Pot tripod control device of vacuum evaporator

Abstract

The utility model discloses a pot tripod control device of a vacuum evaporator, which belongs to the technical field of wafer evaporation and comprises a fixed shaft, a connecting rod structure, a base plate and a rotating mechanism. The locking blocks are circumferentially distributed through the connecting rod structures, the pot tripod is placed on the tops of the locking blocks, the opening and closing mechanism synchronously controls the movement process of the connecting rod structures, the pot tripod is fixed and is in a stable state, meanwhile, a rotating device is arranged on the rotating shaft, the base plate is made to rotate through gear transmission, and therefore the pot tripod is fixed. According to the control device, the connecting rod mechanism and the rotating device are coupled to achieve fixation and rotation of the pot tripod, meanwhile, the pot tripod is moved through the moving device, the position of the pot tripod in the working chamber is adjusted, and automatic control over the pot tripod is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a pot control device of a vacuum evaporation machine. Background Technique

[0002] During the processing of wafers, surface electroplating treatment is required, such as gold plating, carbon plating, etc. The traditional method is that operators use a vacuum pen or a robotic arm to pick up the wafers onto a tray, and then the operators place the tray on the pot. After a certain number of wafers are placed on the pot, the pot is moved into the vacuum evaporation machine to deposit a metal layer on the surface of the wafers, and then the wafers on the pot are removed one by one, placed into the wafer storage, and then the above process is repeated to perform evaporation on each wafer to be evaporated one by one. During the entire evaporation process, the operator needs to repeatedly move the pot, and the pot is relatively large in volume and requires multiple people to cooperate synchronously.

[0003] In order to improve the evaporation efficiency of wafers, it is an important technology to use a robotic arm to operate the wafers, trays and pressing plates are installed on the pot to realize automatic evaporation of wafers. During the manual evaporation process, the fixing and swinging of the pot are in a random state. When using a robotic arm to place the trays, the attitude of the pot needs to be controlled. For example, each tray hole of the pot is located at the working position of the robotic arm, and at the same time, it is ensured that the pot maintains good stability during the movement. Therefore, a control structure is needed to effectively control the position of the pot. Content of the Utility Model

[0004] Aiming at the problems existing in the prior art, the utility model provides a pot control device of a vacuum evaporation machine, which fixes the pot through a plurality of link structures, and at the same time combines a rotating device to realize the automatic rotation of the pot, locates the tray holes at the working positions, and improves the installation efficiency of the tray assembly.

[0005] The utility model is realized through the following technical solutions:

[0006] A pot control device of a vacuum evaporation machine includes a fixed shaft, a link structure, a substrate and a rotating mechanism;

[0007] The fixed shaft is sleeved at the center of the substrate, and a plurality of link structures are arranged circumferentially with the fixed shaft as the center. One end of the link structure is connected to the fixed shaft through an opening and closing mechanism, and a locking block is arranged at the other end of the link structure. The pot is arranged on the top of the locking block, and under the action of the link structure, a plurality of locking blocks tightly lock the pot circumferentially;

[0008] The rotating mechanism includes a shaft sleeve and a gear transmission device;

[0009] The shaft sleeve is sleeved on the fixed shaft and at the bottom of the substrate, the substrate is fixedly connected to the shaft sleeve, and the shaft sleeve is connected to the gear transmission device.

[0010] Preferably, the connecting rod structure includes a hinge seat, a connecting rod, a crank arm, and a sliding seat;

[0011] The hinge seat is fixed on the substrate and located outside the fixed shaft. The inflection point of the crank arm is rotatably connected to the upper end of the hinge seat. The upper end of the crank arm is connected to the engaging mechanism. The lower end of the crank arm is hinged to one end of the connecting rod, and the other end of the connecting rod is connected to the sliding seat. The sliding seat is installed on the substrate, and a locking block is arranged on the top of the sliding seat.

[0012] Preferably, the engaging mechanism includes an adjusting ring and a driving device;

[0013] The adjusting ring is sleeved on the upper end of the fixed shaft and connected to the driving device. The adjusting ring is provided with an annular groove, and the end of the upper end of the crank arm is slidably connected to the annular groove. The up and down movement of the adjusting ring can make the sliding seat move reciprocally in the radial direction of the fixed shaft.

[0014] Preferably, a ball is arranged at the end of the crank arm, and the ball is rotatably arranged in the annular groove.

[0015] Preferably, the gear transmission device includes a support ring sleeve and a motor; the support ring sleeve is sleeved on the fixed shaft and connected to the shaft sleeve, and the motor is meshed with the support ring sleeve.

[0016] Preferably, the substrate is arranged on the workbench, a moving device is arranged at the bottom of the workbench, and the fixed shaft passes through the workbench and is connected to the moving device.

[0017] Preferably, the moving device includes a push rod and a sliding device. The sliding device is connected to the workbench through a guide rail. The push rod is connected to the sliding device, and the lower end of the fixed shaft is connected to the sliding device.

[0018] Preferably, an arc-shaped locking portion is arranged on the top of the locking block.

[0019] Preferably, an image acquisition device is arranged on the fixed shaft for acquiring images of the holes of the pot tripod tray.

[0020] Compared with the prior art, the present utility model has the following beneficial technical effects:

[0021] A pot tripod control device of a vacuum evaporation machine provided by the present utility model includes a fixed shaft, a connecting rod structure, a substrate, and a rotating mechanism; through a plurality of connecting rod structures, a plurality of locking blocks are circumferentially distributed. The pot tripod is placed on the top of the locking blocks. During the synchronous control of the movement of the plurality of connecting rod structures by the opening and closing mechanism, the fixing of the pot tripod is realized, and it is in a stable state. At the same time, a rotating device is arranged on the rotating shaft, and the substrate is rotated through gear transmission, so that the tray holes are moved to the working position of the manipulator. This control device couples the connecting rod mechanism and the rotating device to realize the fixing and rotation of the pot tripod. At the same time, a moving device is adopted to move the pot tripod and adjust the position of the pot tripod in the working chamber, realizing the automatic control of the pot tripod. Brief Description of the Drawings

[0022] Figure 1 This is the external view of the fully automatic evaporation coating device of the present utility model;

[0023] Figure 2 This is the internal structure diagram of the fully automatic evaporation coating device of the present utility model;

[0024] Figure 3 This is the floor plan of the fully automatic evaporation coating device of the present utility model;

[0025] Figure 4 This is the structural schematic diagram of the image acquisition device of the present utility model;

[0026] Figure 5 This is the structural schematic diagram of the wafer bin group of the present utility model;

[0027] Figure 6 This is the structural schematic diagram of the tray rack and the pressure plate rack of the present utility model;

[0028] Figure 7 This is the structural schematic diagram of the pressure plate rack of the present utility model;

[0029] Figure 8 This is the structural schematic diagram of the tray rack of the present utility model;

[0030] Figure 9 This is the structural schematic diagram of the tray clamp of the present utility model;

[0031] Figure 10 This is the structural schematic diagram of the tray clamping plate of the present utility model;

[0032] Figure 11 This is the structural schematic diagram of the tray clamp motor of the present utility model;

[0033] Figure 12 This is the position schematic diagram of the robotic arm, the tray rack and the pressure plate rack of the present utility model;

[0034] Figure 13 This is the structural schematic diagram of the suction cup robotic arm of the present utility model;

[0035] Figure 14 This is the structural schematic diagram of the suction cup of the present utility model;

[0036] Figure 15 This is the structural schematic diagram of the tray robotic arm of the present utility model;

[0037] Figure 16 This is the structural schematic diagram of the tray and pressure plate clamping device of the present utility model;

[0038] Figure 17 This is the internal structural schematic diagram of the clamping device of the present utility model;

[0039] Figure 18 This is a schematic structural view of the bracket jaw assembly of the present utility model;

[0040] Figure 19 This is a schematic sliding structure view of the jaw of the present utility model;

[0041] Figure 20 This is a schematic structural view of the pressing plate suction component of the present utility model;

[0042] Figure 21 This is a schematic structural view of the jaw assembly of the present utility model;

[0043] Figure 22 This is an installation schematic view of the jaw assembly of the present utility model;

[0044] Figure 23 This is a schematic structural view of the gear disk of the present utility model;

[0045] Figure 24 This is a schematic structural view of the jaw of the present utility model;

[0046] Figure 25 This is a schematic structural view of the gear disk and the motor of the present utility model;

[0047] Figure 26 This is a schematic structural view of the lock buckle opening and closing component of the present utility model;

[0048] Figure 27 This is a schematic structural view of the lifting mechanism of the present utility model;

[0049] Figure 28 This is a schematic structural view of the pot tripod assembly of the present utility model;

[0050] Figure 29 This is a schematic structural view of the pot tripod fixing component of the present utility model;

[0051] Figure 30 This is a top view of the pot tripod of the present utility model;

[0052] Figure 31 This is a schematic structural view of the camera component of the present utility model;

[0053] Figure 32 This is a plan view of the pot tripod locking component of the present utility model;

[0054] Figure 33 This is a schematic structural view of the locking device of the present utility model;

[0055] Figure 34 This is a schematic structural view of the locking component of the present utility model;

[0056] Figure 35This is a schematic structural diagram of the pot tripod moving device of the present utility model;

[0057] Figure 36 This is a schematic structural diagram of the tray of the present utility model;

[0058] Figure 37 This is an installation schematic diagram of the lock and the tray of the present utility model;

[0059] Figure 38 This is a schematic structural diagram of the lock of the present utility model;

[0060] Figure 39 This is a schematic structural diagram of the internal spring hole of the lock of the present utility model.

[0061] In the figure: workbench 1, pot tripod moving device 2, tray manipulator 3, pressure plate frame 4, tray rack 5, suction cup manipulator 6, image acquisition device 7, wafer bin group 8, wafer 9, pressure plate 10, tray 11, suction cup 12, camera 13, tray clamping device 14; camera 15; pot tripod 21, camera assembly 22, lock block 23, moving assembly 24, substrate 25, connecting rod structure 26, lock 27, motor 41, slider 42, moving plate 43, base 44, pulley 45, fixing plate 46, support arm 51, motor 52, clamping plate 53, chuck 54, cam 55, cam groove 56, fixing frame 71, first camera 72, light source 73, light plate 74, second camera 75, motor 81, fixing seat 82, rotating shaft 83, wafer bin 84, flange 141, lock control component 142, jaw component 143, sucking component 144, camera 221, connecting plate 222, support ring sleeve 241, push rod 242, cylinder plate 261, cylinder 262, pull rod 263, adjusting ring 264, hinge seat 265, connecting rod 266, crank arm 267, fixed shaft 268, sliding seat 269, bolt 271, rotating shaft 272, pressing head 237, upper fixing plate 1412, lower fixing plate 1413, cylinder 1421, air rod fixing plate 1422, air rod 1423, suction cup 1424, motor 1431, gear ring 1432, jaw 1433, clamping groove 1434, slider 1435, roller 1436, arc groove 1437, gear 1438, fixed base 1441, lead screw 1442, slider 1443, clamping arm 1444, rotating shaft 1445, compound cylinder 1446, motor 1447. Specific embodiments

[0062] The following further elaborates on the present utility model in conjunction with the attached drawings. The following is an explanation rather than a limitation of the present utility model.

[0063] On the one hand, the present utility model provides a pot tripod control device for a vacuum evaporation machine, including a fixed shaft, a connecting rod structure, an image acquisition device, a substrate, and a rotating mechanism;

[0064] The fixed shaft is sleeved at the center of the substrate, and a plurality of link structures are arranged circumferentially around the fixed shaft. One end of the link structure is connected to the fixed shaft through an opening and closing mechanism, and a locking block is arranged at the other end of the link structure. The pot tripod is arranged on the top of the locking block, and under the action of the link structure, a plurality of locking blocks lock the pot tripod circumferentially. An arc-shaped locking portion is arranged on the top of the locking block. The image acquisition device is arranged at the upper end of the fixed shaft and is used for acquiring images of the tray holes of the pot tripod.

[0065] The rotation mechanism includes a shaft sleeve and a gear transmission device;

[0066] The shaft sleeve is sleeved on the fixed shaft and at the bottom of the substrate. The substrate is fixedly connected to the shaft sleeve, and the shaft sleeve is connected to the gear transmission device.

[0067] In some embodiments, the link structure includes a hinge seat, a link, a crank arm, and a sliding seat;

[0068] The hinge seat is fixed on the substrate and located outside the fixed shaft. The inflection point of the crank arm is rotatably connected to the upper end of the hinge seat. The upper end of the crank arm is connected to the engaging mechanism. The lower end of the crank arm is hinged to one end of the link, and the other end of the link is connected to the sliding seat. The sliding seat is installed on the substrate, and the locking block is arranged on the top of the sliding seat.

[0069] The engaging mechanism includes an adjusting ring and a driving device; the adjusting ring is sleeved on the upper end of the fixed shaft and connected to the driving device. An annular groove is arranged on the adjusting ring, and a ball is arranged at the end of the crank arm. The ball is rotatably arranged in the annular groove, and the up and down movement of the adjusting ring can make the sliding seat reciprocate radially with respect to the fixed shaft.

[0070] In some embodiments, the gear transmission device includes a support ring sleeve and a motor; the support ring sleeve is sleeved on the fixed shaft and connected to the shaft sleeve, and the motor is meshed with the support ring sleeve.

[0071] In some embodiments, the pot tripod moving device is arranged on the workbench. A moving device is arranged at the bottom of the workbench. The fixed shaft passes through the workbench and is connected to the moving device. The moving device includes a push rod and a sliding device. The sliding device is connected to the workbench through a guide rail. The push rod is connected to the sliding device, and the lower end of the fixed shaft is connected to the sliding device.

[0072] For the pot tripod control device of this vacuum evaporation machine, a plurality of link structures are used to make a plurality of locking blocks distributed circumferentially. The pot tripod is placed on the top of the locking blocks. During the process of synchronously controlling the movement of a plurality of link structures by the opening and closing mechanism, the pot tripod is fixed. At the same time, a rotating device is arranged on the rotating shaft, and the substrate is rotated through gear transmission, so that the tray holes are moved to the working position of the manipulator.

[0073] On the other hand, the present utility model provides a full-automatic evaporation coating device for wafer. This evaporation coating device is used to install the wafer on the pot before evaporation coating, then move the pot to a vacuum evaporation coater to coat the wafer, and after the evaporation coating is completed, move the pot back to the evaporation coating device to automatically pick up the coated wafer.

[0074] Refer to Figures 1 - 30 , a full-automatic evaporation coating device for wafer, including a working chamber. In the middle of the working chamber, there is a workbench. On the workbench, there are a pot moving device 2, a tray manipulator 3, a pressure plate frame 4, a tray rack 5, a suction cup manipulator 6 and an image acquisition device 7. The pot device 2, the pressure plate frame 4, the tray rack 5 and the image acquisition device 7 are within the movement trajectory range of the manipulator.

[0075] On the tray rack 5, there are trays 11 stacked up and down. The suction cup manipulator 6 places the wafer in the tray through a suction cup. On the pressure plate frame, there are pressure plates 10 stacked up and down. The tray manipulator 3 places the pressure plate on the wafer in the tray and on top of the wafer. Then, the tray manipulator 3 transfers the wafer to the tray installation position of the pot and fixes the tray with a buckle. After all the tray positions of the pot are filled with trays with wafers, move the pot device to the vacuum evaporation coater to coat the wafer. After the evaporation coating is completed, move the pot to the workbench, then use the manipulator to remove the tray from the pot, use the manipulator to remove the pressure plate and place the coated wafer in the corresponding wafer bin, realizing the automatic evaporation coating of the wafer.

[0076] Refer to Figure 5 , in this embodiment, there are two wafer bin groups 8. One group is used to place wafers to be evaporated coated, and the other group is used to place the coated wafers 9; the wafer bin group includes a plurality of wafer bins 84, and the plurality of wafer bins are stacked on top of each other from top to bottom, and the wafer bins are detachably connected. The lowermost wafer bin is placed on a rotating device to rotate the wafer bin for easy disassembly and assembly.

[0077] The rotating device includes a motor 81, a fixed seat 82, a rotating shaft 83 and a wafer bin 84. The fixed seat 82 is fixed on the workbench. The rotating shaft 83 is installed in the fixed seat. The motor is installed on one side of the fixed seat. The output shaft of the motor is engaged with the rotating shaft through a gear. At the top of the rotating shaft 83, there is a fixing plate. The wafer bins are stacked on the fixing plate in sequence. The plurality of wafer bins are fixed through a detachable connection component. During the installation process, the opening side of the wafer bin must face the operator. Therefore, before installation, rotate the fixing plate through the motor to make the installation position outside the working chamber. After installing the wafer bin, rotate the wafer bin 180° through the rotating device to make the opening side of the wafer bin on one side of the manipulator, so that the manipulator can easily pick up the wafer.

[0078] Refer to Figure 6 and12 , the pressing plate frame 4 and the tray frame 5 are located between the two robotic arms. The pressing plate frame 4 is located on the side close to the tray robotic arm 3, and the tray frame 5 is located on the side close to the suction cup robotic arm 6.

[0079] Refer to Figure 7 , the pressing plate frame 4 includes a base and a lifting device provided on one side thereof. The lifting device is located on the side close to the wafer bin. The lifting device includes a motor 41, a slider 42, a moving plate 43, a pulley 45 and a fixing plate 46; the base 44 is vertically fixed on the workbench, the motor 41 is fixed at the bottom of the base 44, the fixing plate 46 is connected to the base and is located on top of the motor, the pulley 45 is provided on top of the base and is connected to the motor by a belt, the slider is provided on the base through a guide rail and is fixedly connected to one side of the belt, the fixing plate is provided with a plurality of guide posts extending vertically, the edge of the moving plate is sleeved on the guide posts, and at the same time the moving plate is connected to the slider 42. The pressing plate 10 is placed on the moving plate and is located between the plurality of guide posts. The motor drives the belt to move, and then drives the moving plate to move through the slider, so that the uppermost pressing plate on the moving plate is in the working position, and this working position is the top of the guide post. That is, for each pick-up of a pressing plate, the moving plate moves a distance equal to the thickness of a pressing plate, so that the lower pressing plate is in the working position, which is convenient for the robotic arm to suck the pressing plate. The pressing plate is of a disc structure and is used to cover the non-evaporation side of the wafer.

[0080] Refer to Figures 8 - 11 , the tray frame 5 includes a base and a lifting device and a tray fixing device provided on one side thereof; the structure of the lifting device is the same as that of the lifting device of the pressing plate frame, and the difference lies in the installation method of the tray on the guide posts.

[0081] Refer to Figure 36 , the tray is of an annular structure, and an annular convex fixing platform is provided at the lower end of its inner wall. The wafer is supported on the arc-shaped convex platform. A radially extending convex ring is provided at the upper end of the outer wall of the tray, and this convex ring is used for the tray fixing device and the robotic arm to clamp the tray.

[0082] The tray is sleeved outside the plurality of guide posts, and a plurality of trays are stacked up and down. The lowermost tray is located on the moving plate. The tray fixing device includes two fixing parts, and the two fixing plates are fixed at the upper end of the base and are symmetrically arranged on both sides of the tray along the center of the tray.

[0083] The fixing part includes a support arm 51, a motor 52, a clamping plate 53, a chuck 54, a cam 55 and a cam groove 56; the support arm 51 is horizontally arranged, one end of which is connected to the base, and the other end extends away from the base. The motor 52 is provided at the bottom of the support arm. The clamping plate 53 is installed on the top of the support arm through a guide rail and can reciprocate towards the tray direction. The output shaft of the motor passes through the support arm and is connected to the clamping plate through an eccentric wheel structure.

[0084] The eccentric wheel structure is composed of a cam 55 and a cam groove 56. The cam is arranged on the upper end face of the motor output shaft to form an eccentric wheel. The cam groove 56 is a strip-shaped groove, and the length direction of the strip-shaped groove is arranged along the length direction of the support arm. The cam is located in the cam groove, and the rotation of the cam makes the clamping plate move reciprocally.

[0085] The chuck 54 is arranged at one end of the clamping plate close to the tray. The chuck is a support plate formed by a protrusion at the end of the overtime. When clamping the tray, under the action of the eccentric wheel, the clamping plate moves towards the tray direction, so that the chuck supports the bottom of the convex ring of the tray in the working position. Then the lifting device moves downwards, and the tray is separated from the guiding column. The wafer and the pressing plate are sequentially placed in the tray through the manipulator. The pressing plate covers the wafer. Finally, the tray is moved to the tray working position of the pot tripod through the manipulator. Similarly, after electroplating is completed, the tray is placed on the tray rack and fixed by the tray fixing device. Then the pressing plate and the wafer are sequentially taken by the manipulator. The pressing plate is placed on the pressing plate rack, and the wafer is placed in the wafer bin. Finally, the lifting device moves upwards, and the tray is sleeved on the guiding column.

[0086] Refer to Figure 13 and 14 As shown in, the suction cup manipulator 6 includes a manipulator, a suction cup and a camera 13. The fixed end of the manipulator is connected to the workbench, the free end of the manipulator is connected to the cantilever, the other end of the cantilever is connected to the suction cup, the cantilever is arranged at a right angle to the base plate, the camera 13 is arranged on the cantilever, and the camera is connected to the manipulator and the controller. When the manipulator picks up the wafer, the camera collects the image of the current wafer bin, the controller analyzes the position of the wafer in the wafer bin, and sucks it according to the position of the uppermost or lowermost wafer.

[0087] The controller determines the number and position of the wafers in the wafer bin according to the collected photos and in combination with the image recognition method. For example, based on the edge information detection method, the contour matching algorithm is used to identify and locate the objects in the image. This method searches for the edge contours of the objects and matches these contours with the known templates to determine the number of wafers. Since the taking and placing of the wafers are in a certain order, when the number of wafers is determined, the positions of the spaces and the wafers can be determined; or the image detection method. In this embodiment, the computer vision image analysis method is adopted. The camera captures the real-time picture of the wafer bin, and then the wafers are analyzed by computer vision to calculate their positions and deviations. The controller adjusts the corresponding posture of the manipulator to perform the wafer picking operation.

[0088] A plurality of air cavities are arranged on the suction cup. The plurality of air cavities are communicated through an air passage. The input end of the air passage is connected to an air pump. The air passage inputs gas into the air cavities. The air flow flows tangentially along the air cavities to form a vortex inside the air cavities. A negative pressure area is formed at the center of the vortex, so that the wafer is adsorbed on the suction cup, and an air film is formed between the wafer and the suction cup to realize the non-contact picking of the wafer.

[0089] Refer to Figure 4 , the image acquisition device is used to acquire the encoding of the wafer. Each wafer has a unique identification code formed on the surface of the wafer. The image acquisition device includes a fixing frame 71, a first camera 72, a light source 73, a light plate 74, and a second camera 75.

[0090] The fixing frame is arranged on the workbench and located at the opening side of the wafer bin group, that is, the position where the wafer is taken. The first camera is arranged on the top of the fixing frame. The light plate 74 is arranged at the lower part of the fixing frame. The second camera is arranged below one side of the light plate 74. Two light sources 73 are arranged on the symmetric sides of the light plate. The two light sources and the light plate irradiate the wafer from multiple directions to improve the imaging quality of the two cameras.

[0091] The first camera 72 and the second camera 75 are respectively connected to the controller. The edge damage of the wafer is detected according to the image acquired by the first camera, and the encoding of the wafer is identified according to the image acquired by the second camera. The encoding can also be identified according to the image of the first camera. A program for wafer defect and model identification method is preset in the controller. This program analyzes the image of the wafer to obtain the encoding and damage data of the wafer. If the wafer is normal, evaporation coating is carried out.

[0092] Refer to Figure 28 and 29 , the pot tripod moving device 2 includes a fixed shaft 268, a pot tripod 21, a camera, a locking block 23, a fixing device, a moving component 24, a substrate 25, and a rotating device.

[0093] The center of the substrate 25 is installed on the fixed shaft through a bushing. The substrate is arranged on the top surface of the workbench. The lower end of the fixed shaft passes through the substrate and is connected to the moving device. The moving device is fixed on the bottom surface of the workbench. The rotating device is arranged on the moving device and connected to the bushing.

[0094] The fixing device includes a clamping device, an adjusting ring 264, a plurality of link structures, and a locking block 23; the adjusting ring is sleeved on the fixed shaft and connected to the opening and closing device. The adjusting ring can move up and down along the fixed shaft. A plurality of link structures 26 are circumferentially and evenly distributed on the substrate with the fixed shaft as the center. One end of the link structure is connected to the adjusting ring, and the other end is slidably connected to the substrate. The sliding direction is the radial direction of the substrate. The locking block is arranged at the end of the link structure far from the fixed shaft. The pot tripod 21 is arranged on the top of the locking block 23. A plurality of locking blocks are used to apply a circumferential locking force to the edge of the pot tripod to fix the pot tripod.

[0095] Refer to Figure 33 and 34, the clamping device includes a cylinder plate 261, a cylinder 262, a pull rod 263 and an adjusting ring 264; a cylinder fixing plate is provided at the top of the fixed shaft, the cylinder 262 is fixed on the top surface of the cylinder fixing plate, and the piston of the cylinder extends upward. The top of the piston is connected to the cylinder plate 261. A plurality of pull rods 263 are provided at the edge of the cylinder plate 261. The lower end of the pull rod 263 is connected to the adjusting ring. The cylinder drives the adjusting ring to move up and down along the axial direction of the fixed shaft. When the adjusting ring moves upward, the connecting rod structure drives the locking block to move towards the center of the pot body to fix the edge of the pot body.

[0096] Refer to Figure 34 , the connecting rod structure 26 includes a hinge seat 265, a connecting rod 266, a crank arm 267 and a sliding seat 269;

[0097] The hinge seat is fixed on the substrate and located outside the fixed shaft. The crank arm 267 is an L-shaped structure. The upper end of the crank arm is a horizontal arm, and the lower part is a vertical wall. The inflection point of the crank arm 267 is rotatably connected to the upper end of the hinge seat. The end of the horizontal arm is movably connected to the adjusting ring. The lower end of the vertical wall is hinged to one end of the connecting rod. The other end of the connecting rod 266 is connected to the sliding seat 269. The sliding seat is installed on the substrate 25 through a guide rail and can move along the radial direction of the fixed shaft. The locking block is provided at the top of the sliding seat.

[0098] An arc-shaped locking portion is provided at the top of the locking block 23. The radian of the locking portion is the same as the edge of the pot body. When the adjusting ring moves downward, the crank arm drives the connecting rod and the sliding seat to move towards the edge of the substrate. It should be noted that when the locking block moves to the outer limit position, the diameter formed by the inner walls of the plurality of locking blocks is smaller than the edge diameter of the pot body, ensuring that the pot body can be lapped on the top of the locking block. When the adjusting ring moves upward, the sliding seat drives the locking block to move towards the center of the fixed shaft. The inner wall of the locking portion of the locking block abuts against the edge of the pot body to fix the pot body.

[0099] Refer to Figure 30 and 37 , the pot body is a circular dome structure. A plurality of tray holes are evenly distributed on the lower circumference with the center of the pot body. The above trays are installed in the tray holes, and the convex rings on the tops of the trays are lapped on the surface of the pot body. A plurality of rotatable latches 27 are provided at the edges of the tray holes. The ends of the latches are used to press on the pressing plates inside the trays to fix the trays. The plurality of latches are evenly distributed along the central circumference of the tray holes.

[0100] Refer to Figure 38 and 39, the latch 27 includes a bolt 271, a rotating shaft 272 and a pressing head 237. The rotating shaft is of a hollow structure. The end of the bolt 271 passes through the rotating shaft 272 and is connected to the pot tripod. A spring is sleeved on the bolt and is located in the shaft hole of the rotating shaft. A pressing arm is provided on the rotating shaft, and the pressing head is arranged at the end of the pressing arm. When in use, the rotating shaft is lifted upward by the bolt. At this time, the spring is compressed. The rotating shaft is rotated so that the pressing head is located above the pressing plate of the tray. The rotating shaft is released and the spring resets. Under the action of the elastic force, the pressing head presses against the pressing plate.

[0101] During the evaporation process, the pot tripod full of wafers is moved into the vacuum evaporator for evaporation. After evaporation is completed, the pot tripod needs to be placed on the pot tripod moving device 2 again. Since the pot tripod is of a circular structure, in order to facilitate the robotic arm to accurately disassemble the tray, the position of the pot tripod needs to be adjusted so that the tray is in the working position. Therefore, it is necessary to drive the pot tripod to rotate through the base plate so that the tray is in the working position of the robotic wall.

[0102] Refer to Figure 31 , a camera 221 and a position detection device are arranged on the fixed shaft. The camera 221 is arranged on the connecting plate 222. One end of the connecting plate 222 is connected to the upper end of the fixed shaft, and the other end is arranged obliquely so that the camera 221 faces the axis of the tray hole. The image of the pot tripod is collected by the camera. The controller is connected to the camera. The controller obtains the included angle between the center of the tray and the camera according to the preset image processing and computer vision technology program, and controls the rotating device to rotate according to the included angle so that the tray moves to the working position.

[0103] The controller loads the image file into the memory and converts the image into a grayscale image to reduce the computational complexity. An edge detection algorithm (such as the Canny algorithm) is used to find the edges in the image. Contours are searched in the edge-detected image, and the Hough Circle Transform is used to identify circular contours. For each detected circle, the Hough Circle Transform provides a center coordinate. The included angle is calculated based on the center coordinate and the camera coordinate, and then the base plate is controlled to rotate.

[0104] Refer to Figure 35 , the moving component 24 includes a moving plate, a shaft fixing seat and a push rod 242. Both sides of the top surface of the moving plate are slidably connected to the bottom surface of the workbench through rails. The piston of the push rod is connected to the end surface of the moving plate. The cylinder body of the push rod is connected to the bottom surface of the workbench through a connecting seat. The shaft fixing seat is fixed on the moving plate. The lower end of the fixed shaft passes through the workbench and extends into the shaft fixing seat and is fixed. The push rod drives the moving plate to slide, and the moving plate drives the substrate to move, thereby realizing the movement of the entire pot tripod moving device.

[0105] Since the entire pot and tripod moving device is located in the middle of the workbench in the working chamber, it is in a dust-free environment for wafer picking operations. When moving the pot and tripod for evaporation coating, the closed door of the working chamber is opened, and then the pot and tripod are moved to the edge of the working chamber through the moving component, facilitating the removal of the entire pot and tripod.

[0106] The rotating device includes a servo motor, a support ring sleeve 241, and a bushing; the bushing is sleeved on the fixed shaft and located at the bottom of the substrate, the upper end of the bushing is fixedly connected to the substrate, the support ring sleeve 241 is sleeved on the fixed shaft and arranged above the shaft fixed seat, the outer circular surface of the support ring sleeve 241 is an external gear ring, the upper end of the support ring sleeve 241 is connected to the lower end of the bushing, and the lower end is rotatably connected to the shaft fixed seat. The servo motor is fixed on the bottom surface of the moving plate, and the output shaft of the servo motor is meshed with the support ring sleeve 241 through a gear.

[0107] Refer to Figure 15 , the tray manipulator 3 includes a manipulator and a tray clamping device 14. The lower end of the manipulator is connected to the workbench, and the tray clamping device 14 is connected to the moving end of the manipulator through a flange. The tray clamping device 14 is used to place the pressing plate on the wafer, and at the same time move the fixed tray clamping jaws to the target position.

[0108] Refer to Figures 16 - 27 , the tray clamping device 14 includes a flange plate 141, a fixing frame, a lock control component 142, a jaw component 143, and a suction component 144; the top of the flange plate is connected to the manipulator, the fixing frame is connected to the bottom surface of the flange plate, the suction component 144 is arranged in the fixing frame, and a plurality of air rods 1423 are formed on the suction component 144. The lower ends of the air rods pass through the fixing frame for sucking the pressing plate.

[0109] The jaw component 143 is arranged at the bottom of the fixing frame. The jaw component 143 includes an iris mechanism and a plurality of jaws. The plurality of jaws are connected to the iris mechanism and are circumferentially distributed. The iris mechanism enables the plurality of jaws to synchronously move along the radial direction of the tray. A clamping groove is arranged at the lower part of the jaw for clamping on the edge of the convex ring of the tray.

[0110] The lock control component 142 includes a plurality of control devices and is connected to the fixing frame. The plurality of control devices are circumferentially distributed. The control device includes a compound cylinder and a clamping arm connected thereto. The clamping arm is used for clamping and rotating the lock block.

[0111] Refer to Figure 17 and 20 , the fixing frame includes an upper fixing plate 1412 and a lower fixing plate 1413 arranged at intervals. The upper fixing plate 1412 and the lower fixing plate 1413 are connected by a plurality of support columns. The support columns are located at the edge of the fixing plate, and the upper fixing plate is connected to the flange plate.

[0112] The suction component includes a cylinder 1421, a piston rod fixing plate 1422, a piston rod 1423, and a suction cup 1424.

[0113] The 1421 is arranged on the bottom surface of the upper fixing plate. The piston rod fixing plate 1422 is connected to the cylinder piston. The piston rod fixing plate 1422 is provided with a plurality of cantilevers extending radially. The upper end of the piston rod 1423 is connected to the cantilever. The lower end of the piston rod passes through the lower fixing plate. The upper end of the piston rod is connected to the air source through a pipeline. The lower end of the piston rod is provided with a suction cup for adsorbing the pressing plate. The suction cup is preferably a circular pneumatic diaphragm. The plurality of piston rods form a diameter smaller than the diameter of the pressing plate. When the manipulator moves above the pressing plate, the cylinder drives the piston rod to move downward, and the piston rod sucks the pressing plate through the suction cup.

[0114] Refer to Figures 18 - 25 As shown, the iris mechanism includes a motor 1431, a gear ring 1432, a linear chute, and an arc chute 1437. The center of the gear ring is installed on the top surface of the lower fixing plate through a rotating shaft. The outer ring wall of the gear ring is a toothed surface. The motor 1431 is fixed on the lower fixing plate. The output shaft of the motor is meshed with the toothed surface of the gear ring through a gear 1438. A plurality of arc chutes 1437 are circumferentially distributed on the end surface of the gear ring and penetrate the gear ring. The rotation directions of the plurality of arc chutes are the same. One end of the arc chute is close to the center of the gear ring, and the other end extends to the edge of the gear ring.

[0115] Refer to Figures 22 and 23. The plurality of linear chutes are circumferentially distributed on the lower fixing plate and are arranged radially. The linear chutes are partially communicated with the arc chutes. A plurality of clamping jaws are respectively connected to the linear chutes through sliders. The sliding direction of the slider is the same as that of the linear chute.

[0116] Refer to Figure 24 and 25 As shown, the clamping jaw 1433 is an L-shaped structure. The upper part is a horizontal arm. One end of the horizontal arm away from the center of the gear ring is connected to a vertical arm. A clamping groove 1434 is arranged on the inner side of the lower end of the vertical wall for clamping on the outer convex ring edge of the tray. A guide block is arranged at the top of one end of the horizontal arm close to the gear ring. The guide block is located in the linear chute. A roller 1436 is arranged at the top of the guide hole. The roller extends into the arc chute.

[0117] During operation, the motor drives the gear ring to rotate. The movement of the arc chute drives the clamping jaw to move along the linear chute, realizing the clamping operation of the clamping jaw. When the roller moves towards the center end of the arc chute, the clamping jaw closes. When the roller moves towards the edge end of the arc chute, the clamping jaw opens.

[0118] The outer toothed surface of the gear ring is a tooth segment, that is, a tooth groove is arranged on the outer wall of the gear ring. When the gear meshes with both ends of the tooth segment, the roller is located at both ends of the arc chute. At this time, the clamping jaw is at the maximum opening distance or in a closed state.

[0119] The latch control component 142 is used to control the locking state of the latch on the pot tripod. Since the tray needs to be fixed on the pot tripod through the latch, the rotary latch fixes the pressure plate through the pressure head, and then stably fixes the tray on the pot tripod. At the same time, when taking the tray, the latch needs to be rotated in the reverse direction to release the locking of the tray, and then take the tray. The function of the latch control component 142 is to simulate the operation process of the worker lifting and rotating the latch to realize the automatic opening and closing of the latch.

[0120] Refer to Figure 26 and 27 As shown in, the control device includes a fixed base 1441, a lifting module, clamping arms 1444, a rotating shaft 1445 and a compound cylinder 1446. A convex fixing part is formed on the side wall of the upper fixing plate, and the fixed base is connected to the fixing part. The lifting module is arranged vertically, the compound cylinder 1446 is connected to the lifting module, the lower end of the compound cylinder 1446 is connected to the rotating shaft, and the two clamping arms are slidably arranged at the lower end of the rotating shaft 1445. The compound cylinder can realize the bidirectional movement of the clamping arms, drive the clamping arms to rotate through the rotating shaft, and at the same time can make the two clamping arms move relatively or away from each other to realize the opening and closing function.

[0121] The upper end of the clamping arm is connected to the rotating shaft through a slider, the slider is connected to the operating mechanism of the compound cylinder, and the rotating shaft is connected to the rotating mechanism of the compound cylinder. A convex clamping plate is arranged at the lower end of the clamping arm. During the process of operating the tray, the clamping plate is located at the bottom of the positioning ring of the rotating shaft of the latch, and the pressing arm is located between the two clamping arms.

[0122] The lifting module includes a lead screw 1442, a slide rail, a slider 1443 and a motor 1447; the motor is fixed on the fixed base 1441, the upper end of the slide rail is connected to the fixed base 1441, the two ends of the upper end of the lead screw 1442 are rotatably connected to the slide rail, the slider is arranged on the slide rail and is connected to the lead screw in a matching manner, the upper end of the lead screw is connected to the output shaft of the motor through a pulley, and the compound motor is fixedly connected to the slider.

[0123] Refer to Figure 19 As shown in, a camera 15 is further arranged at the bottom of the lower fixing plate. The camera is connected to the controller. The camera is used to collect the image of the tray. The controller determines the position of the tray according to the image of the tray, and adjusts the position of the robotic arm according to the position of the tray, so that the jaw assembly can accurately grab the tray.

[0124] Next, a detailed description will be given of the usage method of a full-automatic evaporation coating device for wafers provided by the present invention.

[0125] Open the closing door corresponding to the wafer bin group in the working chamber, and then rotate the fixing plate to the working position through the rotating device. Install the full-bin wafer bin on the fixing plate and fix it, and then reset the wafer bin through the rotating device. At this time, the opening side of the wafer bin faces the robotic arm.

[0126] The suction cup robotic arm operates the suction cup to pick up the wafer. The suction cup moves to the opening of the wafer bin. Camera 13 captures an image of the wafer bin. The controller determines the quantity and position of the wafers in the wafer bin based on the captured photo and in combination with an image recognition method. The robotic arm moves the suction cup to the top of the topmost wafer according to the position of the wafer, and the air pump operates to suck up the topmost wafer with the suction cup.

[0127] The suction cup robotic arm moves the wafer to the image acquisition device and positions it between the first camera and the second camera. The light source and the light plate provide multi-angle illumination. The two cameras capture images of both sides of the wafer. Edge damage of the wafer is detected based on the image captured by the first camera, and the code of the wafer is identified based on the image captured by the second camera to obtain the code and damage data of the wafer. The controller records the wafer data. If the wafer is damaged, it is placed in the corresponding wafer bin through the suction cup robotic arm.

[0128] During the process of detecting the wafer, the tray rack works synchronously. The lifting device moves upward under the action of the motor. The topmost tray moves between the two fixing parts of the tray fixing device. Under the action of the cam, the clamping plate moves towards the tray, and the chuck is clamped to the bottom of the outer convex ring of the tray. At the same time, the lifting device descends, and the guiding column separates from the tray.

[0129] The suction cup robotic arm drives the suction cup to move to the top of the tray and places the wafer in the tray, interrupts the air flow of the suction cup, and the suction cup separates from the wafer.

[0130] The tray robotic arm 3 moves to the top of the pressing plate rack 4. The tray clamping device 14 is located on the top of the pressing plate. The lifting device of the pressing plate rack moves upward so that the topmost pressing plate is flush with the top end of the guiding column. The cylinder 1421 operates and the piston moves downward until the pneumatic suction cup at the lower end of the air rod contacts the surface of the pressing plate. The air rod generates negative pressure to adsorb the pressing plate. Then the suction cup robotic arm moves to the top of the tray rack, and the cylinder 1421 moves downward again to place the pressing plate on the top of the wafer.

[0131] The tray manipulator moves to the top of the tray and moves downward until the card slot of the jaw is flush with the top edge of the tray. The tray clamping device 14 works. The servo motor 1431 drives the gear ring to rotate, and the gear ring drives the jaw to move towards the center. The card slot at the lower end of the jaw is clamped to the flange of the tray. Next, the tray robotic arm 3 moves the tray with the pressing plate and the wafer to the working position of the pot tripod.

[0132] When the pot tripod is placed at the initial moment of the pot tripod moving device, its position is randomly arranged and no tray is placed, that is, the tray hole of the pot tripod is in a non-working position. The camera 221 acquires an image of the tray hole of the pot tripod. By collecting the image of the tray hole on the pot tripod through the camera, the controller obtains the included angle between the center of the tray hole and the camera according to the preset image processing and computer vision technology program, and controls the rotation of the rotating device according to the included angle to move the tray to the working position. Since the tray holes are evenly distributed in a circle, any one of the tray holes is in the working position. After placing the tray in this tray hole and rotating it by a certain angle, the adjacent tray hole can be made to be in the working position.

[0133] The tray manipulator 3 moves to the tray working position of the pot tripod, places the tray in the tray hole, the iris mechanism rotates in the reverse direction, the clamping jaw separates from the tray, and the latch control component 142 starts to work.

[0134] The lifting module moves down, and at the same time the two clamping arms are in the open state. When the rotating shaft of the latch is between the two clamping arms, under the action of the composite cylinder, the two clamping arms close, clamp the rotating shaft, and at the same time the clamping plate is located at the bottom of the positioning ring of the rotating shaft. The lifting module moves up and the spring compresses. At the same time, the rotating shaft 1445 rotates, so that the pressing head of the latch is located on the top of the pressing plate. The composite cylinder moves down and the clamping arms open. Under the action of the elastic force, the pressing head presses against the pressing plate. Thus, the installation of a wafer on the pot tripod is completed.

[0135] The rotating device of the pot tripod moving device drives the substrate to rotate, so that the adjacent tray holes are in the working position, and the above process is repeated until all the tray holes are installed with trays carrying wafers.

[0136] Open the closing door corresponding to the pot tripod moving device in the working chamber. The moving component drives the part of the pot tripod moving device above the workbench to move towards the workbench and open the closing door. Then the cylinder drives the adjusting sleeve to move, and drives the sliding seat and the locking block to move through the connecting rod structure, releases the locking of the pot tripod, and moves the pot tripod to the evaporation coater to coat the wafer.

[0137] After the coating is completed, move the pot tripod to the pot tripod moving device again, and repeat the above actions in reverse. Place the tray on the top of the tray rack, then successively pick up the pressing plate and the wafer, place the wafer in the wafer bin, place the pressing plate on the pressing plate rack, and place the tray on the tray rack to complete the automatic electroplating operation of the wafer.

[0138] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0139] The above content is only to illustrate the technical idea of the present utility model, and the protection scope of the present utility model cannot be limited thereby. Any modification made on the basis of the technical solution according to the technical idea proposed by the present utility model falls within the protection scope of the claims of the present utility model.

Claims

1. A pot control device for a vacuum evaporation machine, characterized in that: It includes a fixed shaft, a connecting rod structure, a base plate and a rotating mechanism; The fixed shaft sleeve is arranged at the center of the base plate, and a plurality of connecting rod structures are arranged around the fixed shaft as the center circumference, one end of the connecting rod structure is connected to the fixed shaft through an opening and closing mechanism, a locking block is arranged at the other end of the connecting rod structure, the pot tripod is arranged on the top of the locking block, and the plurality of locking blocks circumferentially lock the pot tripod under the action of the connecting rod structure; The rotating mechanism includes a shaft sleeve and a gear transmission device; The shaft sleeve is sleeved on the fixed shaft and at the bottom of the base plate. The base plate is fixedly connected to the shaft sleeve, and the shaft sleeve is connected to the gear transmission device.

2. The pot control device of a vacuum evaporation machine according to claim 1, characterized in that: The connecting rod structure comprises an articulated seat, a connecting rod, a crank arm and a sliding seat; The hinge seat is fixed on the base plate and located outside the fixed axis, the turning point of the crank arm is rotatably connected to the upper end of the hinge seat, the upper end of the crank arm is connected to the locking mechanism, the lower end of the crank arm is hinged to one end of the connecting rod, the other end of the connecting rod is connected to the sliding seat, the sliding seat is installed on the base plate, and the locking block is arranged on the top of the sliding seat.

3. The pot control device of a vacuum evaporation machine according to claim 2, characterized in that: The engaging mechanism comprises an adjusting ring and a driving device; The adjusting ring is sleeved on the upper end of the fixed shaft and connected to the driving device. The adjusting ring is provided with an annular groove. The end of the upper end of the crank arm is slidably connected to the annular groove. The up and down movement of the adjusting ring can make the radial reciprocating movement of the sliding seat fixed shaft.

4. The pot control device of a vacuum evaporation machine according to claim 3, characterized in that: A ball is arranged at the end of the crank arm, and the ball is rotatably arranged in the annular groove.

5. The pot control device of a vacuum evaporation machine according to claim 1, characterized in that: The gear transmission device comprises a supporting ring sleeve and a motor; the supporting ring sleeve is sleeved on the fixed shaft and connected to the shaft sleeve, and the motor is meshed with the supporting ring sleeve.

6. The pot control device of a vacuum evaporation machine according to claim 1, characterized in that: The top of the locking block is provided with an arc-shaped locking portion.

7. The pot control device of a vacuum evaporation machine according to claim 1, characterized in that: An image acquisition device is arranged on the fixed shaft for acquiring images of the pot tray holes.

Images