Hundred-thousand-grade clean workshop

Abstract

The utility model relates to a hundred-thousand-grade clean workshop which comprises a static pressure unit, the static pressure unit comprises a clean area and an interlayer space, the top of the clean area is provided with a spacing layer, the spacing layer is provided with an air supply port and a first air return port, and the air supply port is provided with a fan; the interlayer space is arranged above the clean area, the interlayer space and the clean area are separated through the spacing layer, the interlayer space communicates with the clean area through the air supply outlet, the interlayer space is provided with a first air inlet and an air supply assembly, and the air supply assembly is connected with the first air inlet; the air conditioning unit comprises an air conditioning unit and a pipeline assembly, and the air conditioning unit is connected with the first air inlet through the pipeline assembly; and the air return unit comprises at least one air return column, and the air return columns are arranged in the clean area. According to the utility model, the arrangement and use of pipelines can be reduced, the interlayer space is effectively saved, the follow-up repair and maintenance are facilitated, and the device is suitable for clean workshops with lower story heights.

Description

Technical Field

[0001] The utility model relates to the technical field of clean rooms, in particular to a one-hundred-thousand-class clean workshop. Background Art

[0002] A clean room refers to a relatively airtight space in which parameters such as air cleanliness, temperature, humidity, pressure, and noise are controlled as required. The development of clean rooms is closely related to modern industry and cutting-edge technologies. Due to the environmental requirements of precision machinery industries (such as the processing of gyroscopes, miniature bearings, etc.) and semiconductor industries (such as the production of large-scale integrated circuits), the development of clean room technology has been promoted. Currently, the one-hundred-thousand-class clean rooms used in integrated circuit production adopt the form of a modular air handling unit + HEPA BOX (high-efficiency air supply outlet). A "one-hundred-thousand-class clean room" usually refers to a room or facility with a cleanliness level reaching one hundred thousand (ISO8, that is, the number of 0.5μm particles per cubic foot is less than one hundred thousand). In order to achieve a one-hundred-thousand-class cleanliness level, a series of measures are usually required, including an air filtration system: installing high-efficiency filtration equipment such as HEPA BOX, FFU, and MAU / AHU / MCU units; positive pressure control: maintaining positive pressure in the room to prevent pollutants in the external air from entering the clean room; in addition, the room needs to be thoroughly cleaned regularly, including the floor, walls, equipment, mezzanine, etc.; and personnel entering the clean room need to be trained and required to wear special clean clothes and masks to reduce environmental pollution. Currently, the HVAC system of a conventional one-hundred-thousand-class clean room mainly consists of an air handling unit, air supply outlets (HEPA BOX), return air outlets, and main pipes and branch pipes connecting various parts. The air in the lower clean area is transported back to the air handling unit through the return air outlet and pipes under the action of the fan of the air handling unit, and then the air is purified once by the primary and intermediate filters of the air handling unit, and then transported to the air supply outlet through the air supply pipe. Under the action of the air supply pressure, the air is purified again by the air supply outlet and then sent to the lower clean area.

[0003] However, the deficiencies of the prior art are that there are generally various equipment and tools required for installing a clean room, such as HVAC pipes, air handling units, fire pipes, exhaust pipes, water supply and drainage pipes, hot / cold water pipes, cable trays, maintenance lighting, etc. in the mezzanine space. In the currently used HVAC system, a large number of pipes are required to connect each air supply outlet and return air outlet, which will occupy most of the mezzanine space. As a result, the remaining space in the mezzanine space is relatively small, which is not conducive to subsequent maintenance, repair, and renovation and upgrading, causing great difficulties in maintenance work. Summary of the Utility Model

[0004] To this end, the technical problem to be solved by the present utility model is to overcome the deficiencies in the prior art and provide a hundred-thousand-class clean workshop, which can reduce the layout and use of pipelines under the conditions of low floor height and limited mezzanine space, effectively save the mezzanine space, facilitate subsequent maintenance and servicing, and is applicable to clean workshops with low floor height.

[0005] To solve the above technical problems, the present utility model provides a hundred-thousand-class clean workshop, including,

[0006] A static pressure unit, which includes a clean area and a mezzanine space. A spacer layer is provided at the top of the clean area. The spacer layer is provided with air supply outlets and a first air return opening. A blower is provided at the air supply outlet. The mezzanine space is arranged above the clean area. The mezzanine space and the clean area are separated by the spacer layer. The mezzanine space is communicated with the clean area through the air supply outlet. The mezzanine space is provided with a first air inlet and an air supply assembly, and the air supply assembly is connected to the first air inlet.

[0007] An air conditioning unit, which includes an air conditioning unit and a pipeline assembly. The air conditioning unit is connected to the first air inlet through the pipeline assembly.

[0008] An air return unit, which includes at least one air return column. The air return column is arranged in the clean area. The interior of the air return column has a cavity. One end of the air return column is communicated with the mezzanine space through the first air return opening. At least one second air return opening is provided on the side wall of the air return column. The air return column is communicated with the clean area through the second air return opening.

[0009] In an embodiment of the present utility model, the air return column is arranged in the clean area along the height direction.

[0010] In an embodiment of the present utility model, there are multiple air return columns, and the multiple air return columns are evenly spaced in the clean area.

[0011] In an embodiment of the present utility model, each air return column is configured to be connected to one of the first air return openings.

[0012] In an embodiment of the present utility model, at least one of the first air return openings is provided with a cooling assembly, and the cooling assembly includes a dry cooling coil.

[0013] In an embodiment of the present utility model, there are multiple air supply outlets, and the multiple air supply outlets are evenly spaced on the spacer layer.

[0014] In an embodiment of the present utility model, a filtering assembly is further included, and at least one of the air supply outlets is provided with the filtering assembly.

[0015] In an embodiment of the present utility model, the filtering component includes a filter screen, the fan and the filter screen are arranged in sequence along the height direction, and the fan is arranged on one side close to the interlayer space.

[0016] In an embodiment of the present utility model, the pipeline component includes at least one main air supply pipe. One end of the main air supply pipe is connected to the air conditioning unit, and at least one air supply branch pipe is provided at the other end of the main air supply pipe. The air supply branch pipe extends along the length direction of the clean area.

[0017] In an embodiment of the present utility model, the air supply component is arranged in the air supply branch pipe.

[0018] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0019] A hundred-thousand-class clean workshop of the present utility model includes a static pressure unit, an air conditioning unit, and a return air unit. Among them, the static pressure unit includes a clean area and an interlayer space. The clean area is the space for production operations, and the interlayer space is located at the top of the clean area. The air conditioning unit includes an air conditioning unit and a pipeline component. The fresh air is regulated into air with a specified humidity and temperature after passing through the air conditioning unit, enters the interlayer space, and under the action of the fan, enters the clean area from the interlayer space, and can enter the return air column through the second return air opening, and then return to the interlayer space through the first return air opening. Compared with the prior art in which a large number of branch pipes are required to connect the air supply openings and return air openings in the hundred-thousand-class clean room HVAC system, the present utility model does not require branch pipes to connect the air supply openings and return air openings, thereby reducing the arrangement and use of pipelines, effectively saving the interlayer space, facilitating subsequent maintenance and repair, and being applicable to clean workshops with a relatively low floor height. Description of the Drawings

[0020] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to the specific embodiments of the present utility model and in combination with the drawings, wherein:

[0021] Figure 1 is the main view sectional schematic diagram of the overall structure of the preferred embodiment of the present utility model.

[0022] Figure 2 is the top view sectional schematic diagram of the overall structure of the preferred embodiment of the present utility model.

[0023] Figure 3 is the partial structure schematic diagram of the fan and the filtering component of the preferred embodiment of the present utility model.

[0024] Description of the reference numerals in the drawings: 1. Clean area; 2. Mezzanine space; 20. First air inlet; 21. Air supply assembly; 3. Spacer layer; 30. Air supply outlet; 301. Fan; 302. Filter screen; 31. First air return inlet; 311. Cooling assembly; 40. Air conditioning unit; 41. Main air supply pipe; 42. Branch air supply pipe; 50. Air return column; 501. Second air return inlet. Detailed implementation manners

[0025] The present utility model will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the specific embodiments cited shall not be construed as limiting the present utility model.

[0026] Refer to Figure 1 and Figure 2 As shown, the present utility model discloses a one-hundred-thousand-class clean workshop, including a static pressure unit. The static pressure unit includes a clean area 1 and a mezzanine space 2. A spacer layer 3 is provided at the top of the clean area 1. The mezzanine space 2 is arranged above the clean area 1. The mezzanine space 2 and the clean area 1 are separated into two spaces by the spacer layer 3.

[0027] Specifically, the spacer layer 3 is provided with an air supply outlet 30 and a first air return inlet 31. The mezzanine space 2 is communicated with the clean area 1 through the air supply outlet 30. It should be noted that the air supply outlet 30 is provided with a fan 301 to facilitate the delivery of the air in the mezzanine space 2 to the clean area 1 and ensure the uniformity of air supply and the stability of the air flow pattern. If the clean workshop needs to be upgraded and transformed, it can be achieved by increasing the number and arrangement density of the air supply outlets 301 provided in the spacer layer 3, which is convenient for adjustment and transformation.

[0028] The mezzanine space 2 is provided with a first air inlet 20 and an air supply assembly 21. The air supply assembly 21 is connected to the first air inlet 20. Cooperating with the air supply outlet 30 and the fan 301, air can circulate between the mezzanine space 2 and the clean area 1.

[0029] The clean workshop further includes an air conditioning unit. The air conditioning unit includes an air conditioning unit 40 and a pipeline assembly. The air conditioning unit 40 is connected to the first air inlet 20 through the pipeline assembly. It should be noted that the air conditioning unit 40 is arranged outside the static pressure unit, and the air conditioning unit is used to provide fresh air and control temperature and humidity.

[0030] The clean workshop further includes a return air unit, which includes at least one return air column 50. The return air column 50 is arranged in the clean area 1. Specifically, the return air column 50 has a cavity inside. One end of the return air column 50 communicates with the interlayer space 1 through the first return air opening 31. At least one second return air opening 501 is provided on the side wall of the return air column 50, and the return air column 50 communicates with the clean area 1 through the second return air opening 501.

[0031] In terms of details, outdoor air enters the air conditioning unit 40 through the fresh air section. Large particle dust can be filtered out by the primary and intermediate efficiency filters of the air conditioning unit 40. A hot plate and a cold plate are respectively provided in the preheating section and the precooling section of the air conditioning unit 40, so that the air can be preheated first and then cooled and dehumidified. Since a humidifier is provided in the humidifying section of the air conditioning unit 40, the fresh air is humidified into high-humidity air. The high-humidity air passes through the reheating section and the reheat section. Among them, a cold coil and a hot coil are respectively provided in the reheating section and the reheat section, so as to control and adjust the fresh air to the final required temperature and humidity. After passing through the filtering step, small particles are filtered, and finally enter the pipeline assembly through the air outlet section of the air conditioning unit 40, and then are conveyed to the interlayer space 2.

[0032] Then, under the action of the fan 301, the air enters the clean area 1 from the interlayer space 2, enters the return air column 50 through the second return air opening 501, and returns to the interlayer space 2 through the first return air opening 31.

[0033] It can be seen from this that a hundred-thousand-class clean workshop to be protected by the present utility model includes a static pressure unit, an air conditioning unit, and a return air unit. Among them, the static pressure unit includes a clean area and an interlayer space. The clean area is the space for production operations, and the interlayer space is located at the top of the clean area. The air conditioning unit includes an air conditioning unit and a pipeline assembly. After passing through the air conditioning unit, the fresh air is regulated into air with a specified humidity and temperature, enters the interlayer space, and under the action of the fan, enters the clean area from the interlayer space, and can enter the return air column through the second return air opening, and then return to the interlayer space through the first return air opening. Compared with the hundred-thousand-class clean room HVAC system in the prior art, which requires a large number of branch pipes to connect the air supply openings and the return air openings, the present utility model does not require branch pipes to connect the air supply openings and the return air openings, so that the arrangement and use of pipelines can be reduced, the interlayer space can be effectively saved, subsequent maintenance and repair are facilitated, and it is applicable to clean workshops with a relatively low floor height.

[0034] As a preferred implementation manner, in order to improve the space utilization rate of the clean area, increase the air flow rate, and improve the aesthetics, the return air column 50 is arranged in the clean area 1 along the height direction.

[0035] As a preferred embodiment, a plurality of the return air columns 50 are provided, and the plurality of the return air columns 50 are evenly spaced in the clean area 1.

[0036] In detail, a plurality of the first return air openings 31 are provided, and each of the return air columns 50 is configured to communicate with one of the first return air openings 31, so that the first return air openings 31 are also evenly spaced in the spacer layer 3.

[0037] As a preferred embodiment, at least one of the first return air openings 31 is provided with a cooling assembly 311, and the cooling assembly 311 includes, but is not limited to, a dry cooling coil (DCC).

[0038] As a preferred embodiment, a plurality of the air supply openings 30 are provided, and the plurality of the air supply openings 30 are evenly spaced in the spacer layer 3.

[0039] As a preferred embodiment, the clean workshop further includes a filtering assembly, and at least one of the air supply openings 30 is provided with the filtering assembly. Specifically, the filtering assembly uses a high-efficiency filter.

[0040] In detail, the filtering assembly includes a filter screen 302, and the fan 301 and the filter screen 302 are arranged in sequence along the height direction, and the fan 301 is arranged on the side close to the interlayer space 2.

[0041] As a preferred embodiment, the air supply opening adopts an FFU (Fan Filter Unit), which has a better air purification effect, can better ensure the uniformity of air supply and the air flow pattern, and if the clean room needs to be upgraded, only the number and density of FFUs need to be increased, and the installation is convenient.

[0042] In detail, during the selection, the FFU selects the corresponding fan model and filter according to the circulation times requirement of the one hundred thousand grade, and is evenly arranged in the spacer layer 3 at a certain density. The air in the interlayer space 2, under the action of the fan 301, passes through the filtering assembly, and the purified air is conveyed to the clean area 1, and can create a pressure difference between the interlayer space 2 and the clean area 1, so that the air in the clean area 1 is passively conveyed to the interlayer space 2 through the first return air opening 31 under the action of the pressure difference, thereby realizing the circulating flow of air.

[0043] At the same time, the first return air openings 31 can be evenly arranged in the spacer layer 3 at a certain density according to requirements, and the dry cooling coil (DCC) is installed in the first return air openings 31, which can control the temperature of the air circulating back to the interlayer space 2 and assist in controlling the humidity.

[0044] The existing HVAC system for a hundred-thousand-class cleanroom requires a large number of branch pipes to connect the air supply outlets and return air outlets. In the present utility model, since the air supply outlet 30 is configured as an FFU (Fan Filter Unit), and the first return air outlet 31 is configured as a DCC (Dry Cooling Coil), the clean area 1 and the mezzanine space 2 together form a plenum structure, thus eliminating the need for branch pipes to connect the air supply outlet 30 and the first return air outlet 31. Therefore, the use of pipes can be significantly reduced, and the space occupancy rate of the mezzanine space 2 can be lowered, making it suitable for clean workshops with relatively low floor heights.

[0045] Furthermore, in the existing HVAC system for a hundred-thousand-class cleanroom, the temperature, humidity, and differential pressure are mainly controlled by the air handling unit. In the present utility model, the temperature is mainly controlled by the DCC (Dry Cooling Coil), and the differential pressure is controlled by the FFU (Fan Filter Unit). The air handling unit only needs to control the humidity and the temperature of the fresh air, which can reduce the requirements for the air handling unit, thereby reducing the selection difficulty and design difficulty, and being more conducive to controlling the temperature, humidity, and differential pressure of the cleanroom.

[0046] Even further, in the existing HVAC system for a hundred-thousand-class cleanroom, due to the need for air supply pressure, the main pipes and branch pipes must be made of rigid materials (such as PP, stainless steel plates, galvanized steel plates, etc.). In the present utility model, since the differential pressure is mainly provided by the FFU (Fan Filter Unit), the main air supply pipes can use more diverse materials to meet different requirements. For example, the fabric duct as a flexible material can adapt to more complex mezzanine structures and lower floor heights.

[0047] Specifically, the pipe assembly includes at least one main air supply pipe 41. One end of the main air supply pipe 41 is connected to the air handling unit 40, and the other end of the main air supply pipe 41 is provided with at least one air supply branch pipe 42, which extends along the length direction of the clean area 1. The main air supply pipe 41 is connected from the air handling unit 40 to the mezzanine space 2, and can provide humidified and temperature-regulated fresh air.

[0048] As a preferred embodiment, the air supply assembly is arranged on the air supply branch pipe 42.

[0049] In the description of the embodiments of the present utility model, it should also be noted that unless otherwise clearly specified and limited, if the terms "arranged" and "connected" are used, they should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0050] In the description of the present utility model, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more, unless otherwise specifically defined.

[0051] In the present utility model, unless otherwise clearly specified and defined, the terms "installed", "connected", "connected to", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium; it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0052] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of the present utility model.

Claims

1. A 100,000-class clean room, characterized by: include, A static pressure unit, comprising a clean area and a mezzanine space, wherein a spacer layer is provided on the top of the clean area, the spacer layer is provided with an air supply port and a first air return port, and the air supply port is provided with a fan; the mezzanine space is arranged above the clean area, the mezzanine space is separated from the clean area by the spacer layer, the mezzanine space is connected with the clean area through the air supply port, the mezzanine space is provided with a first air inlet and an air supply assembly, and the air supply assembly is connected to the first air inlet; an air conditioning unit, comprising an air conditioning unit and a pipe assembly, wherein the air conditioning unit is connected to the first air inlet through the pipe assembly; A return air unit, comprising at least one return air column, wherein the return air column is arranged in the clean area, wherein a cavity is provided inside the return air column, wherein one end of the return air column is connected to the interlayer space via the first return air port, wherein at least one second return air port is provided on the side wall of the return air column, and wherein the return air column is connected to the clean area via the second return air port.

2. A 100,000-class cleanroom according to claim 1, characterized in that: The return air column is arranged in the clean area along the height direction.

3. A 100,000-class cleanroom according to claim 1 or 2, characterized in that: There are multiple return air columns, and the multiple return air columns are evenly spaced and arranged in the clean area.

4. A 100,000-class cleanroom according to claim 3, characterized in that: Each of the return air columns is configured to be connected to one of the first return air ports.

5. A 100,000-class cleanroom according to claim 4, characterized in that: At least one of the first return air outlets is provided with a cooling assembly, and the cooling assembly includes a dry cooling coil.

6. A 100,000-class cleanroom according to claim 1, characterized in that: There are multiple air supply outlets, and the multiple air supply outlets are evenly spaced and arranged in the spacing layer.

7. A 100,000-class cleanroom according to claim 1 or 6, characterized in that: It also includes a filter assembly, and at least one of the air supply outlets is provided with the filter assembly.

8. A 100,000-class cleanroom according to claim 7, characterized in that: The filter assembly includes a filter screen, the fan and the filter screen are arranged in sequence along the height direction, and the fan is arranged on a side close to the interlayer space.

9. A 100,000-class cleanroom according to claim 1, characterized in that: The pipeline assembly includes at least one air supply main pipe, one end of which is connected to the air conditioning unit, and the other end of which is provided with at least one air supply branch pipe, which extends along the length direction of the clean area.

10. A 100,000-class cleanroom according to claim 9, characterized in that: The air supply component is arranged on the air supply branch pipe.

Images