Jig for chemical electrolytic polishing auxiliary cathode of semiconductor

Abstract

The utility model relates to the technical field of semiconductor electrolysis jigs, and discloses a jig for a semiconductor chemical electrolytic polishing auxiliary cathode, which comprises a tubular workpiece body, a titanium alloy anode hanger, an assembly bolt and an extension connecting tube head mounted on the surface of the tubular workpiece body, and a glue layer is coated in the middle of one side of the titanium alloy anode hanger. A main cathode is arranged in the pipe workpiece body in a sleeved mode, and an assembling threaded hole aligned with the extending connecting pipe head is formed in the surface of the main cathode. According to the utility model, the main cathode, the branch cathode, the anode hanging point assembly, the titanium alloy anode hanger and the assembly bolt form the jig, and in the subsequent chemical electrolytic polishing process of the pipe workpiece body, the jig can be used for additionally arranging the auxiliary cathode in the pipe workpiece body, fixing the auxiliary cathode in a pipeline and connecting the auxiliary cathode with the cathode; and the internal current of the pipeline is increased by additionally arranging the cathode in the pipeline, so that the electrolytic polishing efficiency and quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor electrolysis fixtures, in particular to a fixture for an auxiliary cathode in semiconductor chemical electrolytic polishing. Background Technique

[0002] At present, for semiconductor gas transportation pipelines, the pipe walls are thin and prone to deformation. Therefore, most pipeline materials are made of stainless steel products such as 304 or 316. They have high hardness and good mechanical properties, excellent hot working properties such as stamping, bending, and welding, and no heat treatment hardening phenomenon (operating temperature range -196°C to 800°C), and have excellent corrosion resistance, micro-magnetism or even non-magnetism, which has little impact on the application and performance of equipment.

[0003] As a channel for transporting gas, in order to reduce the friction inside the pipeline and improve the gas transportation efficiency, choosing a relatively smooth and flat pipeline wall and reducing the pipe wall roughness is the most effective and direct method. However, due to the high strength and hardness of the material and the uneven thickness of the pipeline, before specific use, chemical electrolytic polishing surface treatment is still required. However, when the product is electrolytically polished, since the cathode plates are externally placed on both sides of the liquid medicine tank, the current inside the pipe is small and cannot reach the quality after normal electrolytic polishing. If conventional electrolytic polishing is still used, due to the thermal effect of the current, too long conduction time may cause the workpiece to be burned, resulting in energy waste and an increase in the defective processing rate of the workpiece. Content of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a fixture for an auxiliary cathode in semiconductor chemical electrolytic polishing, which solves the problems raised in the above background technique.

[0005] The utility model provides the following technical solution: A fixture for an auxiliary cathode in semiconductor chemical electrolytic polishing, including a pipe-shaped workpiece body, a titanium alloy anode hanger, assembly bolts, an extended connecting pipe head installed on the surface of the pipe-shaped workpiece body. The middle part on one side of the titanium alloy anode hanger is coated with a glue layer. A main cathode is sleeved inside the pipe-shaped workpiece body. Assembly threaded holes aligned with the extended connecting pipe head are opened on the surface of the main cathode, and a branch cathode sleeved inside the extended connecting pipe head is threadedly connected in the assembly threaded holes.

[0006] Limit threaded holes are opened on the inner sides of both ends of the main cathode. An anode hanging point assembly is arranged between one end of the main cathode and one end of the pipe-shaped workpiece body. One end of the assembly bolt penetrates through the glue layer and the middle structure on one side of the titanium alloy anode hanger and is threadedly connected in the limit threaded hole at the other end of the main cathode.

[0007] The anode hanging point assembly comprises a connecting rod, a nut and an insulating sleeve. The insulating sleeve is sleeved in a port at one end of the tube workpiece body and is fitted and connected to the end face of one end of the main cathode. One end of the connecting rod is threadedly connected in a limiting threaded hole at one end of the main cathode, and the other end of the connecting rod passes through the middle of the insulating sleeve and extends to the outside of one end of the tube workpiece body. The nut is threadedly connected to the surface of the other end of the connecting rod and is fitted and connected to the side of one side of the insulating sleeve.

[0008] The insulating sleeve is provided with a long groove inside which is engaged with the connecting rod, so that the insulating sleeve has the conditions for displacement adjustment, and the edges and corners of the insulating sleeve are all set to a rounded structure to avoid scratching the workpiece during assembly.

[0009] Preferably, a clearance groove is provided on the inner side of one end of the branch cathode away from the tube workpiece body, and an adjustment plate is provided on the inner side of the clearance groove through a pin sleeve. The adjustment plate can reciprocate to form the clearance groove or completely accommodate the sleeve under the support of the pin shaft, and the clearance groove is used as a clearance and accommodation space, so that the adjustment plate can form an L-shaped structure with the branch cathode, which is convenient for the operator to apply force and twist.

[0010] The surface of one end of the adjustment plate is adhesively connected with a rubber pad which is fitted with the inner wall of the clearance groove, so as to improve the stability of the adjustment plate when being accommodated in the clearance groove. The adjustment plate and the pin shaft are both made of non-conductive materials.

[0011] Preferably, the branch cathode is fixedly connected with a component threaded rod on the end face away from the tube workpiece body, and an assembly threaded hole is opened in one end of the branch cathode threaded connection inside the main cathode. The assembly threaded hole can be threadedly connected with the component threaded rod, and the depth value of the assembly threaded hole is greater than the length value of the component threaded rod, thereby ensuring a tight connection effect.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] 1. The utility model is provided with a jig composed of a main cathode, a branch cathode, an anode hanging point assembly, a titanium alloy anode hanger, and an assembly bolt. In the subsequent chemical electrolytic polishing process of the pipe workpiece body, the jig can be used to install an auxiliary cathode in the pipe workpiece body, fix it inside the pipe and connect it to the cathode. By adding a cathode to the pipe, the internal current of the pipe is increased, thereby improving the efficiency and quality of electrolytic polishing.

[0014] 2. The jig provided in the utility model, wherein the main cathode and branch cathode inside thereof are matched with the pipe workpiece body and the extended connecting pipe head during the chemical electrolytic polishing process, can ensure the quality of the product, make the inside of the pipe fully contact the current, and ensure the effect of chemical electrolytic polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the front view schematic diagram of the structure of the present utility model;

[0016] Figure 2 is the left view schematic diagram of the structure of the present utility model;

[0017] Figure 3 is the top view schematic diagram of the main cathode of the structure of the present utility model;

[0018] Figure 4 is the enlarged schematic diagram of the branch cathode of the structure of the present utility model;

[0019] Figure 5 is the front view schematic diagram of the adjusting plate of the structure of the present utility model;

[0020] Figure 6 is the unfolded schematic diagram of the adjusting plate of the structure of the present utility model;

[0021] Figure 7 is the cross-sectional view schematic diagram of the assembled threaded hole of the structure of the present utility model;

[0022] Figure 8 is the enlarged schematic diagram of the relief groove of the structure of the present utility model.

[0023] In the figure: 1. Tube workpiece body; 2. Extended connecting pipe head; 3. Titanium alloy anode hanger; 4. Glue layer; 5. Main cathode; 6. Branch cathode; 7. Assembly bolt; 8. Connecting rod; 9. Nut; 10. Insulating sleeve plate; 11. Composed threaded rod; 12. Assembled threaded hole; 13. Relief groove; 14. Adjusting plate. Specific embodiments

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0025] Embodiment 1

[0026] Please refer to Figure 1-4, A fixture for a semiconductor chemical electrolytic polishing auxiliary cathode, comprising a tubular workpiece body 1, a titanium alloy anode hanger 3, assembly bolts 7, an extended connecting pipe head 2 installed on the surface of the tubular workpiece body 1, a glue layer 4 covering the middle part on one side of the titanium alloy anode hanger 3, a main cathode 5 is sleeved inside the tubular workpiece body 1, an assembly threaded hole aligned with the extended connecting pipe head 2 is opened on the surface of the main cathode 5, and a branch cathode 6 sleeved inside the extended connecting pipe head 2 is threadedly connected in the assembly threaded hole. Limiting threaded holes are opened on the inner sides of both ends of the main cathode 5. An anode hanging point assembly is arranged between one end of the main cathode 5 and one end of the tubular workpiece body 1. One end of the assembly bolt 7 penetrates through the glue layer 4, the middle structure on one side of the titanium alloy anode hanger 3 and is threadedly connected in the limiting threaded hole at the other end of the main cathode 5;

[0027] The anode hanging point assembly includes a connecting rod 8, a nut 9, and an insulating sleeve plate 10. The insulating sleeve plate 10 is sleeved inside the port at one end of the tubular workpiece body 1 and is adhesively connected to the end face of one end of the main cathode 5. One end of the connecting rod 8 is threadedly connected in the limiting threaded hole at one end of the main cathode 5, and the other end of the connecting rod 8 penetrates through the middle of the insulating sleeve plate 10 and extends to the outside of one end of the tubular workpiece body 1. The nut 9 is threadedly connected to the surface of the other end of the connecting rod 8 and is adhesively connected to the side surface on one side of the insulating sleeve plate 10. A long strip groove for clamping the connecting rod 8 is opened inside the insulating sleeve plate 10, so that the insulating sleeve plate 10 has the use condition of displacement adjustment, and the corners of the insulating sleeve plate 10 are all set as rounded corner structures to avoid scratching the workpiece during assembly. The number of nuts 9 is two and they are both threadedly connected to the surface of the other end of the connecting rod 8 to ensure the stability of the locking connection and reduce the probability of the nut 9 slipping and loosening.

[0028] Preferably, a relief groove 13 is opened on the inner side of the end of the branch cathode 6 far from the tubular workpiece body 1. An adjusting plate 14 is sleeved inside the relief groove 13 through a pin shaft. The adjusting plate 14 can rotate back and forth out of the relief groove 13 or be completely received and sleeved under the support of the pin shaft. Using the relief groove 13 as the relief and receiving space, the adjusting plate 14 can form an L-shaped structure with the branch cathode 6, which is convenient for the operator to apply force and twist.

[0029] Preferably, a rubber pad adhesively connected to the surface of one end of the adjusting plate 14 and fittingly connected to the inner wall of the relief groove 13 is provided to improve the stability of the adjusting plate 14 when it is received and sleeved inside the relief groove 13. The adjusting plate 14 and the pin shaft are both made of non-conductive materials.

[0030] Preferably, a component threaded rod 11 is fixedly connected to the end face of the end of the branch cathode 6 far from the tubular workpiece body 1. A fitting threaded hole 12 is opened inside the end of the branch cathode 6 threadedly connected inside the main cathode 5. The fitting threaded hole 12 can be threadedly connected to the component threaded rod 11, and the depth value of the fitting threaded hole 12 is greater than the length value of the component threaded rod 11 to ensure the tight connection effect.

[0031] Working principle: When in use, the main cathode 5 is sleeved inside the tube workpiece body 1. Then, the insulating sleeve plate 10 is sleeved outside one end of the connecting rod 8 and is movably connected to the inner wall of the port at one end of the tube workpiece body 1. Then, two nuts 9 are threadedly connected to the surface of one end of the connecting rod 8, thereby pressing the insulating sleeve plate 10 to make it closely fit the inner wall of the port at one end of the tube workpiece body 1;

[0032] Next, the other end of the main cathode 5 is assembled with the titanium alloy anode hanger 3 by using the assembly bolt 7. After completion, one end of the branch cathode 6 penetrates through the corresponding extended connection pipe head 2 and is threadedly connected to the corresponding assembly threaded hole on the surface of the main cathode 5. Thus, during the subsequent electrolytic polishing process, the current inside the tube workpiece body 1, the extended connection pipe head 2, etc. can reach the quality after normal electrolytic polishing, ensuring the treatment effect.

[0033] Embodiment 2

[0034] Please refer to Figure 1-8 , a fixture for a semiconductor chemical electrolytic polishing auxiliary cathode, including a tube workpiece body 1, a titanium alloy anode hanger 3, an assembly bolt 7, an extended connection pipe head 2 installed on the surface of the tube workpiece body 1, and a glue layer 4 is coated in the middle on one side of the titanium alloy anode hanger 3 to prevent the air stirring airflow from interfering with the workpiece and avoid the phenomenon of short circuit caused by the connection of the anode and cathode. The main cathode 5 is sleeved inside the tube workpiece body 1. Assembly threaded holes aligned with the extended connection pipe head 2 are opened on the surface of the main cathode 5, and the branch cathode 6 sleeved inside the extended connection pipe head 2 is threadedly connected in the assembly threaded holes. Limiting threaded holes are opened on the inner sides of both ends of the main cathode 5. An anode hanging point assembly is arranged between one end of the main cathode 5 and one end of the tube workpiece body 1. One end of the assembly bolt 7 penetrates through the glue layer 4, the middle structure on one side of the titanium alloy anode hanger 3 and is threadedly connected in the limiting threaded hole at the other end of the main cathode 5;

[0035] The anode hanging point assembly includes a connecting rod 8, nuts 9, and an insulating sleeve plate 10. The insulating sleeve plate 10 is sleeved inside the port at one end of the tube workpiece body 1 and is in fit connection with the end face of one end of the main cathode 5. One end of the connecting rod 8 is threadedly connected in the limiting threaded hole at one end of the main cathode 5, and the other end of the connecting rod 8 penetrates through the middle of the insulating sleeve plate 10 and extends to the outside of one end of the tube workpiece body 1. The nut 9 is threadedly connected to the surface of the other end of the connecting rod 8 and is in fit connection with the side face on one side of the insulating sleeve plate 10. A long strip groove for clamping the connecting rod 8 is opened inside the insulating sleeve plate 10, enabling the insulating sleeve plate 10 to have the condition of displacement adjustment, and the corners of the insulating sleeve plate 10 are all set as rounded corner structures to avoid scratching the workpiece during assembly;

[0036] One end of the branch cathode 6 away from the pipe workpiece body 1 is provided with a relief groove 13 inside. An adjusting plate 14 is sleeved on the inner side of the relief groove 13 through a pin shaft. The adjusting plate 14 can rotate reciprocally out of the relief groove 13 or be completely received and sleeved under the support of the pin shaft. Using the relief groove 13 as the relief and receiving space, the adjusting plate 14 can form an L-shaped structure with the branch cathode 6, facilitating the operator to apply force and twist. A rubber pad that fits the inner wall of the relief groove 13 is adhesively connected to the surface of one end of the adjusting plate 14, improving the stability of the adjusting plate 14 when it is received and sleeved inside the relief groove 13. The adjusting plate 14 and the pin shaft are both made of non-conductive materials. One end face of the branch cathode 6 away from the pipe workpiece body 1 is fixedly connected with a component threaded rod 11. A fitting threaded hole 12 is provided inside one end of the branch cathode 6 that is threadedly connected inside the main cathode 5. The fitting threaded hole 12 can be threadedly connected with the component threaded rod 11, and the depth value of the fitting threaded hole 12 is greater than the length value of the component threaded rod 11 to ensure the tight connection effect.

[0037] Working principle: During use, the main cathode 5 is sleeved inside the pipe workpiece body 1. Then, the insulating sleeve plate 10 is sleeved outside one end of the connecting rod 8 and is movably connected to the inner wall of the port at one end of the pipe workpiece body 1. Then, two nuts 9 are threadedly connected to the surface of one end of the connecting rod 8, thereby pressing the insulating sleeve plate 10 to make it closely fit the inner wall of the port at one end of the pipe workpiece body 1. Next, the other end of the main cathode 5 is assembled with the titanium alloy anode hanger 3 using the assembly bolt 7. After completion, one end of the branch cathode 6 passes through the corresponding extended connection pipe head 2 and is threadedly connected to the corresponding assembly threaded hole on the surface of the main cathode 5. Thus, during the subsequent electrolytic polishing process, the current inside the pipe workpiece body 1, the extended connection pipe head 2, etc. can reach the quality after normal electrolytic polishing, ensuring the treatment effect.

[0038] During the subsequent process of twisting and disassembling the branch cathode 6, the adjusting plate 14 can be rotated out of the relief groove 13, making the adjusting plate 14 and the branch cathode 6 form an L-shaped structure, facilitating the user to apply force and improving the assembly operation efficiency.

[0039] If the length of the branch cathode 6 cannot meet the usage requirements, multiple branch cathodes 6 provided with component threaded rods 11 and fitting threaded holes 12 can be assembled and used. Specifically, the fitting threaded hole 12 provided on one branch cathode 6 is threadedly connected to the component threaded rod 11 on another branch cathode 6, thereby forming a complete cathode rod body from the two branch cathodes 6.

[0040] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. At the same time, in the drawings of the present utility model, the filling patterns are only for differentiating the layers and are not subject to any other limitations.

[0041] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model, and the scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A semiconductor chemical electrolytic polishing auxiliary cathode jig, comprising a tube workpiece body (1), a titanium alloy anode hanger (3), an assembly bolt (7), an extended connecting pipe head (2) mounted on the surface of the tube workpiece body (1), and a glue layer (4) coated on the middle of one side of the titanium alloy anode hanger (3), characterized in that: A main cathode (5) is sleeved inside the tube workpiece body (1), an assembly threaded hole aligned with the extended connection pipe head (2) is opened on the surface of the main cathode (5), and a branch cathode (6) sleeved inside the extended connection pipe head (2) is threadedly connected inside the assembly threaded hole; Limiting threaded holes are provided on the inner sides of both ends of the main cathode (5); an anode hanging point assembly is provided between one end of the main cathode (5) and one end of the tube workpiece body (1); one end of the assembly bolt (7) penetrates the glue layer (4) and the middle structure of one side of the titanium alloy anode hanger (3) and is threadedly connected to the limiting threaded hole at the other end of the main cathode (5).

2. A semiconductor chemical electrolytic polishing auxiliary cathode jig according to claim 1, characterized in that: The anode hanging point assembly comprises a connecting rod (8), a nut (9), and an insulating sleeve (10); the insulating sleeve (10) is sleeved into a port at one end of the tube workpiece body (1) and is closely connected to the end surface of one end of the main cathode (5); one end of the connecting rod (8) is threadedly connected to a limiting threaded hole at one end of the main cathode (5); the other end of the connecting rod (8) passes through the middle of the insulating sleeve (10) and extends to the outside of one end of the tube workpiece body (1); the nut (9) is threadedly connected to the surface of the other end of the connecting rod (8) and is closely connected to the side surface of one side of the insulating sleeve (10).

3. A semiconductor chemical electrolytic polishing auxiliary cathode jig according to claim 2, characterized in that: The insulating sleeve (10) is provided with a long groove inside for clamping with the connecting rod (8), and the corners of the insulating sleeve (10) are all configured as rounded structures.

4. The semiconductor chemical electrolytic polishing auxiliary cathode jig according to claim 1, characterized in that: A clearance groove (13) is provided on the inner side of one end of the branch cathode (6) away from the tube workpiece body (1), and an adjustment plate (14) is sleeved on the inner side of the clearance groove (13) via a pin shaft. The adjustment plate (14) can be reciprocated and rotated out of the clearance groove (13) or completely accommodated in the sleeve under the support of the pin shaft.

5. The semiconductor chemical electrolytic polishing auxiliary cathode jig according to claim 4, characterized in that: A rubber pad that is bonded and connected to the inner wall of the clearance groove (13) is glued on the surface of one end of the adjustment plate (14), and the adjustment plate (14) and the pin shaft are both made of non-conductive materials.

6. The semiconductor chemical electrolytic polishing auxiliary cathode jig according to claim 1, characterized in that: The end face of the branch cathode (6) away from the tube workpiece body (1) is fixedly connected to a component threaded rod (11); the end of the branch cathode (6) threadedly connected to the inside of the main cathode (5) is provided with an assembly threaded hole (12); the assembly threaded hole (12) can be threadedly connected to the component threaded rod (11), and the depth of the assembly threaded hole (12) is greater than the length of the component threaded rod (11).

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