Mechanical arm
By using stop modules and photoinductance modules in the robotic arm, the problems of low zero-return operation frequency and short service life of the sensor connector are solved, and higher positioning accuracy and operation efficiency are achieved.
Patent Information
- Application Number
- CN202421981290.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-15
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2034-08-15
AI Technical Summary
The existing robotic arms have low frequency of zeroing operations, short service life of the sensor connector, easy to produce wear and spark, and poor applicability.
The two stops of the stop module are used to move with the rotation of the first rotation shaft and the second rotation shaft, and are respectively on the action path, and combined with the photoinductive module to detect the origin of the first rotation shaft, the origin correction of the robot arm is realized.
It provides simple but stable origin correction judgment, improves the positioning accuracy and operating efficiency of the robot arm, and extends the service life of the equipment.
Smart Images
Figure CN222920551U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a robotic arm applicable to semiconductor manufacturing processes. Background Art
[0002] Since the structure and manufacturing of semiconductor wafers are quite precise, the requirements for storage and transportation are also relatively high. When wafers are stored, special storage carriers are used to place and store them to match various types of storage environments, such as vacuum storage or introduction of inert gas for storage. During transportation, in addition to directly carrying the carrier, the wafers can also be taken out after opening the carrier. However, when taking out the wafers inside, robotic arms are mostly used to perform the picking and placing operations to prevent fragmentation or damage during handling.
[0003] To achieve the purpose of accurately picking and placing wafers, the robotic arm needs to have precise positioning and stroke planning capabilities. Accordingly, various sensors need to be added to each component (or arm) of the robotic arm to better control its motion mode. For example, the means adopted in the prior art is to configure sensors on the rotating shaft and use rotary joints to transmit electrical signals to provide the zeroing operation for the robotic arm.
[0004] However, generally speaking, the frequency of the robotic arm performing the zeroing operation is not high, usually when just undergoing mechanical repair or adjustment, or when the encoder battery is replaced. Therefore, in addition to the low usage frequency of the sensors arranged at the rotating shaft, the service life of their joints is subject to structural wear during the operation of the rotating shaft, and it is easy to generate dust or even sparks, which is actually not conducive to the operating environment required for semiconductor manufacturing processes. Summary of the Utility Model
[0005] The utility model provides a robotic arm that provides a simple but stable origin calibration effect with a structural stop.
[0006] A robotic arm of the present utility model is applicable to semiconductor manufacturing processes and includes a body, multiple arms, a first rotating shaft module, a second rotating shaft module, a photoelectric induction module, a stop module, and a control module. The multiple arms include a first arm, a second arm, and a third arm sequentially connected from the body. The first rotating shaft module has a first rotating shaft and is disposed within the body. The second rotating shaft module has a second rotating shaft and is disposed within the first rotating shaft. The photoelectric induction module is disposed within the body. The stop module includes a first stop block disposed on the first rotating shaft and a second stop block disposed on the second rotating shaft. The control module is electrically connected to the first rotating shaft module, the second rotating shaft module, and the photoelectric induction module. The control module drives the second rotating shaft of the second rotating shaft module to rotate, so as to drive the multiple arms to extend and retract in a fixed direction. The control module drives the first rotating shaft of the first rotating shaft module and the second rotating shaft of the second rotating shaft module to rotate at the same angle, thereby changing the direction of the extension and retraction. The control module drives the first rotating shaft of the first rotating shaft module to rotate, and detects the origin position of the first rotating shaft through the photoelectric induction module. The control module drives the second rotating shaft of the second rotating shaft module to rotate relative to the first rotating shaft of the first rotating shaft module, and when the second stop block collides with the first stop block, the control module obtains the relative origin position of the second rotating shaft and the first rotating shaft.
[0007] In an embodiment of the present utility model, the first arm has a first gear, a second gear, and a first belt. The first gear is located at the connection between the body and the first arm and is connected to the second rotating shaft. The second gear is located at the connection between the first arm and the second arm and is connected to the second arm. The first belt is drivably connected to the first gear and the second gear.
[0008] In an embodiment of the present utility model, the second arm has a third gear, a fourth gear, and a second belt. The third gear is coaxially disposed with the second gear. The fourth gear is located at the connection between the second arm and the third arm and is connected to the third arm. The second belt is drivably connected to the third gear and the fourth gear.
[0009] In an embodiment of the present utility model, the photoelectric induction module includes a photoelectric sensor and a stop piece. The photoelectric sensor is disposed on the body and is electrically connected to the control module. The stop piece is disposed on the first rotating shaft. The photoelectric sensor is located on the movement path of the stop piece. The control module drives the first rotating shaft to rotate until the stop piece reaches the photoelectric sensor and is sensed, and the control module obtains the origin position of the first rotating shaft.
[0010] In an embodiment of the present utility model, the first rotating shaft module further includes a first motor and a first speed reducer, which are disposed within the body. The first motor is electrically connected to the control module, and the first speed reducer is drivably connected between the first motor and the first rotating shaft.
[0011] In an embodiment of the present utility model, the second rotating shaft module further includes a second motor and a second speed reducer, which are disposed inside the body. The second motor is electrically connected to the control module, and the second speed reducer is drivably connected between the second motor and the second rotating shaft.
[0012] In an embodiment of the present utility model, it further includes a magnetic fluid shaft seal, which is disposed between the first rotating shaft and the second rotating shaft.
[0013] In an embodiment of the present utility model, it further includes a welded bellows, which is disposed between the first rotating shaft and the body.
[0014] In an embodiment of the present utility model, the first rotating shaft is a hollow rotating shaft, and the second rotating shaft is a solid rotating shaft, which is disposed inside the hollow rotating shaft. The first rotating shaft and the second rotating shaft are coaxially arranged.
[0015] In an embodiment of the present utility model, the first stopper moves along with the rotation of the first rotating shaft, and the second stopper moves along with the rotation of the second rotating shaft. The first stopper and the second stopper are in each other's action paths.
[0016] Different from the problems faced by the sensors provided at the rotating shaft in the prior art, such as low usage frequency and easy wear due to the rotation of the rotating shaft, in this case, the two stoppers of the stopper module move along with the rotation of the first rotating shaft and the second rotating shaft respectively, and are in each other's action paths. Therefore, it can provide a simple but stable judgment basis for the origin judgment of the first rotating shaft and the second rotating shaft. At the same time, it is paired with the photoelectric induction module for the origin detection of the first rotating shaft, so that the operation and calibration of the robotic arm can be carried out accurately and effectively.
[0017] To make the above features and advantages of the present utility model more obvious and understandable, the following specific embodiments are given and detailed descriptions are made in conjunction with the accompanying drawings as follows. Description of the Drawings
[0018] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present invention;
[0019] Figure 2 is Figure 1 a cross-sectional view of the robotic arm in another state;
[0020] Figure 3 is Figure 1 a partial cross-sectional view of the robotic arm;
[0021] Figure 4 is Figure 1 a component electrical relationship diagram of the robotic arm;
[0022] Figure 5 isFigure 1 Partial schematic view of the robotic arm;
[0023] Figure 6 is Figure 1 Partial schematic view of the robotic arm;
[0024] Figure 7 is Figure 1 Exploded view of some components of the robotic arm;
[0025] Figure 8 Shown from another perspective Figure 7 Some components. Detailed implementation mode
[0026] Figure 1 Schematic view of the robotic arm in an embodiment of the present novelty. Figure 2 is Figure 1 Cross-sectional view of the robotic arm in another state. Figure 3 is Figure 1 Partial cross-sectional view of the robotic arm. Please also refer to Figures 1 to 3 , in this embodiment, the robotic arm 100 is applicable to semiconductor manufacturing processes, such as Figure 1 shown for carrying the wafer 20. The robotic arm 100 includes a body 140, a multi-joint arm MR, a first rotating shaft module MD1, and a second rotating shaft module MD2. The multi-joint arm MR includes a first arm 110, a second arm 120, and a third arm 130 sequentially connected from the body 140. Among them, the first arm 110 and the body 140 rotate relative to each other along the axis AX1, the second arm 120 and the first arm 110 rotate relative to each other along the axis AX2, and the third arm 130 and the second arm 120 rotate relative to each other along the axis AX3.
[0027] The first rotating shaft module MD1 has a first rotating shaft H1 and is arranged in the body 140. The second rotating shaft module MD2 has a second rotating shaft H2 and is arranged in the first rotating shaft H1. Here, the first rotating shaft H1 is a hollow rotating shaft, the second rotating shaft H2 is a solid rotating shaft, configured inside the hollow rotating shaft, and the first rotating shaft H1 and the second rotating shaft H2 are coaxially arranged (along the same axis AX1).
[0028] Figure 4 is Figure 1 Electrical connection diagram of the components of the robotic arm. Please also refer to Figures 2 to 4, in this embodiment, the robotic arm 100 further includes a control module CM, which is electrically connected to the first rotating shaft module MD1 and the second rotating shaft module MD2. The first rotating shaft module MD1 further includes a first motor M1 and a first reduction gear R1. The first reduction gear R1 is drivably connected between the first motor M1 and the first rotating shaft H1. The second rotating shaft module MD2 further includes a second motor M2 and a second reduction gear R2. The second reduction gear R2 is drivably connected between the second motor M2 and the second rotating shaft H2. The control module CM is electrically connected to the first motor M1 and the second motor M2. Here, the first motor M1 is, for example, a servo motor. After adjusting the rotation speed through the first reduction gear R1, it can drive the first rotating shaft H1 to rotate at a required speed. Similarly, the second motor M2 is, for example, a servo motor, and it can drive the second rotating shaft H2 through the second reduction gear R2 with a larger reduction ratio.
[0029] Furthermore, the robotic arm 100 further includes a third motor M3 and a ball screw H3, which are respectively disposed in the body 140 and connected to each other. The third motor M3 enables a partial structure of the body 140 to move away from or close to each other through the ball screw H3, achieving the purpose of lifting along the axis AX1.
[0030] On the other hand, as Figure 2 shown, the robotic arm 100 of this embodiment further includes a magnetic fluid shaft seal 150 and a welded bellows 160. The magnetic fluid shaft seal 150 is disposed between the first rotating shaft H1 and the second rotating shaft H2, and the welded bellows 160 is disposed between the first rotating shaft H1 and the body 140. Both of them can provide a better sealing effect, enabling the robotic arm 100 to operate in a pressing or even vacuum environment.
[0031] Figure 5 is Figure 1 a partial schematic diagram of the robotic arm. Please also refer to Figure 4 and Figure 5 , in this embodiment, the first arm 110 has a first gear 111, a second gear 112 and a first belt 113. The first gear 111 is located at the connection between the body 140 and the first arm 110 and is connected to the second rotating shaft H2. The second gear 112 is located at the connection between the first arm 110 and the second arm 120 and is connected to the second arm 120. The first belt 113 is drivably connected to the first gear 111 and the second gear 112. In addition, the second arm 120 of this embodiment has a third gear 121, a fourth gear 122 and a second belt 123. The third gear 121 is coaxially arranged with the second gear 112 (along the same axis AX2). The fourth gear 122 is located at the connection between the second arm 120 and the third arm 130 and is connected to the third arm 130. The second belt 123 is drivably connected to the third gear 121 and the fourth gear 122.
[0032] There are no special restrictions on the materials of the first belt 113 and the second belt 123 described above. They can be steel belts, or rubber belts such as neoprene belts, nitrile rubber belts, urethane rubber belts, etc. They can also be hybrid belts formed by combining a steel belt and a rubber belt. When the robotic arm 100 is used in a decompression (low-pressure) environment or even a vacuum environment, it is preferably a belt that can generate less gas and dust. For example, fluororubber belts can be cited. Also, regarding the shape of the belt, it can be a flat belt, a toothed belt (in this embodiment), or a hybrid belt formed by combining a flat belt and a toothed belt. The shape of each gear can be selected according to the type of belt used. In another embodiment, when a flat belt is used, smooth wheels can be used instead of the gears in this embodiment.
[0033] On the other hand, in order to make the first belt 113 and the second belt 123 have appropriate tension, as Figure 5 shown, in this embodiment, a plurality of idle pulleys press against the outer side surface of the first belt 113 and press against the outer side surface of the second belt 123. In addition, the idle pulleys can also be set up as a mechanism that can be finely adjusted. In addition to adjusting the aforementioned tension, it can also adjust the contact angle of the first belt 113 with respect to the first gear 111 and the second gear 112, and adjust the contact angle of the second belt 123 with the third gear 121 and the fourth gear 122.
[0034] Based on the above settings of the multi-joint arm MR, the control module CM can drive the second motor M2, drive the second rotating shaft H2, and cause the first arm 110 and the second arm 120 to perform telescopic movements. Further, without changing the relative positions of the first rotating shaft H1 and the second rotating shaft H2, the first rotating shaft H1 and the second rotating shaft H2 are driven together, thereby causing the first arm 110 and the second arm 120 to rotate to change the direction of the aforementioned contraction. Simply put, the control module CM drives the second rotating shaft H2 of the second rotating shaft module MD2 to rotate, so as to drive the multi-joint arm MR to expand and contract in a fixed direction. The control module CM drives the first rotating shaft H1 of the first rotating shaft module MD1 and the second rotating shaft H2 of the second rotating shaft module MD2 to rotate at the same angle (without relative rotation to each other), and change the direction of the expansion and contraction.
[0035] For example, when the second rotating shaft H2 rotates by an angle, the first arm 110 will rotate by that angle with the center of the first gear 111 as the center. However, at this time, the first gear 111 does not rotate, so only the position of the second gear 112 rotates by that angle together with the first arm 110. Therefore, the second gear 112 rotates in the direction opposite to the rotation direction of the first rotating shaft H1 via the first belt 113. Also, the second gear 112 is connected to the second arm 120, so the second arm 120 will rotate in the direction opposite to the rotation direction of the first arm 110. Correspondingly, the third arm 130 will rotate in the direction opposite to the rotation direction of the second arm 120. Thus, it can make Figure 1 the multi-joint arm MR shown in the figure in a contracted state extend correspondingly, asFigure 2 As shown. Conversely, when the second rotating shaft H2 rotates in the opposite direction as described above, the multi-joint arm MR can be made to Figure 2 return from the extended state shown in Figure 1 to the contracted state shown in
[0036] Here, the relative rotational speeds and rotational angles of the first arm 110, the second arm 120, and the third arm 130 are not restricted, and can be appropriately adjusted by the outer diameter ratios of the first gear 111 and the second gear 112, as well as the outer diameter ratios of the third gear 121 and the fourth gear 122.
[0037] In addition, when the first rotating shaft H1 and the second rotating shaft H2 rotate together with their relative positions unchanged, the multi-joint arm MR will not perform actions such as contraction and extension as described above. Instead, only the first arm 110 will perform a simple rotational movement relative to the body 140 along the axis AX1 (the second arm 120 and the third arm 130 thereon remain in the contracted state or the extended state without change).
[0038] Based on the above-described action characteristics, how to accurately position the first rotating shaft H1 and the second rotating shaft H2 needs to be achieved through origin calibration.
[0039] First, it is about how to perform origin positioning on the first rotating shaft H1. Figure 6 is Figure 1 a partial schematic view of the robotic arm. Please also refer to Figure 4 and Figure 6 In this embodiment, the robotic arm 100 further includes a photoelectric induction module 150 disposed inside the body 140, which, as shown in Figure 6 includes a photoelectric sensor 151 and a shutter 152. The photoelectric sensor 151 is disposed on the inner frame 141 of the body 140 and is electrically connected to the control module CM. The shutter 152 is disposed on the flange H11 of the first rotating shaft H1 and rotates with the flange H11, and the photoelectric sensor 151 is located on the action path of the shutter 152. Accordingly, the control module CM drives the first rotating shaft H1 to rotate until the shutter 152 reaches the photoelectric sensor 151 and is sensed (for example, blocking the light generated by the photoelectric sensor 151), then the control module CM can thereby obtain the origin position of the first rotating shaft H1. It can be seen from this that once it is necessary to calibrate the first rotating shaft H1, the control module CM drives the first rotating shaft H1 to rotate until the photoelectric sensor 151 is blocked, and the operation of origin calibration (zeroing) is completed.
[0040] Figure 7 is Figure 1 an exploded schematic view of some components of the robotic arm, which is equivalent to Figure 6The shown flange H11 is split into two opposite disk components H111 and H112 to facilitate the identification of the stopper structure therein. Figure 8 Shown from another perspective Figure 7 of some components. Please also refer to Figure 7 and Figure 8 In this embodiment, the robotic arm 100 further includes a stop module, which includes a first stopper B1 disposed on the first rotating shaft H1 and a second stopper B2 disposed on the second rotating shaft H2. The first stopper B1 moves with the rotation of the first rotating shaft H1, and the second stopper B2 moves with the rotation of the second rotating shaft H2. The first stopper B1 and the second stopper B2 are in each other's movement paths. Accordingly, when the control module CM drives the second rotating shaft H2 of the second rotating shaft module MD2 to rotate relative to the first rotating shaft H1 of the first rotating shaft module MD1, and when the second stopper B2 collides with the first stopper B1, the control module CM can thereby obtain the relative origin position of the second rotating shaft H2 and the first rotating shaft H1. If the calibration (zeroing) operation of the foregoing first rotating shaft H1 is further coordinated, the origin calibration operations of the first rotating shaft H1 and the second rotating shaft H2 can be successfully completed.
[0041] For example, regarding the origin detection method of the second rotating shaft H2, in step 1, the second rotating shaft H2 is first rotated by an angle in one direction while the first rotating shaft H1 remains stationary until the first stopper B1 hits the second stopper B2 to generate (trigger) a torque limit signal. Then in step 2, the first rotating shaft H1 is driven to rotate by an angle in this direction while the second rotating shaft H2 remains stationary, and in step 3, it is determined whether the foregoing torque limit signal is released. If not, it means that a structural member interference occurs at this time, and a warning signal needs to be triggered to notify the operator. On the contrary, if the torque limit signal has been released, steps 1 to 3 are executed again and continuously repeated until the zeroing operations of the first rotating shaft H1 and the second rotating shaft H2 are completed.
[0042] In summary, in the above embodiment of the present invention, the robotic arm uses two stoppers of the stop module, each moving with the rotation of the first rotating shaft and the second rotating shaft, and being in each other's movement paths. Therefore, it can provide a simple but stable basis for judging the origin of the first rotating shaft and the second rotating shaft. At the same time, in coordination with the origin detection of the first rotating shaft by the photoelectric induction module, the operation and calibration of the robotic arm can be carried out accurately and effectively. By whether the components collide or not, and in coordination with the origin detection of the photoelectric induction module, the first rotating shaft and the second rotating shaft of the robotic arm can gradually complete the required origin calibration (zeroing) operations.
[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A robotic arm, suitable for semiconductor manufacturing process, characterized in that: include: ontology; A multi-section arm, comprising a first arm, a second arm and a third arm connected in sequence from the top end of the body; A first rotating shaft module, having a first rotating shaft, disposed in the body; A second rotating shaft module, comprising a second rotating shaft, and disposed inside the first rotating shaft; A photoelectric sensing module is disposed in the body; A stopper module, comprising a first stopper arranged on the first rotating shaft and a second stopper arranged on the second rotating shaft; as well as A control module electrically connects the first rotating shaft module, the second rotating shaft module and the photoelectric sensing module, The control module drives the second rotating shaft of the second rotating shaft module to rotate, so as to drive the multi-section arm to extend and retract along a fixed direction. The control module drives the first rotating shaft of the first rotating shaft module and the second rotating shaft of the second rotating shaft module to rotate at the same angle, so as to change the direction of the extension and retraction. The control module drives the first rotating shaft of the first rotating shaft module to rotate, and detects the origin position of the first rotating shaft through the photoelectric sensing module. The control module drives the second rotating shaft of the second rotating shaft module to rotate relative to the first rotating shaft of the first rotating shaft module, and when the second stopper collides with the first stopper, the control module obtains the relative origin position of the second rotating shaft and the first rotating shaft.
2. The robotic arm according to claim 1, characterized in that: The first arm has a first gear, a second gear and a first belt. The first gear is located at the connection between the main body and the first arm and is connected to the second rotating shaft. The second gear is located at the connection between the first arm and the second arm and is connected to the second arm. The first belt is transmissionably connected to the first gear and the second gear.
3. The robotic arm according to claim 2, characterized in that: The second arm has a third gear, a fourth gear and a second belt. The third gear is coaxially arranged with the second gear. The fourth gear is located at the connection between the second arm and the third arm and is connected to the third arm. The second belt can transmission connect the third gear and the fourth gear.
4. The robotic arm according to claim 1, characterized in that: The photoelectric sensing module includes a photoelectric sensor and a baffle. The photoelectric sensor is configured on the main body and electrically connected to the control module. The baffle is configured on the first rotating shaft. The photoelectric sensor is located on the movement path of the baffle. The control module drives the first rotating shaft to rotate until the baffle reaches the photoelectric sensor and is sensed, and the control module obtains the origin position of the first rotating shaft.
5. The robotic arm according to claim 1, characterized in that: The first rotating shaft module further includes a first motor and a first reducer, which are disposed in the body. The first motor is electrically connected to the control module, and the first reducer is transmissionably connected between the first motor and the first rotating shaft.
6. The robotic arm according to claim 1, characterized in that: The second rotating shaft module further includes a second motor and a second reducer, which are disposed in the body. The second motor is electrically connected to the control module, and the second reducer is transmissionably connected between the second motor and the second rotating shaft.
7. The robotic arm according to claim 1, characterized in that: It also includes a magnetic fluid shaft seal, which is arranged between the first rotating shaft and the second rotating shaft.
8. The robotic arm according to claim 1, characterized in that: It also includes a welding bellows, which is arranged between the first rotating shaft and the body.
9. The robotic arm according to claim 1, characterized in that: The first rotating shaft is a hollow rotating shaft, and the second rotating shaft is a solid rotating shaft, which is arranged inside the hollow rotating shaft. The first rotating shaft and the second rotating shaft are coaxially arranged.
10. The robotic arm according to claim 1, characterized in that: The first stopper moves with the rotation of the first rotating shaft, and the second stopper moves with the rotation of the second rotating shaft. The first stopper and the second stopper are on each other's movement paths.