Galvanometer motor consistency detection device

Abstract

The utility model discloses a galvanometer motor consistency detection device. The galvanometer motor consistency detection device comprises an X-axis rectilinear motion platform, wherein a photosensitive position acquisition device is configured on the X-axis rectilinear motion platform; a laser light source and a galvanometer motor are sequentially arranged on the Y-axis linear motion table in the direction away from the original point, and a galvanometer piece is arranged at the rotating shaft end of the galvanometer motor; the galvanometer motor consistency detection device can solve the problems that a traditional galvanometer motor consistency detection device is complex in structure and high in detection cost.

Description

Technical Field

[0001] The utility model relates to the technical field of laser marking, and particularly relates to a galvanometer motor consistency detection device. Background Art

[0002] Galvanometer laser scanning systems have been increasingly applied in fields such as semiconductor processing, military detection, aerospace, biomedicine, and nanoscience research, and at the same time, higher performance requirements are imposed on them; as the main component of the galvanometer laser scanning system, the galvanometer motor directly affects the stability of the scanning system.

[0003] A complete galvanometer motor includes a mirror group. At present, the vast majority of motors are assembled with lenses by non-automated means, and at the same time, the internal parts of the galvanometer motor are numerous and small, so there are assembly errors in the assembly production process of the galvanometer motor, and the cumulative error after assembly cannot guarantee product consistency.

[0004] For the performance indicators of the galvanometer motor, such as the installation angle of the galvanometer lens determining the linearity index and the linearity of the galvanometer motor, the vast majority are debugged by powering on. By using the additional functions of the marking software, corrections are made to it. However, this process not only requires building a complete laser control marking system but also requires manual calibration and measurement. Among them, precise calibration requires the help of equipment such as an image measuring instrument, so the requirements for equipment and operators are relatively high; in addition, the repeat positioning accuracy of the galvanometer is also an important technical indicator and is particularly important for the positioning of galvanometer products. However, this indicator also needs to be completed in the laser control marking system, resulting in high detection costs.

[0005] In view of this, the present application provides a galvanometer motor consistency detection device with a simple structure and low detection cost. Summary of the Utility Model

[0006] To overcome the above disadvantages, the purpose of the utility model is to provide a galvanometer motor consistency detection device.

[0007] To achieve the above purpose, the technical solutions adopted by the utility model include:

[0008] An X-axis linear motion stage, on which a photosensitive position acquisition device is configured;

[0009] A Y-axis linear motion stage, on which a laser light source and a galvanometer motor are sequentially arranged along the direction away from the origin position, and a galvanometer lens is configured at the rotating shaft end of the galvanometer motor.

[0010] In this application, a laser source on the Y-axis linear moving stage emits laser light. A galvanometer motor controls the galvanometer mirror to reflect the received laser light in the X-axis direction. The X-axis linear moving stage is used to drive a photosensitive position acquisition device to receive the laser light reflected by the galvanometer mirror, so that the laser light reflected by the galvanometer mirror can be received in real time, improving the accuracy of data detection, and having a simple structure and low detection cost.

[0011] In the preferred technical solution of the above galvanometer motor consistency detection device, the X-axis linear moving stage is one of an X-axis linear motor module and an X-axis linear guide rail module.

[0012] In the preferred technical solution of the above galvanometer motor consistency detection device, the Y-axis linear moving stage is one of a Y-axis linear motor module and a Y-axis linear guide rail module.

[0013] In the preferred technical solution of the above galvanometer motor consistency detection device, the galvanometer mirror is adhesively bonded to the rotating shaft end of the galvanometer motor.

[0014] In the preferred technical solution of the above galvanometer motor consistency detection device, the photosensitive position acquisition device is a PSD position sensitive sensor.

[0015] In the preferred technical solution of the above galvanometer motor consistency detection device, the galvanometer motor is detachably connected to the Y-axis linear moving stage.

[0016] In the preferred technical solution of the above galvanometer motor consistency detection device, the laser source is configured to be height adjustable on the Y-axis linear moving stage.

[0017] The beneficial effect of the present utility model is that a laser source on the Y-axis linear moving stage emits laser light. A galvanometer motor controls the galvanometer mirror to reflect the received laser light in the X-axis direction. The X-axis linear moving stage is used to drive a photosensitive position acquisition device to receive the laser light reflected by the galvanometer mirror, so that the laser light reflected by the galvanometer mirror can be received in real time, improving the accuracy of data detection, and having a simple structure and low detection cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is the front view of the present utility model;

[0019] Figure 2 is a schematic diagram of the galvanometer motor and the galvanometer mirror;

[0020] Figure 3 is a schematic diagram of the photosensitive position acquisition device receiving the reflected laser Figure 1 ;

[0021] Figure 4 is a schematic diagram of the photosensitive position acquisition device receiving the reflected laser Figure 1 ;

[0022] In the figure: laser light source 1, galvanometer motor 2, galvanometer mirror 3, photosensitive position acquisition device 4, X-axis linear motion stage 5, Y-axis linear motion stage 6. Specific embodiments

[0023] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present invention and are not intended to limit the protection scope of the present invention.

[0024] It should be noted that in the description of the present invention, the terms indicating directions or positional relationships such as "upper", "lower", "left", "right", "front", "rear", etc. are based on the directions or positional relationships shown in the drawings. This is only for the convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0025] In addition, it should also be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "set", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0026] Based on the problems of the complex structure and high detection cost of the galvanometer motor consistency detection device pointed out in the background technology. The present invention provides a galvanometer motor consistency detection device, aiming to emit laser through the laser light source 1 on the Y-axis linear motion stage 6, and the galvanometer motor 2 controls the galvanometer mirror 3 to reflect the received laser in the X-axis direction. The X-axis linear motion stage 5 is used to drive the photosensitive position acquisition device 4 to receive the laser reflected by the galvanometer mirror 3. In this way, the laser reflected by the galvanometer mirror 3 can be received in real time, improving the accuracy of data detection, and the structure is simple and the detection cost is low.

[0027] As Figures 1 to 4 shown, the galvanometer motor 2 consistency detection device of the present invention includes: an X-axis linear motion stage 5, on which a photosensitive position acquisition device 4 is configured; a Y-axis linear motion stage 6, on which a laser light source 1 and a galvanometer motor 2 are sequentially configured along the direction away from the origin position, and a galvanometer mirror 3 is configured at the rotating shaft end of the galvanometer motor 2.

[0028] See Figure 1, the X-axis linear stage 5 can control the photosensitive position acquisition device 4 to move in the X-axis direction to receive the laser reflected by the galvanometer mirror 3, and the photosensitive position acquisition device 4 can record the distance of the laser reflected by the galvanometer mirror 3 relative to the origin in the X-axis direction.

[0029] See Figure 1 , the Y-axis linear stage 6 can control the laser light source 1 and the galvanometer motor 2 to move in the Y-axis direction; wherein, when the laser light source 1 and the galvanometer motor 2 move to the predetermined position, the positions of the laser light source 1 and the galvanometer motor 2 do not change relative to the position of the photosensitive position acquisition device 4; the galvanometer mirror 3 of the galvanometer motor 2 can receive the laser emitted by the laser light source 1 and reflect it towards the X-axis direction to be received by the photosensitive position acquisition device 4 following along the X-axis.

[0030] See Figure 1 , when detecting the linearity of the galvanometer motor 2, control the galvanometer mirror 3 to deflect clockwise from the direction parallel to the X-axis. The laser light source 1 emits laser light, and the laser light is reflected by the galvanometer mirror 3 and received by the photosensitive position acquisition device 4, and record the reflection angle θ of the laser by the galvanometer mirror 3 at this time 1 ; thereafter, continue to control the galvanometer mirror 3 to continue to deflect clockwise, and the deflection angle is θ 2 , and follow the position of the laser reflection in the X-axis direction by moving the photosensitive position acquisition device 4 in the X-axis direction; wherein, the rotation angle of the galvanometer motor 2 is A is the position distance of the laser spot received by the photosensitive position acquisition device 4 relative to the origin on the X-axis; B is the position distance of the incident laser spot on the galvanometer mirror 3 relative to the origin on the Y-axis.

[0031] It should be noted that the linearity of the galvanometer motor 2 refers to the proportional relationship between the control signal input to the galvanometer motor 2 and the output rotation angle. When the error between the output rotation angle and the input control signal is higher, the linearity of the galvanometer motor 2 is lower. When the error between the output rotation angle and the input control signal is lower, the linearity of the galvanometer motor 2 is higher. The input control signal of the galvanometer motor 2 can be expressed by θ 1 expression, and the output signal of the galvanometer motor 2 can be expressed by θ 2 for expression; at this time, by comparing the errors of multiple groups of θ 1 and θ 2 , the linearity of the galvanometer motor 2 can be determined. By this method, the cost of detecting the linearity of the galvanometer motor 2 can be reduced, defective products can be reasonably screened, the yield rate of the galvanometer motor 2 can be improved, and the consistency of the galvanometer motor 2 can be improved.

[0032] In one or more embodiments, the X-axis linear stage 5 is one of an X-axis linear motor module and an X-axis linear guide rail module; the Y-axis linear stage 6 is one of a Y-axis linear motor module and a Y-axis linear guide rail module.

[0033] The driving forms of the X-axis linear motor module and the Y-axis linear motor module are linear motors, which generally consist of profiles, sliders, motors, stators (magnet steels), grating scales, Hall sensors, linear guides, etc.; in the linear motor, the magnet steel is used as part of the stator and cooperates with other components in the motor to achieve the drive of linear motion; through this method, the X-axis linear motor module and the Y-axis linear motor module can have extremely high precision, and the positions of the photosensitive position acquisition device 4 on the X-axis and the galvanometer motor 2 and the laser light source 1 on the Y-axis can be accurately recorded, improving the accuracy of the consistency detection of the galvanometer motor 2 and the detection effect on the galvanometer motor 2.

[0034] In one or more embodiments, the galvanometer mirror 3 is adhesively bonded to the rotating shaft end of the galvanometer motor 2.

[0035] In one or more embodiments, the photosensitive position acquisition device 4 is a PSD position sensitive sensor. The PSD position sensitive sensor has the advantages of high position resolution, simple response current, and fast response, and can improve the accurate recording of the laser position reflected by the galvanometer mirror 3, improving the detection effect on the galvanometer motor 2.

[0036] In one or more embodiments, the galvanometer motor 2 is detachably connected to the Y-axis linear motion stage 6. The galvanometer motor 2 can be installed on the Y-axis linear motion stage 6 by means of a slider, and the galvanometer motor 2 and the slider are connected by bolts to achieve the detachable configuration of the galvanometer motor 2 on the Y-axis linear motion stage 6; through this method, it is convenient to quickly replace and detect more galvanometer motors 2, improving the efficiency of the consistency detection of the galvanometer motor 2.

[0037] In one or more embodiments, the laser light source 1 is configured to be height-adjustable on the Y-axis linear motion stage 6. A spacer can be configured between the laser light source 1 and the Y-axis linear motion stage 6. By installing or removing the spacer, the height of the laser light source 1 on the Y-axis linear motion stage 6 can be changed, so that the laser emitted by the laser light source 1 can be located at different heights to meet the detection of galvanometer motors 2 of different sizes.

[0038] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it, and cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A galvanometer motor consistency detection device, characterized in that: include: An X-axis linear motion table, wherein the X-axis linear motion table is provided with a photosensitive position acquisition device; A Y-axis linear motion table, wherein a laser light source and a galvanometer motor are sequentially arranged on an upper edge of the Y-axis linear motion table toward a position away from an origin, and a galvanometer lens is arranged at a rotating shaft end of the galvanometer motor.

2. The galvanometer motor consistency detection device according to claim 1, characterized in that: The X-axis linear motion platform is one of an X-axis linear motor module and an X-axis linear guide module.

3. The galvanometer motor consistency detection device according to claim 1, characterized in that: The Y-axis linear motion platform is one of a Y-axis linear motor module and a Y-axis linear guide module.

4. The galvanometer motor consistency detection device according to claim 1, characterized in that: The galvanometer lens and the rotating shaft end of the galvanometer motor are glued.

5. The galvanometer motor consistency detection device according to claim 1, characterized in that: The photosensitive position acquisition device is a PSD position sensitive sensor.

6. The galvanometer motor consistency detection device according to claim 1 or 3, characterized in that: The galvanometer motor is detachably connected to the Y-axis linear motion table.

7. The galvanometer motor consistency detection device according to claim 1 or 3, characterized in that: The laser light source is configured on the Y-axis linear motion stage to be height-adjustable.

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