Tail gas treatment device for silicon furnace

Abstract

The utility model relates to the technical field of silicon furnace tail gas treatment, and discloses a silicon furnace tail gas treatment device which comprises a water storage tank body, a first filtering tank body and a second filtering tank body, a conveying pipe is arranged in the water storage tank body in a penetrating mode, one end of the conveying pipe is communicated with a tail gas connector, and the other end of the conveying pipe is communicated with the first filtering tank body. A first filter screen and a second filter screen are sequentially arranged in the first filter box body, and a beating mechanism is arranged between the first filter screen and the second filter screen. By arranging the water storage tank body and connecting the conveying pipe into the water storage tank body, heat in the tail gas of the silicon furnace can be recovered, water in the water storage tank body can be heated, heat energy recovery is realized, and heat pollution can be prevented while resource waste is prevented; the first filter screen and the second filter screen are arranged in the first filter box body, and meanwhile, the beating mechanism is arranged between the first filter screen and the second filter screen, so that the first filter screen and the second filter screen can be prevented from being blocked when the silicon furnace tail gas is filtered through the first filter screen and the second filter screen.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon furnace tail gas treatment and discloses a silicon furnace tail gas treatment device. Background Art

[0002] Silicon furnace tail gas refers to a mixed gas produced by chemical reactions or process during the production of silicon, especially in the production of polycrystalline silicon and monocrystalline silicon. The composition of silicon furnace tail gas is quite complex, mainly containing a variety of harmful substances. In the production process of polycrystalline silicon, the tail gas is mainly composed of various silane forms such as silicon tetrachloride, trichlorosilane, and dichlorodihydrogen silicon. The separation and distillation of these components are difficult, and the conversion rate is also very low. In the monocrystalline silicon plant, the exhaust gas components emitted include hydrogen chloride (HCl), nitrogen oxides (NOx), chlorosilane, hydrofluoric acid (HF), etc., which are harmful to the environment and human health. In addition, carbon monoxide gas and sulfur dioxide emitted from the silicon carbide smelting furnace are also common components in silicon furnace tail gas.

[0003] The treatment of silicon furnace exhaust is an important environmental issue, because if these exhaust gases are directly discharged into the atmosphere without proper treatment, they will have a serious impact on the production environment, the health of employees and surrounding residents. Most traditional silicon furnace exhaust treatment devices introduce silicon furnace exhaust into an activated carbon filter, and use the adsorption capacity of activated carbon and other substances to adsorb harmful substances in the exhaust gas, thereby achieving exhaust treatment. However, if there are a large number of harmful substances in the form of dust particles in the exhaust gas, it is easy to cause the filter to be blocked, thereby affecting the filtering effect of the filter, which has limitations. In addition, the exhaust gas of the silicon furnace contains a large amount of heat. If it is directly adsorbed through the filter and then discharged, it will not only cause a waste of heat energy, but also easily cause thermal pollution. Utility Model Content

[0004] In view of the defects in the prior art, the utility model provides a silicon furnace tail gas treatment device, which can effectively treat the silicon furnace tail gas and make full use of the silicon furnace tail gas, thereby preventing waste of resources and effectively protecting the environment.

[0005] In order to solve the above technical problems, the utility model proposes the following technical solutions:

[0006] A silicon furnace exhaust gas treatment device comprises a water storage tank, a first filter tank and a second filter tank, a delivery pipe is provided through the water storage tank, one end of the delivery pipe is connected to an exhaust gas interface, and the other end of the delivery pipe is connected to the first filter tank, a first filter screen and a second filter screen are sequentially provided in the first filter tank, a knocking mechanism is provided between the first filter screen and the second filter screen, an air guide pipe is provided through the end of the first filter tank away from the water storage tank, and the air guide pipe is connected to the second filter tank, a cover plate is installed on the second filter tank, a stirring mechanism is installed on the cover plate, the stirring mechanism is arranged in the second filter tank, a filter screen is provided on the stirring mechanism, and the filter screen is movably arranged in the second filter tank.

[0007] Furthermore, a water inlet and a water pumping port are provided on the top of the water storage tank body, and sealing covers are detachably installed on the water inlet and water pumping ports. The delivery pipe is arranged in a straight wave line in the water storage tank body, and a sealing ring is provided at the connection between the delivery pipe and the water storage tank body.

[0008] Furthermore, a slag discharge notch is provided through the bottom of the first filter box body, a slag collecting trough is movably installed below the slag discharge notch, and four groups of slag discharge notches and slag collecting troughs are provided, which are respectively located at the bottom ends of the first filter screen and the second filter screen.

[0009] Furthermore, the knocking mechanism includes a second motor, a connecting rod, a knocking ball and a spring. The second motor is installed at the bottom of the first filter box, the connecting rod is installed at the output end of the second motor, and the knocking ball is connected to the end of the connecting rod through the spring.

[0010] Furthermore, clean water is provided at the bottom of the second filter box, and the end of the air guide pipe is located in the clean water. The stirring mechanism includes a first motor, a stirring rod and a rotating rod. The first motor is installed on the cover plate, and a plurality of through holes are provided on the cover plate. The rotating rod is installed at the output end of the first motor, and the stirring rod is installed at the bottom of the rotating rod and is located in the clean water.

[0011] Furthermore, a bearing is installed on the rotating rod, and the filter is installed on the outer ring of the bearing.

[0012] It can be seen from the above technical solution that the beneficial effects of the utility model are:

[0013] The utility model sets a water storage box and connects the delivery pipe to the water storage box, so that the heat in the silicon furnace exhaust gas can be recovered and the water in the water storage box can be heated to realize heat energy recovery, which can prevent waste of resources and thermal pollution at the same time; by setting the first filter screen and the second filter screen in the first filter box and setting a knocking mechanism between the first filter screen and the second filter screen, the first filter screen and the second filter screen can be prevented from being blocked when filtering the silicon furnace exhaust gas through the first filter screen and the second filter screen, thereby ensuring that the first filter screen and the second filter screen effectively filter the silicon furnace exhaust gas; by connecting the air guide pipe to the second filter box and setting a stirring mechanism and a filter screen in the second filter box, the silicon furnace exhaust gas can be fully mixed with the clean water in the second filter box, which can not only further reduce the temperature of the exhaust gas and prevent thermal pollution, but also precipitate harmful particulate matter in the exhaust gas, and further filter the exhaust gas through the filter screen to prevent the silicon furnace exhaust gas from polluting the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0015] Figure 1 It is a schematic diagram of the overall cross section of the utility model;

[0016] Figure 2 For the utility model Figure 1 An enlarged schematic diagram of point A.

[0017] Reference numerals:

[0018] 1- water storage box, 2- tail gas interface, 3- delivery pipe, 4- water inlet pipe, 5- water pumping pipe, 6- first filter box, 7- slag discharge notch, 8- slag collecting trough, 9- air guide pipe, 10- second filter box, 11- cover plate, 12- first motor, 13- filter screen, 14- bearing, 15- stirring rod, 16- rotating rod, 17- first filter screen, 18- second filter screen, 19- second motor, 20- connecting rod, 21- knocking ball, 22- spring. DETAILED DESCRIPTION

[0019] The following embodiments of the technical solution of the utility model are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model, and are therefore only used as examples, and cannot be used to limit the protection scope of the utility model.

[0020] See also Figure 1-2As shown, a silicon furnace exhaust gas treatment device includes a water storage tank 1, a first filter tank 6 and a second filter tank 10, a delivery pipe 3 is arranged through the water storage tank 1, one end of the delivery pipe 3 is connected to the exhaust interface 2, and the other end of the delivery pipe 3 is connected to the first filter tank 6, a first filter screen 17 and a second filter screen 18 are arranged in sequence in the first filter tank 6, a knocking mechanism is arranged between the first filter screen 17 and the second filter screen 18, an air guide pipe 9 is connected to the end of the first filter tank 6 away from the water storage tank 1, and the air guide pipe 9 is connected to the second filter tank 10, a cover plate 11 is installed on the second filter tank 10, a stirring mechanism is installed on the cover plate 11, the stirring mechanism is arranged in the second filter tank 10, a filter screen 13 is arranged on the stirring mechanism, and the filter screen 13 is movably arranged in the second filter tank 10.

[0021] In actual use, by setting up a water storage tank 1 and connecting the delivery pipe 3 to the water storage tank 1, the heat in the silicon furnace exhaust gas can be recovered, and the water in the water storage tank 1 can be heated to achieve heat recovery, thereby preventing waste of resources and preventing thermal pollution; by setting up a first filter screen 17 and a second filter screen 18 in the first filter box 6, and setting a knocking mechanism between the first filter screen 17 and the second filter screen 18, when filtering the silicon furnace exhaust gas through the first filter screen 17 and the second filter screen 18, the first filter screen 17 and the second filter screen 18 can be prevented from being knocked. 18 is blocked, thereby ensuring that the first filter 17 and the second filter 18 can effectively filter the silicon furnace exhaust gas; by connecting the air duct 9 to the second filter box 10, and arranging a stirring mechanism and a filter 13 in the second filter box 10, the silicon furnace exhaust gas can be fully mixed with the clean water in the second filter box 10, which not only further reduces the temperature of the exhaust gas to prevent thermal pollution, but also can precipitate harmful particulate matter in the exhaust gas, and further filter the exhaust gas through the filter 13 to prevent the silicon furnace exhaust gas from polluting the environment, which is highly practical.

[0022] Among them, the filter screen 13, the first filter screen 17 and the second filter screen 18 are all filled with activated carbon balls, so that the silicon furnace tail gas can be effectively adsorbed and purified, and the practicability is high.

[0023] In the present embodiment, a water inlet pipe port 4 and a water pumping pipe port 5 are provided through the top of the water storage tank body 1, and sealing covers are detachably installed on the water inlet pipe port 4 and the water pumping pipe port 5. The delivery pipe 3 is arranged in a straight wave line in the water storage tank body 1, and a sealing ring is arranged at the connection between the delivery pipe 3 and the water storage tank body 1; specifically, water can be injected and pumped into the water storage tank body 1 through the arrangement of the water inlet pipe port 4 and the water pumping pipe port 5, so as to facilitate the heating of the injected clean water, and by arranging the delivery pipe 3 in a straight wave line in the water storage tank body 1, the heat of the silicon furnace exhaust gas in the delivery pipe 3 can be effectively recovered to prevent waste of resources.

[0024] In this embodiment, a slag discharge notch 7 is provided through the bottom of the first filter box 6, and a slag collecting trough 8 is movably installed below the slag discharge notch 7. There are four groups of slag discharge notches 7 and slag collecting troughs 8, which are respectively located at the bottom ends of the first filter screen 17 and the second filter screen 18; the knocking mechanism includes a second motor 19, a connecting rod 20, a knocking ball 21 and a spring 22. The second motor 19 is installed at the bottom of the first filter box 6, and the connecting rod 20 is installed at the output end of the second motor 19. The knocking ball 21 is connected to the end of the connecting rod 20 through the spring 22; specifically, the knocking ball 21, the spring 22 and the connecting rod 20 can be driven to rotate by starting the second motor 19, so that the knocking ball 21 can knock the first filter screen 17 and the second filter screen 18, and the harmful substance particles filtered on the first filter screen 17 and the second filter screen 18 are knocked down, and enter the slag collecting trough 8 through the slag discharge notch 7 for collection, thereby effectively preventing the first filter screen 17 and the second filter screen 18 from being blocked, and the practicability is high.

[0025] The first filter screen 17 and the second filter screen 18 are detachably installed in the first filter box 6, and a sealing ring is provided at the interface between the first filter screen 17 and the second filter screen 18 and the first filter box 6, so as to prevent gas leakage while facilitating the replacement of the first filter screen 17 and the second filter screen 18. The slag collecting tank 8 is detachably arranged below the slag discharge notch 7, and a sealing treatment is provided between the slag collecting tank 8 and the first filter box 6 to prevent gas leakage.

[0026] In this embodiment, clean water is provided at the bottom of the second filter box 10, and the end of the air guide pipe 9 is located in the clean water. The stirring mechanism includes a first motor 12, a stirring rod 15 and a rotating rod 16. The first motor 12 is installed on the cover plate 11, and a plurality of through holes are provided on the cover plate 11. The rotating rod 16 is installed at the output end of the first motor 12, and the stirring rod 15 is installed at the bottom of the rotating rod 16 and is located in the clean water. Specifically, the stirring rod 15 and the rotating rod 16 can be driven to rotate by starting the first motor 12, so that the filtered silicon furnace exhaust gas can be effectively neutralized with the clean water, and while reducing the exhaust gas temperature, harmful particulate matter in the exhaust gas can be further precipitated to prevent environmental pollution.

[0027] The clean water in the second filter box 10 can be replaced regularly, thereby ensuring effective cooling and sedimentation of silicon furnace tail gas, which is highly practical.

[0028] In this embodiment, a bearing 14 is installed on the rotating rod 16, and the filter 13 is installed on the outer ring of the bearing 14; specifically, the setting of the bearing 14 can prevent the rotation of the rotating rod 16 from driving the filter 13 to rotate.

[0029] The inner wall of the second filter box 10 is provided with a limiting block, which can support the filter screen 13 .

[0030] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model, and they should all be included in the scope of the claims and specification of the utility model.

Claims

1. A silicon furnace tail gas treatment device, comprising a water storage box (1), a first filter box (6) and a second filter box (10), characterized in that: A delivery pipe (3) is provided through the water storage box (1), one end of the delivery pipe (3) is connected to an exhaust gas interface (2), and the other end of the delivery pipe (3) is connected to a first filter box (6). A first filter screen (17) and a second filter screen (18) are provided in sequence in the first filter box (6), and a knocking mechanism is provided between the first filter screen (17) and the second filter screen (18). An air guide pipe (9) is provided through the end of the first filter box (6) away from the water storage box (1), and the air guide pipe (9) is connected to a second filter box (10). A cover plate (11) is installed on the second filter box (10), and a stirring mechanism is installed on the cover plate (11). The stirring mechanism is arranged in the second filter box (10), and a filter screen (13) is provided on the stirring mechanism. The filter screen (13) is movably arranged in the second filter box (10).

2. A silicon furnace tail gas treatment device according to claim 1, characterized in that: The top of the water storage tank (1) is provided with a water inlet pipe opening (4) and a water extraction pipe opening (5), and sealing covers are detachably mounted on the water inlet pipe opening (4) and the water extraction pipe opening (5). The delivery pipe (3) is arranged in a straight wave line in the water storage tank (1), and a sealing ring is provided at the connection between the delivery pipe (3) and the water storage tank (1).

3. The silicon furnace tail gas treatment device according to claim 1, characterized in that: A slag discharge notch (7) is provided through the bottom of the first filter box (6), and a slag collecting trough (8) is movably installed below the slag discharge notch (7). Four groups of slag discharge notches (7) and slag collecting troughs (8) are provided, which are respectively located at the bottom ends of the first filter screen (17) and the second filter screen (18).

4. The silicon furnace tail gas treatment device according to claim 1, characterized in that: The knocking mechanism comprises a second motor (19), a connecting rod (20), a knocking ball (21) and a spring (22); the second motor (19) is mounted at the bottom of the first filter box (6); the connecting rod (20) is mounted at the output end of the second motor (19); and the knocking ball (21) is connected to the end of the connecting rod (20) via the spring (22).

5. The silicon furnace tail gas treatment device according to claim 1, characterized in that: Clean water is provided at the bottom of the second filter box (10), and the end of the air guide pipe (9) is located in the clean water. The stirring mechanism comprises a first motor (12), a stirring rod (15) and a rotating rod (16). The first motor (12) is mounted on the cover plate (11), and a plurality of through holes are provided on the cover plate (11). The rotating rod (16) is mounted on the output end of the first motor (12), and the stirring rod (15) is mounted at the bottom of the rotating rod (16) and is located in the clean water.

6. A silicon furnace tail gas treatment device according to claim 5, characterized in that: A bearing (14) is mounted on the rotating rod (16), and the filter screen (13) is mounted on the outer ring of the bearing (14).

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