Electroplating liquid spraying assembly and electroplating equipment

Abstract

The utility model relates to the technical field of electroplating, and discloses an electroplating liquid spraying assembly and electroplating equipment, and the electroplating liquid spraying assembly comprises a first pipe body, a second pipe body and a third pipe body, an overflowing opening is formed in the peripheral wall of the outer side of the first pipe body, and the overflowing opening communicates with the containing cavity; the second pipe body and the first pipe body are coaxially arranged; a plurality of jet flow units are formed on the second pipe body and are arranged at intervals in the circumferential direction or the axial direction; each group of jet flow units comprises a plurality of jet flow holes, and at least two groups of jet flow units are different in hole diameter and / or hole position density; the second pipe body and the first pipe body move relatively in the circumferential direction or the axial direction so that the overflowing opening can be selectively communicated with any jet flow unit. According to the electroplating liquid spraying assembly provided by the utility model, the density and the arrangement mode of the hole sites can be accurately adjusted, so that flexible and rapid adjustment can be carried out according to actual copper plating requirements, the copper plating effect can be enhanced, and the copper plating efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electroplating, in particular to an electroplating liquid spraying component and electroplating equipment. Background Art

[0002] In the process of copper plating on the anode titanium tube of the electroplating line, specific copper plating agents are usually required. These agents are usually sprayed out through the holes on the anode titanium tube and come into contact with the object to be plated, thereby realizing the copper plating process.

[0003] The existing technical solution is usually to design the holes on the anode titanium tube into a multi-layer structure, which can effectively improve the effect and efficiency of copper plating. However, the adjustment range and accuracy of this multi-layer structure are limited and cannot meet the production needs of various copper plating situations. Utility Model Content

[0004] In view of this, the utility model provides an electroplating liquid spray assembly and an electroplating device to solve the problem that the existing multi-layer porous anode titanium tube structure has limited adjustment range and accuracy and cannot meet the production needs of various copper plating situations.

[0005] In a first aspect, the utility model provides an electroplating liquid spray assembly, comprising:

[0006] The first tube body has an inner peripheral wall enclosing a receiving cavity; an outer peripheral wall of the first tube body is provided with a flow port, the flow port being connected to the receiving cavity;

[0007] The second tube body is coaxially arranged with the first tube body; a plurality of jet units are formed on the second tube body, and the plurality of jet units are arranged at intervals along the circumferential direction or the axial direction; each group of jet units includes a plurality of jet holes, and at least two groups of jet units have different hole diameters and / or hole position densities; the second tube body and the first tube body move relative to each other along the circumferential direction or the axial direction, so that the flow port is selectively connected to any jet unit.

[0008] Beneficial effects: In the electroplating liquid spray assembly provided by the utility model, the first tube body can be used as an inner nesting, the second tube body can be used as an outer nesting, and the first tube body is inserted axially into the second tube body, thereby forming a double-layer embedded hole structure. During operation, the circumferential position or axial position of the first tube body relative to the second tube body can be adjusted so that the flow port is selectively connected to the jet unit with different apertures and / or hole position density, thereby achieving precise adjustment of the hole position density and arrangement mode without changing the structure of the anode titanium tube, so that it can be flexibly and quickly adjusted according to the actual copper plating needs, which is conducive to enhancing the copper plating effect and improving the copper plating efficiency, and has a wide range of applicability.

[0009] In an optional embodiment, a plurality of jet units are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body, and the jet holes of each group of jet units are arranged at intervals along the axial direction; the apertures of the plurality of jet units are arranged to increase gradually along the circumferential direction;

[0010] The second tube body rotates relative to the first tube body in the circumferential direction so that the flow port is selectively connected to any jet unit.

[0011] Beneficial effect: During operation, the first tube body is rotated circumferentially relative to the second tube body to adjust the circumferential position of the first tube body relative to the second tube body, so that the flow port is selectively connected to the jet units with different apertures, thereby achieving precise switching and adjustment of the jet hole position, and then being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0012] In an optional embodiment, a plurality of jet units are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body, and the jet holes of each group of jet units are arranged at intervals along the axial direction; the hole density of the plurality of jet units is arranged to increase gradually along the circumferential direction;

[0013] The second tube body rotates relative to the first tube body in the circumferential direction so that the flow port is selectively connected to any jet unit.

[0014] Beneficial effect: During operation, the first tube body is rotated circumferentially relative to the second tube body to adjust the circumferential position of the first tube body relative to the second tube body, so that the flow port is selectively connected to the jet units with different hole density, thereby realizing precise switching and adjustment of the jet hole positions, and then being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0015] In an optional embodiment, a first adjusting portion is provided on the outer peripheral wall of the first tube body, and a second adjusting portion corresponding to the first adjusting portion is provided at one axial end of the second tube body, and the second adjusting portion and the first adjusting portion at least partially overlap during the relative circumferential rotation of the second tube body and the first tube body;

[0016] The electroplating liquid spraying assembly further comprises a fastener, which is suitable for fixing the first adjusting portion and the second adjusting portion circumferentially.

[0017] Beneficial effect: When it is necessary to switch and adjust the jet hole position, the operator can adjust the circumferential position of the first tube body relative to the second tube body by turning the first adjustment part and / or the second adjustment part, so that the flow port is connected to the jet unit of the specified aperture and / or hole density; when the circumferential position of the first tube body and the second tube body is adjusted to the right position, the first adjustment part and the second adjustment part can be circumferentially locked by fasteners to avoid offset between the flow port and the specified jet unit.

[0018] In an optional embodiment, a first adjusting groove is formed on the first adjusting portion, and a second adjusting groove is formed on the second adjusting portion;

[0019] The fastener comprises a bolt and a nut. The bolt is suitable for passing through the first adjusting groove and the second adjusting groove in the axial direction and being threadedly connected with the nut.

[0020] Beneficial effects: When it is necessary to switch and adjust the jet hole position, the nut can be loosened to allow the fastener to release the circumferential lock of the first adjustment part and the second adjustment part; when the circumferential position of the first tube body and the second tube body is adjusted to the right position, the nut is tightened to circumferentially lock the first adjustment part and the second adjustment part, thereby avoiding offset between the flow port and the designated jet unit; when it is necessary to disassemble and assemble the first tube body and / or the second tube body, the bolt and nut can be completely disengaged, thereby facilitating maintenance and replacement.

[0021] In an optional embodiment, a first scale is provided on the outer circumferential wall of the first tube body; a second scale corresponding to the first scale is provided on the outer circumferential wall of the second tube body, and multiple lines of the second scale correspond to different hole diameters and / or hole position densities.

[0022] Beneficial effect: During the adjustment process, whenever the flow port is adjusted to a jet unit with any specified aperture and / or aperture density, a scale line corresponding to the first scale and the second scale are collinear, which facilitates the operator to adjust intuitively and accurately.

[0023] In an optional embodiment, a plurality of jet units are arranged at intervals along the axial direction on the outer peripheral wall of the second tube body, and the jet holes of each group of jet units are arranged at intervals along the circumferential direction; the apertures and / or hole density of the plurality of jet units are arranged to increase gradually along the axial direction;

[0024] The second tube body moves axially relative to the first tube body, so that the flow port is selectively connected with any jet unit.

[0025] Beneficial effect: During operation, the first tube body is axially moved relative to the second tube body to adjust the axial position of the first tube body relative to the second tube body, so that the flow port is selectively connected to the jet units with different apertures and / or hole density, thereby achieving precise switching and adjustment of the jet hole positions, and thus being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0026] In an optional embodiment, a first limiting portion is provided on the outer circumferential wall of the first tube body; a second limiting portion is provided on the inner circumferential wall of the second tube body, and the first limiting portion is suitable for cooperating with the second limiting portion to limit the circumferential rotation between the first tube body and the second tube body.

[0027] Beneficial effect: By arranging a first limiting portion axially on the first tube body and arranging a second limiting portion matching the first limiting portion on the second tube body, the first tube body and the second tube body are guided axially and the circumferential rotation between the first tube body and the second tube body is limited, so that the first tube body and the second tube body only slide relative to each other axially, thereby ensuring accurate switching and adjustment of the jet hole position.

[0028] In an optional embodiment, a first sealing groove is further provided on the outer peripheral wall of the first tube body, and the first sealing groove is arranged around the flow port; a first sealing ring is provided between the outer peripheral wall of the first tube body and the inner peripheral wall of the second tube body, and the first sealing ring is compressed in the first sealing groove;

[0029] A second sealing groove is circumferentially formed on the outer circumferential wall of the first tube body, and the second sealing groove is arranged at both axial ends of the first tube body; a second sealing ring is also arranged between the outer circumferential wall of the first tube body and the inner circumferential wall of the second tube body, and the second sealing ring is compressed in the second sealing groove.

[0030] Beneficial effect: By arranging the first sealing ring and the second sealing ring between the outer peripheral wall of the first tube body and the inner peripheral wall of the second tube body, the first tube body and the second tube body are sealed to avoid leakage of the electroplating solution.

[0031] In a second aspect, the utility model further provides an electroplating device, comprising: an equipment body, and an electroplating liquid spray assembly as described above.

[0032] Beneficial effects: The electroplating equipment of the second aspect includes the electroplating liquid spray assembly of the first aspect, and therefore, the electroplating equipment of the second aspect includes all the beneficial effects of the electroplating liquid spray assembly of the first aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 A schematic diagram of a radial cross section of an electroplating liquid spray assembly according to an embodiment of the utility model;

[0035] Figure 2 for Figure 1 A local enlarged schematic diagram of the middle A;

[0036] Figure 3 This is a front view of a first tube body of an electroplating liquid spray assembly according to an embodiment of the utility model;

[0037] Figure 4 for Figure 3 Cross-sectional view of the middle BB section;

[0038] Figure 5 This is a front view of a second tube body of an electroplating liquid spray assembly according to an embodiment of the utility model;

[0039] Figure 6 for Figure 5 Sectional view of the CC section;

[0040] Figure 7 A schematic diagram of the hole position distribution of a jet unit of a second tube body of an electroplating liquid spray assembly according to an embodiment of the utility model;

[0041] Figure 8 A schematic diagram of hole position distribution of another jet unit of the second tube of the electroplating liquid spray assembly according to an embodiment of the utility model;

[0042] Fig. 9 This is a schematic diagram of the hole position distribution of a jet unit of another second tube body of the electroplating liquid spray assembly according to an embodiment of the utility model;

[0043] Fig.10 A schematic diagram of circumferential rotation adjustment of an electroplating liquid spray assembly according to an embodiment of the utility model;

[0044] Fig.11 for Fig.10 A partial enlarged schematic diagram of point D in the middle;

[0045] Fig.12 A cross-sectional view of an electroplating liquid spray assembly according to an embodiment of the utility model along the axial direction;

[0046] Fig.13 This is a schematic diagram of the hole position distribution of a jet unit of another second tube body of the electroplating liquid spray assembly according to an embodiment of the utility model;

[0047] Fig.14 This is a schematic diagram of the hole distribution of a jet unit of an additional second tube body of the electroplating liquid spray assembly according to an embodiment of the utility model;

[0048] Fig.15 A radial cross-sectional view of another electroplating liquid spray assembly according to an embodiment of the utility model;

[0049] Fig.16 for Fig.15 A partial enlarged schematic diagram of point E in the middle.

[0050] Description of reference numerals:

[0051] 10. first tube body; 11. accommodating cavity; 12. flow port; 13. first sealing groove; 14. second sealing groove; 15. first adjusting portion; 151. first adjusting groove; 16. first scale; 17. first limit portion;

[0052] 20. second tube body; 21. jet unit; 211. jet hole; 22. second adjustment part; 221. second adjustment slot; 23. second scale; 24. second limit part;

[0053] 30. Fasteners; 31. Bolts; 32. Nuts;

[0054] 41. First sealing ring; 42. Second sealing ring. DETAILED DESCRIPTION

[0055] In the related art, in order to enhance the copper plating effect and improve the copper plating efficiency, the holes on the anode titanium tube are usually designed as a multi-layer structure. However, on the one hand, although the multi-layer hole design of the anode titanium tube can increase the density of the holes and adjust their arrangement, its adjustment range and accuracy are limited and cannot meet the production needs of various copper plating situations; on the other hand, the multi-layer hole design requires complex processing and manufacturing of the anode titanium tube, which not only increases the manufacturing cost, but also reduces the production efficiency; on the other hand, the anode titanium tube with multi-layer holes is not easy to adjust in actual operation, which brings certain difficulties to the operator.

[0056] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0057] Combine the following Figures 1 to 16 , describing an embodiment of the utility model.

[0058] According to an embodiment of the present utility model, on the one hand, a plating liquid spray assembly is provided, comprising:

[0059] First tube 10, see Figure 1 As shown, the inner peripheral wall thereof encloses a receiving chamber 11; a flow port 12 is provided on the outer peripheral wall of the first tube body 10, and the flow port 12 is connected to the receiving chamber 11;

[0060] The second tube body 20 is coaxially arranged with the first tube body 10; please combine them together Figure 2As shown, a plurality of jet units 21 are formed on the second tube body 20, and the plurality of jet units 21 are arranged at intervals along the circumferential direction or the axial direction; each group of jet units 21 includes a plurality of jet holes 211, and at least two groups of jet units 21 have different hole diameters and / or hole position densities; the second tube body 20 and the first tube body 10 move relative to each other along the circumferential direction or the axial direction, so that the flow port 12 is selectively connected to any jet unit 21.

[0061] It should be noted that the first tube body 10 can be an anode titanium tube; the first tube body 10 can be made of titanium, specifically industrial pure titanium, which has good corrosion resistance and mechanical strength; the second tube body 20 can be made of stainless steel, specifically 304 stainless steel with excellent performance and low cost.

[0062] In the manufacturing process, the first tube body 10 can be used as an inner nesting, and the second tube body 20 can be used as an outer nesting, and the first tube body 10 is inserted into the second tube body 20 along the axial direction, so as to form a double-layer embedded hole structure. In the working process, the circumferential position or axial position of the first tube body 10 relative to the second tube body 20 can be adjusted so that the flow port 12 is selectively connected with the jet unit 21 with different apertures and / or hole density, so as to achieve precise adjustment of the hole density and arrangement mode without changing the structure of the anode titanium tube, so that it can be flexibly and quickly adjusted according to the actual copper plating needs, which is conducive to enhancing the copper plating effect and improving the copper plating efficiency, and has a wide range of applicability.

[0063] At the same time, compared with the multi-layer hole design in the related art, on the one hand, the electroplating liquid spray assembly provided by the utility model, by assembling the first tube body 10 and the second tube body 20 to form a double-layer embedded hole structure, does not require complicated processing and manufacturing of the anode titanium tube, greatly simplifies the manufacturing process, reduces manufacturing costs, and also improves the production efficiency of the electroplating liquid spray assembly; on the other hand, the electroplating liquid spray assembly provided by the utility model, during operation, only needs to adjust the circumferential position or axial position of the first tube body 10 relative to the second tube body 20 to achieve precise adjustment of the hole density and arrangement method, which is easy to adjust in actual operation, reduces the workload of the operator, and improves the convenience of operation.

[0064] In some embodiments, see Figure 7 and Fig. 9 As shown, a plurality of jet units 21 are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body 20, and the jet holes 211 of each group of jet units 21 are arranged at even intervals along the axial direction; the apertures of the plurality of jet units 21 are arranged to increase gradually along the circumferential direction;

[0065] The second tube body 20 rotates relative to the first tube body 10 in the circumferential direction, so that the flow port 12 is selectively connected to any jet unit 21 .

[0066] In this embodiment, the apertures of the several jet units 21 of the second tube body 20 are arranged to increase gradually along the circumferential direction. During operation, the first tube body 10 is rotated circumferentially relative to the second tube body 20 to adjust the circumferential position of the first tube body 10 relative to the second tube body 20, so that the flow port 12 is selectively connected to the jet units 21 with different apertures, thereby realizing precise switching and adjustment of the jet hole positions, and then being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0067] In some embodiments, see Figure 8 As shown, a plurality of jet units 21 are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body 20, and the jet holes 211 of each group of jet units 21 are arranged at even intervals along the axial direction; the hole density of the plurality of jet units 21 is arranged to increase gradually along the circumferential direction;

[0068] The second tube body 20 rotates relative to the first tube body 10 in the circumferential direction, so that the flow port 12 is selectively connected to any jet unit 21 .

[0069] In the present embodiment, the hole density of the plurality of jet units 21 of the second tube body 20 is arranged to increase gradually along the circumferential direction. During operation, the first tube body 10 is rotated circumferentially relative to the second tube body 20 to adjust the circumferential position of the first tube body 10 relative to the second tube body 20, so that the flow port 12 is selectively connected to the jet units 21 with different hole density, thereby realizing precise switching and adjustment of the jet hole positions, and thus being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0070] In some embodiments, please combine Fig.10 and Fig.11 As shown, a first adjusting portion 15 is provided on the outer peripheral wall of the first tube body 10, and a second adjusting portion 22 corresponding to the first adjusting portion 15 is provided at one axial end of the second tube body 20, and the second adjusting portion 22 and the first adjusting portion 15 at least partially overlap during the relative circumferential rotation of the second tube body 20 and the first tube body 10;

[0071] The electroplating liquid spray assembly further includes a fastener 30 , which is suitable for circumferentially fixing the first adjustment portion 15 and the second adjustment portion 22 .

[0072] In this embodiment, by setting the first adjustment part 15 on the first tube body 10 and the second adjustment part 22 on the second tube body 20, when it is necessary to switch and adjust the jet hole position, the operator can adjust the circumferential position of the first tube body 10 relative to the second tube body 20 by turning the first adjustment part 15 and / or the second adjustment part 22, so that the flow port 12 is connected to the jet unit 21 of the specified aperture and / or hole density; when the circumferential position of the first tube body 10 and the second tube body 20 is adjusted to the right position, the first adjustment part 15 and the second adjustment part 22 can be circumferentially locked by the fastener 30, so as to avoid the offset between the flow port 12 and the specified jet unit 21.

[0073] In some embodiments, see Fig.11 As shown, the first adjusting portion 15 is provided with a first adjusting groove 151, and the second adjusting portion 22 is provided with a second adjusting groove 221;

[0074] The fastener 30 includes a bolt 31 and a nut 32 . The bolt 31 is adapted to pass through the first adjustment groove 151 and the second adjustment groove 221 in the axial direction and be threadedly connected with the nut 32 .

[0075] In this embodiment, when it is necessary to switch and adjust the jet hole position, the nut 32 can be loosened to allow the fastener 30 to release the circumferential locking of the first adjustment part 15 and the second adjustment part 22; when the circumferential position of the first tube body 10 and the second tube body 20 is adjusted to the right position, the nut 32 is tightened to circumferentially lock the first adjustment part 15 and the second adjustment part 22, thereby avoiding displacement between the flow port 12 and the designated jet unit 21; when it is necessary to disassemble and assemble the first tube body 10 and / or the second tube body 20, the bolt 31 and the nut 32 can be completely disengaged to facilitate maintenance and replacement.

[0076] In some embodiments, see Fig.11 As shown, a first scale 16 is provided on the outer peripheral wall of the first tube body 10; a second scale 23 corresponding to the first scale 16 is provided on the outer peripheral wall of the second tube body 20, and multiple scale lines of the second scale 23 correspond to different hole diameters and / or hole position densities.

[0077] In this embodiment, during the adjustment process, whenever the flow port 12 is adjusted to the position with any jet unit 21 of a specified aperture and / or aperture density, a scale line corresponding to the first scale 16 and the second scale 23 is collinear, which facilitates the operator to adjust intuitively and accurately.

[0078] In some embodiments, see Fig.13 As shown, a plurality of jet units 21 are arranged at intervals along the axial direction on the outer peripheral wall of the second tube body 20, and the jet holes 211 of each group of jet units 21 are arranged at uniform intervals along the circumferential direction; the apertures of the plurality of jet units 21 are arranged to increase gradually along the axial direction;

[0079] The second tube body 20 and the first tube body 10 move axially relative to each other, so that the flow port 12 is selectively connected to any one of the jet units 21 .

[0080] In the present embodiment, the apertures of several jet units 21 are arranged to increase gradually along the axial direction. During operation, the first tube body 10 is moved axially relative to the second tube body 20 to adjust the axial position of the first tube body 10 relative to the second tube body 20, so that the flow port 12 is selectively connected to the jet units 21 with different apertures, thereby realizing precise switching and adjustment of the jet hole positions, and thus being able to perform flexible and rapid adjustments according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0081] In some embodiments, see Fig.14 As shown, a plurality of jet units 21 are arranged at intervals along the axial direction on the outer peripheral wall of the second tube body 20, and the jet holes 211 of each group of jet units 21 are arranged at intervals along the circumferential direction; the hole density of the plurality of jet units 21 is arranged to increase gradually along the axial direction;

[0082] The second tube body 20 and the first tube body 10 move axially relative to each other, so that the flow port 12 is selectively connected to any one of the jet units 21 .

[0083] In the present embodiment, the hole density of several jet units 21 is arranged to increase gradually along the axial direction. During operation, the first tube body 10 is axially moved relative to the second tube body 20 to adjust the axial position of the first tube body 10 relative to the second tube body 20, so that the flow port 12 is selectively connected to the jet units 21 with different hole density, thereby realizing precise switching and adjustment of the jet hole positions, and then being able to flexibly and quickly adjust according to actual copper plating needs, which is beneficial to enhancing the copper plating effect and improving the copper plating efficiency.

[0084] It is understandable that the axial length of the first tube body 10 is greater than the axial length of the second tube body 20, so as to reserve the axial stroke of the second tube body 20 on the first tube body 10, so as to facilitate the adjustment of the axial position of the first tube body 10 relative to the second tube body 20; the width and axial length of the flow port 12 can be adjusted according to actual production requirements and design conditions, and are not limited to the conditions shown in the drawings of the embodiments of this article. The circumferential distance or axial distance between two adjacent groups of jet units 21 and the aperture and hole spacing of the jet holes 211 can be adjusted according to actual production requirements and design conditions, and are not limited to the conditions shown in the drawings of the embodiments of this article.

[0085] In some embodiments, please combine Fig.15 and Fig.16As shown, a first limiting portion 17 is provided on the outer circumferential wall of the first tube body 10; a second limiting portion 24 is provided on the inner circumferential wall of the second tube body 20, and the first limiting portion 17 and the second limiting portion 24 are both arranged along the axial direction, and the first limiting portion 17 is suitable for cooperating with the second limiting portion 24 to limit the circumferential rotation between the first tube body 10 and the second tube body 20.

[0086] In this embodiment, a first limiting portion 17 is axially provided on the first tube body 10, and a second limiting portion 24 cooperating with the first limiting portion 17 is provided on the second tube body 20, so that the first tube body 10 and the second tube body 20 are guided in the axial direction, and the circumferential rotation between the first tube body 10 and the second tube body 20 is limited, so that the first tube body 10 and the second tube body 20 only slide relative to each other in the axial direction, thereby ensuring the precise switching adjustment of the jet hole position.

[0087] In some embodiments, please combine Figure 3 and Figure 4 As shown, a first sealing groove 13 is also provided on the outer peripheral wall of the first tube body 10, and the first sealing groove 13 is arranged around the flow port 12; Fig.15 As shown, a first sealing ring 41 is disposed between the outer peripheral wall of the first tube body 10 and the inner peripheral wall of the second tube body 20, and the first sealing ring 41 is compressed in the first sealing groove 13;

[0088] Please see again Figure 3 As shown, a second sealing groove 14 is also circumferentially formed on the outer peripheral wall of the first tube body 10, and the second sealing groove 14 is arranged at both axial ends of the first tube body 10; Fig.12 As shown, a second sealing ring 42 is further disposed between the outer peripheral wall of the first tube body 10 and the inner peripheral wall of the second tube body 20 , and the second sealing ring 42 is compressed in the second sealing groove 14 .

[0089] In this embodiment, a first sealing ring 41 and a second sealing ring 42 are provided between the outer peripheral wall of the first tube body 10 and the inner peripheral wall of the second tube body 20 to seal the first tube body 10 and the second tube body 20, thereby preventing leakage of the electroplating solution.

[0090] The electroplating liquid spraying assembly provided by the utility model mainly comprises a first tube body 10, a second tube body 20, a fastener 30, a first sealing ring 41 and a second sealing ring 42. The first sealing ring 41 is compressed in the first sealing groove 13, and the second sealing ring 42 is compressed in the second sealing groove 14. During the assembly process, the second tube body 20 is sleeved on the first tube body 10, and the first sealing ring 41 and the second sealing ring 42 are compressed between the outer peripheral wall of the first tube body 10 and the inner peripheral wall of the second tube body 20, so as to achieve sealing between the first tube body 10 and the second tube body 20. The fastener 30 is detachably connected to the first adjusting part 15 and the second adjusting part 22. Each component of the electroplating liquid spraying assembly is independently arranged. When some of the components fail, only the corresponding components need to be replaced, which is conducive to reducing maintenance costs and improving production efficiency.

[0091] According to an embodiment of the present invention, on the other hand, an electroplating device is provided, including: an equipment body, and the electroplating liquid spraying assembly as described above.

[0092] The electroplating equipment in this embodiment includes the above-mentioned electroplating liquid spray assembly, and therefore, the electroplating equipment in this embodiment includes all the beneficial effects of the above-mentioned electroplating liquid spray assembly.

[0093] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A plating liquid spray assembly, characterized in that: include: A first tube body (10), whose inner peripheral wall encloses a receiving cavity (11); a flow port (12) is provided on the outer peripheral wall of the first tube body (10), and the flow port (12) is connected to the receiving cavity (11); The second tube body (20) is coaxially arranged with the first tube body (10); a plurality of jet units (21) are formed on the second tube body (20), and the plurality of jet units (21) are arranged at intervals along the circumferential direction or the axial direction; each group of the jet units (21) comprises a plurality of jet holes (211), and at least two groups of the jet units (21) have different hole diameters and / or hole position densities; the second tube body (20) and the first tube body (10) move relative to each other along the circumferential direction or the axial direction, so that the flow port (12) is selectively connected to any of the jet units (21).

2. The electroplating liquid spray assembly according to claim 1, characterized in that: A plurality of the jet units (21) are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body (20); the jet holes (211) of each group of the jet units (21) are arranged at intervals along the axial direction; and the apertures of the plurality of the jet units (21) are arranged to increase gradually along the circumferential direction; The second tube body (20) and the first tube body (10) rotate relative to each other in the circumferential direction, so that the flow port (12) is selectively connected to any one of the jet units (21).

3. The electroplating liquid spray assembly according to claim 1, characterized in that: A plurality of the jet units (21) are arranged at intervals along the circumferential direction on the outer peripheral wall of the second tube body (20), and the jet holes (211) of each group of the jet units (21) are arranged at intervals along the axial direction; the hole density of the plurality of the jet units (21) is arranged to increase gradually along the circumferential direction; The second tube body (20) and the first tube body (10) rotate relative to each other in the circumferential direction, so that the flow port (12) is selectively connected to any one of the jet units (21).

4. The electroplating liquid spray assembly according to claim 2 or 3, characterized in that: A first adjusting portion (15) is provided on the outer peripheral wall of the first tube body (10), and a second adjusting portion (22) corresponding to the first adjusting portion (15) is provided at one axial end of the second tube body (20), and the second adjusting portion (22) and the first adjusting portion (15) at least partially overlap during the relative circumferential rotation of the second tube body (20) and the first tube body (10); The electroplating liquid spray assembly further comprises a fastener (30), wherein the fastener (30) is suitable for circumferentially fixing the first adjustment portion (15) and the second adjustment portion (22).

5. The electroplating liquid spray assembly according to claim 4, characterized in that: The first adjusting portion (15) is provided with a first adjusting groove (151), and the second adjusting portion (22) is provided with a second adjusting groove (221); The fastener (30) comprises a bolt (31) and a nut (32), wherein the bolt (31) is adapted to pass through the first adjustment groove (151) and the second adjustment groove (221) in the axial direction and be threadedly connected with the nut (32).

6. The electroplating liquid spray assembly according to claim 4, characterized in that: The first tube body (10) is provided with a first scale (16) on the outer peripheral wall thereof; the second tube body (20) is provided with a second scale (23) corresponding to the first scale (16) on the outer peripheral wall thereof, wherein a plurality of engraved lines of the second scale (23) respectively correspond to different hole diameters and / or hole position densities.

7. The electroplating liquid spray assembly according to claim 1, characterized in that: The plurality of jet units (21) are arranged at intervals along the axial direction on the outer peripheral wall of the second tube body (20); the jet holes (211) of each group of the jet units (21) are arranged at intervals along the circumferential direction; the hole diameters and / or hole position densities of the plurality of jet units (21) are arranged to increase gradually along the axial direction; The second tube body (20) and the first tube body (10) are axially movable relative to each other so that the flow port (12) is selectively connected to any one of the jet units (21).

8. The electroplating liquid spray assembly according to claim 7, characterized in that: A first limiting portion (17) is provided on the outer peripheral wall of the first tube body (10); a second limiting portion (24) is provided on the inner peripheral wall of the second tube body (20), and the first limiting portion (17) is suitable for cooperating with the second limiting portion (24) to limit the circumferential rotation between the first tube body (10) and the second tube body (20).

9. The electroplating liquid spray assembly according to any one of claims 1 to 3 or 7 or 8, characterized in that: A first sealing groove (13) is also provided on the outer peripheral wall of the first tube body (10), and the first sealing groove (13) is arranged around the flow port (12); a first sealing ring (41) is provided between the outer peripheral wall of the first tube body (10) and the inner peripheral wall of the second tube body (20), and the first sealing ring (41) is compressed in the first sealing groove (13); A second sealing groove (14) is circumferentially provided on the outer peripheral wall of the first tube body (10), and the second sealing groove (14) is arranged at two axial ends of the first tube body (10); a second sealing ring (42) is also provided between the outer peripheral wall of the first tube body (10) and the inner peripheral wall of the second tube body (20), and the second sealing ring (42) is compressed in the second sealing groove (14).

10. An electroplating device, characterized in that: include: An equipment body and a plating liquid spray assembly as described in any one of claims 1 to 9 above.

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