Elastic sheet type force control swing arm rotation adjusting structure and die bonder

Abstract

The utility model is suitable for the technical field of die bonding equipment, and provides an elastic sheet type force control swing arm rotation adjusting structure, which comprises a rotating seat, a swing arm assembly, a driving unit and an elastic structure. The middle portion of the swing arm assembly is connected to the rotating base through an elastic structure, and the power end of the swing arm assembly can be driven by the driving unit to reciprocate. The elastic structure can generate elastic deformation and can limit the position of the middle part of the swing arm assembly, so that the swing arm assembly can swing around the second axis by taking the elastic structure as a support, the die bonding end of the swing arm assembly can also reciprocate, and meanwhile, the whole swing arm assembly can also move around the first axis along with the rotation of the rotating seat. Compared with a swing arm structure in the prior art, the middle portion of the swing arm assembly is connected to the rotating base through the elastic structure, overall parallel movement of the swing arm assembly is converted into swing of the swing arm assembly, the movement amplitude of the swing arm assembly in the working process is reduced, and the working efficiency of the swing arm assembly is also improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of die bonding equipment, and particularly relates to a shrapnel type force control swing arm rotation adjustment structure and a die bonder. Background Art

[0002] A die bonder, also known as a die loader, a wafer bonding machine or a chip bonder, is a key device used to fix crystals during the semiconductor packaging process, and is widely used in fields such as LED (Light-Emitting Diode) packaging and semiconductor packaging. Among them, the swing arm structure is an important part of the die bonder. During the working process of the die bonder, high-frequency reciprocating motion needs to be carried out through the swing arm structure to realize crystal picking and crystal placing. However, most of the existing swing arm structures have the problems of large movement amplitude and low working efficiency. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a shrapnel type force control swing arm rotation adjustment structure and a die bonder, aiming to solve the technical problems of large movement amplitude and low working efficiency existing in the existing swing arm structure.

[0004] The utility model is implemented as follows. In the first aspect, a shrapnel type force control swing arm rotation adjustment structure is provided, including:

[0005] A rotating seat having a degree of freedom of self-rotation about a first axis;

[0006] A swing arm assembly having a power end and a die bonding end arranged oppositely, and the swing arm assembly further has an intermediate part located between the power end and the die bonding end;

[0007] A driving unit is arranged on the rotating seat, and a driving end of the driving unit is connected to the power end of the swing arm assembly, and the driving unit is used to drive the power end of the swing arm assembly to reciprocate;

[0008] An elastic structure is connected between the rotating seat and the intermediate part, and can undergo elastic deformation when subjected to an external force, and is used to make the swing arm assembly reciprocally swing around a second axis with the elastic structure as a support when the power end moves, and the second axis is arranged at an angle to the first axis.

[0009] In an optional embodiment, the elastic structure includes a first elastic sheet, the first elastic sheet is parallel to the second axis, and one end of the first elastic sheet is fixedly attached to the rotating seat, and the other end is fixedly attached to the intermediate part.

[0010] In an alternative embodiment, the elastic structure further includes a second elastic sheet, which is also parallel to the second axis. One end of the second elastic sheet is fixedly attached to the rotating base, and the other end is fixedly attached to the middle part. The first elastic sheet and the second elastic sheet are arranged along the direction of the second axis, and the projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect with each other.

[0011] In an alternative embodiment, a nozzle assembly is rotatably provided at the die-bonding end of the swing arm assembly, and a rotating unit for driving the nozzle assembly to rotate is further provided on the rotating base. A transmission structure is further provided between the driving end of the rotating unit and the nozzle assembly, and the driving end of the rotating unit intersects with the second axis.

[0012] In an alternative embodiment, the number of the elastic structures is two, and the two elastic structures are spaced apart along a direction parallel to the second axis. The driving end of the rotating unit is located in the region between two adjacent elastic structures.

[0013] In an alternative embodiment, the swing arm assembly further has an avoidance structure for accommodating the transmission structure. At least part of the nozzle assembly is located within the avoidance structure, and at least part of the driving end of the rotating unit is also located within the avoidance structure. The avoidance structure is located in the region between the two elastic structures.

[0014] In an alternative embodiment, the driving unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly has a magnetic part, and the stator assembly is fixedly installed on the rotating base. The mover assembly has a coil part, and the mover assembly is movably arranged on the stator assembly. At least part of the mover assembly is connected to the power end of the swing arm assembly. After the coil part is energized, the mover assembly can drive the power end of the swing arm assembly to reciprocate under the action of the magnetic part.

[0015] In an alternative embodiment, an elastic safety member is further provided between the rotating base and the swing arm assembly, and the elastic safety member is used to apply a force to the swing arm assembly to lift the die-bonding end upward after the voice coil motor is powered off.

[0016] In an alternative embodiment, the swing arm assembly includes a swing arm mounting seat and a swing arm body. At least part of the swing arm mounting seat is movably connected to the rotating base through the elastic structure. The first end of the swing arm mounting seat is connected to the driving end of the driving unit, the second end of the swing arm mounting seat is connected to the first end of the swing arm body, and the second end of the swing arm body extends away from the swing arm mounting seat.

[0017] In a second aspect, a die bonder is provided, which includes the elastic sheet type force control swing arm rotation adjustment structure described in any one of the above.

[0018] The technical effect of the present utility model compared with the prior art is as follows: The middle part of the swing arm assembly is connected to the rotating seat through an elastic structure, and a driving unit is further provided on the rotating seat, and the driving end of the driving unit is connected to the power end of the swing arm assembly, and the power end of the swing arm assembly can be driven to reciprocate by the driving unit. When the power end of the swing arm assembly reciprocates under the action of the driving unit, the elastic structure can undergo elastic deformation, and the elastic deformation will also limit the position of the middle part of the swing arm assembly, so that the swing arm assembly can swing around the second axis with the elastic structure as a support, and further the die bonding end of the swing arm assembly can also reciprocate, and at the same time, the whole of the swing arm assembly can also move around the first axis along with the rotation of the rotating seat. Compared with the swing arm structure in the prior art, the middle part of the swing arm assembly is connected to the rotating seat through an elastic structure, and then the driving unit drives the power end of the swing arm assembly to reciprocate to achieve the purpose of moving the die bonding end of the swing arm assembly. When working, the parallel movement of the whole swing arm assembly can be converted into the swing of the swing arm assembly, reducing the movement amplitude of the swing arm assembly during the crystal picking and placing operations, improving the working efficiency of the swing arm assembly for crystal picking and placing, and also improving the working accuracy of crystal picking and placing.

[0019] It can be understood that the beneficial effects of the above second aspect can refer to the relevant descriptions in the above first aspect and will not be elaborated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments of the present utility model or the description of the prior art. Obviously, the following described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0021] Figure 1 is a schematic diagram of the elastic sheet type force control swing arm rotation adjustment structure provided by the embodiment of the present utility model;

[0022] Figure 2 is a schematic diagram of the structure of the elastic structure adopted by the embodiment of the present utility model;

[0023] Figure 3 is a schematic diagram of the structure of the swing arm assembly and the rotating unit adopted by the embodiment of the present utility model;

[0024] Figure 4 is Figure 3 the enlarged structural schematic diagram at A in

[0025] Figure 5 It is a schematic structural diagram of the drive unit adopted in the embodiment of the present utility model.

[0026] Explanation of reference numerals:

[0027] 1. Rotating seat; 2. Swing arm assembly; 201. Swing arm mounting seat; 202. Swing arm body; 203. Avoidance structure; 204. Protruding block; 3. Drive unit; 301. Stator assembly; 302. Rotor assembly; 4. Elastic structure; 401. First elastic sheet; 402. Second elastic sheet; 5. Nozzle assembly; 6. Rotating unit; 601. Driving end of the rotating unit; 7. Transmission structure; 701. First pulley; 702. Second pulley; 703. Transmission belt; 8. Elastic safety member; 9. First pressing block; 10. Second pressing block. Detailed implementation manners

[0028] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model, and should not be construed as a limitation of the present utility model.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0030] In this embodiment, as shown in Figure 1 : Among them, the first axis is in the direction of the X line in the figure, the second axis is in the direction of the Y line in the figure, and the position of the second axis is not completely fixed and unchanged.

[0031] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality" means two or more, unless otherwise specifically defined.

[0032] In the present utility model, unless otherwise clearly defined and limited, terms such as "installation", "connection", "linkage", "fixation", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0034] Please refer to Figures 1 to 5 As shown, in an embodiment of the present utility model, in a first aspect, a shrapnel type force control swing arm rotation adjustment structure is provided, which includes a rotating seat 1, a swing arm assembly 2, a driving unit 3, and an elastic structure 4. The rotating seat 1 has a degree of freedom of self-rotation about a first axis. The swing arm assembly 2 has a power end and a die bonding end arranged oppositely, and the swing arm assembly 2 further has an intermediate portion between the power end and the die bonding end. The driving unit 3 is arranged on the rotating seat 1, and the driving end of the driving unit 3 is connected to the power end of the swing arm assembly 2. The driving unit 3 is used to drive the power end of the swing arm assembly 2 to reciprocate. The elastic structure 4 is connected between the rotating seat 1 and the intermediate portion of the swing arm assembly 2, and the elastic structure 4 can elastically deform when subjected to an external force. The elastic structure 4 is used to make the swing arm assembly 2 reciprocally swing about a second axis with the elastic structure 4 as a support when the power end of the swing arm assembly 2 moves, and the second axis is arranged at an angle to the first axis.

[0035] Specifically, the rotating seat 1 refers to a supporting component with a certain volume. The shape of the rotating seat 1 can be a block shape, a column shape, a plate shape, etc. The rotating seat 1 has a degree of freedom of self-rotation about a first axis. The rotating seat 1 can be connected to a power device on a die bonding device such as a motor and rotate about the first axis under the drive of the power device, where the first axis is usually arranged in the vertical direction. The swing arm assembly 2 refers to a component with a certain length. The swing arm assembly 2 can be rod-shaped, column-shaped, etc., and the swing arm assembly 2 can also be composed of a combination of multiple shapes. The power end and the die bonding end respectively refer to two end regions of the swing arm assembly 2. The power end and the die bonding end are arranged oppositely, and the intermediate portion refers to other regions of the swing arm assembly 2 except for the two ends.

[0036] The driving unit 3 refers to a power component that can drive an object to move along a straight line or an arc. The driving unit 3 can be a cylinder, an electric push rod, or a voice coil motor, etc. The driving end of the driving unit 3 refers to the part of the driving unit 3 that can move relative to the main body. The main body of the driving unit 3 is usually set on a part that does not need to move, and the driving end of the driving unit 3 can be connected to a part that needs to move.

[0037] The elastic structure 4 refers to a component or assembly that can be elastically deformed when subjected to force. The elastic structure 4 can be a separate component or a combination of multiple components. The second axis refers to a virtual straight line, not a real structure. The second axis is generally set in the horizontal direction. In this case, the angle between the second axis and the first axis is generally a right angle. The second axis can be located on the swing arm assembly 2 and penetrate the swing arm assembly 2, or it can be located in the outer area of ​​the swing arm assembly 2.

[0038] The spring-type force-controlled swing arm rotation adjustment structure provided by the embodiment of the utility model, the middle part of the swing arm assembly 2 is connected to the rotating seat 1 through the elastic structure 4, and the rotating seat 1 is also provided with a driving unit 3, and the driving end of the driving unit 3 is connected to the power end of the swing arm assembly 2, and the power end of the swing arm assembly 2 can be driven to reciprocate by the driving unit 3. When the power end of the swing arm assembly 2 reciprocates under the action of the driving unit 3, the elastic structure 4 can be elastically deformed, and the position of the middle part of the swing arm assembly 2 can be limited at the same time, so that the swing arm assembly 2 can swing around the second axis with the elastic structure 4 as the support, and then the solid crystal end of the swing arm assembly 2 can also reciprocate. At the same time, the whole of the swing arm assembly 2 can also move around the first axis as the rotating seat 1 rotates. Compared with the swing arm structure in the prior art, the middle part of the swing arm assembly 2 is connected to the rotating seat 1 through the elastic structure 4, and then the power end of the swing arm assembly 2 is driven to reciprocate by the driving unit 3, so as to achieve the purpose of moving the solid crystal end of the swing arm assembly 2. When working, the overall parallel movement of the swing arm assembly 2 can be converted into the swinging of the swing arm assembly 2, which reduces the movement amplitude of the swing arm assembly 2 during crystal retrieval and crystal placement operations, improves the working efficiency of the swing arm assembly 2 in crystal retrieval and crystal placement, and also improves the working accuracy of the swing arm assembly 2 in crystal retrieval and crystal placement.

[0039] In addition, when the swing arm assembly 2 is installed, in addition to the power end of the swing arm assembly 2 being connected to the drive end of the drive unit 3, the middle part of the swing arm assembly 2 can also be connected to the rotating seat 1 through the elastic structure 4, so that the swing arm assembly 2 can have multiple connection points for installation, which can avoid excessive shaking of the swing arm assembly 2 during movement and after the movement stops, thereby improving the stability of the installation of the swing arm assembly 2.

[0040] In one embodiment, see Figure 1 and Figure 3, the number of the elastic structures 4 can be multiple groups. The multiple groups of elastic structures 4 can be arranged at intervals in a direction parallel to the second axis, which can enable the middle part of the swing arm assembly 2 and the rotating seat 1 to have multiple connection points in the direction parallel to the second axis, making the connection between the swing arm assembly 2 and the rotating seat 1 more firm and improving the stability of the installation of the swing arm assembly 2.

[0041] In one embodiment, please refer to Figure 2 and Figure 4 , the elastic structure 4 includes a first elastic sheet 401. The first elastic sheet 401 is parallel to the second axis, and one end of the first elastic sheet 401 is fixedly attached to the rotating seat 1, and the other end is fixedly attached to the middle part. Specifically, the first elastic sheet 401 refers to a sheet-like or plate-like component that can undergo elastic deformation when subjected to an external force. The main elastic deformation mode of the first elastic sheet 401 is bending. The first elastic sheet 401 can be made of a metal material, and the first elastic sheet 401 can also be a non-metal material such as plastic. The number of the first elastic sheets 401 can be one, and the number of the first elastic sheets 401 can also be multiple. When there are multiple first elastic sheets 401, the multiple first elastic sheets 401 can be arranged in a direction parallel to the second axis. During installation, one end of the first elastic sheet 401 can be fixedly attached to the rotating seat 1, and the other end can be fixedly attached to the middle part. And the first elastic sheet 401 is arranged parallel to the second axis. While connecting the swing arm assembly 2 and the rotating seat 1 through the first elastic sheet 401, when the power end of the swing arm assembly 2 is pushed by the driving end of the driving unit 3, through the deformation of the first elastic sheet 401, the swing arm assembly 2 can swing around the second axis with the first elastic sheet 401 as the support. The elastic structure 4 adopting the first elastic sheet 401 can make the overall structure of the elastic structure 4 simpler.

[0042] In one embodiment, please refer to Figure 2 and Figure 4, the elastic structure 4 further includes a second elastic sheet 402. The second elastic sheet 402 is also parallel to the second axis. One end of the second elastic sheet 402 is fixedly attached to the rotating base 1, and the other end is fixedly attached to the middle part of the swing arm assembly 2. The first elastic sheet 401 and the second elastic sheet 402 are arranged in a direction parallel to the second axis, and the projections of the second elastic sheet 402 and the first elastic sheet 401 on a plane perpendicular to the second axis intersect with each other. Specifically, the second elastic sheet 402 refers to a sheet-like or plate-like component that can undergo elastic deformation when subjected to an external force. The main way of elastic deformation of the second elastic sheet 402 is bending. The second elastic sheet 402 can be made of metal, or can also be made of non-metal materials such as plastic. The number of the second elastic sheets 402 can be one, or can also be multiple. When there are multiple second elastic sheets 402, the multiple second elastic sheets 402 can be arranged in a direction parallel to the second axis. The second elastic sheet 402 is also parallel to the second axis. One end of the second elastic sheet 402 is fixedly attached to the rotating base 1, and the other end is fixedly attached to the middle part. By arranging the first elastic sheet 401 and the second elastic sheet 402 in a direction parallel to the second axis, and making the projections of the second elastic sheet 402 and the first elastic sheet 401 on a plane perpendicular to the second axis intersect with each other, while further enhancing the connection firmness between the swing arm assembly 2 and the rotating base 1, the rotation of the swing arm assembly 2 deviating from the second axis during swinging can be avoided, so that the swinging of the swing arm assembly 2 is more stable.

[0043] It should be noted that when the projections of the second elastic sheet 402 and the first elastic sheet 401 on a plane intersect with each other, the intersection position between the second elastic sheet 402 and the first elastic sheet 401 is the position where the second axis is located, and the second axis intersects with both the second elastic sheet 402 and the first elastic sheet 401.

[0044] In an alternative embodiment, please refer to Figure 2 , the second elastic sheet 402 and the first elastic sheet 401 are arranged perpendicular to each other. For example, when the swing arm assembly 2 can be arranged in a horizontal direction as a whole, the swing arm assembly 2 is located below the rotating base 1. At this time, the first elastic sheet 401 can be arranged in a horizontal direction. One end of the first elastic sheet 401 is fixedly attached to the bottom surface of the rotating base 1, and the other end is fixedly attached to the top surface of the swing arm assembly 2. The second elastic sheet 402 can be arranged in a vertical direction. One end of the second elastic sheet 402 is attached to the side surface of the rotating base 1, and the other end is fixedly attached to the side surface of the swing arm assembly 2. Specifically, by arranging the second elastic sheet 402 and the first elastic sheet 401 perpendicular to each other, the force on the swing arm assembly 2 during the swinging process is more uniform and always remains stable, and the installation of the swing arm assembly 2 can also be more stable and firm.

[0045] In another alternative embodiment, please refer to Figure 4, on both sides of the swing arm assembly 2 along the direction parallel to the second axis, there are also convex blocks 204 provided. On the convex blocks 204, there is an installation plane parallel to the second axis, and the installation plane can be arranged in the vertical direction. Specifically, the convex block 204 refers to a component with a certain volume. The convex block 204 can be an integral structure with the swing arm assembly 2, or the convex block 204 can be a split structure with the swing arm assembly 2. The convex block 204 can be installed on the side of the swing arm assembly 2 by means of welding, fasteners, and snap connection. When installing the second elastic piece 402, one end of the second elastic piece 402 can be fixedly attached to the side surface of the rotating seat 1 arranged in the vertical direction, and at the same time, the other end of the second elastic piece 402 can be fixedly attached to the installation plane on the convex block 204, which can make the installation of the second elastic piece 402 more convenient, and also make the installation of the second elastic piece 402 more firm and reliable.

[0046] In one embodiment, please refer to Figure 2 and Figure 4 , on the rotating seat 1, there is a first pressing block 9 for pressing the first elastic piece 401 or the second elastic piece 402. The first pressing block 9 can be fixed to the rotating seat 1 by fasteners. At least part of the first elastic piece 401 or at least part of the second elastic piece 402 is located between the first pressing block 9 and the rotating seat 1. The first elastic piece 401 or the second elastic piece 402 can be fixedly attached to the rotating seat 1 by the pressing of the first pressing block 9. At the same time, installation through holes can be provided on the first elastic piece 401 or the second elastic piece 402. When the first pressing block 9 is fixed by fasteners, the fasteners can also pass through the installation through holes on the first elastic piece 401 or the second elastic piece 402, making the fitting and fixing between the first elastic piece 401 or the second elastic piece 402 and the rotating seat 1 more firm. Similarly, on the swing arm assembly 2, there is a second pressing block for pressing the first elastic piece 401 or the second elastic piece 402. The second pressing block 10 can be fixed to the swing arm assembly 2 by fasteners. At least part of the first elastic piece 401 or at least part of the second elastic piece 402 is located between the second pressing block 10 and the swing arm assembly 2. The first elastic piece 401 or the second elastic piece 402 can be fixedly attached to the swing arm assembly 2 by the pressing of the second pressing block 10. At the same time, installation through holes can be provided on the first elastic piece 401 or the second elastic piece 402. When the second pressing block is fixed by fasteners, the fasteners can also pass through the installation through holes on the first elastic piece 401 or the second elastic piece 402, making the fitting and fixing between the first elastic piece 401 or the second elastic piece 402 and the swing arm assembly 2 more firm and reliable.

[0047] In one embodiment, please refer to Figure 1 and Figure 3, a nozzle assembly 5 is rotatably arranged at the die bonding end of the swing arm assembly 2, and a rotating unit 6 for driving the nozzle assembly 5 to rotate is further arranged on the rotating seat 1. A transmission structure 7 is further arranged between the driving end of the rotating unit 6 and the nozzle assembly 5, and the driving end of the rotating unit 6 intersects with the second axis. Specifically, the nozzle assembly 5 refers to a component for grasping wafers. Its working principle is to set a cavity with an opening on the component, connect the cavity with the pipeline of the vacuum unit, and generate negative pressure at the opening through the vacuum unit to suck the wafers. The rotating unit 6 refers to a power component that can output rotational torque. The rotating unit 6 can be a motor, a hydraulic motor, etc. The transmission structure 7 refers to a component that transmits power from one place to another. The transmission structure 7 can be a belt drive, a chain drive, or a gear drive, etc. By arranging a transmission structure 7 between the driving end of the rotating unit 6 and the nozzle assembly 5, generally, the driving end of the rotating unit 6 will be the position where one end of the transmission structure 7 is located. At this time, by arranging the driving end of the rotating unit 6 to intersect with the second axis, it can be avoided that when the swing arm assembly 2 swings around the second axis, the distance between the two ends of the transmission structure 7 changes too much, reducing the influence of the movement of the swing arm assembly 2 on the transmission structure 7. For example, when the transmission structure 7 adopts a belt drive, by arranging the driving end of the rotating unit 6 to intersect with the second axis, since the pulley of the transmission structure 7 needs to be coaxially arranged with the driving end of the rotating unit 6, one pulley of the transmission structure 7 will also be arranged at the second axis. At this time, when the swing arm assembly 2 swings around the second axis, the transmission structure 7 will not cause the tightness of the belt to change due to the swing of the swing arm assembly 2, making the swing arm assembly 2 safer to use.

[0048] In an alternative embodiment, please refer to Figure 3 , the transmission structure 7 includes a first pulley 701, a second pulley 702, and a transmission belt 703. The first pulley 701 is connected to the driving end of the rotating unit 6, and the axis of the first pulley 701 coincides with the rotation axis of the driving end of the rotating unit 6. The second pulley 702 is connected to the nozzle assembly 5, and the axis of the second pulley 702 coincides with the rotation axis of the nozzle assembly 5. The transmission belt 703 is wound around the outside of the first pulley 701 and the second pulley 702. Specifically, both the first pulley 701 and the second pulley 702 refer to wheel-shaped components with a certain volume, and the transmission belt 703 refers to an annular structure with a certain length. By winding the transmission belt 703 around the outside of the first pulley 701 and the second pulley 702, when the first pulley 701 rotates driven by the driving end of the rotating unit 6, the second pulley 702 and the nozzle assembly 5 can be driven to rotate simultaneously through the transmission belt 703, making it more convenient for the rotating unit 6 to drive the nozzle assembly 5 to rotate and making the use of the transmission structure 7 more convenient.

[0049] In an embodiment, please refer to Figure 3 AndFigure 4 , the number of the elastic structures 4 is two. The two elastic structures 4 are arranged at intervals along the second axis direction, and the driving end of the rotating unit 6 is located in the area between two adjacent elastic structures 4. Specifically, by setting two groups of elastic structures 4, and the two groups of elastic structures 4 can be arranged at intervals along the direction parallel to the second axis, multiple connection points can be provided between the middle part of the swing arm assembly 2 and the rotating base 1, making the connection between the swing arm assembly 2 and the rotating base 1 more firm. In addition, by locating the driving end of the rotating unit 6 in the area between two adjacent elastic structures 4, while ensuring that the driving end of the rotating unit 6 intersects the second axis, the volume occupied by the rotating unit 6 can also be reduced, making the structure of the swing arm assembly 2 simpler and more compact.

[0050] In one embodiment, please refer to Figure 3 , the swing arm assembly 2 further has an avoidance structure 203. The avoidance structure 203 is used to accommodate the transmission structure 7. At least part of the nozzle assembly 5 is located in the avoidance structure 203, and at least part of the driving end of the rotating unit 6 is also located in the avoidance structure 203. The avoidance structure 203 is located in the area between two elastic structures 4. Specifically, the avoidance structure 203 refers to a structure with a certain accommodation space. The avoidance structure 203 can be a groove structure or the like. The avoidance structure 203 is usually arranged along the length direction of the swing arm assembly 2. At least part of the nozzle assembly 5 can be located at one end of the avoidance structure 203, and at least part of the driving end of the rotating unit 6 extends into the other end of the avoidance structure 203, and then the rotating unit 6 is integrally arranged in the avoidance structure 203 to realize the transmission between the driving end of the rotating unit 6 and the nozzle assembly 5. By providing the avoidance structure 203 to accommodate the transmission structure 7, and at the same time locating the avoidance structure 203 in the area between two elastic structures 4, the overall structure of the swing arm assembly 2 can be made more reasonable and more concise.

[0051] In one embodiment, please refer to Figure 5, the driving unit 3 includes a voice coil motor. The voice coil motor includes a stator assembly 301 and a mover assembly 302. The stator assembly 301 has a magnetic part. The stator assembly 301 is fixedly installed on the rotating base 1. The mover assembly 302 has a coil part. The mover assembly 302 is movably arranged on the stator assembly 301, and at least part of the mover assembly 302 is connected to the power end of the swing arm assembly 2. After the coil part is energized, the mover assembly 302 can drive the power end of the swing arm assembly 2 to reciprocate under the action of the magnetic part. Specifically, the stator assembly 301 refers to a component with a certain volume. Usually, a receiving structure is arranged on the stator assembly 301, and the receiving structure can be a receiving groove, a receiving hole, etc. The magnetic part refers to a component with magnetism and capable of generating a stable magnetic field, and the magnetic part can be arranged in the receiving structure on the stator assembly 301. The mover assembly 302 also refers to a component with a certain volume, and a coil part is also arranged on the mover assembly 302. The coil part refers to a structure wound by a wire. When the voice coil motor works, the coil part can be connected to an external circuit. After the coil part is energized, a magnetic field will also be generated, and it will interact with the magnetic field generated by the magnetic part to make the mover assembly 302 move in a straight line or an arc. By changing the direction of the current passing through the coil part (such as passing through alternating current), the direction of the magnetic field on the coil part can be changed, so that the reciprocating movement of the mover assembly 302 can be realized. At the same time, at least part of the mover assembly 302 is connected to the power end of the swing arm assembly 2, and when the mover assembly 302 moves, it will also drive the power end of the swing arm assembly 2 to move together. In this embodiment, the voice coil motor is used to drive the power end of the swing arm assembly 2 instead of the servo motor. The voice coil motor has better high-frequency response characteristics and can realize high-speed reciprocating movement. It is especially suitable for short-stroke servo control with high positioning accuracy. Moreover, the voice coil motor has no intermediate transmission link, which can greatly simplify its own structure and volume, improve the compactness of the entire swing arm assembly 2, and at the same time reduce the moment of inertia of the swing arm assembly 2, improving the working efficiency and movement accuracy of the entire swing arm assembly 2 during operation.

[0052] In an alternative embodiment, please refer to Figure 1 , an installation groove is provided on the rotating base 1. The installation groove has an opening facing the swing arm assembly 2. The driving unit 3 can be installed in the installation groove, and the driving end of the driving unit 3 can extend out from the opening and be connected to the power end of the swing arm assembly 2, so that the installation of the driving unit 3 saves more space and makes the entire structure of the rotating base 1 more compact.

[0053] In an embodiment, please refer to Figure 3, an elastic safety member 8 is further provided between the rotating base 1 and the swing arm assembly 2, and the elastic safety member 8 is used to apply a force to the swing arm assembly 2 to lift the die bonding end of the swing arm assembly 2 upward after the voice coil motor is powered off. Specifically, the elastic safety member 8 refers to a component that can absorb impact force. The elastic safety member 8 can be a spring, a rubber component, polyurethane, etc. The first end of the elastic safety member 8 is connected to the rotating base 1, and the second end of the elastic safety member 8 can be connected to the area of the swing arm assembly 2 between the driving end of the driving unit 3 and the elastic structure 4, or the second end of the elastic safety member 8 can also be connected to the area of the swing arm assembly 2 between the die bonding end and the elastic structure 4. When the second end of the elastic safety member 8 is connected to the area between the driving end of the driving unit 3 and the elastic structure 4, the elastic safety member 8 can apply a downward thrust to the swing arm assembly 2, causing the die bonding end of the swing arm assembly 2 to lift upward. When the second end of the elastic safety member 8 is connected to the area between the die bonding end and the elastic structure 4, the elastic safety member 8 can apply an upward pulling force to the swing arm assembly 2, thereby causing the die bonding end of the swing arm assembly 2 to lift upward. By providing the elastic safety member 8 between the rotating base 1 and the swing arm assembly 2, the die bonding end of the swing arm assembly 2 can be lifted upward after the voice coil motor is powered off, avoiding the swing arm assembly 2 from colliding with other components on the die bonder during the rotation around the first axis, thus making the use of the swing arm assembly 2 safer.

[0054] In an alternative embodiment, please refer to Figure 3 , the elastic safety member 8 includes a spring. The first end of the elastic safety member 8 abuts against the rotating base 1, and the second end of the elastic safety member 8 abuts against the area of the swing arm assembly 2 between the driving end of the driving unit 3 and the elastic structure 4. The elastic safety member 8 is in a compressed state, and the elastic safety member 8 can apply a downward thrust to the swing arm assembly 2. Using a spring for the elastic safety member 8 can reduce the manufacturing cost of the entire device and also make the installation of the elastic safety member 8 more convenient.

[0055] In an embodiment, please refer to Figure 3The swing arm assembly 2 includes a swing arm mounting seat 201 and a swing arm body 202. At least part of the swing arm mounting seat 201 is movably connected to the rotating seat 1 through the elastic structure 4. The first end of the swing arm mounting seat 201 is connected to the driving end of the driving unit 3. The second end of the swing arm mounting seat 201 is connected to the first end of the swing arm body 202, and the second end of the swing arm body 202 extends in a direction away from the swing arm mounting seat 201. Specifically, the swing arm mounting seat 201 refers to a component with a certain volume. The swing arm mounting seat 201 can be a block, a plate, or a combination of multiple shapes. The swing arm body 202 refers to a component with a certain length. The swing arm body 202 can be columnar, rod-shaped, or block-shaped. The first end of the swing arm body 202 of the swing arm body 202 can be connected to the second end of the swing arm mounting seat 201 by means of clamping, fastener fixing, and welding. A weight reduction structure can also be provided on the swing arm body 202.

[0056] By configuring the swing arm assembly 2 as a split structure consisting of the swing arm mounting seat 201 and the swing arm body 202, the swing arm mounting seat 201 and the swing arm body 202 can be processed separately, thereby reducing the overall manufacturing cost of the swing arm assembly 2. At the same time, when the swing arm assembly 2 is installed, the swing arm mounting seat 201 is first connected to the rotating seat 1 through the elastic structure 4, and then the swing arm body 202 is installed on the second end of the swing arm mounting seat 201, so that the assembly of the swing arm assembly 2 can be faster and more convenient.

[0057] In the second aspect, a crystal bonding machine is provided, comprising any of the above-mentioned spring-type force-controlled swing arm rotation adjustment structures. When in use, the rotating seat 1 is connected to the power device on the crystal bonding machine, so that the swing arm assembly 2 can swing up and down under the action of the driving unit 3, and can also reciprocate in the horizontal direction with the rotating seat 1, so that the crystal bonding part of the swing arm assembly 2 can move in the entire three-dimensional space.

[0058] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here.

[0059] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for the purpose of explaining the principles of the present invention, and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanation here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementation methods of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A spring-type force-controlled swing arm rotation adjustment structure, characterized in that: include: A rotating seat having a degree of freedom of rotation about a first axis; A swing arm assembly, the swing arm assembly having a power end and a die-bonding end that are arranged opposite to each other, and the swing arm assembly also having a middle portion, the middle portion being between the power end and the die-bonding end; A driving unit, arranged on the rotating seat, wherein a driving end of the driving unit is connected to a power end of the swing arm assembly, and the driving unit is used to drive the power end of the swing arm assembly to reciprocate; The elastic structure is connected between the rotating seat and the middle part, and can be elastically deformed when subjected to external force. It is used to make the swing arm assembly swing back and forth around the second axis with the elastic structure as support when the power end moves, and the second axis is set at an angle with the first axis.

2. The spring-type force-controlled swing arm rotation adjustment structure according to claim 1, characterized in that: The elastic structure includes a first elastic sheet, the first elastic sheet is parallel to the second axis, one end of the first elastic sheet is fitted and fixed to the rotating seat, and the other end of the first elastic sheet is fitted and fixed to the middle part.

3. The spring-type force-controlled swing arm rotation adjustment structure according to claim 2, characterized in that: The elastic structure also includes a second elastic sheet, which is also parallel to the second axis. One end of the second elastic sheet is fitted and fixed to the rotating seat, and the other end is fitted and fixed to the middle part. The first elastic sheet and the second elastic sheet are arranged along the direction of the second axis, and the projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect with each other.

4. The spring-type force-controlled swing arm rotation adjustment structure according to claim 1, characterized in that: A suction nozzle assembly is rotatably arranged at the crystal fixing end of the swing arm assembly, and a rotating unit for driving the suction nozzle assembly to rotate is also arranged on the rotating seat. A transmission structure is also arranged between the driving end of the rotating unit and the suction nozzle assembly, and the driving end of the rotating unit is arranged to intersect with the second axis.

5. The spring-type force-controlled swing arm rotation adjustment structure according to claim 4, characterized in that: The number of the elastic structures is two, and the two elastic structures are arranged at intervals along a direction parallel to the second axis, and the driving end of the rotating unit is located in a region between two adjacent elastic structures.

6. The spring-type force-controlled swing arm rotation adjustment structure according to claim 5, characterized in that: The swing arm assembly also has an avoidance structure, which is used to accommodate the transmission structure. At least part of the suction nozzle assembly is located in the avoidance structure, and at least part of the driving end of the rotating unit is also located in the avoidance structure. The avoidance structure is located in the area between the two elastic structures.

7. The spring-type force-controlled swing arm rotation adjustment structure according to any one of claims 1 to 6, characterized in that: The driving unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly has a magnetic part, and the stator assembly is fixedly mounted on the rotating seat. The mover assembly has a coil part, and the mover assembly is movably arranged on the stator assembly. At least a portion of the mover assembly is connected to the power end of the swing arm assembly. After the coil part is energized, the mover assembly can drive the power end of the swing arm assembly to reciprocate under the action of the magnetic part.

8. The spring-type force-controlled swing arm rotation adjustment structure according to claim 7, characterized in that: An elastic safety member is also arranged between the rotating seat and the swing arm assembly, and the elastic safety member is used to apply a force to the swing arm assembly so as to lift the die-bonding end upward after the voice coil motor is powered off.

9. The spring-type force-controlled swing arm rotation adjustment structure according to any one of claims 1 to 6, characterized in that: The swing arm assembly includes a swing arm mounting seat and a swing arm body, at least a portion of the swing arm mounting seat is movably connected to the rotating seat through the elastic structure, the first end of the swing arm mounting seat is connected to the driving end of the driving unit, the second end of the swing arm mounting seat is connected to the first end of the swing arm body, and the second end of the swing arm body extends in a direction away from the swing arm mounting seat.

10. A die bonding machine, characterized in that: It comprises the spring-type force-controlled swing arm rotation adjustment structure as described in any one of claims 1 to 9.

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