Integrated module valve with adjustable pre-pumping function

Abstract

The utility model relates to the technical field of vacuum coating process pipelines, in particular to an adjustable integrated module valve with a pre-pumping function, which comprises a reaction cavity, and the right side of the reaction cavity is communicated with a first process pipeline. According to the utility model, the problems that in the existing scheme, three valves and one corrugated pipe are generally needed, so that not only are the mounting space and the number of middle connecting interfaces increased, but also the cost is increased are solved, the existing process pipeline does not need to be changed, and additional bypass branches do not need to be added; a process scheme with a pre-pumping function can be realized only by replacing a main pumping valve on an existing process pipeline with the integrated module valve, so that the installation and maintenance time of personnel is saved, the occupied space is small, the equipment installation space can be reduced, one valve has multiple purposes, the three valves can be independently used, the integrated valve is convenient to maintain, and when a valve group has problems and needs to be maintained, the maintenance cost is reduced. Overall replacement is not needed, only the valves with problems need to be replaced, and the use cost of the valves is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating process pipelines, in particular to an integrated module valve with an adjustable pre-pumping function. Background Technique

[0002] At present, the valve layout of the vacuum coating process pipeline mainly uses a small-caliber pneumatic baffle valve and a large-caliber pneumatic baffle valve as the auxiliary pumping valve and the main pumping valve in the vacuum pipeline system respectively. To adjust the exhaust speed in the auxiliary pumping valve pipeline, a manual regulating valve with a manually adjustable opening degree needs to be added to the auxiliary pumping valve pipeline, and a bellows is required to connect the main pumping valve in the bypass and the process pipeline in the middle.

[0003] In the existing scheme, generally three valves and a bellows are needed, which not only increases the installation space and the number of intermediate connection interfaces, but also increases the cost. To solve the above technical problems, we have designed an integrated module valve with an adjustable pre-pumping function. Content of the Utility Model

[0004] The purpose of the utility model is to provide an integrated module valve with an adjustable pre-pumping function, which has the advantages of multi-purpose of one valve, convenient replacement and cost saving, and solves the problems in the existing scheme that generally three valves and a bellows are needed, which not only increases the installation space and the number of intermediate connection interfaces, but also increases the cost.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: an integrated module valve with an adjustable pre-pumping function, including a reaction chamber, a process pipeline one is connected and installed on the right side of the reaction chamber, and an integrated module valve is connected to the right side of the process pipeline one. The integrated module valve includes a pneumatic main pumping valve, a pneumatic auxiliary pumping valve and a manual regulating valve.

[0006] Preferably, the air inlet end of the pneumatic auxiliary pumping valve is communicated with the air outlet cavity end of the pneumatic main pumping valve, and the air outlet end of the pneumatic auxiliary pumping valve is communicated with the air inlet end of the manual regulating valve.

[0007] Preferably, the pneumatic main pumping valve is a large-caliber pneumatic baffle valve, and the pneumatic auxiliary pumping valve is a small-caliber pneumatic baffle valve.

[0008] Preferably, the connection between the pneumatic auxiliary pumping valve and the pneumatic main pumping valve, the connection between the pneumatic auxiliary pumping valve and the manual regulating valve, and the connection between the manual regulating valve and the pneumatic main pumping valve are all fixedly connected by connection flanges.

[0009] Preferably, the air outlet end of the manual regulating valve is communicated with the air inlet cavity end of the pneumatic main pumping valve, and a process pipeline two is connected and installed at the bottom of the pneumatic main pumping valve.

[0010] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0011] 1. The present utility model does not need to modify the existing process pipeline, nor does it need to add an extra bypass. Only by replacing the main extraction valve on the existing process pipeline with an integrated module valve can a process scheme with a pre-extraction function be realized.

[0012] 2. The present utility model saves the installation and maintenance time of personnel. Moreover, the integrated module valve occupies a small space, which can reduce the installation space of the equipment.

[0013] 3. The integrated module valve of the present utility model can be used for multiple purposes. When the valve block is integrated, it can be applied to the process pipeline that requires adjustable pre-extraction function. When the valve block is disassembled, the three valves can be used separately. The integrated valve is convenient for maintenance. When there is a problem with the valve group that needs to be repaired, it is not necessary to replace the whole, and only the valve with problems needs to be replaced, which saves the use cost of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;

[0015] Figure 2 is a planar structural schematic diagram of the present utility model;

[0016] Figure 3 is a sectional schematic diagram of the integrated module valve of the present utility model.

[0017] In the figure: 1. Reaction chamber; 2. Process pipeline one; 3. Integrated module valve; 31. Pneumatic main extraction valve; 32. Pneumatic auxiliary extraction valve; 33. Manual regulating valve; 4. Process pipeline two. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] Please refer to Figures 1 - 3 , an integrated module valve with an adjustable pre-extraction function, including a reaction chamber 1. The right side of the reaction chamber 1 is connected and installed with a process pipeline one 2. The right side of the process pipeline one 2 is connected with an integrated module valve 3. By setting the integrated module valve 3, three valves can be concentrated together, which is convenient for operation. And the three valves can be used separately, which is convenient for maintenance and does not require overall replacement, saving costs. The integrated module valve 3 includes a pneumatic main extraction valve 31, a pneumatic auxiliary extraction valve 32 and a manual regulating valve 33. By setting the manual regulating valve 33, the opening degree of the pneumatic auxiliary extraction valve 32 can be adjusted manually through the manual regulating handle to achieve the purpose of controlling the exhaust speed;

[0019] Please refer to Figure 1 The intake end of the pneumatic auxiliary extraction valve 32 is communicated with the outlet cavity end of the pneumatic main extraction valve 31, and the outlet end of the pneumatic auxiliary extraction valve 32 is communicated with the intake end of the manual regulating valve 33;

[0020] Please refer to Figure 2, the pneumatic main extraction valve 31 is a large-diameter pneumatic baffle valve, and the pneumatic auxiliary extraction valve 32 is a small-diameter pneumatic baffle valve;

[0021] Please refer to Figure 3 , between the connection of the pneumatic auxiliary extraction valve 32 and the pneumatic main extraction valve 31, between the connection of the pneumatic auxiliary extraction valve 32 and the manual regulating valve 33, and between the connection of the manual regulating valve 33 and the pneumatic main extraction valve 31 are fixedly connected by connecting flanges;

[0022] Please refer to Figure 1 and Figure 3 , the air outlet end of the manual regulating valve 33 is communicated with the air inlet cavity end of the pneumatic main extraction valve 31, and a second process pipeline 4 is connected and installed at the bottom of the pneumatic main extraction valve 31.

[0023] During use, by using an integrated module valve 3 on the vacuum pipeline to replace the original main extraction valve, auxiliary extraction valve, manual valve, bellows and various bypass process interfaces, the pneumatic auxiliary extraction valve 32 and the manual regulating valve 33 are designed in series, and their air inlets and air outlets are respectively connected in parallel to the air inlet cavity end and the air outlet cavity end of the pneumatic main extraction valve 31, so that they are integrated onto the pneumatic main extraction valve 31 and designed into an integrated valve. During the initial evacuation stage of the reaction chamber 1, the pneumatic main extraction valve 31 is closed and the pneumatic auxiliary extraction valve 32 is opened. The gas in the reaction chamber 1 is discharged from the pneumatic auxiliary extraction valve 32 end. At the same time, the bypass of the pneumatic auxiliary extraction valve 32 has the function of the manual regulating valve 33, and the opening degree of the pneumatic auxiliary extraction valve 32 can be adjusted by manually adjusting the handle to control the exhaust speed. When a preliminary vacuum environment is established, the pneumatic auxiliary extraction valve 32 is closed and the pneumatic main extraction valve 31 is opened, and the gas in the reaction chamber 1 is discharged from the pneumatic main extraction valve 31 end

[0024] To sum up: The integrated module valve with adjustable pre-pumping function solves the problem in the existing solution that generally three valves and a bellows are required, which not only increases the installation space and the number of intermediate connection interfaces, but also increases the cost through the cooperation of the reaction chamber 1, the first process pipeline 2, the integrated module valve 3 and the second process pipeline 4.

Claims

1. An integrated modular valve with an adjustable pre-pumping function, comprising a reaction chamber (1), characterized in that: The right side of the reaction chamber (1) is connected to a process pipeline (2), and the right side of the process pipeline (2) is connected to an integrated module valve (3). The integrated module valve (3) comprises a pneumatic main pumping valve (31), a pneumatic auxiliary pumping valve (32) and a manual regulating valve (33).

2. The integrated modular valve with adjustable pre-pumping function according to claim 1, characterized in that: The air inlet end of the pneumatic auxiliary pumping valve (32) is communicated with the air outlet cavity end of the pneumatic main pumping valve (31), and the air outlet end of the pneumatic auxiliary pumping valve (32) is communicated with the air inlet end of the manual regulating valve (33).

3. The integrated modular valve with adjustable pre-pumping function according to claim 1, characterized in that: The pneumatic main pumping valve (31) is a large-caliber pneumatic baffle valve, and the pneumatic auxiliary pumping valve (32) is a small-caliber pneumatic baffle valve.

4. The integrated modular valve with adjustable pre-pumping function according to claim 1, characterized in that: The connection between the pneumatic auxiliary pumping valve (32) and the pneumatic main pumping valve (31), the connection between the pneumatic auxiliary pumping valve (32) and the manual regulating valve (33), and the connection between the manual regulating valve (33) and the pneumatic main pumping valve (31) are all fixedly connected via connecting flanges.

5. The integrated modular valve with adjustable pre-pumping function according to claim 1, characterized in that: The air outlet end of the manual regulating valve (33) is connected to the air inlet cavity end of the pneumatic main pumping valve (31), and the bottom of the pneumatic main pumping valve (31) is connected to a process pipeline 2 (4).

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