Six-degree-of-freedom precision motion platform

Abstract

The utility model relates to the technical field of precision motion platforms, in particular to a six-degree-of-freedom precision motion platform which comprises a movable connecting plate, the whole movable connecting plate is triangular, the upper surface of the movable connecting plate is fixedly connected with three sliding fixing plates, and the three sliding fixing plates are located at the positions of the movable connecting plate in the triangular direction. And the three sliding fixing plates are uniformly distributed at equal angles relative to the central axis of the movable connecting plate. Under the cooperation of the spherical hinge ball seat, the spherical hinge ball head, the circular cover plate and the three adjusting motors, the circular cover plate and the connecting cylinder can be rotated to adjust the angle on the X axis and the Y axis, the connecting cylinder drives the rotating platform to adjust the horizontal angle, and then the rotating platform drives a workpiece on the rotating platform to adjust the horizontal angle. Six-degree-of-freedom adjustment can be carried out on the precision motion platform, the superiority of the precision motion platform is improved, and the precision motion use effect is greatly improved.

Description

Technical Field

[0001] The utility model relates to a precision motion platform, in particular to a six-degree-of-freedom precision motion platform, and belongs to the technical field of precision motion platforms. Background Art

[0002] Precision motion platform is a device that can achieve high-precision, high-speed and high-stability motion. It is widely used in semiconductor manufacturing, optical processing, biomedicine, aerospace and other fields. Precision motion platform is usually composed of mechanical structure, drive system, control system and sensor, etc. Through precise control and adjustment, it can achieve precise position control and motion trajectory tracking of objects.

[0003] With the continuous development of science and technology, the performance requirements for precision motion platforms are getting higher and higher. Traditional precision motion platforms generally only move on the X-axis, Y-axis and Z-axis and rotate around the Z-axis. They do not have the function of rotating and adjusting the angle on the X-axis and Y-axis, and cannot perform six-degree-of-freedom adjustment. Therefore, they cannot meet some new needs, resulting in limitations in the use of precision motion platforms and greatly reducing the effect of precision motion.

[0004] Therefore, there is an urgent need to improve the six-degree-of-freedom precision motion platform to solve the above-mentioned problems. Utility Model Content

[0005] The purpose of the utility model is to provide a six-degree-of-freedom precision motion platform. Through the cooperation of a ball hinge ball seat, a ball hinge ball head, a circular cover plate and three adjustment motors, the circular cover plate and a connecting tube can be rotated and adjusted on the X-axis and the Y-axis. The connecting tube drives the rotating platform to adjust the horizontal angle, and then the rotating platform drives the workpiece on the rotating platform to adjust the horizontal angle. The precision motion platform can be adjusted with six degrees of freedom, which increases the superiority of the precision motion platform and greatly improves the use effect of precision motion.

[0006] In order to achieve the above-mentioned purpose, the main technical scheme adopted by the utility model includes: comprising a movable connecting plate, the movable connecting plate is in a triangular shape as a whole, three sliding fixed plates are fixedly connected to the upper surface of the movable connecting plate, the three sliding fixed plates are located at the triangular direction position of the movable connecting plate, and the three sliding fixed plates are evenly distributed at equal angles about the central axis of the movable connecting plate, a sliding movable plate is slidably connected to the upper surface of the sliding fixed plate through a guide rail, a right-angled trapezoidal piece is fixedly connected to the sliding movable plate, a follower is slidably connected to the inclined surface of the right-angled trapezoidal piece through a guide rail, a ball joint ball seat is fixedly connected to the follower, a motor mounting plate is fixedly connected to the sliding fixed plate, an adjusting motor is fixedly installed on one side of the motor mounting plate, a first support block and a second support block are fixedly connected to the sliding fixed plate, a screw rod is rotatably connected to the first support block and the second support block together, one end of the screw rod is fixedly connected to the output end of the adjusting motor, a threaded transmission member is threadedly connected to the screw rod, and the threaded transmission member is fixedly connected to the sliding movable plate.

[0007] Preferably, a ball joint ball head is hinged on the ball joint ball seat, and a connecting block is bolted to the other end of the ball joint ball head. A circular cover plate is fixedly connected to the upper surfaces of the three connecting blocks, a connecting tube is fixedly connected to the lower surface of the circular cover plate, and a rotating platform is rotatably connected to the upper end of the connecting tube.

[0008] Preferably, a motor stator is sleeved in the connecting cylinder, a motor rotor is arranged in the motor stator, and one end of the motor rotor is fixedly connected to the rotating platform.

[0009] Preferably, an upper translation plate is fixedly connected to the lower surface of the movable connecting plate, a middle translation plate is slidably connected to the lower surface of the upper translation plate via a guide rail, and a first motor magnetic rail is fixedly connected to the middle position of one side of the upper translation plate close to the middle translation plate.

[0010] Preferably, a first motor coil is provided inside the regulating motor, and the first motor coil is fixedly connected to the middle translation plate.

[0011] Preferably, a lower translation plate is slidably connected to the lower surface of the middle translation plate via a guide rail, and a second motor magnetic rail is fixedly connected to the middle position of one side of the middle translation plate close to the lower translation plate, and the second motor magnetic rail is perpendicular to the first motor magnetic rail.

[0012] Preferably, a second motor coil is provided in the second motor magnetic track, and the second motor coil is fixedly connected to the lower translation plate.

[0013] The utility model has at least the following beneficial effects:

[0014] 1. The three adjusting motors drive the corresponding screw to rotate, the screw drives the corresponding threaded transmission parts to move, the threaded transmission parts drive the corresponding sliding movable plate to move, the sliding movable plate drives the corresponding right-angle trapezoidal parts and the driven parts to move, the driven parts drive the ball joint ball seat to move, under the action of the ball joint ball seat, the ball joint ball head and the circular cover plate, with the three adjusting motors, the circular cover plate and the connecting tube can be rotated and adjusted on the X-axis and Y-axis, the connecting tube drives the rotating platform to adjust the horizontal angle, and then the rotating platform drives the workpiece on the rotating platform to adjust the horizontal angle, which can adjust the precision motion platform with six degrees of freedom, increase the superiority of the precision motion platform, and greatly improve the use effect of precision motion. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0016] Figure 1 A three-dimensional schematic diagram provided for the utility model;

[0017] Figure 2 A schematic diagram of a connecting tube provided by the utility model;

[0018] Figure 3 A partial structural schematic diagram provided for the utility model;

[0019] Figure 4 A left side view provided for the utility model;

[0020] Figure 5 This is a front view provided by the utility model.

[0021] In the figure, 1, movable connecting plate; 2, sliding fixed plate; 3, sliding movable plate; 4, right-angled trapezoidal member; 5, driven member; 6, ball joint ball seat; 7, motor mounting plate; 8, adjusting motor; 9, first support block; 10, second support block; 11, screw rod; 12, threaded transmission member; 13, ball joint ball head; 14, connecting block; 15, circular cover plate; 16, connecting tube; 17, rotating platform; 18, motor stator; 19, motor rotor; 20, upper translation plate; 21, middle translation plate; 22, first motor magnetic track; 23, first motor coil; 24, lower translation plate; 25, second motor magnetic track; 26, second motor coil. DETAILED DESCRIPTION

[0022] The following will describe the implementation methods of the present application in detail with the help of accompanying drawings and examples, so that the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0023] like Figure 1-Figure 5 As shown, the six-degree-of-freedom precision motion platform provided in this embodiment includes a movable connecting plate 1, which is in a triangular shape as a whole. Three sliding fixed plates 2 are fixedly connected to the upper surface of the movable connecting plate 1, and the three sliding fixed plates 2 are located at the triangular direction positions of the movable connecting plate 1. The three sliding fixed plates 2 are evenly distributed at equal angles about the central axis of the movable connecting plate 1. A sliding movable plate 3 is slidably connected to the upper surface of the sliding fixed plate 2 through a guide rail, and a right-angled trapezoidal member 4 is fixedly connected to the sliding movable plate 3. A follower 5 is slidably connected to the inclined surface of the right-angled trapezoidal member 4 through a guide rail, and a ball joint ball seat 6 is fixedly connected to the follower 5, a motor mounting plate 7 is fixedly connected to the sliding fixed plate 2, and an adjusting motor 8 is fixedly installed on one side of the motor mounting plate 7, and a first support block 9 and a second support block 10 are fixedly connected to the sliding fixed plate 2, and the first support block 9 and the second support block 10 are connected to rotate together There is a screw rod 11, one end of which is fixedly connected to the output end of the adjusting motor 8, and a threaded transmission member 12 is threadedly connected to the screw rod 11, and the threaded transmission member 12 is fixedly connected to the sliding movable plate 3. The three adjusting motors 8 drive the corresponding screw rod 11 to rotate, the screw rod 11 drives the corresponding threaded transmission member 12 to move, the threaded transmission member 12 drives the corresponding sliding movable plate 3 to move, the sliding movable plate 3 drives the corresponding right-angle trapezoidal member 4 and the follower 5 to move, the follower 5 drives the ball hinge ball seat 6 to move, under the action of the ball hinge ball seat 6, the ball hinge ball head 13 and the circular cover plate 15, in conjunction with the three adjusting motors 8, the circular cover plate 15 and the connecting tube 16 can be rotated and adjusted on the X-axis and Y-axis, the connecting tube 16 drives the rotating platform 17 to adjust the horizontal angle, and then the rotating platform 17 drives the workpiece on the rotating platform 17 to adjust the horizontal angle.

[0024] Secondly, if Figure 2 , Figure 4 as well as Figure 5 As shown, a ball hinge ball head 13 is hinged on the ball hinge ball seat 6, and a connecting block 14 is bolted to the other end of the ball hinge ball head 13. A circular cover plate 15 is fixedly connected to the upper surfaces of the three connecting blocks 14, and a connecting tube 16 is fixedly connected to the lower surface of the circular cover plate 15. The upper end of the connecting tube 16 is rotatably connected to a rotating platform 17, and a motor stator 18 is sleeved in the connecting tube 16. A motor rotor 19 is arranged in the motor stator 18, and one end of the motor rotor 19 is fixedly connected to the rotating platform 17. The ball hinge ball seat 6 and the ball hinge ball head 13 are used to support the horizontal angle adjustment of the circular cover plate 15. The rotating platform 17 is driven to rotate on the connecting tube 16 by the motor rotor 19, and the rotating platform 17 drives the workpiece on the rotating platform 17 to rotate, which can meet the rotation demand of the workpiece.

[0025] Further, such as Figure 1 as well as Figure 4 As shown, an upper translation plate 20 is fixedly connected to the lower surface of the movable connecting plate 1, and a middle translation plate 21 is slidably connected to the lower surface of the upper translation plate 20 through a guide rail, and a first motor magnetic rail 22 is fixedly connected to the middle position of one side of the upper translation plate 20 close to the middle translation plate 21, and a first motor coil 23 is provided inside the adjusting motor 8, and the first motor coil 23 is fixedly connected to the middle translation plate 21. Through the cooperation of the first motor magnetic rail 22 and the first motor coil 23, the upper translation plate 20 can be moved on the middle translation plate 21 to adjust the position of the upper translation plate 20.

[0026] Further, if Figure 1 as well as Figure 5 As shown, a lower translation plate 24 is slidably connected to the lower surface of the middle translation plate 21 through a guide rail, and a second motor magnetic rail 25 is fixedly connected to the middle position of one side of the middle translation plate 21 close to the lower translation plate 24. The second motor magnetic rail 25 is perpendicular to the first motor magnetic rail 22. A second motor coil 26 is arranged in the second motor magnetic rail 25, and the second motor coil 26 is fixedly connected to the lower translation plate 24. Through the cooperation of the second motor magnetic rail 25 and the second motor coil 26, the middle translation plate 21 can be moved on the lower translation plate 24 to adjust the position of the middle translation plate 21.

[0027] like Figure 1-Figure 5 As shown, the principle of the six-degree-of-freedom precision motion platform provided in this embodiment is as follows: when using this six-degree-of-freedom precision motion platform, the three adjusting motors 8 drive the corresponding screw rod 11 to rotate, the screw rod 11 drives the corresponding threaded transmission member 12 to move, the threaded transmission member 12 drives the corresponding sliding movable plate 3 to move, the sliding movable plate 3 drives the corresponding right-angle trapezoidal member 4 and the follower 5 to move, the follower 5 drives the ball hinge ball seat 6 to move, under the action of the ball hinge ball seat 6, the ball hinge ball head 13 and the circular cover plate 15, with the three adjusting motors 8, the circular cover plate 15 and the connecting tube 16 can be rotated and adjusted on the X-axis and Y-axis, the connecting tube 16 drives the rotating platform 17 to adjust the horizontal angle, and then the rotating platform 17 drives the workpiece on the rotating platform 17 to adjust the horizontal angle.

[0028] For example, certain words are used in the specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. This specification and claims do not use differences in names as a way to distinguish components, but use differences in the functions of components as the criteria for distinction. For example, "including" mentioned throughout the specification and claims is an open term, so it should be interpreted as "including but not limited to". "Approximately" means that within an acceptable error range, those skilled in the art can solve technical problems within a certain error range and basically achieve technical effects.

[0029] It should be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a product or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such product or system. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the product or system including the elements.

[0030] The above description shows and describes several preferred embodiments of the utility model, but as mentioned above, it should be understood that the utility model is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the utility model concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not deviate from the spirit and scope of the utility model, and should be within the scope of protection of the claims attached to the utility model.

Claims

1. A six-degree-of-freedom precision motion platform, comprising a movable connecting plate (1), characterized in that: The movable connecting plate (1) is in a triangular shape as a whole. Three sliding fixed plates (2) are fixedly connected to the upper surface of the movable connecting plate (1). The three sliding fixed plates (2) are located at triangular positions of the movable connecting plate (1). The three sliding fixed plates (2) are evenly distributed at equal angles with respect to the central axis of the movable connecting plate (1). A sliding movable plate (3) is slidably connected to the upper surface of the sliding fixed plate (2) via a guide rail. A right-angled trapezoidal member (4) is fixedly connected to the sliding movable plate (3). A follower (5) is slidably connected to the inclined surface of the right-angled trapezoidal member (4) via a guide rail. The follower (5) is fixedly connected to A ball seat (6) of a ball hinge, a motor mounting plate (7) being fixedly connected to the sliding fixed plate (2), an adjusting motor (8) being fixedly mounted on one side of the motor mounting plate (7), a first supporting block (9) and a second supporting block (10) being fixedly connected to the sliding fixed plate (2), a screw rod (11) being rotatably connected to the first supporting block (9) and the second supporting block (10), one end of the screw rod (11) being fixedly connected to the output end of the adjusting motor (8), a threaded transmission member (12) being threadedly connected to the screw rod (11), and the threaded transmission member (12) being fixedly connected to the sliding movable plate (3).

2. A six-degree-of-freedom precision motion platform according to claim 1, characterized in that: A ball joint ball head (13) is hinged on the ball joint ball seat (6), and a connecting block (14) is bolted to the other end of the ball joint ball head (13). A circular cover plate (15) is fixedly connected to the upper surfaces of the three connecting blocks (14), and a connecting cylinder (16) is fixedly connected to the lower surface of the circular cover plate (15). The upper end of the connecting cylinder (16) is rotatably connected to a rotating platform (17).

3. A six-degree-of-freedom precision motion platform according to claim 2, characterized in that: A motor stator (18) is sleeved in the connecting cylinder (16), a motor rotor (19) is arranged in the motor stator (18), and one end of the motor rotor (19) is fixedly connected to the rotating platform (17).

4. A six-degree-of-freedom precision motion platform according to claim 3, characterized in that: An upper translation plate (20) is fixedly connected to the lower surface of the movable connection plate (1), a middle translation plate (21) is slidably connected to the lower surface of the upper translation plate (20) via a guide rail, and a first motor magnetic track (22) is fixedly connected to the middle position of a side of the upper translation plate (20) close to the middle translation plate (21).

5. The six-degree-of-freedom precision motion platform according to claim 4, characterized in that: The regulating motor (8) is provided with a first motor coil (23) therein, and the first motor coil (23) is fixedly connected to the middle translation plate (21).

6. The six-degree-of-freedom precision motion platform according to claim 5, characterized in that: A lower translation plate (24) is slidably connected to the lower surface of the middle translation plate (21) via a guide rail, and a second motor magnetic track (25) is fixedly connected to the middle position of one side of the middle translation plate (21) close to the lower translation plate (24), wherein the second motor magnetic track (25) is perpendicular to the first motor magnetic track (22).

7. The six-degree-of-freedom precision motion platform according to claim 6, characterized in that: A second motor coil (26) is provided in the second motor magnetic track (25), and the second motor coil (26) is fixedly connected to the lower translation plate (24).

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