] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0021] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0022] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and can also be the communication inside two elements. It can be a wireless connection or a wired connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.
[0023] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0024] An embodiment of the present invention provides an integrated system. Refer to Figure 1 , including:
[0025] Conveying device 200;
[0026] A number of independent processing modules 100 around the side of the conveying device 200, the processing module 100 includes a processing module body;
[0027] An electric control module 500, the electric control module 500 has a number of interfaces, different interfaces are detachably connected to different processing module bodies, and the electric control module 500 is used to control each processing module body.
[0028] In this embodiment, a number of processing modules 100 around the side of the conveying device 200 are independent of each other, and different interfaces of the electric control module 500 are detachably connected to different processing module bodies. When it is necessary to replace the processing module 100, the processing module 100 and the interface can be disconnected, and a new processing module 100 can be replaced. A number of processing modules 100 share a conveying device 200, which improves the integration degree. Since the processing module 100 can be replaced at any time, the cost of the integrated system is reduced.
[0029] The sample includes a wafer or a semiconductor device.
[0030] At least part of the functions of the processing modules 100 are different. In one embodiment, the functions of a number of independent processing modules 100 are all different.
[0031] The number of processing modules 100 is two, three, four or more than four. Figure 1 Only the number of processing modules 100 being three is taken as an example. In other embodiments, the number of processing modules 100 is not limited.
[0032] The processing of the sample by the processing module 100 includes detection or processing, and the processing includes one of polishing, grinding, vapor deposition and lithography.
[0033] The processing module 100 includes any one or a combination of a detection module, a deposition module and an etching module. The processing module body performs a processing operation. Specifically, the processing module body performs any one of a detection operation, a deposition operation and an etching operation.
[0034] In one embodiment, the number of the processing modules 100 is multiple; the multiple processing modules 100 include: a front detection module, a back detection module and an edge detection module.
[0035] In one embodiment, the electric control module 500 is a total controller, and the integrated system further includes: a controller.
[0036] The controller is used to control the start and end of each processing module body and perform a processing operation, and the controller is used to send a processing end signal of the processing module body to the total controller.
[0037] The total controller is used to control the order in which the transfer device 200 transfers samples to the main body of the processing module.
[0038] The controller is used to control the main body of the processing module to perform a processing operation. When the processing operation of the main body of the processing module is completed, the controller sends a processing end signal of the main body of the processing module to the total controller. The total controller controls the order in which the transfer device 200 transfers samples to the main body of the processing module. When the sample is processed in the previous main body of the processing module, the total controller controls the transfer device 200 to transfer the sample to the next main body of the processing module, and sends an instruction to the controller to start processing the main body of the next processing module 100. The interface between the controller and the total controller is detachably connected.
[0039] In one embodiment, the processing module 100 further includes: a first cabinet; the controller is located inside the first cabinet; the main body of the processing module is located outside the first cabinet; the main body of the processing module and the controller are detachably connected. The main body of the processing module and the controller are respectively connected by connecting wires. One end of the connecting wire is detachably connected to the main body of the processing module, and the other end of the connecting wire is detachably connected to the controller. When it is necessary to replace the processing module 100, only the main body of the processing module needs to be replaced. If the control software of the new main body of the processing module is different, only the new control software needs to be installed on the controller, and there is no need to replace the controller, which can save costs.
[0040] In one embodiment, the controller is integrated inside the main body of the processing module to form an inseparable whole. When it is necessary to replace the processing module 100, the entire processing module 100 is replaced with a new processing module 100, and the new processing module 100 is connected to the interface of the total controller.
[0041] In one embodiment, both the controller and the total controller are placed in a second cabinet, and the processing module 100 is located outside the second cabinet.
[0042] The transfer device 200 includes a transfer chamber and a transfer module 300 located in the transfer chamber. The transfer module 300 is, for example, a robotic arm, and the transfer module 300 is used to move in the transfer chamber.
[0043] The transfer device 200 further includes: a plurality of first isolation doors disposed on the side wall of the transfer chamber; the main body of the processing module includes a processing chamber, and a second isolation door is disposed on the side wall of the processing chamber; the first isolation door and the second isolation door are disposed opposite to each other. The transfer module 300 transfers the sample to the main body of the processing module or takes the sample from the main body of the processing module through the first isolation door and the second isolation door. When the first isolation door and the second isolation door are opened, the transfer module 300 places the sample in the main body of the processing module or takes out the sample from the main body of the processing module.
[0044] The integrated system further includes: a loading and unloading device 400 located on the side of the transfer device 200. The loading and unloading device 400 and the processing module 100 are spaced apart. The loading and unloading device 400 is used for loading and unloading samples.
[0045] The transfer device 200 further includes: a third isolation door disposed on the side wall of the transfer chamber, and the third isolation door is disposed opposite to the loading and unloading device 400. The transfer module 300 transfers the sample to the loading and unloading device 400 or takes the sample from the loading and unloading device 400 through the third isolation door. When the third isolation door is opened, the transfer module 300 can take out the sample from the loading and unloading device 400 or place the processed sample into the loading and unloading device 400.
[0046] The transfer device 200 further includes: a setting module communicatively connected to the electric control module. The setting module is used for a user to set the state of the main body of the processing module and send the state of the main body of the processing module to the electric control module; the electric control module is used to control the opening time or sequence of each main body of the processing module according to the state of the main body of the processing module.
[0047] The state of the main body of the processing module includes: whether each main body of the processing module is working, or the position and number of the main bodies of the processing module to be opened.
[0048] The setting module is, for example, a switch.
[0049] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present invention.
Claims
1. An integrated system, characterized in that: include: Conveying equipment; A plurality of mutually independent processing modules surrounding the side of the conveying device, the processing modules comprising a processing module body; The electric control module has a plurality of interfaces, and different interfaces are detachably connected to different processing module bodies. The electric control module is used to control each processing module body.
2. The integrated system according to claim 1, characterized in that: The electric control module is a master controller, and the integrated system further comprises: a controller; The controller is used to control the start and end of each processing module body and to perform processing operations, and the controller is used to send a processing end signal of the processing module body to the master controller; The master controller is used to control the order in which the conveying device conveys samples to the processing module body.
3. The integrated system according to claim 2, characterized in that: The processing module further includes: a first cabinet; the controller is located inside the first cabinet; the processing module body is located outside the first cabinet; the processing module body and the controller are detachably connected.
4. The integrated system according to claim 2, characterized in that: The controller is integrated inside the processing module body.
5. The integrated system according to claim 1, characterized in that: The conveying device comprises a conveying cavity and a conveying module located in the conveying cavity, wherein the conveying module is used for moving in the conveying cavity.
6. The integrated system according to claim 5, characterized in that: The conveying device also includes: a plurality of first isolation doors arranged on the side walls of the conveying chamber; the processing module body includes a processing chamber, and the side walls of the processing chamber are provided with a second isolation door; the first isolation door and the second isolation door are arranged opposite to each other; the transmission module conveys the sample to the processing module body or takes the sample away from the processing module body through the first isolation door and the second isolation door.
7. The integrated system according to claim 6, characterized in that: Also includes: The loading and unloading equipment is located at the side of the conveying equipment; the conveying equipment further comprises: a third isolation door arranged on the side wall of the conveying chamber, the third isolation door and the loading and unloading equipment are arranged opposite to each other; The transmission module transfers the sample to the loading and unloading device or takes the sample away from the loading and unloading device through the third isolation door.
8. The integrated system according to claim 1, characterized in that: Also includes: A setting module is communicatively connected with the electric control module, and is used to allow the user to set the state of the processing module body and send the state of the processing module body to the electric control module; the electric control module is used to control the start time or sequence of each processing module body according to the state of the processing module body.
9. The integrated system according to claim 8, characterized in that: The status of the processing module body includes: whether each processing module body is working, or the position and number of the processing module bodies that need to be turned on.
10. The integrated system according to claim 1, characterized in that: The functions of the several independent processing modules are different; the processing modules include any one or more combinations of detection modules, deposition modules and etching modules.
11. The integrated system according to claim 10, characterized in that: There are multiple processing modules; the multiple processing modules include: a front detection module, a back detection module and an edge detection module.