Process and automatic feeding and discharging all-in-one machine

Abstract

The utility model relates to a process and automatic feeding and discharging all-in-one machine which comprises a machine frame, a feeding and discharging device, a process device and a carrier boat carrying device, and the machine frame is provided with a feeding and discharging area and a process area which are distributed up and down. The loading and unloading device is arranged in the loading and unloading area and is used for mutually transferring the silicon wafers in the flower basket and the carrier boat; the process device is arranged in the process area and comprises a plurality of process furnaces and a paddle conveying unit, and the process furnaces are horizontal furnaces; and the carrier boat carrying device is movably arranged between the loading and unloading area and the process area, and is used for carrying the carrier boat loaded with the silicon wafer between the loading and unloading device and the paddle conveying unit. The device is designed into an integrated structure, the path of the carrier boat from a wafer inserting and unloading station to a process furnace and the structure of each part are greatly simplified, the structure is simplified, the device is compact, the occupied space is small, the silicon wafer taking and placing precision is high, the automation degree is high, and the stability is high; manufacturing, installation and maintenance are more convenient; and the cost of the whole machine is lower.

Description

Technical Field

[0001] The utility model belongs to the technical field of the processing of solar cell wafers, and particularly relates to a process and an automatic loading and unloading integrated machine. Background Technique

[0002] In the manufacturing process of solar cell wafers, various process treatments are carried out on the silicon wafers, such as PECVD, LPCVD, etc. Before these processes, it is necessary to first take out the silicon wafers from the cassette coming from the previous process and load them into the carrier boat. After the silicon wafers are loaded, the carrier boat is sent into the reaction chamber of the process equipment for reaction; after the process is completed, the carrier boat is sent out from the process equipment. After the carrier boat is cooled, the silicon wafers are taken out from the carrier boat and re-loaded into the cassette, and then sent to the next process. At present, an independent automatic loading and unloading device + process equipment is usually used for combination.

[0003] Referring to the patent with the publication number CN114203611A, it discloses an automatic loading and unloading system for a vertical furnace and a vertical furnace body. Although its silicon wafer automatic loading and unloading system has high precision in picking and placing silicon wafers, high automation degree and high stability, and can realize the automatic, stable and reliable entry and exit of the quartz boat into and out of the furnace body, the automatic loading and unloading system and the furnace body are arranged front and back, the process route is relatively long, the structure is still not compact enough, and the floor space is still relatively large.

[0004] Referring to the patent with the publication number CN115425113A, it discloses a battery preparation integrated system and a battery preparation integrated method. It integrates the diffusion and annealing processes through a conveying device, thereby reducing equipment investment. However, its conveying device and process equipment are actually still independent of each other, and they are also arranged front and back, and there are also problems of non-compact structure and large floor space.

[0005] Therefore, the current split structure of the automatic loading and unloading equipment and the processing machine has a redundant structure and a large equipment size. Content of the Utility Model

[0006] The purpose of the utility model is to provide a process and an automatic loading and unloading integrated machine.

[0007] To achieve the above object, a technical solution adopted by the utility model is:

[0008] A process and an automatic loading and unloading integrated machine, comprising:

[0009] A frame: The frame is provided with a loading and unloading area and a process area. The loading and unloading area is located below the process area, and one end of the loading and unloading area forms an inlet and outlet.

[0010] Loading and unloading device: The described loading and unloading device is arranged in the loading and unloading area, and is at least used to transfer wafers located in the flower basket and carrier boat to each other;

[0011] Process device: The described process device is arranged in the process area, and the process device includes a process furnace and a paddle transfer unit. There are multiple process furnaces and they are horizontal furnaces. The paddle transfer unit is used to send a carrier boat loaded with wafers into or out of the process furnace;

[0012] Carrier boat transfer device: The described carrier boat transfer device is movably arranged between the loading and unloading area and the process area, and is at least used to transfer a carrier boat loaded with wafers between the loading and unloading device and the paddle transfer unit.

[0013] Preferably in the above technical solution, the loading and unloading device includes a flower basket conveying unit, a flower basket transfer unit, and a wafer inserting / removing unit. The flower basket conveying unit, the flower basket transfer unit, and the wafer inserting / removing unit are distributed in sequence from one end to the other end of the loading and unloading area. The flower basket transfer unit is used to transfer a flower basket loaded with wafers between the flower basket conveying unit and the wafer inserting / removing unit; the wafer inserting / removing unit is used to transfer wafers located in the flower basket and carrier boat to each other.

[0014] More preferably, the wafer inserting / removing unit includes a flower basket wafer inserting / removing unit, a carrier boat wafer inserting / removing unit, and a wafer transfer module. The flower basket wafer inserting / removing unit is used to insert or eject wafers into or out of the flower basket; the carrier boat wafer inserting / removing unit is used to insert or eject wafers into or out of the carrier boat; the wafer transfer module is used to transfer wafers between the flower basket wafer inserting / removing unit and the carrier boat wafer inserting / removing unit.

[0015] Even more preferably, the flower basket wafer inserting / removing unit includes a flower basket wafer inserting / removing conveying module, a flower basket top tooth module, and a flower basket alignment module. The flower basket wafer inserting / removing conveying module has a first working position and a second working position. The flower basket transfer unit transfers a flower basket loaded with wafers between the flower basket conveying unit and the first working position of the flower basket wafer inserting / removing conveying module. The flower basket top tooth module and the flower basket alignment module are arranged at the second working position of the flower basket wafer inserting / removing conveying module. The flower basket top tooth module is used to insert or eject wafers into or out of the flower basket, and the flower basket alignment module is used to align the wafers on the flower basket top tooth module.

[0016] More preferably, the boat loading and unloading chip unit includes a boat loading and unloading chip conveying module, a boat top tooth module, and a boat alignment module. The boat loading and unloading chip conveying module has a first working position and a second working position. The boat top tooth module and the boat alignment module are arranged at the end of the first working position of the boat loading and unloading chip conveying module. The boat top tooth module is used to insert or eject the silicon wafers into or out of the boat, and the boat alignment module is used to align the silicon wafers on the boat top tooth module. The boat conveying device is used to mutually convey the boat loaded with silicon wafers between the second working position of the boat loading and unloading chip conveying module and the paddle transfer unit.

[0017] More preferably, the cassette loading and unloading chip unit includes a first cassette loading and unloading chip unit and a second cassette loading and unloading chip unit; the boat loading and unloading chip unit includes a first boat loading and unloading chip unit and a second boat loading and unloading chip unit, and the first boat loading and unloading chip unit and the second boat loading and unloading chip unit are respectively located on both sides of the first cassette loading and unloading chip unit and the second cassette loading and unloading chip unit.

[0018] More preferably, the loading and unloading device further includes a boat buffer unit. The boat buffer unit includes a plurality of boat buffer modules. The boat conveying device is used to mutually convey the boat loaded with silicon wafers between the loading and unloading chip unit, the boat buffer unit, and the paddle transfer unit.

[0019] Preferably in the above technical solution, the paddle transfer unit and the process furnace are sequentially distributed from one end to the other end of the process area.

[0020] Preferably in the above technical solution, the process device further includes a gas source and a tail gas treatment unit. The gas source and the tail gas treatment unit are connected to the process furnace and are used to provide reaction gas and tail gas treatment for the process furnace. The paddle transfer unit, the process furnace, and the gas source and the tail gas treatment unit are sequentially distributed from one end to the other end of the process area.

[0021] Preferably in the above technical solution, the number of the paddle transfer units is the same as the number of the process furnaces, and each process furnace is correspondingly provided with a paddle transfer unit.

[0022] Preferably in the above technical solution, a plurality of the process furnaces are distributed in multiple rows in the left - right direction of the process area and in multiple columns in the up - down direction of the process area.

[0023] Preferably in the above technical solution, the process furnaces are distributed in 2 - 4 rows; and / or the process furnaces are distributed in 2 - 5 columns. For example, if the process furnaces are distributed in 2 rows and 3 columns in each row, there are a total of 6.

[0024] Preferably, the boat carrier includes a pair of first guide rods, a pair of second guide rod units, a boat transfer unit, and a driving unit. The pair of first guide rods extend in the vertical direction. The pair of second guide rod units are respectively connected to the pair of first guide rods and can move on the pair of first guide rods. The boat transfer unit is connected between the pair of second guide rod units and can move between the pair of second guide rod units. The driving unit is used to drive the second guide rod units and the boat transfer unit to move.

[0025] More preferably, the second guide rod unit includes a second fixed guide rod and a second telescopic guide rod. The second fixed guide rod is movably connected to the first guide rod. The second telescopic guide rod is movably connected to the second fixed guide rod. The boat transfer unit is movably connected to a pair of the second telescopic guide rods. The second telescopic guide rod can move on the second fixed guide rod, and the boat transfer unit can move on the second telescopic guide rod, so that the moving range of the boat transfer unit is larger.

[0026] More preferably, the second guide rod unit is perpendicular to the first guide rod.

[0027] More preferably, the boat transfer unit includes a connecting rod and a hook portion. The connecting rod is movably connected between the pair of second guide rod units. The hook portion is connected to the connecting rod and is used to hook the boat carrier. The hook portions are provided in pairs, and a pair of hook portions hook the hanging ears at both ends of the boat carrier.

[0028] Even more preferably, multiple groups of hook portions are provided, so that multiple groups of boat carriers can be transferred simultaneously on one connecting rod.

[0029] To achieve the above object, another technical solution adopted by the present utility model is:

[0030] A process and automatic loading and unloading integrated machine, including:

[0031] Frame: The frame is provided with a loading and unloading area and a process area. The loading and unloading area is located below the process area, and one end of the loading and unloading area forms an inlet and outlet.

[0032] Loading and unloading device: The loading and unloading device is arranged in the loading and unloading area. The loading and unloading device includes a flower basket conveying unit, a flower basket transfer unit, an inserting and removing piece unit, and a boat carrier buffer unit. The flower basket conveying unit, the flower basket transfer unit, the inserting and removing piece unit, and the boat carrier buffer unit are distributed in sequence from one end to the other end of the loading and unloading area.

[0033] Process device: The described process device is arranged in the described process area. The process device includes a process furnace, a paddle transfer unit, a gas source, and a tail gas treatment unit. There are multiple process furnaces, which are horizontal furnaces. The paddle transfer unit, the process furnace, the gas source, and the tail gas treatment unit are sequentially distributed from one end to the other end of the process area. The multiple process furnaces are distributed in multiple rows in the left - right direction of the process area and in multiple columns in the up - down direction of the process area.

[0034] Carrier boat transfer device: The described carrier boat transfer device is movably arranged between the loading and unloading area and the process area. The carrier boat transfer device is used to mutually transfer the carrier boat loaded with silicon wafers between the wafer inserting / removing unit, the carrier boat buffer unit, and the paddle transfer unit.

[0035] Preferably, in the above - mentioned technical solution, the flower basket conveying unit is located below the gas source and the tail gas treatment unit; the flower basket transfer unit is located below the process furnace; at least part of the wafer inserting / removing unit is located below the process furnace; the carrier boat buffer unit is located below the paddle transfer unit.

[0036] Due to the application of the above - mentioned technical solution, the present utility model has the following advantages compared with the prior art:

[0037] The process and the automatic loading and unloading design of the present utility model are an integrated structure. At the same time, the path and each part structure between the wafer inserting / removing station and the process furnace for the carrier boat are greatly simplified. The structure is simple, the equipment is compact, the floor space is small, the accuracy of picking and placing silicon wafers is high, the degree of automation is high, and the stability is high; manufacturing, installation, and maintenance are all more convenient; the cost of the whole machine is lower. Description of the Drawings

[0038] Attached Figure 1 is a three - dimensional schematic diagram of the integrated machine of the present utility model;

[0039] Attached Figure 2 is a front - view schematic diagram of the integrated machine of the present utility model;

[0040] Attached Figure 3 is a top - view schematic diagram of the integrated machine of the present utility model;

[0041] Attached Figure 4 is a side - view schematic diagram of the integrated machine of the present utility model;

[0042] Attached Figure 5 is a three - dimensional schematic diagram of the wafer inserting / removing unit of the present utility model;

[0043] Attached Figure 6 is a top - view schematic diagram of the wafer inserting / removing unit of the present utility model;

[0044] Attached Figure 7Schematic perspective view of the boat conveying device of the present utility model;

[0045] Appendix Figure 8 Front view schematic of the boat conveying device of the present utility model.

[0046] In the above figures:

[0047] 1. Frame; 10. Loading and unloading area; 100. Inlet and outlet; 11. Process area;

[0048] 20. Basket conveying unit; 21. Basket handling unit; 22. Inserting and removing sheet unit; 23. Boat buffer module;

[0049] 2201. Basket inserting and removing sheet conveying module; 2202. Basket top tooth module; 2203. Basket alignment module; 2211. Boat inserting and removing sheet conveying module; 2212. Boat top tooth module; 2213. Boat alignment module; 222. Wafer transfer module;

[0050] 30. paddle conveying unit; 31. Process furnace; 32. Gas source and tail gas treatment unit;

[0051] 4. Boat conveying device; 40. First guide rod; 41. Second guide rod unit; 410. Second fixed guide rod; 411. Second telescopic guide rod; 42. Boat handling unit; 420. Link; 421. Hook part;

[0052] 5. Boat. Detailed implementation manners

[0053] Next, the technical solutions of the present utility model will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0054] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0055] Such as Figure 1-4A process and an automatic loading and unloading integrated machine as shown, including a frame 1, a loading and unloading device, a process device, and a boat transfer device 4. The following specifically introduces each device in detail.

[0056] In this embodiment, the left end of the frame 1 is defined as the front end, and the right end is defined as the rear end; the lower side of the frame 1 is defined as the left side, and the upper side is defined as the right side for description. Figure 2 The left end of the frame 1 is defined as the front end, and the right end is defined as the rear end; the lower side of the frame 1 is defined as the left side, and the upper side is defined as the right side for description. Figure 3 The lower side of the frame 1 is defined as the left side, and the upper side is defined as the right side for description.

[0057] The frame 1 serves as the framework of the entire integrated machine. The loading and unloading device, the process device, and the boat transfer device of the integrated machine are all arranged within the frame 1. The reduction of the overall size of the equipment also means the reduction of the size of the frame 1. The frame 1 is provided with a loading and unloading area 10 and a process area 11. The loading and unloading area 10 is located below the process area 11. One end of the loading and unloading area 10 forms an inlet and outlet 100. That is to say, the entire frame 1 is divided into two layers, the lower layer is the loading and unloading area 10, and the upper layer is the process area 11.

[0058] The loading and unloading device is arranged within the loading and unloading area 10, that is, the loading and unloading device is located in the lower layer of the frame 1. The loading and unloading device is mainly used to transfer the silicon wafers located in the flower baskets and boats to each other. Specifically:

[0059] The loading and unloading device includes a flower basket conveying unit 20, a flower basket transfer unit 21, and an inserting and removing wafer unit 22. The flower basket conveying unit 20, the flower basket transfer unit 21, and the inserting and removing wafer unit 22 are sequentially distributed from one end to the other end of the loading and unloading area 10, that is, distributed from the front end to the rear end of the frame 1.

[0060] The flower basket conveying unit 20 is used to convey the flower baskets loaded with silicon wafers between the inlet and outlet 100 and the flower basket transfer unit 21. The flower basket conveying unit 20 adopts, including but not limited to, rail conveying, etc. The flower baskets that need to be processed and loaded with silicon wafers are placed at one end (front end) of the flower basket conveying unit 20 through the inlet and outlet 100, and the flower basket conveying unit 20 conveys it to the other end (rear end); similarly, the flower baskets that have completed the process and are loaded with silicon wafers are placed at the other end (rear end) of the flower basket conveying unit 20, and the flower basket conveying unit 20 conveys it to the inlet and outlet 100 at one end (front end).

[0061] The flower basket transfer unit 21 is used to transfer the flower baskets loaded with silicon wafers between the flower basket conveying unit 20 and the inserting and removing wafer unit 22. The flower basket transfer unit 21 adopts, including but not limited to, a transfer robot, etc. The flower basket transfer unit 21 transfers the flower baskets that need to be processed and are loaded with silicon wafers from the other end of the flower basket conveying unit 20 to the inserting and removing wafer unit 22; similarly, the flower basket transfer unit 21 transfers the flower baskets that have completed the process and are loaded with silicon wafers from the inserting and removing wafer unit 22 to the other end of the flower basket conveying unit 20.

[0062] As Figure 5 、 Figure 6 shown, the wafer loading and unloading unit 22 is used to transfer wafers located in the cassette and the boat to each other. In this embodiment: The wafer loading and unloading unit 22 includes a cassette wafer loading and unloading unit, a boat wafer loading and unloading unit, and a wafer transfer module 222. Specifically:

[0063] The cassette wafer loading and unloading unit is used to insert or eject wafers into or out of the cassette. The cassette wafer loading and unloading unit includes a cassette wafer loading and unloading conveyor module 2201, a cassette top tooth module 2202, and a cassette alignment module 2203. The cassette wafer loading and unloading conveyor module 2201 employs, including but not limited to, rail conveyance, etc., and a cassette seat can be configured on the rail. In this embodiment: The cassette wafer loading and unloading conveyor module 2201 has a first working position 2201a and a second working position 2201b. The cassette transfer unit 21 conveys the cassette loaded with wafers between the cassette conveyor unit 20 and the first working position 2201a of the cassette wafer loading and unloading conveyor module 2201; The cassette top tooth module 2202 and the cassette alignment module 2203 are arranged at the second working position 2201b of the cassette wafer loading and unloading conveyor module 2201. The cassette top tooth module 2202 is used to insert or eject wafers into or out of the cassette, and the cassette alignment module 2203 is used to align the wafers on the cassette top tooth module 2202. Therefore, the cassette top tooth module 2202 is arranged below the second working position 2201b of the cassette wafer loading and unloading conveyor module 2201, and the cassette alignment module 2203 is arranged above the second working position 2201b of the cassette wafer loading and unloading conveyor module 2201. The cassette loaded with wafers that needs to be processed is conveyed from the first working position 2201a of the cassette wafer loading and unloading conveyor module 2201 to the second working position 2201b of the cassette wafer loading and unloading conveyor module 2201. The cassette top tooth module 2202 first ejects the wafers in the cassette, and then the cassette alignment module 2203 aligns the wafers on the cassette top tooth module 2202, facilitating the wafer transfer module 222 to transfer the wafers to the boat wafer loading and unloading unit; Similarly, the wafer transfer module 222 transfers the wafers that have completed the process to the second working position 2201b of the cassette wafer loading and unloading conveyor module 2201 and places them on the cassette top tooth module 2202 ejected from the cassette. The cassette alignment module 2203 first aligns the wafers on the cassette top tooth module 2202, the cassette top tooth module 2202 descends, the wafers are reinserted into the cassette, and then the cassette is conveyed to the first working position 2201a of the cassette wafer loading and unloading conveyor module 2201, waiting for the cassette transfer unit 21 to convey.

[0064] The wafer loading and unloading unit for the carrier is used to insert or eject wafers into or from the carrier. The wafer loading and unloading unit for the carrier includes a wafer loading and unloading conveyor module 2211, a carrier top tooth module 2212, and a carrier alignment module 2213. The wafer loading and unloading conveyor module 2211 adopts, including but not limited to, rail conveying, etc., and a carrier seat can be configured on the rail. In this embodiment: The wafer loading and unloading conveyor module 2211 has a first working position 2211a and a second working position 2211b. The wafer transfer module 222 conveys wafers between the second working position 2201b of the cassette loading and unloading conveyor module 2201 and the first working position 2211a of the wafer loading and unloading conveyor module 2211; The carrier top tooth module 2212 and the carrier alignment module 2213 are arranged at the end of the first working position 2211a of the wafer loading and unloading conveyor module 2211 (before the beginning of the second working position 2211b). The carrier top tooth module 2212 is used to insert or eject wafers into or from the carrier, and the carrier alignment module 2213 is used to align the wafers on the carrier top tooth module. Since the carrier top tooth module 2212 cannot insert or eject all the wafers in the carrier at one time, therefore, the carrier top tooth module 2212 will first perform wafer loading and unloading on the carrier at the end of the first working position 2211a of the wafer loading and unloading conveyor module 2211. As the carrier is conveyed from the first working position 2211a to the second working position 2211b of the wafer loading and unloading conveyor module 2211, the carrier top tooth module 2212 gradually performs wafer loading and unloading on the conveyed carrier. The wafers to be processed are conveyed from the cassette top tooth module 2202 to the first working position 2211a of the wafer loading and unloading conveyor module 2211 and placed on the carrier top tooth module 2212 ejected from the carrier. The carrier alignment module 2213 first aligns the wafers on the carrier top tooth module 2212. The carrier top tooth module 2212 descends, and the wafers are inserted into the carrier. Then the carrier is conveyed to the second working position 2211b of the wafer loading and unloading conveyor module 2211, waiting to be conveyed by the carrier conveying device; Similarly, the carrier conveying device conveys the carrier loaded with wafers after the process is completed to the second working position 2211b of the wafer loading and unloading conveyor module 2211 and conveys it to the first working position 2211a of the wafer loading and unloading conveyor module 2211. The carrier top tooth module 2212 first ejects the wafers in the carrier, and the carrier alignment module 2213 then aligns the wafers on the carrier top tooth module 2212, facilitating the wafer transfer module 222 to transfer the wafers to the cassette loading and unloading unit.

[0065] The wafer transfer module 222 is used to transfer wafers between the cassette loading and unloading unit and the wafer loading and unloading unit for the carrier, specifically to transfer wafers between the cassette top tooth module 2202 and the carrier top tooth module 2212. The wafer transfer module 222 adopts, including but not limited to, a suction cup type wafer inserting robot.

[0066] In a preferred embodiment of the present embodiment: The wafer basket loading and unloading unit includes a first wafer basket loading and unloading unit and a second wafer basket loading and unloading unit; the boat loading and unloading unit includes a first boat loading and unloading unit and a second boat loading and unloading unit, and the first boat loading and unloading unit and the second boat loading and unloading unit are respectively located on both sides of the first wafer basket loading and unloading unit and the second wafer basket loading and unloading unit. That is to say, two sets of wafer basket loading and unloading units and boat loading and unloading units are provided. One set can be used for loading and unloading wafers that need to be processed, and the other set can be used for loading and unloading wafers that have completed the process. Only one set of wafer transfer module 222 is provided and is located between the first boat loading and unloading unit and the second boat loading and unloading unit.

[0067] In a preferred embodiment of the present embodiment: The loading and unloading device further includes a boat buffer unit, which is used to store boats loaded with wafers that need to be processed or have completed the process. The boat buffer unit includes a plurality of boat buffer modules 23. In the figure, 6 boat buffer modules 23 are provided, and the 6 boat buffer modules 23 are distributed in 2 rows, with 3 columns in each row. And the second working position 2211b of the boat loading and unloading conveyor module 2211 extends between the two rows of boat buffer modules 23.

[0068] The process device is arranged in the process area 11, that is, the process device is located on the upper layer of the frame 1. The process device is mainly used for processing wafers, such as PECVD, LPCVD, etc. Specifically:

[0069] The process device includes a paddle transfer unit 30, a process furnace 31, and a gas source and tail gas treatment unit 32. The paddle transfer unit 30, the process furnace 31, and the gas source and tail gas treatment unit 32 are sequentially distributed from one end to the other end of the process area 11, that is, from the rear end to the front end of the frame 1.

[0070] The paddle transfer unit 30 is used to send the boat loaded with wafers into or out of the process furnace 31; the process furnace 31 is used to process wafers. Among them, a plurality of process furnaces 31 are provided and are horizontal furnaces. The so-called horizontal furnace means that the furnace body of the process furnace 31 is arranged horizontally. The number of paddle transfer units 30 is the same as the number of process furnaces 31, and each process furnace 31 is correspondingly provided with a paddle transfer unit 30. For example, a plurality of process furnaces 31 are distributed in multiple rows in the left-right direction of the process area 11 and in multiple columns in the up-down direction of the process area 11. Generally, the process furnaces 31 can be distributed in 2-4 rows and 2-5 columns. In the figure, 6 process furnaces 31 are provided, and the 6 process furnaces 31 are distributed in 2 rows, with 3 columns in each row.

[0071] The gas source and tail gas treatment unit 32 is connected to the process furnace 31 and is used to provide reaction gas and tail gas treatment for the process furnace 31, and each process furnace 31 is correspondingly provided with a gas source and tail gas treatment unit 32.

[0072] The boat transfer device 4 is movably arranged between the loading and unloading area 10 and the process area 11. The boat transfer device 4 is used to transfer the boat loaded with silicon wafers between the loading and unloading device and the paddle transfer unit. Further, the boat transfer device 4 is used to transfer the boat loaded with silicon wafers between the wafer inserting / removing unit, the boat buffer unit, and the paddle transfer unit 30.

[0073] As Figure 7 , Figure 8 shown in the figure: The boat transfer device 4 includes a pair of first guide rods 40, a pair of second guide rod units 41, a boat transfer unit 42, and a driving unit (not marked in the figure). Specifically:

[0074] A pair of first guide rods 40 are arranged on the frame 1 and both extend in the vertical direction. The pair of first guide rods 40 are distributed front and back. A pair of second guide rod units 41 are respectively connected to the pair of first guide rods 40. That is to say, one second guide rod unit 41 is connected to one first guide rod 40, and the second guide rod unit 41 is perpendicular to the first guide rod 40, that is, the second guide rod unit 41 extends in the left - right direction and can move on the pair of first guide rods 40. The boat transfer unit 42 is connected between the pair of second guide rod units 41 and can move between the pair of second guide rod units 41. The driving unit is used to drive the pair of second guide rod units 41 and the boat transfer unit 42 to move. In this way, the second guide rod unit 41 moves up and down on the first guide rod 40, driving the boat transfer unit 42 to move up and down. At the same time, the boat transfer unit 42 moves left and right between the pair of second guide rod units 41, so as to realize the transfer in the up, down, left, and right directions.

[0075] In a preferred embodiment of this embodiment: The second guide rod unit 41 includes a second fixed guide rod 410 and a second telescopic guide rod 411. The second fixed guide rod 410 is connected to the first guide rod 40 in a vertically movable manner. The second telescopic guide rod 411 is connected to the second fixed guide rod 410 in a left - right movable manner. The boat transfer unit 42 is connected to the pair of second telescopic guide rods 411 in a movable manner. Since the second telescopic guide rod 411 can move on the second fixed guide rod 410 and can move left or right relative to the second fixed guide rod 410. At the same time, the boat transfer unit 42 can also move left or right on the second telescopic guide rod 411, so that the moving range of the boat transfer unit 42 in the left - right direction is larger, meeting the transfer requirements of each position.

[0076] In another preferred embodiment of the present embodiment: The boat transfer unit 42 includes a connecting rod 420 and a hook portion 421. The connecting rod 420 is movably connected between the second telescopic guide rods 411 of a pair of second guide rod units 41. The hook portion 421 is connected to the connecting rod 420 and is used for hooking the boat. The hook portions 421 are usually arranged in pairs, and a pair of hook portions 421 hook the hanging ears at both ends of the boat. Multiple groups of hook portions 421 are provided, so that multiple groups of boats can be transferred simultaneously on one connecting rod 420. In the figure, 2 groups of hook portions 421 are provided, and 2 groups of boats can be transferred simultaneously.

[0077] As Figure 2 shown: Looking at the entire loading and unloading device, process device, and boat transfer device 4, the flower basket conveying unit 20 is located below the gas source and tail gas treatment unit 32; the flower basket transfer unit 21 is located below the process furnace 31; the inserting and removing wafer unit is basically located below the process furnace 31, but the second working position 2211b of the boat inserting and removing wafer conveying module extends below the paddle transfer unit 30. At the same time, the boat buffer unit is also located below the paddle transfer unit 30. That is to say, the second working position 2211b of the boat inserting and removing wafer conveying module, the boat buffer unit, and the paddle transfer unit 30 are distributed vertically, which is more convenient for the boat transfer device 4 to transfer between the three.

[0078] Comparative example and embodiment:

[0079] Taking a case where an automated loading and unloading machine and a process machine (with 6 furnaces distributed vertically) are connected in series as an example, where: Automated loading and unloading machine: length 10.5 meters, width 3 meters, height 2.2 meters; Process machine: length 15 meters, width 2.2 meters, height 4.5 meters. After being connected in series, the whole machine occupies a length of 25.5 meters, a width of 3 meters, and a height of 4.5 meters.

[0080] Taking a process and automated loading and unloading integrated machine (6 furnaces in 2 rows and 3 columns) as an example, under the same conditions, the whole machine occupies a length of 12 meters, a width of 3 meters, and a height of 4.5 meters.

[0081] Obviously, with the width and height remaining basically unchanged, the length of the whole machine can be shortened by nearly half, greatly reducing the size of the equipment.

[0082] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A process and automatic loading and unloading integrated machine, characterized in that: include: Frame: The frame is provided with a loading and unloading area and a process area. The loading and unloading area is located below the process area, and one end of the loading and unloading area forms a material inlet and outlet; Loading and unloading device: The loading and unloading device is arranged in the loading and unloading area, and the loading and unloading device is at least used to transfer the silicon wafers in the flower basket and the boat to each other; Process device: The process device is arranged in the process area, and comprises a process furnace and a paddle transfer unit. The process furnace is provided with a plurality of horizontal furnaces, and the paddle transfer unit is used to transfer a carrier boat loaded with silicon wafers into or out of the process furnace; Boat carrier transporting device: The boat carrier transporting device is movably arranged between the loading and unloading area and the process area, and the boat carrier transporting device is at least used to transport the boat carrier loaded with silicon wafers between the loading and unloading device and the paddle transfer unit.

2. The process and automatic loading and unloading integrated machine according to claim 1 is characterized in that: The loading and unloading device includes a flower basket conveying unit, a flower basket transporting unit, and an inserting and unloading sheet unit. The flower basket conveying unit, the flower basket transporting unit, and the inserting and unloading sheet unit are distributed in sequence from one end to the other end of the loading and unloading area. The flower basket transporting unit is used to transport the flower basket loaded with silicon wafers between the flower basket conveying unit and the inserting and unloading sheet unit; the inserting and unloading sheet unit is used to transfer the silicon wafers in the flower basket and the carrier boat to each other.

3. The process and automatic loading and unloading integrated machine according to claim 2 is characterized in that: The sheet inserting and unloading unit comprises a flower basket sheet inserting and unloading unit, a carrier boat sheet inserting and unloading unit and a silicon wafer transfer module. The flower basket sheet inserting and unloading unit is used to insert or eject silicon wafers from the flower basket; the carrier boat sheet inserting and unloading unit is used to insert or eject silicon wafers from the carrier boat; the silicon wafer transfer module is used to transfer silicon wafers between the flower basket sheet inserting and unloading unit and the carrier boat sheet inserting and unloading unit.

4. The process and automatic loading and unloading integrated machine according to claim 3, characterized in that: The flower basket sheet insertion and unloading unit comprises a flower basket sheet insertion and unloading conveying module, a flower basket top tooth module and a flower basket alignment module. The flower basket sheet insertion and unloading conveying module has a first working position and a second working position. The flower basket conveying unit conveys the flower basket loaded with silicon wafers between the flower basket conveying unit and the first working position of the flower basket sheet insertion and unloading conveying module. The flower basket top tooth module and the flower basket alignment module are arranged at the second working position of the flower basket sheet insertion and unloading conveying module. The flower basket top tooth module is used for inserting or ejecting silicon wafers from the flower basket, and the flower basket alignment module is used for aligning the silicon wafers on the flower basket top tooth module.

5. The process and automatic loading and unloading integrated machine according to claim 3, characterized in that: The boat carrier sheet insertion and unloading unit comprises a boat carrier sheet insertion and unloading conveying module, a boat carrier top gear module, and a boat carrier alignment module. The boat carrier sheet insertion and unloading conveying module has a first working position and a second working position. The boat carrier top gear module and the boat carrier alignment module are arranged at the end of the first working position of the boat carrier sheet insertion and unloading conveying module. The boat carrier top gear module is used for inserting or ejecting silicon wafers into or out of the boat carrier. The boat carrier alignment module is used for aligning the silicon wafers on the boat carrier top gear module. The boat carrier conveying device is used for conveying the boat loaded with silicon wafers between the second working position of the boat carrier sheet insertion and unloading conveying module and the paddle unit.

6. The process and automatic loading and unloading integrated machine according to claim 3, characterized in that: The flower basket plug-in and unloading piece unit includes a first flower basket plug-in and unloading piece unit and a second flower basket plug-in and unloading piece unit; the boat carrier plug-in and unloading piece unit includes a first boat carrier plug-in and unloading piece unit and a second boat carrier plug-in and unloading piece unit, and the first boat carrier plug-in and unloading piece unit and the second boat carrier plug-in and unloading piece unit are respectively located on both sides of the first flower basket plug-in and unloading piece unit and the second flower basket plug-in and unloading piece unit.

7. The process and automatic loading and unloading integrated machine according to claim 2, characterized in that: The loading and unloading device also includes a boat carrier buffer unit, which includes multiple boat carrier buffer modules. The boat carrier transport device is used to transport the boat carrier loaded with silicon wafers between the wafer insertion and unloading unit, the boat carrier buffer unit, and the paddle transfer unit.

8. The process and automatic loading and unloading integrated machine according to claim 1, characterized in that: The paddle transfer unit and the process furnace are distributed in sequence from the other end to the one end of the process area.

9. The process and automatic loading and unloading integrated machine according to claim 1 or 8, characterized in that: The process device also includes a gas source and exhaust gas treatment unit, which is connected to the process furnace and is used to provide reaction gas and exhaust gas treatment for the process furnace. The paddle unit, process furnace, gas source and exhaust gas treatment unit are distributed in sequence from the other end to one end of the process area.

10. The process and automatic loading and unloading integrated machine according to claim 1, characterized in that: The number of the paddle transfer units is consistent with the number of the process furnaces, and each process furnace is correspondingly provided with the paddle transfer unit.

11. The process and automatic loading and unloading integrated machine according to claim 1 or 10, characterized in that: The plurality of process furnaces are distributed into a plurality of rows in the left-right direction of the process area, and are distributed into a plurality of columns in the up-down direction of the process area.

12. The process and automatic loading and unloading integrated machine according to claim 11, characterized in that: The process furnaces are arranged in 2-4 rows; and / or the process furnaces are arranged in 2-5 columns.

13. The process and automatic loading and unloading integrated machine according to claim 1, characterized in that: The boat carrying and transporting device includes a pair of first guide rods, a pair of second guide rod units, a boat moving unit and a driving unit. The pair of first guide rods extend in a vertical direction. The pair of second guide rod units are respectively connected to the pair of first guide rods and can move on the pair of first guide rods. The boat moving unit is connected between the pair of second guide rod units and can move between the pair of second guide rod units. The driving unit is used to drive the second guide rod units and the boat moving unit to move.

14. The process and automatic loading and unloading integrated machine according to claim 13, characterized in that: The second guide rod unit includes a second fixed guide rod and a second telescopic guide rod. The second fixed guide rod is movably connected to the first guide rod, and the second telescopic guide rod is movably connected to the second fixed guide rod. The boat moving unit is movably connected to a pair of second telescopic guide rods.

15. The process and automatic loading and unloading integrated machine according to claim 13, characterized in that: The boat carrying unit comprises a connecting rod and a hook portion, wherein the connecting rod is movably connected between a pair of second guide rod units, and the hook portion is connected to the connecting rod and is used for hooking the boat carrying unit.

16. A process and automatic loading and unloading integrated machine, characterized in that: include: Frame: The frame is provided with a loading and unloading area and a process area. The loading and unloading area is located below the process area, and one end of the loading and unloading area forms a material inlet and outlet; Loading and unloading device: The loading and unloading device is arranged in the loading and unloading area, and comprises a flower basket conveying unit, a flower basket transporting unit, an insertion and unloading sheet unit, and a boat carrier buffer unit. The flower basket conveying unit, the flower basket transporting unit, the insertion and unloading sheet unit, and the boat carrier buffer unit are sequentially distributed from one end to the other end of the loading and unloading area; Process device: The process device is arranged in the process area, and the process device includes a process furnace, a paddle transfer unit, a gas source and an exhaust gas treatment unit. The process furnace is provided with a plurality of horizontal furnaces. The paddle transfer unit, the process furnace, the gas source and the exhaust gas treatment unit are sequentially distributed from the other end to the one end of the process area. The plurality of process furnaces are distributed in a plurality of rows in the left-right direction of the process area, and in a plurality of columns in the up-down direction of the process area. Boat carrier transporting device: The boat carrier transporting device is movably arranged between the loading and unloading areas and the process areas, and is used to transport the boat carrier loaded with silicon wafers between the wafer insertion and unloading unit, the boat carrier buffer unit, and the paddle transfer unit.

17. The process and automatic loading and unloading integrated machine according to claim 16, characterized in that: The flower basket conveying unit is located below the gas source and exhaust gas treatment unit; the flower basket transporting unit is located below the process furnace; the plug-in and unplug unit is at least partially located below the process furnace; the boat carrier buffer unit is located below the propeller unit.

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