Three-piece type wafer feeding and discharging manipulator finger

Abstract

The utility model discloses a three-piece type wafer feeding and discharging manipulator finger which comprises a six-axis mechanical arm, a ceramic finger connected with the six-axis mechanical arm, and a suction holding mechanism arranged on the six-axis mechanical arm and located below the ceramic finger, and the ceramic finger is fixedly installed on the six-axis mechanical arm. And a multi-station clamping claw is arranged on the sucking and holding mechanism, and the sucking and holding mechanism is mounted on the ceramic finger. The beneficial effects of the utility model are that three wafers can be fed at the same time, the efficiency of feeding and discharging can be greatly improved, the productivity can be increased, and two kinds of manipulator fingers are installed and can meet different use requirements, and work does not affect each other.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer loading and unloading, in particular to a three-piece wafer loading and unloading manipulator finger. Background Art

[0002] The 12-inch polishing machine carrier plate of the wafer has three wafer placement grooves. Currently, when placing wafers, the manipulator usually places the wafers one by one, with relatively low efficiency and low productivity. The use effect is not good and cannot meet the long-term processing and use needs of people.

[0003] In view of the above situation, it is necessary to improve the existing wafer clamping device so that it can meet the current needs of wafer clamping. Summary of the Utility Model

[0004] To achieve the above object, the technical solution of the utility model is a three-piece wafer loading and unloading manipulator finger, including a six-axis robotic arm, a ceramic finger connected to the six-axis robotic arm, and a suction mechanism disposed on the six-axis robotic arm and below the ceramic finger. The ceramic finger is fixedly installed on the six-axis robotic arm. The suction mechanism is provided with a multi-station clamping claw, and the suction mechanism is installed on the ceramic finger.

[0005] As a further supplement to the above technical solution, the suction mechanism includes a driving mechanism, a connecting shaft connected to the driving structure, a plurality of fixing brackets circumferentially arranged on the connecting shaft, and clamping claws fixedly connected to the fixing brackets. One end of the fixing bracket is fixedly connected to the connecting shaft, and the number of the fixing brackets is the same as that of the clamping claws.

[0006] As a further supplement to the above technical solution, the number of the fixing brackets is three.

[0007] As a further supplement to the above technical solution, the driving mechanism is a motor, and the motor is fixedly installed on the six-axis robotic arm.

[0008] As a further supplement to the above technical solution, the cross section of the fixing bracket is in the shape of a right trapezoid.

[0009] As a further supplement to the above technical solution, the clamping claw includes a suction cup finger and a plurality of suction cups disposed below the suction cup finger. The suction cup finger is fixedly connected to the fixing bracket.

[0010] As a further supplement to the above technical solution, a plurality of the suction cups are disposed at the end of the suction cup finger.

[0011] As a further supplement to the above technical solution, fixing blocks are disposed on the front and rear sides of the suction cup finger where the fixing bracket is located. One end of the fixing block is fixedly connected to the fixing bracket, and the fixing block is fixedly installed on the suction cup finger.

[0012] Its beneficial effects are as follows: it can load three wafers at the same time, which can greatly improve the efficiency of loading and unloading, increase the production capacity, and install two types of robotic fingers, both of which can meet different usage requirements and do not affect each other's work. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is the overall structural schematic diagram of the first angle of the present utility model;

[0014] Figure 2 is the overall structural schematic diagram of the second angle of the present utility model;

[0015] In the figure, 1 is a six-axis robotic arm; 2 is a ceramic finger; 3 is a suction mechanism; 31 is a driving mechanism; 32 is a connecting shaft; 33 is a fixed bracket; 4 is a clamping jaw; 41 is a suction cup finger; 42 is a suction cup; 5 is a fixed block; 6 is a wafer. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] For the convenience of those skilled in the art to understand the technical solution of the present invention more clearly, the technical solution of the present utility model will be elaborated in detail below with reference to the attached Figure 1 -2:

[0017] A three-piece wafer 6 loading and unloading robotic finger includes a six-axis robotic arm 1, a ceramic finger 2 connected to the six-axis robotic arm 1, and a suction mechanism 3 disposed on the six-axis robotic arm 1 and below the ceramic finger 2. The ceramic finger 2 is fixedly installed on the six-axis robotic arm 1. The suction mechanism 3 is provided with a multi-station clamping jaw 4. The suction mechanism 3 is installed on the ceramic finger 2. The ceramic finger 2 and the suction mechanism 3 are installed on the robotic arm. The thickness of the upper ceramic finger 2 is within 4 mm, and it picks up wafers from the wafer 6 cassette; the lower robotic finger can simultaneously place multiple wafers 6 taken out of the cassette into the polishing machine.

[0018] The structure of the suction mechanism will be elaborated in detail below. The suction mechanism includes a driving mechanism 31, a connecting shaft 32 connected to the driving structure, a plurality of fixed brackets 33 circumferentially arranged on the connecting shaft 32, and a clamping jaw 4 fixedly connected to the fixed bracket 33. One end of the fixed bracket 33 is fixedly connected to the connecting shaft 32, and the number of the fixed brackets 33 and the clamping jaws 4 is the same; the driving mechanism 31 can control the rotation of the connecting shaft 32, and the rotation of the connecting shaft 32 can control the rotation of the fixed brackets 33 and the clamping jaws 4, so as to avoid conflict with the ceramic finger 2 when taking materials. Among them, the number of the fixed brackets 33 is three, and the driving mechanism 31 is a motor. The motor is fixedly installed on the six-axis robotic arm 1. Further, the cross-section of the fixed bracket 33 is a right-angled trapezoid. During operation, the rotating shaft of the six-axis robotic arm 1 facilitates the ceramic finger 2 to pick up materials, and the installation of the motor can meet the rotational avoidance and material-taking actions of the suction mechanism 3.

[0019] Among them, the clamping jaw 4 includes a suction cup finger 41 and a plurality of suction cups 42 arranged below the suction cup finger 41. The suction cup finger 41 is fixedly connected to the fixed bracket 33. The plurality of suction cups 42 are arranged at the end of the suction cup finger 41. In order to better fix the suction cup finger 41, fixing blocks 5 are provided on the front and back sides of the fixed bracket 33 on the suction cup finger 41. One end of the fixing block 5 is fixedly connected to the fixed bracket 33, and the fixing block 5 is fixedly installed on the suction cup finger 41.

[0020] The above technical solution only reflects the preferred technical solution of the technical solution of the present invention. Some changes that those skilled in the art may make to some parts thereof all reflect the principle of the present invention and fall within the protection scope of the present invention.

Claims

1. A three-piece wafer loading and unloading robot finger, characterized in that: The invention comprises a six-axis robot arm (1), a ceramic finger (2) connected to the six-axis robot arm (1), and a suction mechanism (3) arranged on the six-axis robot arm (1) and located below the ceramic finger (2); the ceramic finger (2) is fixedly mounted on the six-axis robot arm (1); a multi-station clamping claw (4) is arranged on the suction mechanism (3); and the suction mechanism (3) is mounted on the ceramic finger (2).

2. A three-wafer loading and unloading robot finger according to claim 1, characterized in that: The suction mechanism comprises a driving mechanism (31), a connecting shaft (32) connected to the driving mechanism, a plurality of fixed brackets (33) arranged in a circumferential array on the connecting shaft (32), and a clamping claw (4) fixedly connected to the fixed bracket (33), one end of the fixed bracket (33) being fixedly connected to the connecting shaft (32), and the number of the fixed brackets (33) and the clamping claw (4) being the same.

3. A three-wafer loading and unloading robot finger according to claim 2, characterized in that: The number of the fixing brackets (33) is three.

4. A three-wafer loading and unloading robot finger according to claim 2, characterized in that: The driving mechanism (31) is a motor, and the motor is fixedly mounted on the six-axis robot arm (1).

5. A three-wafer loading and unloading robot finger according to claim 3, characterized in that: The fixing bracket (33) has a right-angle trapezoidal cross section.

6. A three-wafer loading and unloading robot finger according to claim 2, characterized in that: The clamping claw (4) comprises a suction cup finger (41) and a plurality of suction cups (42) arranged below the suction cup finger (41); the suction cup finger (41) is fixedly connected to a fixed bracket (33).

7. A three-wafer loading and unloading robot finger according to claim 6, characterized in that: A plurality of suction cups (42) are arranged at the ends of the suction cup fingers (41).

8. A three-wafer loading and unloading robot finger according to claim 7, characterized in that: The suction cup finger (41) is provided with a fixing block (5) at both the front and rear sides of the fixing bracket (33), one end of the fixing block (5) is fixedly connected to the fixing bracket (33), and the fixing block (5) is fixedly mounted on the suction cup finger (41).

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