Wafer ring material conveying device

Abstract

The utility model relates to a wafer ring material conveying device which comprises a material storage area, a grabbing device and a conveying assembly, at least two first detection assemblies are transversely arranged on a conveying mechanism at intervals and located on the same straight line, and a second detection assembly is arranged on the conveying mechanism and located on the downstream of the first detection assemblies. The first detection assembly and the second detection assembly are located in the placement area, the transmission mechanism comprises an upper driving mechanism, a lower driving mechanism and a supporting seat arranged between the upper driving mechanism and the lower driving mechanism, the upper driving mechanism and the lower driving mechanism each comprise a guide rail and a moving part, and the two moving parts are arranged on the two guide rails at intervals; guiding assemblies are arranged between the moving parts and the guide rails, supporting plates are arranged between the moving parts, gaps are formed between the adjacent supporting plates, and the first detection assembly and the second detection assembly correspond to the gaps. According to the utility model, the materials can be prevented from deflection during placement, the direction is kept consistent during conveying, the transportation stability is better, and the subsequent process is convenient to process.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal ring processing, and particularly relates to a crystal ring material conveying device. Background Art

[0002] The processing of crystal rings is an important link in semiconductor manufacturing, which is directly related to the quality and efficiency of wafer cutting. In this process, the wafer cutting ring needs to have high precision and good stability to ensure the accuracy of cutting and the performance of chips. According to the design drawings, crystal rings are manufactured by using precise machining methods, including a series of processes such as casting, forging, machining, heat treatment, and surface treatment. During the above processes, it is necessary to transfer and convey the crystal ring materials, and usually, conveying devices such as conveyors are used. During the material conveying process, the materials are prone to skew during placement. In addition, the conveyor may also cause the materials to skew during transmission, resulting in manual adjustment required during downstream processing, reducing the processing efficiency. Content of the Utility Model

[0003] The utility model provides a crystal ring material conveying device that can be adjusted during the material placement process and moves smoothly to solve the problems of the prior art.

[0004] The specific technical solution is as follows: A crystal ring material conveying device includes a material storage area, a grasping device, and a conveying component. The conveying component includes a first detection component, a second detection component, and a transmission mechanism. At least two groups of first detection components are arranged horizontally at intervals on the transmission mechanism, and the first detection components are located on the same straight line. The second detection component is arranged on the transmission mechanism and is located downstream of the first detection component. The first detection component and the second detection component are located in the placement area. The transmission mechanism includes an upper driving mechanism, a lower driving mechanism, and a support seat arranged between the upper and lower driving mechanisms. Both the upper driving mechanism and the lower driving mechanism include guide rails and moving parts. Two groups of moving parts are arranged at intervals on two guide rails. A guiding component is arranged between the moving parts and the guide rails. A support plate is arranged between the moving parts, and there is a gap between adjacent support plates. The first detection component and the second detection component are arranged corresponding to the gap.

[0005] In some embodiments, the first detection component includes a first sensor and a first inductor, and the second detection component includes a second sensor and a second inductor. The first and second sensors are arranged on the transmission mechanism, and the first and second inductors are arranged above the support plate.

[0006] In some embodiments, the crystal ring materials are stacked in the material storage area.

[0007] In some embodiments, a roller is arranged in the middle of the moving part, and the roller abuts against the guide rail.

[0008] In some embodiments, the guiding assembly includes a mounting base, a connecting shaft, and a guiding wheel. The mounting base is disposed on the side of the moving part. One end of the connecting shaft is connected to the mounting base, and the other end is connected to the guiding wheel. The guiding wheel is horizontally arranged and abuts against the side of the guide rail.

[0009] In some embodiments, the moving part includes a plurality of sliders arranged in series, and rollers are disposed on the sliders.

[0010] In some embodiments, the lower driving mechanism is provided with a fixing rod. One end of the fixing rod is connected to the support base, and the outer roller of the moving part abuts against the fixing rod.

[0011] Technical effects of the present utility model: A crystal ring material conveying device of the present utility model can prevent the material from being placed obliquely, keep the direction consistent during conveying, have good transportation stability, and facilitate the processing of subsequent processes. Description of the Drawings

[0012] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0013] Figure 1 It is a schematic diagram of a crystal ring material conveying device according to an embodiment of the present utility model.

[0014] Figure 2 It is a schematic diagram of a transmission mechanism according to an embodiment of the present utility model.

[0015] Figure 3 It is a schematic diagram of an upper driving mechanism according to an embodiment of the present utility model.

[0016] Figure 4 It is a schematic diagram of a detection assembly according to an embodiment of the present utility model.

[0017] Figure 5 It is a schematic diagram when the material is skewed according to an embodiment of the present utility model.

[0018] Figure 6 It is a schematic diagram after the material is adjusted according to an embodiment of the present utility model.

[0019] Figure 7 It is a schematic diagram of the material placed on the transmission mechanism according to an embodiment of the present utility model. Detailed Embodiments

[0020] The technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts shall fall within the protection scope of the present utility model.

[0021] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0023] The following will describe in detail the specific embodiments of the present utility model in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only for the purpose of illustrating and explaining the present utility model, and are not used to limit the present utility model.

[0024] Such as Figures 1 to 7As shown, a wafer ring material conveying device of this embodiment includes a material storage area 1, a gripping device 2 and a conveying component 3. The material storage area 1 is used to stack materials. The gripping device 2 grabs the materials and places them on the conveying component 3. The gripping device 2 can use a mechanical arm. The conveying component 3 includes a first detection component 4, a second detection component 5 and a transmission mechanism 6. At least two groups of first detection components 4 are arranged on the transmission mechanism 6 at intervals in the horizontal direction. The first detection components 4 are located on the same straight line. The first component 4 can sense whether the material is located at the first component position. The second detection component 5 is arranged on the transmission mechanism 6 and is located downstream of the first detection component 4, and is used to sense the material position. The first detection component 4 and the second detection component 5 are located in the placement area 7, the transmission mechanism 6 includes an upper driving mechanism 61, a lower driving mechanism 62 and a support seat 63 arranged between the upper and lower driving mechanisms, the upper driving mechanism 61 and the lower driving mechanism 62 both include guide rails 64 and moving parts 65, two groups of moving parts 65 are arranged on two guide rails 64 at intervals, a guide component 66 is provided between the moving parts 65 and the guide rails 64, a support plate 67 is provided between the moving parts 65, and a gap 68 is provided between adjacent support plates 67, the first detection component 4 and the second detection component 5 are arranged corresponding to the gap 68, so as to avoid blocking the first and second detection components, and further, the support plate 67 can be made of transparent material, such as plastic, etc., so as to allow the light of the detection component to pass through. In the above technical solution, the grabbing device 2 grabs the material 10 and then turns to the conveying component 3. When the posture of the material 10 is not correct, one of the two first detection components 4 will first sense the material 10, and the first detection component 4 sends a signal to the controller, and the controller controls the material 10 to rotate so that it covers the two first detection components 4 and corrects the position; then the material 10 continues to move in the direction of the second detection component until the second detection component 5 senses the material 10, and then the grabbing device places the material on the transmission mechanism 6. The transmission mechanism drives the support plate 67 to move through the upper and lower drive mechanisms, thereby driving the material 10 to move. By setting the guide component 66, it is possible to avoid deflection when the moving part 65 moves. Through the above technical solution, the material can maintain a consistent direction during transportation, avoid skewing, and facilitate subsequent processing.

[0025] In this embodiment, the first detection component 4 includes a first sensor 41 and a first inductor 42, the second detection component 5 includes a second sensor 51 and a second inductor 52, the first and second sensors are arranged on the transmission mechanism 6, and the first and second inductors are arranged above the support plate 67. The first and second sensors 41 emit light, and the first and second inductors receive light, thereby sensing the material. The first and second detection components 4 can adopt infrared sensor components. The wafer ring material 10 is stacked and arranged in the material storage area 1, so as to facilitate the grabbing device to obtain it.

[0026] In this embodiment, a roller 651 is provided in the middle of the moving part 65. The roller 651 abuts against the guide rail 64, so that the roller 651 can roll on the guide rail 64. In this test example, a chain can be used for the moving part. The guiding assembly 66 includes a mounting seat 661, a connecting shaft 662 and a guiding wheel 663. The mounting seat 661 is arranged on the side of the moving part 65. One end of the connecting shaft 662 is connected to the mounting seat 661, and the other end is connected to the guiding wheel 663. The guiding wheel 663 is horizontally arranged and abuts against the side of the guide rail 64, so that when the moving part 65 moves, it can drive the guiding wheel 663 to roll synchronously on the side, preventing deviation through lateral limitation. The moving part 65 includes a plurality of sliders 652 arranged in series. The roller 651 is arranged on the slider 652. The slider 652 is used for the installation of the support plate 67. The sliders 652 are connected in series like a chain, so that continuous cyclic conveying can be achieved. The lower driving mechanism 62 is provided with a fixed rod 621. One end of the fixed rod 621 is connected to the support seat 63. The outer roller 653 of the moving part 65 abuts against the fixed rod 621. The fixed rod 621 is used to support the lower moving part 65. The fixed rod is L-shaped, and the moving part 65 moves relative to the fixed rod.

[0027] A crystal ring material conveying device according to this embodiment can prevent the material from being skewed when placed, keep the direction consistent during conveying, and has good transportation stability, which is convenient for the subsequent process processing.

[0028] The above has described a crystal ring material conveying device of the present invention. However, the present invention is not limited to the above specific embodiments. Various deformations or changes can be made as long as they do not deviate from the scope of the claims. The present invention includes various deformations and changes within the scope of the claims.

[0029] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A wafer ring material conveying device, comprising a material storage area, a gripping device and a conveying assembly, characterized in that: The conveying assembly includes a first detection assembly, a second detection assembly and a transmission mechanism, at least two groups of first detection assemblies are arranged on the transmission mechanism at a laterally spaced interval, the first detection assembly is located on the same straight line, the second detection assembly is arranged on the transmission mechanism and is located downstream of the first detection assembly, the first detection assembly and the second detection assembly are located in a placement area, the transmission mechanism includes an upper driving mechanism, a lower driving mechanism and a support seat arranged between the upper and lower driving mechanisms, the upper driving mechanism and the lower driving mechanism both include guide rails and moving parts, two groups of moving parts are arranged on two guide rails at a distance, a guide assembly is provided between the moving part and the guide rail, a support plate is provided between the moving parts, there is a gap between adjacent support plates, and the first detection assembly and the second detection assembly are arranged corresponding to the gap.

2. The wafer ring material conveying device according to claim 1, characterized in that: The first detection component includes a first sensor and a first inductor, the second detection component includes a second sensor and a second inductor, the first and second sensors are arranged on the transmission mechanism, and the first and second inductors are arranged above the support plate.

3. The wafer ring material conveying device according to claim 2, characterized in that: Wafer ring material stacks are set up in the material storage area.

4. The wafer ring material conveying device according to claim 1, characterized in that: A roller is arranged in the middle of the moving part, and the roller abuts against the guide rail.

5. The wafer ring material conveying device according to claim 4, characterized in that: The guide assembly includes a mounting seat, a connecting shaft and a guide wheel. The mounting seat is arranged on the side of the moving part. One end of the connecting shaft is connected to the mounting seat, and the other end is connected to the guide wheel. The guide wheel is arranged horizontally and abuts against the side of the guide rail.

6. The wafer ring material conveying device according to claim 5, characterized in that: The moving part comprises a plurality of sliding blocks arranged in series, and the rollers are arranged on the sliding blocks.

7. The wafer ring material conveying device according to claim 6, characterized in that: The lower driving mechanism is provided with a fixing rod, one end of which is connected to the supporting seat, and the outer roller of the moving part abuts against the fixing rod.

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