Supporting frame structure of wafer bearing box

Abstract

The utility model discloses a support frame structure of a wafer bearing box, which comprises a support frame assembly for placing a wafer bearing box A, a bottom frame, a vertical rod of which the bottom end is connected with the corner position of the bottom frame, and a baffle plate of which the bottom surface of one side is connected with the top end position of the vertical rod, the center position of one side of the bottom frame is vertically connected with a connecting block; the supporting assembly comprises a supporting plate parallel to the bottom frame, a transverse rod penetrating through the side position of the supporting plate and a lantern ring connected with the end of the transverse rod and arranged on the outer side of the vertical rod in a sliding and sleeving mode. The supporting frame is provided with a limiting design for preventing the wafer bearing box from falling off from the two sides of the supporting frame, the baffles distributed on the two sides limit the wafer bearing box A placed on the supporting plate, the wafer bearing box A is prevented from falling off from the two sides, the position of the supporting plate can be lifted, the placing space is increased, stacking of the wafer bearing box A is facilitated, and the working efficiency is improved. The blocking rods arranged on the side surfaces of the two end edges of the supporting plate block the wafer bearing box A and prevent the wafer bearing box A from falling off.

Description

Technical Field

[0001] The utility model belongs to the technical field of support devices for wafer processing, and particularly relates to a support frame structure for a wafer carrier box. Background Art

[0002] A wafer refers to a silicon wafer used for manufacturing silicon semiconductor integrated circuits. Since its shape is circular, it is called a wafer. In order to protect and transport wafers, wafers are generally placed inside a wafer carrier box to ensure the safety and integrity of the wafers during transportation, storage, and processing, and to prevent physical damage such as collision and friction to the wafers during transportation and storage. During the wafer processing process, it is necessary to transfer the wafers between different processing devices. When transferring, generally the wafer carrier box is placed on a support. The Chinese utility model authorized patent application number CN202122289451.X discloses a support for a wafer carrier box. Placing the wafer carrier box on the support for transfer is a conventional method.

[0003] When the wafer carrier box is placed on the support for transfer, generally the surface of the support is in a horizontal state, and the wafer carrier box is not limited on the horizontal surface of the support. When the support for transfer suddenly stops or shakes due to being bumped, the wafer carrier box may fall from both sides of the horizontal surface of the support, resulting in the wafer carrier box being impacted, and even the wafers inside the wafer carrier box popping out. There is a problem that the design of the support for transferring the wafer carrier box does not limit the wafer carrier box. Therefore, this application proposes a support frame structure for a wafer carrier box. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a support frame structure for a wafer carrier box to solve the problem in the above background art that there is no limit design on the support to prevent the wafer carrier box from falling from both sides.

[0005] To achieve the above purpose, the utility model provides the following technical solutions: A support frame structure for a wafer carrier box, comprising

[0006] A support frame assembly for placing the wafer carrier box A, including a bottom frame, vertical rods connected to the corner positions of the bottom of the bottom frame, and a baffle connected to the top position of the vertical rod on the surface of one bottom side. A contraction spring is sleeved on the outer side of the bottom end of the vertical rod. A connection block is vertically connected to the central position of one side of the bottom frame.

[0007] A support component, including a support plate parallel to the bottom frame, a cross bar passing through the side position of the support plate, and a collar connected to the end of the cross bar and slidably sleeved on the outer side of the vertical rod.

[0008] A limiting member installed at the central position of the side of the support plate, including a sliding rod passing through the support plate, a connecting rod connected to the top end of the sliding rod, and a limiting plate connected to the other end of the connecting rod.

[0009] Preferably, the baffle includes an upper horizontal portion, an inclined portion, and a lower vertical portion. The top end of the vertical rod is connected to the upper horizontal portion. The width H of the support plate is the same as the distance between the opposite surfaces of the lower horizontal portion.

[0010] Preferably, both ends of the contraction spring are respectively connected to the bottom frame and the collar. Stop rods are provided on the side surfaces of both ends of the support plate.

[0011] Preferably, a rectangular limit groove is formed on the surface of the connection block.

[0012] Preferably, the bottom end of the sliding rod is an inverted "T" - shaped structure. The limit plate is a rectangular plate - shaped structure. The limit plate is in clearance fit with the limit groove, and the distance between the limit plate and the depth of the limit groove is 1 centimeter.

[0013] Preferably, a limit assembly is provided on the surface of the support plate. The limit assembly includes an adjustment box assembled separately from the support plate, partition plates installed inside the adjustment box and distributed at equal intervals, a fixed shaft installed in the adjustment box and passing through the partition plates, and a sliding column passing through the side surface of the adjustment box and the partition plates.

[0014] Preferably, round heads are provided at both ends of the sliding column. A rubber cylinder is sleeved outside the position of the sliding column between adjacent partition plates. Through - holes are formed on the isosceles trapezoid - shaped partition plates. Fixed columns are provided on the surface of the adjustment box facing the support plate, and magnet blocks are provided at one ends of the fixed columns.

[0015] Preferably, a round groove is formed on the surface of the support plate. A metal round plate is provided in the round groove of the support plate. The magnet block is magnetically adsorbed and connected to the corresponding metal round plate.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] In the present utility model, there is a limit design on the support frame to prevent the wafer carrier box from falling from its two sides. The baffles distributed on both sides limit the wafer carrier box A placed on the support plate, avoiding its falling from both sides. The position of the support plate can be lifted and lowered, increasing the placement space and facilitating the stacking of wafer carrier boxes A. The stop rods provided on the side surfaces of both ends of the support plate block the wafer carrier box A, preventing it from falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is the Figure 1 enlarged schematic structural diagram of part A in the present utility model;

[0020] Figure 3 is a schematic top - view structural diagram of the support plate of the present utility model;

[0021] Figure 4 It is a schematic enlarged structure view of part B in the baffle of the present utility model;

[0022] Figure 5 It is a schematic cross-sectional structure view of the adjustment box of the present utility model;

[0023] In the figure: 1, bottom frame; 2, vertical rod; 3, baffle; 5, limiting member; 6, adjustment box; 11, connecting block; 21, contraction spring; 41, support plate; 42, cross bar; 43, collar; 51, sliding rod; 52, connecting rod; 53, limiting plate; 61, sliding column; 62, partition plate; 63, fixed shaft; 64, fixed column; 111, limiting groove; 411, stop bar; 412, metal round plate; 611, rubber cylinder; 641, magnet block. Specific embodiments

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0025] Embodiment 1

[0026] Please refer to Figures 1 to 3 , the present utility model provides a technical solution: a support frame structure of a wafer carrier box, including a bracket assembly for placing the wafer carrier box A, including a bottom frame 1, a vertical rod 2 connected to the corner position of the bottom of the bottom frame 1, and a baffle 3 connected to the top position of the vertical rod 2 on one side of the bottom surface. The vertical rod 2 is combined with the bottom frame 1 and the baffle 3 by conventional methods. A contraction spring 21 is sleeved on the outer side of the bottom end of the vertical rod 2. The support plate 41 moves vertically downward, and the collar 43 presses the contraction spring 21, so that the position of the support plate 41 can be changed. The baffle 3 is a bent plate structure, which can limit the wafer carrier box A placed on the support plate 41 to prevent it from falling from both sides. A connecting block 11 is vertically connected to the center position of one side of the bottom frame 1. The connecting block 11 is combined with the bottom frame 1 by conventional methods. The connecting block 11 plays a role in limiting the height position of the limiting plate 53;

[0027] A support component, including a support plate 41 parallel to the bottom frame 1, a cross bar 42 passing through the side position of the support plate 41, and a collar 43 connected to the end of the cross bar 42 and slidably sleeved on the outer side of the vertical rod 2. The wafer carrier box A is placed on the support plate 41, and the position of the support plate 41 can be lifted and lowered to increase the placement space and facilitate stacking of the wafer carrier box A;

[0028] The limiting member 5 installed at the central position on the side of the support plate 41 includes a sliding rod 51 passing through the support plate 41, a connecting rod 52 connected to the top end of the sliding rod 51, and a limiting plate 53 connected to the other end of the connecting rod 52. The sliding rod 51 is slidably connected to the support plate 41, and the position of the limiting member 5 can be changed. The limiting member 5 rotates around the position of the sliding rod 51, so that the limiting plate 53 can be placed in the limiting groove 111, and the limiting member 5 is limited by the connecting block 11, thereby limiting the position of the support plate 41.

[0029] In this embodiment, the baffle 3 includes an upper horizontal portion, an inclined portion, and a lower vertical portion. The top end of the vertical rod 2 is connected to the upper horizontal portion. The width H of the support plate 41 is the same as the distance between the opposite surfaces of the lower horizontal portion. The baffle 3 is a bent plate structure and is distributed on both sides of the surface of the support plate 41 to prevent the wafer carrier box A stacked on the support plate 41 from falling off from both sides.

[0030] In this embodiment, both ends of the contraction spring 21 are respectively connected to the bottom frame 1 and the collar 43. The baffle rods 411 are provided on the surface of both ends of the support plate 41 to prevent the wafer carrier box A placed on the support plate 41 from being limited by the baffle rods 411 and falling off.

[0031] In this embodiment, a rectangular limiting groove 111 is formed on the surface of the connecting block 11, and the limiting plate 53 is placed in the limiting groove 111, so that the limiting member 5 is limited by the connecting block 11.

[0032] In this embodiment, the bottom end of the sliding rod 51 is an inverted "T" - shaped structure, the limiting plate 53 is a rectangular plate - shaped structure, the limiting plate 53 is in clearance fit with the limiting groove 111, and the distance between the depth of the limiting plate 53 and the limiting groove 111 is 1 centimeter. There is a distance between the limiting plate 53 located in the limiting groove 111 and the inner surface of the connecting block 11, which is conducive to the connecting rod 52 and the limiting plate 53 rotating around the sliding rod 51, and the angle of the limiting plate 53 can be changed.

[0033] The working principle and usage process of the present utility model:

[0034] When the wafer carrier box A is placed and transported, the height position of the support plate 41 is adjusted and the support plate 41 is moved downward, and the collar 43 compresses the contraction spring 21;

[0035] When the support plate 41 moves downward to an appropriate position, at the same time, the connecting rod 52 and the limiting plate 53 are rotated around the sliding rod 51, so that the limiting plate 53 is placed in the limiting groove 111. At this time, the limiting member 5 is limited by the connecting block 11, and further the position of the support plate 41 is limited. The position of the support plate 41 can be raised and lowered, increasing the placement space and facilitating the stacking of the wafer carrier box A;

[0036] The wafer carrier box A is stacked on the surface of the support plate 41, and the baffle rods 411 provided on the surface of both ends of the support plate 41 block the wafer carrier box A to prevent it from falling.

[0037] The baffle 3 is a bent plate structure, which can limit the wafer carrier box A placed on the support plate 41 and prevent it from falling from both sides;

[0038] In summary: There is a limit design on the support frame to prevent the wafer carrier box from falling from both sides. The baffles 3 distributed on both sides limit the wafer carrier box A placed on the support plate 41 to prevent it from falling from both sides. The position of the support plate 41 can be lifted and lowered to increase the placement space, which is beneficial to stacking the wafer carrier box A. The stop bars 411 provided on the two end side surfaces of the support plate 41 block the wafer carrier box A to prevent it from falling.

[0039] Embodiment 2

[0040] Please refer to Figures 1 to 5 , which is the second embodiment of the present invention. Based on the previous embodiment, in order to increase the limiting effect, a limiting component is provided on the surface of the support plate 41. The limiting component includes an adjustment box 6 assembled separately from the support plate 41, partition plates 62 installed inside the adjustment box 6 and distributed at equal intervals, a fixed shaft 63 installed in the adjustment box 6 and passing through the partition plates 62, and a sliding column 61 passing through the side surface of the adjustment box 6 and the partition plates 62. The adjustment box 6 and the support plate 41 are combined, and the adjustment box 6 can be detached. The partition plates 62 play a partitioning role. When it is necessary to vertically place the disk-shaped wafer carrier box A, the partition plates 62 play a limiting role to prevent the vertically placed wafer carrier box A from tilting. Round heads are provided at both ends of the sliding column 61, and a rubber cylinder 611 is sleeved on the outer side of the sliding column 61 at the position between adjacent partition plates 62. The rubber cylinder 611 plays a role in limiting the partition plates 62. Through holes are provided on the isosceles trapezoid-shaped partition plates 62, which is beneficial to the penetration of the sliding column 61 and the fixed shaft 63 and is beneficial to the adjustment of the angle of the partition plates 62. A limiting rubber ring identical to the rubber cylinder 611 is provided on the outer side of the fixed shaft 63 to play a role in positioning the partition plates 62. A fixed column 64 is provided on the surface of the adjustment box 6 facing the support plate 41, and a magnet block 641 is provided at one end of the fixed column 64. The magnet block 641 and the metal circular plate 412 on the support plate 41 make the installation of the adjustment box 6 stable.

[0041] In this embodiment, a circular groove is provided on the surface of the support plate 41, and the fixed column 64 is embedded in the circular groove to be limited. A metal circular plate 412 is provided in the support plate 41 in the circular groove, and the magnet block 641 is magnetically adsorbed to the corresponding metal circular plate 412 to make the installation of the adjustment box 6 stable.

[0042] In summary, when the wafer carrier box A in the shape of a disc needs to be placed vertically, the partition plate 62 plays a limiting role to prevent the vertically placed wafer carrier box A from tilting. By moving the sliding column 61, the rubber cylinder 611 drives the partition plate 62 to tilt, so that the wafer carrier box A can be placed obliquely, and the placement angle of the wafer carrier box A can be changed. When placed obliquely, under the action of friction, the vertically placed wafer carrier box A is prevented from rolling.

[0043] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A support frame structure for a wafer carrier box, characterized in that: include A support assembly for placing a wafer carrier box A comprises a bottom frame (1), a vertical pole (2) whose bottom end is connected to a corner position of the bottom frame (1), and a baffle (3) whose bottom surface is connected to a top position of the vertical pole (2); a contraction spring (21) is sleeved on the outer side of the bottom end of the vertical pole (2); and a connecting block (11) is vertically connected to the center position of one side of the bottom frame (1); The support assembly comprises a support plate (41) parallel to the bottom frame (1), a cross bar (42) penetrating the side of the support plate (41), and a collar (43) connected to the end of the cross bar (42) and slidably sleeved on the outside of the vertical rod (2); The limiting member (5) is installed at the center position of the side of the support plate (41), and comprises a sliding rod (51) penetrating the support plate (41), a connecting rod (52) having one end connected to the top end of the sliding rod (51), and a limiting plate (53) connected to the other end of the connecting rod (52).

2. The support frame structure of a wafer carrier box according to claim 1, characterized in that: The baffle (3) comprises an upper horizontal portion, an inclined portion and a lower vertical portion, the top end of the vertical rod (2) is connected to the upper horizontal portion, and the width H of the support plate (41) is the same as the distance between the opposite surfaces of the lower horizontal portion.

3. The support frame structure of a wafer carrier box according to claim 1, characterized in that: The two ends of the contraction spring (21) are respectively connected to the bottom frame (1) and the collar (43), and blocking rods (411) are provided on the side surfaces of both ends of the support plate (41).

4. The support frame structure of a wafer carrier box according to claim 1, characterized in that: A rectangular limiting groove (111) is provided on the surface of the connecting block (11).

5. The support frame structure of a wafer carrier box according to claim 4, characterized in that: The bottom end of the sliding rod (51) is an inverted "T"-shaped structure, the limiting plate (53) is a rectangular plate-shaped structure, the limiting plate (53) and the limiting groove (111) are clearance-matched, and the spacing between the limiting plate (53) and the limiting groove (111) is 1 cm.

6. The support frame structure of a wafer carrier box according to claim 1, characterized in that: A limiting assembly is provided on the surface of the support plate (41), the limiting assembly comprising an adjustment box (6) assembled separately from the support plate (41), partition plates (62) installed inside the adjustment box (6) and distributed at equal intervals, a fixed shaft (63) installed inside the adjustment box (6) and passing through the partition plates (62), and a sliding column (61) passing through the side surface of the adjustment box (6) and the partition plates (62).

7. The support frame structure of a wafer carrier box according to claim 6, characterized in that: Round heads are provided at both ends of the sliding column (61); a rubber sleeve (611) is provided on the outer side of the sliding column (61) located between adjacent partition plates (62); a through hole is provided on the isosceles trapezoidal partition plate (62); a fixing column (64) is provided on the surface of the regulating box (6) facing the support plate (41); a magnet block (641) is provided on one end of the fixing column (64).

8. The support frame structure of a wafer carrier box according to claim 7, characterized in that: A circular groove is provided on the surface of the support plate (41), a metal circular plate (412) is provided in the circular groove of the support plate (41), and the magnet block (641) is connected to the corresponding metal circular plate (412) by magnetic attraction.

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