Carrying robot for wafer box
By designing a handling robot for wafer boxes and using storage modules and shock absorption modules, the problem that robots in the prior art cannot provide sufficient stability and safety is solved, and the stability and safety of wafer boxes are achieved during transportation, reducing the risk of wafer damage.
Patent Information
- Application Number
- CN202421512837.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-06-27
AI Technical Summary
Existing robots cannot provide sufficient stability and security when performing open wafer box transportation tasks, resulting in wafer damage and economic losses.
A robot for handling wafer boxes is designed, using a storage module and a shock absorbing module. The storage module forms a storage unit through a support plate, a fixed block and a limiting member. The shock absorbing module absorbs vibration through elastic members to ensure that the wafer box remains stable and safe during transportation.
Through the design of storage modules and shock absorbing modules, the wafer box does not slide, pour or damage during transportation, which improves transportation stability and safety and reduces the risk of wafer damage.
Smart Images
Figure CN222914754U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of robots, in particular to a handling robot for a wafer cassette. Background Art
[0002] An open wafer cassette is a container widely used in semiconductor manufacturing processes, mainly used to protect, transport, and store wafers.
[0003] In related technologies, robots are used to replace manual labor to place wafers into open wafer cassettes for transportation. However, open wafer cassettes have extremely high requirements for safety and stability during transportation. The currently used robots cannot provide sufficient stability and safety guarantees when performing open wafer cassette transportation tasks. Due to the high value and sensitivity of wafers, an unstable transportation process may cause wafer damage, resulting in huge economic losses. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a handling robot for a wafer cassette to solve the technical problem that the currently used robots cannot provide sufficient stability and safety guarantees when performing open wafer cassette transportation tasks.
[0005] To achieve the above purpose, the utility model provides a handling robot for a wafer cassette, which includes:
[0006] A robot body, on which a carrying platform is provided;
[0007] A storage module, which includes a support plate, a first fixing block, and a second fixing block. The support plate is arranged on the carrying platform. The first fixing block and the second fixing block are arranged at intervals in the transverse direction on the support plate. The first fixing block and the second fixing block are provided with limiting members arranged at intervals. The first fixing block, the second fixing block, and the limiting members form a storage unit for placing the wafer cassette, and the limiting members are used to abut against the outer periphery of the wafer cassette.
[0008] In the handling robot of the present application, the handling robot further includes a shock absorption module, which is arranged between the support plate and the carrying platform, and the shock absorption module is respectively connected to the support plate and the carrying platform.
[0009] In the handling robot of the present application, the shock absorption module includes a plurality of elastic members, and the plurality of elastic members are arranged in an array between the support plate and the carrying platform. One end of the elastic member is connected to the support plate, and the other end of the elastic member is connected to the carrying platform.
[0010] In the handling robot of the present application, each elastic member corresponds to each storage unit one by one.
[0011] In the handling robot of the present application, the handling robot includes a plurality of pressure detection elements, the pressure detection elements are respectively arranged on the first fixing block and the second fixing block, and the pressure detection elements are arranged adjacent to the limiting member, and the pressure detection elements are used to abut against the wafer cassette.
[0012] In the handling robot of the present application, the limiting member is provided with a clamping groove for clamping and connecting with the wafer cassette.
[0013] In the handling robot of the present application, the handling robot includes a plurality of material detection elements, the material detection elements are arranged on the support plate, and each of the material detection elements corresponds to each of the storage units one by one.
[0014] In the handling robot of the present application, the first fixing block has a first inclined surface that slopes forward and upward, the second fixing block has a second inclined surface that slopes forward and upward, and the first inclined surface and the second inclined surface are located in the same plane.
[0015] In the handling robot of the present application, the handling robot includes a mechanical arm and a fixture, one end of the mechanical arm is fixed to the robot body, the other end of the mechanical arm is connected to the fixture, and the fixture is used to clamp the wafer cassette.
[0016] In the handling robot of the present application, the handling robot further includes a mobile chassis, the mobile chassis is arranged at the bottom of the robot body, and a positioning radar is arranged on the mobile chassis.
[0017] The present utility model provides a handling robot, and its beneficial effects are as follows:
[0018] In the present utility model, a carrying platform is arranged on the robot body for carrying the storage module, the support plate is connected to the carrying platform, the first fixing block and the second fixing block are arranged at intervals on the support plate, the limiting members of the first fixing block and the second fixing block and the first fixing block and the second fixing block together enclose a storage unit for placing the wafer cassette, and the storage module has a plurality of storage units for storing, fixing and transporting a plurality of wafer cassettes, ensuring that the wafer cassette remains stable and safe during the movement and operation of the handling robot, and preventing the wafer cassette from sliding, tipping or being damaged during transportation. The limiting member abuts against the outer periphery of the wafer cassette, which can prevent the wafer cassette from sliding or tipping during handling to ensure that the wafer cassette is placed correctly. Compared with the robot directly clamping the wafer cassette for transportation, the handling robot of the present utility model first places the wafer cassette in the storage unit of the storage module, and then takes the wafer cassette out of the storage unit after moving to the target location, so as to avoid damage to the wafer caused by excessive vibration during transportation. Description of the Drawings
[0019] Figure 1 Schematic structural diagram of the wafer cassette provided by the embodiment of the present utility model;
[0020] Figure 2 Schematic structural diagram of the handling robot provided by the embodiment of the present utility model;
[0021] Figure 3 Application scenario diagram of the handling robot provided by the embodiment of the present utility model;
[0022] Figure 4 Schematic structural diagram of the storage position module provided by the embodiment of the present utility model;
[0023] Figure 5 Application scenario diagram of the storage position module provided by the embodiment of the present utility model;
[0024] Figure 6 is Figure 4 bottom view of;
[0025] Figure 7 is Figure 5 side view of.
[0026] The markings in the figure are as follows:
[0027] 10, robot body; 11, carrying platform; 20, storage position module; 21, first fixing block; 211, first inclined surface; 22, second fixing block; 221, second inclined surface; 23, support plate; 24, limiting member; 25, card slot; 30, shock absorption module; 31, elastic member; 40, pressure detection element; 50, material detection element; 60, manipulator; 70, fixture; 80, moving chassis; 90, positioning radar; 100, handling robot; 200, wafer cassette. Specific embodiments
[0028] The following combines the accompanying drawings and embodiments to further describe in detail the specific embodiments of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.
[0029] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. in the present utility model is based on the positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.
[0030] In the description of the present utility model, it should be understood that in the present utility model, terms such as "first" and "second" are used to describe various information, but this information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present utility model, the "first" information may also be referred to as the "second" information, and similarly, the "second" information may also be referred to as the "first" information.
[0031] As Figure 1 shown, an embodiment of the present utility model provides a handling robot 100 for a wafer cassette 200, which includes a robot body 10 and a storage module 20. The robot body 10 is provided with a carrying platform 11; the storage module 20 includes a support plate 23, a first fixing block 21 and a second fixing block 22. The support plate 23 is arranged on the carrying platform 11. The first fixing block 21 and the second fixing block 22 are arranged on the support plate 23 at intervals in the horizontal direction. The first fixing block 21 and the second fixing block 22 are provided with limiting members 24 arranged at intervals. The first fixing block 21, the second fixing block 22 and the limiting members 24 form a storage unit for placing the wafer cassette 200, and the limiting members 24 are used to abut against the outer periphery of the wafer cassette 200.
[0032] In the related art, as Figure 1 shown, the wafer cassette 200 serves as a wafer carrier for placing and transporting wafers. A wafer cassette 200 can usually hold a large number of wafers. At the production site, the robot directly grabs the wafer cassette 200 through a fixture, moves the robot to the target location and then places it. During transportation, the wafers inside the wafer cassette 200 are easily damaged due to large vibrations.
[0033] Based on the above technical solution, as Figures 2 to 5As shown in the figure, in this embodiment, a carrying platform 11 is provided on the robot body 10 for carrying the storage module 20. The support plate 23 is connected to the carrying platform 11. The first fixing block 21 and the second fixing block 22 are arranged at intervals on the support plate 23. The limiting members 24 on the first fixing block 21 and the second fixing block 22, together with the first fixing block 21 and the second fixing block 22, jointly enclose a storage unit. The storage module 20 has a plurality of storage units for storing, fixing, and transporting a plurality of wafer cassettes 200, so that the wafer cassettes 200 remain stable and safe during the movement and operation of the handling robot, and prevent the wafer cassettes 200 from sliding, tipping, or being damaged during transportation. Among them, the limiting member 24 abuts against the outer periphery of the wafer cassette 200, which can prevent the wafer cassette from sliding or tipping during handling to ensure that the wafer cassette is placed correctly. Compared with the traditional method of directly clamping the wafer cassette 200 by the robot for transportation, the handling robot 100 in this embodiment adopts a handling strategy of first placing the wafer cassette 200 in the storage unit of the storage module 20, then moving to the target location, and finally taking out the wafer cassette 200 from the storage unit. This can reduce the risk of wafer damage caused by large vibrations during transportation and greatly improve the stability and safety of handling wafers.
[0034] In this embodiment, the first fixing block 21 and the second fixing block 22 can be arranged at intervals horizontally or vertically on the support plate 23. According to the size, shape, and handling requirements of the wafer cassette 200, the spatial layout of the storage unit can be flexibly adjusted to make the most of the space of the support plate 23, increase the number of storage units of the storage module 20, carry more wafer cassettes 200 in a single handling, reduce the number of handling times, and improve work efficiency.
[0035] Exemplarily, the wafer cassette 200 has a frame structure with four sides and four top corners. When the wafer cassette 200 is placed in the storage unit of the storage module 20, the two limiting members 24 on the first fixing block 21 and the two limiting members 24 on the second fixing block 22 respectively hold the wafer cassette 200 at the four top corners of the wafer cassette 200, thereby fixing the wafer cassette 200 and preventing the wafer cassette from sliding during handling.
[0036] As an implementation manner, as Figure 6 shown, the handling robot 100 further includes a shock absorption module 30. The shock absorption module 30 is provided between the support plate 23 and the carrying platform 11, and the shock absorption module 30 is respectively connected to the support plate 23 and the carrying platform 11.
[0037] Specifically, when the handling robot 100 is moving or performing a handling task, it will inevitably generate a certain degree of vibration. The wafers inside the wafer cassette 200 are extremely sensitive to vibration and are likely to be damaged due to large vibrations. Based on this, in this embodiment, a shock absorption module 30 is provided at the bottom of the storage module 20 (between the support plate 23 and the carrier platform 11) to absorb vibration, reduce the impact on the wafer cassette 200, and ensure its stability and safety during handling. When the handling robot 100 faces uneven ground or sudden impacts, it can smoothly transition, avoid the wafer cassette 200 from tipping over due to vibration, and reduce the risk of damage to the wafer cassette 200.
[0038] As an implementation manner, as Figure 6 shown, the shock absorption module 30 includes a plurality of elastic members 31. The plurality of elastic members 31 are arranged in an array between the support plate 23 and the carrier platform 11. One end of the elastic member 31 is connected to the support plate 23, and the other end of the elastic member 31 is connected to the carrier platform 11.
[0039] Specifically, the plurality of elastic members 31 are arranged in an array and evenly distributed between the support plate 23 and the carrier platform 11, so that the vibration generated by the wafer cassette 200 can be evenly dispersed and absorbed, rather than concentrated at a certain point, thereby improving the overall shock absorption effect of the wafer cassette 200. Since the elastic members 31 are directly connected to the support plate 23 and the carrier platform 11, the elastic members 31 can directly absorb and convert the vibration. The plurality of elastic members 31 arranged in an array form a stable support network, effectively supporting and fixing the wafer cassette 200, and ensuring the stability of the wafer cassette 200 during handling.
[0040] As an implementation manner, as Figure 6 shown, each elastic member 31 corresponds to each storage unit one by one.
[0041] Specifically, each wafer cassette 200 in each storage unit can obtain independent shock absorption protection from the elastic member 31, and each wafer cassette 200 can obtain targeted shock absorption effect, thereby minimizing the impact of vibration on each wafer cassette 200. When the robot generates vibration due to uneven ground, speed change or other factors, the elastic member 31 can quickly respond, and through its unique elastic characteristics, disperse and absorb the vibration energy, thereby minimizing the direct impact on the wafer cassette 200.
[0042] In this embodiment, since each elastic member 31 is independently provided, different elastic members 31 with different elastic coefficients or types can be selectively used according to the characteristics such as the weight and size of the wafer cassette 200 in different storage units, so that the handling robot 100 can be applied to different types of wafer cassettes 200, improving its versatility.
[0043] In this embodiment, when the elastic member 31 in a certain storage unit is damaged or fails, the elastic member 31 can be replaced individually without replacing the entire shock absorption module 30.
[0044] As an implementation manner, as Figure 4 shown, the handling robot 100 includes a plurality of pressure detection elements 40, which are respectively arranged on the first fixing block 21 and the second fixing block 22, and the pressure detection elements 40 are arranged adjacent to the limiting member 24, and the pressure detection elements 40 are used to abut against the wafer cassette 200.
[0045] In this embodiment, the pressure detection element 40 is used to detect whether the wafer cassette 200 is placed in place. By detecting in real time whether the wafer cassette 200 is placed in place, the handling robot 100 can quickly confirm the position state of the wafer cassette 200, avoiding handling errors or equipment damage caused by improper placement. When the wafer cassette 200 is correctly placed on the storage unit, the pressure detection element 40 will sense a specific pressure value, and at this time, the handling robot 100 performs the transportation task. If the wafer cassette 200 is not correctly placed in place, the handling robot 100 stops transporting and issues an alarm, prompting the staff to promptly discover and handle the improper placement situation, thereby reducing the operation risk and protecting the safety of the wafer cassette 200 and the handling robot 100.
[0046] In this embodiment, by combining the pressure detection element 40 with the control system of the handling robot 100, intelligent operation can be achieved. When it is detected that the wafer cassette 200 is placed in place, the robot can automatically perform the next handling operation; if it is detected that the placement is improper, the robot can automatically stop the operation and issue a prompt for the operator to make adjustments.
[0047] Exemplarily, among the two limiting members 24 on the first fixing block 21 and the two limiting members 24 on the second fixing block 22, the pressure detection element 40 is arranged beside two limiting members 24 at opposite corners, or the pressure detection element 40 is arranged on three of the limiting members 24 to fully detect whether the wafer cassette 200 is placed in place.
[0048] As an implementation manner, as Figure 4 shown, the limiting member 24 is provided with a card slot 25 for engaging and connecting with the wafer cassette 200.
[0049] Specifically, the card slot 25 is engaged with the wafer cassette 200 to prevent the wafer cassette 200 from shaking or shifting during handling. Even in the event of an emergency during handling, such as the sudden stop or impact of the handling robot, the card slot 25 can ensure that the wafer cassette 200 does not fall off or fly out. On the other hand, the design of the card slot 25 makes it simple and quick to place and remove the wafer cassette 200. The operator only needs to align the wafer cassette 200 with the card slot 25 of the limiting member 24 to easily complete the placement; similarly, when removing, only a little force is required to take out the wafer cassette 200 from the card slot 25.
[0050] As an implementation manner, as Figure 4 shown, the handling robot 100 includes a plurality of material detection elements 50, and the material detection elements 50 are arranged on the support plate 23, and each material detection element 50 corresponds to each storage unit one by one.
[0051] Specifically, the material detection element 50 is used to detect whether there is a wafer cassette 200 on the storage unit. By setting the material detection element 50 and corresponding it to each storage unit one by one, the handling robot 100 can monitor in real time whether there is a wafer cassette 200 on each storage unit through the material detection element 50. When the handling robot 100 needs to handle the wafer cassette 200, it can quickly obtain the status information of the storage unit through the material detection element 50, so as to select the storage unit with the wafer cassette 200 for handling, avoiding the ineffective operation of the robot on the empty storage unit and improving the handling efficiency.
[0052] In this embodiment, by monitoring the status of the storage unit in real time, the handling robot 100 can avoid ineffective operations on the empty storage unit, thereby reducing the risk of equipment damage or personal injury caused by improper operation. In addition, when an abnormal situation is detected, the robot can also automatically stop the operation and issue an alarm, improving the safety of the entire device.
[0053] As an implementation manner, as Figure 7 shown, the first fixing block 21 has a first inclined surface 211 that slopes forward and upward, the second fixing block 22 has a second inclined surface 221 that slopes forward and upward, and the first inclined surface 211 and the second inclined surface 221 are in the same plane.
[0054] Specifically, when the handling robot suddenly stops or is impacted, the traditional horizontal placement of the wafer cassette 200 will cause the wafers to be thrown out due to inertia. In this embodiment, the wafer cassette 200 is placed on the inclined surface formed by the first inclined surface 211 and the second inclined surface 221, so that the whole wafer cassette 200 is slightly inclined forward and upward. When the handling robot suddenly stops or is impacted, the wafers in the wafer cassette 200 can rely on their own gravity and will not be thrown out.
[0055] As an implementation manner, asFigure 2 and Figure 3 As shown in Figure 3 , the handling robot 100 includes a manipulator 60 and a fixture 70. One end of the manipulator 60 is fixed to the robot body 10, and the other end of the manipulator 60 is connected to the fixture 70. The fixture 70 is used to grip the wafer cassette 200.
[0056] Specifically, after the handling robot 100 is equipped with the manipulator 60 and the fixture 70, it can perform more diverse tasks. The manipulator 60 and the fixture 70 can be designed into different shapes, sizes and functions according to needs to be applicable to different wafer cassettes 200. This design enables the handling robot 100 to perform tasks such as grasping, placing, rotating and fastening, thus greatly improving the functionality and flexibility of the robot.
[0057] In this embodiment, the handling robot 100 grips the wafer cassette 200 through the fixture 70 and accurately places it at the designated position; it can also rotate the wafer cassette through the manipulator 60 to adapt to different production processes; in addition, it can also fasten the wafer cassette through the fixture 70 to ensure that it will not shake or shift during transportation.
[0058] In this embodiment, the manipulator 60 and the fixture 70 are arranged above the storage module 20, effectively utilizing the vertical space of the handling robot 100, making the structure of the handling robot 100 more compact, the overall layout being a more streamlined modular layout, with a small robot body and better maintainability.
[0059] In this embodiment, the controller of the fixture 70 is integrally designed with the fixture 70 body, without external wiring, which is not only simple and beautiful but also does not pose a risk of scraping adjacent material boxes during production operations.
[0060] As an implementation, as Figure 2 shown, the handling robot 100 further includes a mobile chassis 80. The mobile chassis 80 is arranged at the bottom of the robot body 10, and a positioning radar 90 is provided on the mobile chassis 80.
[0061] Specifically, the handling robot 100 scans the surrounding environment through the positioning radar 90 and constructs an accurate environmental map, can determine its own position in real time, thus autonomously planning the handling path, avoiding collision with obstacles, and realizing efficient and accurate handling tasks. The positioning radar 90 is not affected by environmental factors such as light and smoke and can work stably in various complex environments. The handling robot 100 can perform handling operations in different factories, warehouses or outdoor environments, greatly enhancing its environmental adaptability.
[0062] Among them, the mobile chassis 80 provides a stable mobile platform for the handling robot 100, ensuring that the handling robot 100 can operate in various terrains and environments. Secondly, the mobile chassis 80 has load capacity and motion performance, enabling the robot to carry the relatively heavy robot body 10 and complete the handling task quickly and accurately.
[0063] In addition, the handling robot 100 further includes a communication module, a positioning vision camera, other sensors, and other components, enabling the handling robot 100 to adapt to various operating environments and achieve millimeter-level navigation accuracy, which will not be specifically elaborated in this embodiment.
[0064] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and substitutions can be made, and these improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A handling robot for a wafer box, characterized in that: include: A robot body, wherein the robot body is provided with a carrying platform; A storage module, the storage module includes a support plate, a first fixed block and a second fixed block, the support plate is arranged on the supporting platform, the first fixed block and the second fixed block are arranged on the support plate along a lateral interval, the first fixed block and the second fixed block are provided with spaced-apart limiters, the first fixed block, the second fixed block and the limiters form a storage unit, the storage unit is used to place the wafer box, and the limiters are used to abut against the outer periphery of the wafer box.
2. The handling robot according to claim 1, characterized in that: The transport robot further comprises a shock absorbing module, which is arranged between the support plate and the carrying platform, and the shock absorbing module is respectively connected to the support plate and the carrying platform.
3. The handling robot according to claim 2, characterized in that: The shock absorbing module comprises a plurality of elastic members, wherein the plurality of elastic members are arranged in an array between the support plate and the bearing platform, one end of the elastic member is connected to the support plate, and the other end of the elastic member is connected to the bearing platform.
4. The handling robot according to claim 3, characterized in that: Each of the elastic members corresponds to each of the storage units one by one.
5. The handling robot according to claim 1, characterized in that: The transport robot includes a plurality of pressure detection elements, which are respectively arranged on the first fixed block and the second fixed block, and are arranged adjacent to the limiter, and are used to abut against the wafer box.
6. The handling robot according to claim 1, characterized in that: The limiting member is provided with a slot for engaging and connecting with the wafer box.
7. The handling robot according to claim 1, characterized in that: The handling robot comprises a plurality of material detection elements, and the material detection elements are arranged on the support plate, and each of the material detection elements corresponds to each of the storage units one by one.
8. The handling robot according to claim 1, characterized in that: The first fixing block has a first inclined surface inclined forward and upward, the second fixing block has a second inclined surface inclined forward and upward, and the first inclined surface and the second inclined surface are located in the same plane.
9. The handling robot according to claim 1, characterized in that: The transport robot comprises a manipulator and a clamp, one end of the manipulator is fixed to the robot body, and the other end of the manipulator is connected to the clamp, and the clamp is used to clamp the wafer box.
10. The handling robot according to any one of claims 1 to 9, characterized in that: The transport robot further comprises a mobile chassis, which is arranged at the bottom of the robot body and is provided with a positioning radar.