Adjusting device for sight glass of reduction furnace

Abstract

The utility model provides an adjusting device for a sight glass of a reduction furnace, which relates to the technical field of reduction furnace equipment for polycrystalline silicon production and comprises a conical cylinder with a sight glass body, a cavity is arranged in the side wall of the conical cylinder, and a first air inlet channel communicated with the cavity is arranged on the outer wall of the conical cylinder. An upper air outlet channel and a lower air outlet channel are respectively formed in the inner wall of the conical cylinder; the upper nozzle is obliquely communicated with the upper air outlet channel; the lower nozzle is obliquely communicated with the lower air outlet channel; wherein each upper nozzle and each lower nozzle incline towards the sight glass body, and the distance from each lower nozzle to the sight glass body is smaller than that from each upper nozzle to the sight glass body. According to the utility model, the gas blowing directions of the nozzles on the two sides of the sight glass are adjusted, so that hydrogen can be better dispersed on the surface of the sight glass, a good protection effect is achieved, too low local temperature caused by direct blowing of the hydrogen to the surface of the sight glass can be avoided, and silicone oil is prevented from polluting the surface of the sight glass.

Description

Technical Field

[0001] The utility model relates to the technical field of reduction furnace equipment for polysilicon production, in particular to an adjusting device for a reduction furnace sight glass. Background Art

[0002] The polysilicon reduction furnace is the main equipment for polysilicon production. In order to more conveniently observe the progress of the reaction in the furnace, grasp the reaction process at any time, and avoid the occurrence of rod fall as much as possible, an observation mirror is installed on the polysilicon reduction furnace. Its function is to observe the formation of silicon rods in the reduction furnace, so as to adjust the process parameters to obtain higher quality polysilicon products.

[0003] During the operation of the reduction furnace of the polysilicon production equipment, the amorphous silicon powder in the furnace gas field will blur the sight glass. To avoid the blurring of the sight glass, a hydrogen channel will be set on the reduction furnace, and a connected nozzle will be set at the outlet of the hydrogen channel. The nozzle will be directed toward the sight glass or the reduction furnace for spraying, which can form a flow field near the sight glass to achieve a protective effect. However, in the setting of this type of nozzle, there is only a nozzle set on the side of the reduction furnace above the sight glass. Although this setting method can play a protective role, the purge is not comprehensive, and a dead zone will appear after running for a period of time, which will still cause the sight glass to be blurred. Therefore, on this basis, there are nozzles set on the reduction furnace on both sides of the sight glass. The nozzles on both sides of the sight glass blow air in the direction of the sight glass at the same time to form an air curtain to protect the sight glass. Compared with the nozzle set on one side, this setting method has more comprehensive and thorough protection, but the nozzles on both sides will form convection when spraying, that is, the nozzles on both sides are opposite, which makes it difficult to spread the gas sprayed on the mirror surface of the sight glass, which will also cause the sight glass to be blurred. In addition, the nozzles on both sides are located closer to the sight glass, which will cause the nozzles to blow directly toward the mirror surface, forming a local low-temperature area accompanied by the generation of low-temperature silicon, that is, silicone oil contaminating the mirror surface. Utility Model Content

[0004] In order to solve the problems that the hydrogen gas cannot be better dispersed on the glass surface of the sight glass to play a protective effect due to the relative jetting of the nozzles facing the sight glass on the reduction furnace, and the local temperature is too low due to the nozzles blowing directly on the sight glass surface, thereby forming low-temperature silicon and polluting the mirror surface, the utility model provides an adjustment device for the sight glass of the reduction furnace, which adjusts the blowing direction of the nozzles on both sides of the sight glass so that the hydrogen gas can be better dispersed on the glass surface of the sight glass to play a good protective effect, and can avoid the local temperature being too low due to the hydrogen gas blowing directly on the sight glass surface, thereby preventing the silicone oil from polluting the sight glass surface.

[0005] The technical solution adopted by the utility model is:

[0006] Provided is an adjustment device for a reduction furnace sight glass, comprising:

[0007] A cone, wherein the small-diameter end of the cone has a mirror body, a cavity is provided in the side wall of the cone, a first air inlet channel connected to the cavity is provided on the outer wall of the cone, and a plurality of upper air outlet channels and lower air outlet channels connected to the cavity are circumferentially spaced apart on the inner wall of the cone; an upper nozzle, wherein the upper nozzle is obliquely connected to the upper air outlet channel, and the angle formed by the connecting line of a single upper nozzle located on both sides of the plurality of upper nozzles to the central axis of the cone is less than 180°; a lower nozzle, wherein the lower nozzle is obliquely connected to the lower air outlet channel, and the symmetry point formed by each lower nozzle along the diameter of the cone is located between two adjacent upper nozzles; wherein each upper nozzle and each lower nozzle are inclined toward the mirror body, the distance from each lower nozzle to the mirror body is less than the distance from each upper nozzle to the mirror body, and the element line passing through the symmetry point of each lower nozzle is located between two adjacent upper nozzles.

[0008] In some embodiments of the present invention, the number of the upper nozzles is 7-11, and the number of the lower nozzles is 6-10.

[0009] In some embodiments of the utility model, the cavity includes a first cavity and a second cavity, the first cavity and the second cavity are both located inside the side wall of the cone and are not connected, the first cavity is connected to the first air inlet channel and multiple upper air outlet channels; the second cavity is connected to the multiple lower air outlet channels, and a second air inlet channel connected to the second cavity is opened on the cone.

[0010] In some embodiments of the present invention, the relative distance between the connection point between the jet direction of the upper nozzle and the mirror body, and the relative distance between the connection point between the jet direction of the lower nozzle and the mirror body is smaller than the minimum inner diameter of the cone.

[0011] In some embodiments of the present invention, the edges of the upper nozzles located at both ends of the cone are flush with the inner wall of the cone.

[0012] In some embodiments of the present invention, the inner diameter of the first air intake passage gradually decreases along the air intake direction, and the inner diameter of the second air intake passage gradually decreases along the air intake direction.

[0013] In some embodiments of the present invention, the first cavity and the second cavity are both distributed in a ring shape inside the side wall of the cone.

[0014] The beneficial effects of the utility model are:

[0015] 1. Hydrogen enters the cavity located in the side wall of the cone through the first air inlet channel, and then transitions from the cavity to the upper air outlet channel and the lower air outlet channel on the inner wall of the cone and is discharged. The discharged hydrogen is blown to the mirror body located at the small-diameter end of the cone through the nozzles connected to each other, forming an air curtain in front of the mirror body to achieve a protective effect. In addition, the gas ejected from the upper nozzle and the gas ejected from the lower nozzle are interlaced with each other, that is, the gas ejected from the lower nozzle is located between the gases ejected from the two upper nozzles. Compared with the upper and lower nozzles blowing against each other, the hydrogen can be better spread on the mirror body, and compared with the single-sided nozzle, it can avoid the hydrogen being unable to spread at any position on the mirror body and the dead angle, resulting in low-temperature silicon contamination on the mirror body;

[0016] 2. The lower nozzle on the cone is closer to the mirror body than the upper nozzle. Since the first air inlet channel is arranged close to the upper nozzle, the gas flow rate of hydrogen that can be ejected from the lower nozzle is reduced. Therefore, the position of the lower nozzle is arranged closer to the mirror body, which can prevent the hydrogen from being unable to blow to the mirror body and form protection. In addition, there is a certain distance between the lower nozzle and the mirror body, which can avoid the formation of a local low-temperature area on the surface of the mirror body, thereby preventing the generation of low-temperature silicon to contaminate the mirror body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the structure of an adjustment device for a reduction furnace sight glass Figure 1 ;

[0019] Figure 2 A schematic diagram of the structure of an adjustment device for a reduction furnace sight glass Figure 2 ;

[0020] Figure 3 for Figure 2 A local enlarged schematic diagram of point A in the middle.

[0021] Reference numerals:

[0022] 1-cone, 10-first air inlet channel, 11-second air inlet channel, 12-first cavity, 13-second cavity, 14-upper air outlet channel, 15-lower air outlet channel, 16-upper nozzle, 17-lower nozzle, 2-mirror body, 3-connecting flange. DETAILED DESCRIPTION

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0025] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0026] Example

[0027] like Figure 1 and Figure 2 As shown, this embodiment provides an adjustment device for a reduction furnace sight glass, comprising:

[0028] A cone 1, a small-diameter end of the cone 1 having a mirror body 2, a cavity is formed in the side wall of the cone 1, a first air inlet channel 10 connected to the cavity is formed on the outer wall of the cone 1, and a plurality of upper air outlet channels 14 and lower air outlet channels 15 connected to the cavity are formed on the inner wall of the cone 1 at intervals in the circumferential direction;

[0029] The upper nozzle 16 is connected to the upper air outlet channel 14 at an angle, and the angle formed by the line connecting the single upper nozzle 16 located on both sides of the plurality of upper nozzles 16 to the central axis of the cone 1 is less than 180°;

[0030] A lower nozzle 17, the lower nozzle 17 is connected to the lower air outlet channel 15 at an angle, and a symmetrical point formed along the diameter of each lower nozzle 17 is located between two adjacent upper nozzles 16;

[0031] Among them, each upper nozzle 16 and each lower nozzle 17 are inclined toward the mirror body 2, the distance from each lower nozzle 17 to the mirror body 2 is smaller than the distance from each upper nozzle 16 to the mirror body 2, and the element line passing through the symmetry point of each lower nozzle 17 is located between two adjacent upper nozzles 16.

[0032] The mirror body 2 on the cone cylinder 1 is fixed to the small-diameter end of the cone cylinder 1 by the connecting flange 3. In order to avoid the gap between the mirror body 2 and the cone cylinder 1 causing the gas in the reduction furnace to leak, a sealing gasket is set at the gap between the mirror body 2 and the cone cylinder 1. It is worth noting that the cone cylinder 1 is a straight cylinder near the mirror body 2, that is, the small-diameter end of the cone cylinder 1 is provided with a straight cylinder with a smaller height, the inner diameter of the straight cylinder is equal to the small-diameter end of the cone cylinder 1, and the mirror body 2 is located on the straight cylinder here. The cone cylinder 1 is installed on the observation hole opened on the reduction furnace. The first air inlet channel 10 is located inside the side wall of the cone cylinder 1 facing the top of the reduction furnace, and is used to communicate with the cavity opened in the circumferential direction inside the side wall of the cone cylinder 1, and after transitioning through the cavity, the gas is discharged from the upper air outlet channel 14 and the lower air outlet channel 15 on the inner wall of the cone cylinder 1. The plurality of upper nozzles 16 are all arranged to be tilted toward the direction of the mirror body 2, and the plurality of lower nozzles 17 are also arranged to be tilted toward the direction of the mirror body 2. Among the angles formed by the connecting lines of the upper nozzles 16 located at both ends of the plurality of upper nozzles 16 to the central axis of the cone 1, the angles toward all the upper nozzles 16 are less than 180°, and the same is true for the lower nozzles 17. In addition, the symmetric point of the lower nozzle 17 projected onto the cone 1 with the diameter of the cone 1 as the symmetry axis is located between two adjacent upper nozzles 16. When the lower nozzle 17 is closer to the mirror body 2, the element line passing through the symmetric point projected by the lower nozzle 17 with the diameter of the cone 1 as the symmetry axis will pass through the connecting line between the two adjacent upper nozzles 16.

[0033] When in use, the external hydrogen enters the cavity through the first air inlet channel 10, passes through the transition of the cavity, and is discharged from the upper air outlet channel 14 and the lower air outlet channel 15 respectively. The staggered arrangement between the upper nozzle 16 and the lower nozzle 17 can completely cover the mirror body 2 located on the cone 1, avoiding the occurrence of dead angles and causing the mirror surface of the mirror body 2 to be contaminated. It is worth noting that at the connection between the upper air outlet channel 14 and the upper nozzle 16, and the connection between the lower air outlet channel 15 and the lower nozzle 17, the nozzle and the corresponding air outlet channel can be connected through a pipeline to facilitate the installation of the nozzle.

[0034] Further, such as Figure 2 As shown, the number of the upper nozzles 16 is 7-11, and the number of the lower nozzles 17 is 6-10.

[0035] When in use, the number of upper nozzles 16 ranges from 7 to 11, and the number of lower nozzles 17 corresponding to the number of upper nozzles 16 is 6 to 10, which is specifically selected according to the size of the mirror body. It can be ensured that there is one lower nozzle 17 between two upper nozzles 16, and the hydrogen sprayed by the upper nozzles 16 and the lower nozzles 17 can cover the mirror body 2.

[0036] Further, such as Figure 2As shown, the cavity includes a first cavity 12 and a second cavity 13. The first cavity 12 and the second cavity 13 are both located inside the side wall of the cone 1 and are not connected. The first cavity 12 is connected to the first air inlet channel 10 and multiple upper air outlet channels 14; the second cavity 13 is connected to multiple lower air outlet channels 15, and a second air inlet channel 11 connected to the second cavity 13 is opened on the cone 1.

[0037] The overall annular cavity is divided into a first cavity 12 and a second cavity 13 which are not connected to each other. The first cavity 12 is connected to the first air inlet channel 10, and the second cavity 13 is connected to the second air inlet channel 11. After the cavities are separated, the flow rate of the hydrogen flowing into the first air inlet channel 10 can be prevented from slowing down when being ejected from the lower nozzle 17, thereby achieving the effect of enhancing the protection on the mirror body 2.

[0038] Furthermore, the relative distance between the connection point between the jet direction of the upper nozzle 16 and the mirror body 2 and the connection point between the jet direction of the lower nozzle 17 and the mirror body 2 is smaller than the minimum inner diameter of the cone 1 .

[0039] When the upper nozzle 16 sprays toward the mirror body 2, the connection between the sprayed hydrogen and the mirror body 2 is plane a. Similarly, when the lower nozzle 17 sprays toward the mirror body 2, the connection between the sprayed hydrogen and the mirror body 2 is also plane b. These two planes are on the mirror surface of the mirror body 2, and the two planes are staggered with each other. The relative distance between the side of plane a facing plane b and the side of plane b facing plane a is smaller than the minimum inner diameter of the cone 1, that is, the inner diameter of the cone 1 where the mirror body 2 is installed. This enables the upper nozzle 16 and the lower nozzle 17 to completely cover the mirror body 2 when spraying hydrogen, thereby avoiding dead corners on the mirror body 2 and mirror surface contamination. It is worth noting that, since the cone 1 has a certain inclination angle and the mirror body 2 is arranged at the small-diameter end of the cone 1, the connection between the inner wall of the cone 1 and the cone 1 on which the mirror body 2 is installed is a straight cylinder, which will cause the upper nozzle 16 and the lower nozzle 17 to start jetting from the edge of the mirror body 2 close to the side of each nozzle even if they spray jets close to the inner wall of the cone 1.

[0040] When in use, the jet direction of the upper nozzle 16 can start along the inclined direction of its own inner wall until it blows to the edge of the mirror body 2 close to the side of the lower nozzle 17. The jet direction of the lower nozzle 17 starts along the inclined direction of its own inner wall until it blows to the edge of the mirror body 2 close to the side of the upper nozzle 16. Within the variation range of the upper nozzle 16 and the lower nozzle 17, the effect of completely covering the mirror body 2 can be achieved, avoiding dead corners on the mirror body 2 and preventing silicone oil from polluting the mirror surface.

[0041] Further, such as Figure 2As shown, the edges of the upper nozzles 16 located at both ends of the cone 1 are flush with the inner wall of the cone 1 .

[0042] The number of upper nozzles 16 on the cone 1 is greater than the number of lower nozzles 17, which means that among the multiple upper nozzles 16, the gas ejected by the upper nozzles 16 located on both sides can completely cover the edge of the cone 1, that is, the edge of the nozzle is flush with the inner wall of the cone 1. It is worth noting that the upper nozzle 16 is flush with the edge of the cone 1 here refers to the inner wall of the cone 1 at the small-diameter end.

[0043] When in use, after the upper nozzles 16 located at both ends among the multiple upper nozzles 16 spray hydrogen, it is necessary to fill the gap between the lower nozzles 17 located at both ends among the multiple lower nozzles 17 and the inner wall of the cone cylinder 1. Therefore, the edge of the nozzle's jet outlet is flush with the inner wall of the cone cylinder 1, so that the gas sprayed by the nozzle can fill the gap between the lower nozzle 17 and the cone cylinder 1, thereby preventing the amorphous silicon in the reduction furnace from entering the sight glass body 2 through the gap and causing mirror contamination.

[0044] Further, such as Figure 3 As shown, the inner diameter of the first air intake passage 10 along the air intake direction gradually decreases, and the inner diameter of the second air intake passage 11 along the air intake direction gradually decreases.

[0045] The inner wall of the first air intake channel 10 gradually shrinks along the air intake direction, that is, in the front section where the first air intake channel 10 is connected to the upper nozzle 16, the cross-section of the first air intake channel 10 at this position is a cone 1. The second air intake channel 11 is the same as above. The cross-section of the front end part where the second air intake channel 11 is connected to the upper nozzle 16 is also a cone 1, so that when the air enters the respective nozzles through the air intake channel, the flow rate of hydrogen is increased by changing the diameter, thereby increasing the hydrogen flow on the mirror body 2, and the protection effect on the mirror body 2 is better.

[0046] During use, when hydrogen passes through the first air inlet channel 10 and the second air inlet channel 11, the diameter of the channel in front of the nozzles connected to each other gradually decreases. According to the Venturi principle, the flow rate of hydrogen increases, which also increases the gas flow rate ejected from the upper nozzle 16 and the lower nozzle 17, thereby enhancing the protective effect of the mirror body 2.

[0047] Further, such as Figure 2 As shown, the first cavity 12 and the second cavity 13 are both distributed in the side wall of the cone 1 in an annular shape.

[0048] The first cavity 12 and the second cavity 13 are both annular cavities with an angle not exceeding 180°. The annular first cavity 12 connects each upper air outlet channel 14 on the cone 1 , and the annular second cavity 13 connects each lower air outlet channel 15 on the cone 1 .

[0049] When in use, hydrogen enters into the first cavity 12 and the second cavity 13 from the first air inlet channel 10 and the second air inlet channel 11 respectively. After entering the cavity, the hydrogen is discharged from the upper nozzle 16 and the lower nozzle 17, using the cavity as a transition. The annularly distributed first cavity 12 and the second cavity 13 are also adapted to the shape of the cone 1, and can better surround the mirror body 2 on the inner wall of the cone 1, so that the gas ejected from the upper nozzle 16 and the lower nozzle 17 can cover the mirror body 2.

[0050] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. In the absence of conflicts, the embodiments of the present application and the features in the embodiments may be arbitrarily combined with each other. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. An adjusting device for a reduction furnace sight glass, characterized in that: include: A cone, wherein the small-diameter end of the cone has a mirror body, a cavity is formed in the side wall of the cone, a first air inlet channel connected to the cavity is formed on the outer wall of the cone, and a plurality of upper air outlet channels and lower air outlet channels connected to the cavity are formed on the inner wall of the cone at intervals in the circumferential direction; An upper nozzle, wherein the upper nozzle is obliquely connected to the upper air outlet channel, and an angle formed by a line connecting a single upper nozzle located on both sides of the plurality of upper nozzles to the central axis of the cone is less than 180°; A lower nozzle, wherein the lower nozzle is obliquely connected to the lower air outlet channel, and a symmetrical point formed by each lower nozzle along the diameter of the cone is located between two adjacent upper nozzles; Wherein, each of the upper nozzles and each of the lower nozzles are inclined toward the mirror body, the distance from each of the lower nozzles to the mirror body is smaller than the distance from each of the upper nozzles to the mirror body, and the element line passing through the symmetry point of each of the lower nozzles is located between two adjacent upper nozzles.

2. The adjusting device for reduction furnace sight glass according to claim 1, characterized in that: The number of the upper nozzles is 7-11, and the number of the lower nozzles is 6-10.

3. The adjusting device for reduction furnace sight glass according to claim 2, characterized in that: The cavity includes a first cavity and a second cavity, the first cavity and the second cavity are both located inside the side wall of the cone and are not connected, the first cavity is connected to the first air inlet channel and the plurality of upper air outlet channels; the second cavity is connected to the plurality of lower air outlet channels, and a second air inlet channel connected to the second cavity is provided on the cone.

4. The adjusting device for reduction furnace sight glass according to claim 3, characterized in that: The relative distance between the connection point between the jet direction of the upper nozzle and the mirror body, and the connection point between the jet direction of the lower nozzle and the mirror body is smaller than the minimum inner diameter of the cone.

5. The adjusting device for reduction furnace sight glass according to claim 4, characterized in that: The edges of the upper nozzles located at the two ends of the cone are flush with the inner wall of the cone.

6. The adjusting device for reduction furnace sight glass according to claim 5, characterized in that: The inner diameter of the first air intake passage gradually decreases along the air intake direction, and the inner diameter of the second air intake passage gradually decreases along the air intake direction.

7. The adjusting device for reduction furnace sight glass according to claim 6, characterized in that: The first cavity and the second cavity are both distributed in a ring shape inside the side wall of the cone.

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