Surface grinding machine

Abstract

According to the surface grinding machine, when the surface grinding machine is in an automatic mode that a workbench is driven by an automatic driving device to do reciprocating motion, a safety plug pin is inserted between a rack and a manual driving assembly so that power provided by the manual driving assembly can be prevented from being transmitted to a working platform; therefore, even if a worker operates the manual driving assembly by mistake, the influence on the working platform can be avoided, equipment damage or self injury is prevented, and the safety risk is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and particularly to a surface grinder. Background Art

[0002] As an emerging core material of the third-generation semiconductors, silicon carbide (SiC) has excellent properties such as a wide bandgap, a high critical breakdown electric field strength, a high electron mobility, good radiation resistance, and chemical stability. This makes it an important substrate wafer material with wide applications and shows good application prospects in fields such as aviation devices, new energy vehicles, rail transit, and household appliances.

[0003] Existing silicon carbide wafers need to be ground by a surface grinder to achieve high-precision flatness and parallelism. The surface grinder usually has an automatic mode and a manual mode. However, in the automatic mode, personnel may accidentally operate manually, resulting in equipment damage or personal injury, with relatively high safety risks. Summary of the Utility Model

[0004] The purpose of this application is to provide a surface grinder that can prevent equipment damage or personal injury and reduce safety risks.

[0005] The embodiments of this application can be implemented as follows:

[0006] In a first aspect, the present utility model provides a surface grinder, including a frame, a work platform, an automatic driving device, and a manual driving device provided on the frame. The automatic driving device and the manual driving device are both connected to the work platform and are respectively used to drive the work platform to make reciprocating movements.

[0007] Among them, the manual driving device includes a manual driving component and a safety bolt. The manual driving component is connected to the work platform, and the safety bolt is used to be inserted between the frame and the manual driving component to prevent the power provided by the manual driving component from being transmitted to the work platform.

[0008] In an optional embodiment, the manual driving device further includes a detection component provided on the manual driving component, and the detection component is used to detect whether one end of the safety bolt is inserted into the manual driving component.

[0009] In an optional embodiment, the detection component includes a Hall sensor, and a magnetic induction part is provided at one end of the safety bolt.

[0010] In an optional embodiment, the detection component includes a static contact, and a moving contact is provided at one end of the safety bolt.

[0011] In an alternative embodiment, a receiving hole is provided on a side surface of the working platform, and the receiving hole is used to receive the safety bolt.

[0012] In an alternative embodiment, the manual driving assembly includes a handwheel rotatably provided on the frame and a manual transmission assembly connected to the handwheel. The manual transmission assembly is connected to the working platform and is configured to convert the rotational power provided by the handwheel into a linear driving force capable of driving the working platform to perform a reciprocating motion. One end of the safety bolt is configured to insert into the manual transmission assembly.

[0013] In an alternative embodiment, the manual transmission assembly includes a gear and a rack. The gear is connected to the handwheel, the rack is fixed to the working platform, and the gear meshes with the rack. One end of the safety bolt is configured to insert between the handwheel and the rack to prevent the handwheel from driving the gear to rotate.

[0014] In an alternative embodiment, the manual transmission assembly further includes a connecting shaft rotatably provided on the frame. The handwheel is coaxially connected to one end of the connecting shaft, and the gear is coaxially connected to the other end of the connecting shaft. One end of the safety bolt is configured to insert into the connecting shaft.

[0015] In an alternative embodiment, the manual transmission assembly includes a lead screw and a nut seat threadedly engaged with the lead screw. One end of the lead screw is connected to the nut seat, the nut seat is connected to the working platform, and one end of the safety bolt is configured to insert into the lead screw.

[0016] In an alternative embodiment, the automatic driving device includes a driving motor, a reducer, and a transmission pair. The driving motor is connected to the transmission pair through the reducer, and the transmission pair is connected to the working platform.

[0017] Compared with the prior art, the beneficial effects of the embodiments of the present application include, for example:

[0018] When the surface grinder is in the automatic mode in which the working table is driven to perform a reciprocating motion by the automatic driving device, inserting the safety bolt between the frame and the manual driving assembly can prevent the power provided by the manual driving assembly from being transmitted to the working platform. In this way, even if the staff accidentally operates the manual driving assembly, it can avoid affecting the working platform, prevent equipment damage or personal injury, and reduce safety risks. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a structural schematic diagram of a surface grinder according to an embodiment of the present application;

[0021] Figure 2 It is a schematic diagram of a manual driving device according to an embodiment of the present application.

[0022] Icon: 10 - working platform; 11 - receiving hole; 20 - handwheel; 30 - connecting shaft; 40 - gear; 50 - rack; 60 - safety bolt; 70 - detecting member. Specific Embodiments

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application to be protected, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0025] It should be noted that: similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0026] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this application is usually placed when in use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0027] In addition, terms such as "horizontal", "vertical", "hanging", etc. do not require the components to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0028] In the description of the present application, it should also be noted that unless otherwise clearly specified and limited, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0029] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0030] Reference Figure 1 and Figure 2 , an embodiment of the present application discloses a surface grinder, which includes a frame and a workbench 10, an automatic driving device, and a manual driving device arranged on the frame. The automatic driving device and the manual driving device are both connected to the workbench 10 and are respectively used to drive the workbench 10 to make reciprocating motions;

[0031] Among them, the manual driving device includes a manual driving component and a safety bolt 60. The manual driving component is connected to the workbench 10, and the safety bolt 60 is used to be inserted between the frame and the manual driving component to prevent the power provided by the manual driving component from being transmitted to the workbench 10.

[0032] In this way, in the automatic mode where the surface grinder drives the workbench to make reciprocating motions through the automatic driving device, inserting the safety bolt 60 between the frame and the manual driving component can prevent the power provided by the manual driving component from being transmitted to the workbench 10. In this way, even if the staff accidentally operates the manual driving component, it can avoid affecting the workbench 10, prevent equipment damage or personal injury, and reduce safety risks.

[0033] The manual driving device further includes a detecting member 70 provided on the manual driving assembly. The detecting member 70 is used to detect whether one end of the safety bolt 60 is inserted into the manual driving assembly. In this way, after the surface grinder is started, the detection result of the detecting member 70 can be used to determine whether to start the automatic mode. That is, only after the detecting member 70 detects that the safety bolt 60 is inserted into the manual driving assembly, the automatic driving device will operate to start the automatic mode. Otherwise, if the detecting member 70 does not detect it, the automatic driving device will not operate.

[0034] Specifically, the manual driving assembly includes a handwheel 20 rotatably provided on the machine frame and a manual transmission assembly connected to the handwheel 20. The manual transmission assembly is connected to the workbench 10 and is used to convert the rotational power provided by the handwheel 20 into a linear driving force capable of driving the workbench 10 to reciprocate. One end of the safety bolt 60 is used to insert into the manual transmission assembly, so that the other end of the safety bolt 60 is fixed relative to the machine frame to lock the manual transmission assembly, so that in the automatic mode, even if the operator accidentally misoperates the handwheel 20, the manual transmission assembly can be prevented from being driven by the handwheel 20.

[0035] More specifically, the manual transmission assembly includes a gear 40 and a rack 50. The gear 40 is connected to the handwheel 20, the rack 50 is fixed to the workbench 10, and the gear 40 meshes with the rack 50. One end of the safety bolt 60 is used to insert between the handwheel 20 and the rack 50 to prevent the handwheel 20 from driving the gear 40 to rotate.

[0036] Among them, the manual transmission assembly further includes a connecting shaft 30. The connecting shaft 30 is rotatably provided on the machine frame. The handwheel 20 is coaxially connected to one end of the connecting shaft 30, and the gear 40 is coaxially connected to the other end of the connecting shaft 30. One end of the safety bolt 60 is used to insert into the connecting shaft 30. In this way, when the handwheel 20 is accidentally touched in the automatic mode, since the connecting shaft 30 is locked and will not rotate, the gear 40 can be prevented from driving the rack 40 to move.

[0037] In addition, in another embodiment, the manual transmission assembly may include a lead screw and a nut seat threadedly engaged with the lead screw. One end of the lead screw is connected to the nut seat, the nut seat is connected to the workbench 10, and one end of the safety bolt 60 is used to insert into the lead screw.

[0038] The type of the detecting member 70 is not specifically limited. For example, it can be a Hall sensor, a static contact, etc. If the detecting member 70 is a Hall sensor, a magnetic induction portion is provided at one end of the safety bolt 60. If the detecting member 70 is a static contact, a moving contact is provided at one end of the safety bolt 60.

[0039] In addition, in order to place the safety bolt 60 in the manual mode, a receiving hole 11 is provided on the side of the workbench 10. The receiving hole 11 is used to receive the safety bolt 60.

[0040] The automatic driving device includes a driving motor, a speed reducer and a transmission pair. The driving motor is connected to the transmission pair through the speed reducer, and the transmission pair is connected to the working platform 10.

[0041] In summary, the embodiment of the present application discloses a surface grinder. In the automatic mode where the surface grinder drives the workbench to reciprocate through the automatic driving device, the safety bolt 60 is inserted between the machine frame and the manual driving component to prevent the power provided by the manual driving component from being transmitted to the working platform 10. In this way, even if the staff misoperates the manual driving component, it can avoid affecting the working platform 10, prevent equipment damage or personal injury, and reduce the safety risk.

[0042] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A surface grinding machine, characterized in that: It comprises a frame, a working platform (10) arranged on the frame, an automatic driving device and a manual driving device, wherein the automatic driving device and the manual driving device are both connected to the working platform (10) and are respectively used to drive the working platform (10) to perform reciprocating motion; The manual drive device comprises a manual drive component and a safety latch (60), wherein the manual drive component is connected to the working platform (10), and the safety latch (60) is used to be inserted between the frame and the manual drive component to prevent the power provided by the manual drive component from being transmitted to the working platform (10).

2. The surface grinding machine according to claim 1, characterized in that: The manual drive device further comprises a detection member (70) arranged on the manual drive assembly, wherein the detection member (70) is used to detect whether one end of the safety latch (60) is inserted into the manual drive assembly.

3. The surface grinding machine according to claim 2, characterized in that: The detection member (70) comprises a Hall sensor, and one end of the safety latch (60) is provided with a magnetic sensing portion.

4. The surface grinding machine according to claim 2, characterized in that: The detection member (70) comprises a static contact, and one end of the safety latch (60) is provided with a moving contact.

5. The surface grinding machine according to claim 1, characterized in that: A receiving hole (11) is provided on the side of the working platform (10), and the receiving hole (11) is used to receive the safety latch (60).

6. The surface grinding machine according to claim 1, characterized in that: The manual drive assembly comprises a handwheel (20) rotatably arranged on the frame and a manual transmission assembly connected to the handwheel (20); the manual transmission assembly is connected to the working platform (10) and is used for converting the rotational power provided by the handwheel (20) into a linear driving force capable of driving the working platform (10) to perform reciprocating motion; one end of the safety latch (60) is used for inserting into the manual transmission assembly.

7. The surface grinding machine according to claim 6, characterized in that: The manual transmission assembly comprises a gear (40) and a rack (50), wherein the gear (40) is connected to the hand wheel (20), the rack (50) is fixed to the working platform (10), the gear (40) is meshed with the rack (50), and one end of the safety pin (60) is used to be inserted between the hand wheel (20) and the rack (50) to prevent the hand wheel (20) from driving the gear (40) to rotate.

8. The surface grinding machine according to claim 7, characterized in that: The manual transmission assembly also includes a connecting shaft (30), the connecting shaft (30) is rotatably arranged on the frame, the hand wheel (20) is coaxially connected to one end of the connecting shaft (30), the gear (40) is coaxially connected to the other end of the connecting shaft (30), and one end of the safety latch (60) is used to be inserted into the connecting shaft (30).

9. The surface grinding machine according to claim 6, characterized in that: The manual transmission assembly comprises a lead screw and a nut seat threadably matched with the lead screw, one end of the lead screw is connected to the nut seat, the nut seat is connected to the working platform (10), and one end of the safety pin (60) is used to be inserted into the lead screw.

10. The surface grinding machine according to claim 1, characterized in that: The automatic drive device comprises a drive motor, a reducer and a transmission pair, the drive motor is connected to the transmission pair via the reducer, and the transmission pair is connected to the working platform (10).

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