Gas distribution mechanism with cooling structure and thin film deposition equipment thereof

Abstract

The utility model discloses a gas distribution mechanism with a cooling structure, which comprises a gas distribution component, a first cooling component, a second cooling component and a gas distribution component, and the gas distribution component is internally provided with a gas distribution channel and a first cooling channel surrounding the gas distribution channel; an air outlet channel and a second cooling channel surrounding the air outlet channel are arranged in the air outlet assembly; wherein the air outlet assembly is connected to the air distribution end of the air distribution assembly, the air outlet channels communicate with the air distribution channels, and the second cooling channels communicate with the first cooling channels. The one-way circulating cooling channels are arranged in the gas distribution assembly and the gas outlet assembly, the cooling agent is introduced to cool the distributed special gas, all the gas distribution channels and the gas outlet channels can be cooled in an all-around mode, and meanwhile the cooling efficiency can be improved. The utility model further discloses thin film deposition equipment which adopts the gas distribution mechanism with the cooling structure and can improve the deposition quality.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film deposition equipment, in particular to a gas distribution mechanism with a cooling structure and a thin film deposition equipment thereof. Background Art

[0002] Vapor deposition technology is a new technology that uses physical and chemical changes occurring in the gas phase to change the surface composition of a workpiece and form a metal or compound coating with specific optical and electrical properties on the surface of the workpiece, and is widely used in technical fields such as chip manufacturing.

[0003] In technical fields such as plasma enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), and metal organic chemical vapor deposition (MOCVD), in order to meet the requirements of expanding the thin film size, expanding the product production scale, etc., the prior art generally increases the gas flow rate and shunts the gas to supply gas to multiple positions in the reaction chamber or multiple independent sub-chambers, so as to meet the production requirements of synchronously growing thin films at multiple positions in the reaction chamber or multiple independent sub-chambers.

[0004] However, some special gases shunted by the gas distribution structure need to be cooled, so it is necessary to design a gas distribution mechanism with a cooling function. Summary of the Utility Model

[0005] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a gas distribution mechanism with a cooling structure and a thin film deposition equipment thereof, so as to solve the technical problem that special gases need to be cooled during shunting.

[0006] To achieve the above purpose, the utility model adopts the following technical solutions:

[0007] In a first aspect, an embodiment of the utility model provides a gas distribution mechanism with a cooling structure, which includes:

[0008] A gas distribution component, in which a gas distribution channel and a first cooling channel surrounding the gas distribution channel are provided;

[0009] At least one gas outlet component, in which a gas outlet channel and a second cooling channel surrounding the gas outlet channel are provided;

[0010] Wherein, the gas outlet component is connected to the gas distribution end of the gas distribution component, the gas outlet channels are all communicated with the gas distribution channel, and the second cooling channels are all communicated with the first cooling channel.

[0011] Wherein, the first cooling channel and / or the second cooling channel is a coolant flow channel that extends unidirectionally from the coolant inlet end to the outlet end.

[0012] Wherein, the first cooling channel and / or the second cooling channel is a coolant channel that extends unidirectionally in a spiral manner from the coolant inlet end to the outlet end.

[0013] Wherein, the gas distribution mechanism with a cooling structure further includes a plurality of connecting pipes. One of the connecting pipes connects the first cooling channel to the second cooling channel of one of the gas distribution components, and the remaining connecting pipes respectively connect the second cooling channels of adjacent gas outlet components in sequence.

[0014] Wherein, one end of the connecting pipe connecting the second cooling channels in adjacent gas outlet components is connected to the end of the gas outlet component close to the gas distribution component, and the other end is connected to the end of the gas outlet component far from the gas distribution component.

[0015] Wherein, the gas distribution component includes: a gas distribution block and a gas distribution sleeve sleeved outside the gas distribution block. The gas distribution channel is opened along the axial direction of the gas distribution block. The gas distribution block and the side wall of the gas distribution sleeve jointly enclose the first cooling channel. A coolant inlet is provided at a position near the top of the gas distribution sleeve, and a coolant outlet is provided at a position near the bottom.

[0016] Wherein, the gas distribution block includes: a rod-shaped main body, a top flange provided at the top end of the rod-shaped main body, and a gas distribution disc provided at the bottom end of the rod-shaped main body. A plurality of gas distribution air channels communicating with the gas distribution channel are provided in the gas distribution disc. The gas outlet component is connected to the gas distribution disc, and the gas outlet components are symmetrically distributed.

[0017] Wherein, a first convex portion extending in a curve is provided on the side wall of the rod-shaped main body. The top surface of the first convex portion is hermetically abutted against the inner wall of the gas distribution sleeve, so as to form the first cooling channel between the gas outlet sleeve and the rod-shaped main body.

[0018] Wherein, the gas outlet component includes: a gas outlet block and a gas outlet sleeve sleeved outside the gas outlet block. The gas outlet channel is opened along the axial direction of the gas outlet block. The gas outlet block and the side wall of the gas outlet sleeve jointly enclose the second cooling channel.

[0019] Wherein, the gas outlet block includes: a rod-shaped body, an upper flange provided at the top end of the rod-shaped body, a lower flange provided at the lower end of the rod-shaped body, and an annular limiting platform provided on the outer wall of the rod-shaped body near one end of the upper flange. The top end of the gas outlet sleeve abuts against the annular limiting platform.

[0020] Wherein, a second convex portion extending in a curve is provided on the side wall of the rod-shaped body. The top surface of the second convex portion is hermetically abutted against the inner wall of the gas outlet sleeve, so as to form the second cooling channel between the gas outlet sleeve and the rod-shaped body.

[0021] Wherein, the intake end of the air outlet component is quickly locked and connected to the air distribution end of the air distribution component.

[0022] In a second aspect, an embodiment of the present invention provides a thin film deposition apparatus, which includes the air distribution mechanism with a cooling structure as described in any one of the above.

[0023] The air distribution mechanism with a cooling structure of the present invention cools the shunted special gas by arranging a unidirectional flow cooling channel in the air distribution component and the air outlet component and introducing a coolant. The internally arranged cooling channel is arranged to extend in a unidirectional spiral manner, and the coolant flows unidirectionally, so that all-round cooling treatment can be carried out on each air distribution channel and air outlet channel, and at the same time, the cooling contact area can be increased, and the cooling efficiency is improved.

[0024] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly, it can be implemented according to the content of the description. And in order to make the above and other objects, features and advantages of the present invention more obvious and understandable, the following preferred embodiments are specifically described in detail as follows. Description of the Drawings

[0025] Figure 1 It is a schematic diagram of the overall structure of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0026] Figure 2 It is a schematic diagram of a partial structure of the air outlet component of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0027] Figure 3 It is a front view of a partial structure of the air outlet component of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0028] Figure 4 It is Figure 3 the sectional view taken along the line A-A shown.

[0029] Figure 5 It is a schematic diagram of a partial structure of the air outlet block of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0030] Figure 6 It is a schematic diagram of a partial structure of the air distribution component of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0031] Figure 7 It is a front view of the air distribution component of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0032] Figure 8 It is Figure 7 the sectional view taken along the line B-B shown.

[0033] Figure 9 The bottom view of the air distribution component of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0034] Figure 10 The partial structural schematic diagram of the air distribution block of the air distribution mechanism with a cooling structure according to an embodiment of the present invention.

[0035] Explanation of reference numerals:

[0036] The air distribution mechanism 100 with a cooling structure, the air distribution component 1, the air distribution block 11, the air distribution sleeve 12, the first cooling channel 10, the rod-shaped main body 111, the flange 112, the air distribution plate 113, the side flange 114, the input port 121, the output port 122, the air distribution channel 1110, the first convex part 1111, the groove 1112, the air distribution airway 1131, the connecting pipe 2, the quick lock 3, the air outlet component 4, the air outlet component 5, the air outlet component 6, the air outlet component 7, the air outlet block 41, the air outlet sleeve 42, the second cooling channel 410, the rod-shaped body 411, the annular limiting platform 412, the upper flange 413, the air outlet channel 414, the lower flange 415, the coolant inlet 421, the coolant outlet 422, the second convex part 4111, the linear groove 4112. Detailed implementation manners

[0037] In order to make the purpose, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the drawings and specific implementation manners.

[0038] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present invention.

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "resin", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0040] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0041] In the present utility model, unless otherwise clearly defined and limited, terms such as "installed", "connected", "connected to", "fixed" and the like shall be construed in a broad sense. For example, it may be a connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0042] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0043] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.

[0044] Embodiment 1

[0045] Please refer to Figures 1 to 10, this embodiment provides an air distribution mechanism 100 with a cooling structure, and the air distribution mechanism 100 with a cooling structure includes: an air distribution component 1 and at least one air outlet component 4 connected to the air distribution end of the air distribution component 1. In this embodiment, there are four air outlet components, namely, air outlet component 4, air outlet component 5, air outlet component 6 and air outlet component 7, and the above four air outlet components 4 (5, 6, 7) are distributed in a cross shape. In other embodiments, the number of air outlet components is selected according to actual needs. This embodiment only takes four air outlet components as an example for structural description, but is not limited to this. The specific structure and function are described below by taking the air outlet component 4 as an example.

[0046] The gas distribution component 1 is used to connect to an external gas source and deliver the gas to the gas outlet component 4 (5, 6, 7) in multiple ways. The gas outlet component 4 (5, 6, 7) divides the gas input from the gas distribution component 1 into multiple ways and outputs them to the surface of the deposition carrier respectively. The gas distribution mechanism 100 with a cooling structure can output the gas to a single large deposition chamber with a larger spraying area, and can also deliver the gas to multiple single small deposition chambers in multiple ways.

[0047] The gas distribution component 1 is provided with a gas distribution channel 1110 and a first cooling channel 10 surrounding the gas distribution channel 1110. The gas outlet component 4 is provided with a gas outlet channel 414 and a second cooling channel 410 surrounding the gas outlet channel 414. The gas outlet channel 414 is connected to the gas distribution channel 1110, and the second cooling channel 410 is connected to the first cooling channel 10.

[0048] It can be understood that the air outlet channels 414 in the multiple air outlet components 4 (5, 6, 7) are all connected to the air separation channel 1110 in the air separation component 1, and the second cooling channels 410 in the multiple air outlet components 4 (5, 6, 7) are all connected to the first cooling channel 10 in the air separation component 1, and the coolant and the diverted gas flow unidirectionally in the air separation component 1 and the air outlet component 4 (5, 6, 7).

[0049] During cooling operation, the coolant input from the input port of the first cooling channel 10 first flows through the first cooling channel 10 and flows to the second cooling channel 410 of the gas outlet component 4 connected thereto. At this time, the coolant passing through the same path and flow rate is evenly transported to each gas outlet component 4 (5, 6, 7), so that each position of the gas separation component 1 and each gas outlet component 4 (5, 6, 7) can be cooled in all directions, and the cooling effect and efficiency are basically consistent. Finally, the gas temperature output from each gas outlet component 4 (5, 6, 7) can be kept highly consistent, thereby ensuring the vapor deposition effect and quality.

[0050] The gas distribution channel 1110 and the air outlet channel 414 can be interconnected through a lumen structure provided inside. The first cooling channel 10 and the second cooling channel 410 can also be interconnected through a communication channel provided inside the gas distribution assembly 1 and the air outlet assembly 4, without the need to add an external communication pipeline.

[0051] The coolant circulating in the first cooling channel 10 and the second cooling channel 410 is first input from the inlet of the gas distribution assembly 1 by an external pump body, and then the coolant output from all the air outlet assemblies 4 (5, 6, 7) is collected and cooled before being circulated back to the first cooling channel 10 again. That is, the coolant in multiple air outlet assemblies 4 (5, 6, 7) can be designed in a parallel connection mode, and finally, after being collected, it is circulated back into the gas distribution assembly 1 again.

[0052] Please refer to again Figure 1 , in this embodiment, the gas distribution assembly 1 and the air outlet assemblies 4 (5, 6, 7) are connected by an external pipeline to transport the coolant. Specifically, the gas distribution mechanism 100 with a cooling structure further includes several connecting pipes 2. One end of one connecting pipe 2 is connected to the output port of the first cooling channel 10 of the gas distribution assembly 1, and the other end is connected to the input port of the second cooling channel of one of the air outlet assemblies 4. The second cooling channels 410 of adjacent air outlet assemblies 4 (5, 6, 7) are sequentially connected through the connecting pipe 2. That is, the output port of the second cooling channel 410 of the air outlet assembly 4 is connected to the input port of the second cooling channel of the adjacent air outlet assembly 5 through the connecting pipe 2, and so on. The second cooling channels 410 inside the adjacent air outlet assemblies 4 (5, 6, 7) are sequentially connected in series through the connecting pipe 2 to form a unidirectional flow coolant flow path. Externally, the first cooling channel 10 of the gas distribution assembly 1 and the second cooling channels 410 of the air outlet assemblies 4 (5, 6, 7) are sequentially connected in series through the connecting pipe 2. Heat of the coolant can be released to the outside at the connecting pipe 2, reducing the temperature of the coolant entering the second cooling channel 410, thereby improving the cooling efficiency, and the external connection by the connecting pipe 2 is also more convenient for later maintenance.

[0053] In order to ensure that the coolant cools each location in the second cooling channel 410, the coolant input port and output port of the gas outlet component 4 are respectively arranged near the two end positions of the gas outlet component 4. Taking the adjacent gas outlet components 4 and gas outlet components 5 as an example, the coolant output port of the second cooling channel 410 in the gas outlet component 4 is connected to one of the connecting pipes 2, where the coolant output port is arranged near the outer end of the gas outlet component 4, and the other end of the connecting pipe 2 is connected to the coolant input port of the second cooling channel in the gas outlet component 5, where the coolant input port is arranged near the inner end of the gas outlet component 5, and so on, all the gas outlet components 4 (5, 6, 7) are connected in series. The design of the connection positions at both ends of the connecting pipe 2 allows the coolant to flow through each location as much as possible, thereby improving the cooling efficiency of the diverted gas.

[0054] Please refer again Figure 4 and Figure 5 , the second cooling channel 410 is a one-way flow structure design extending from the coolant inlet to the outlet direction. That is, the second cooling channel 410 extends from the coolant inlet to the outlet direction in a trend close to the outlet direction, and there is no structure of the second cooling channel 410 that detours toward the inlet direction. In this embodiment, the second cooling channel 410 is a one-way spiral cooling flow extending around the outside of the outlet channel 414.

[0055] Similarly, please refer to Figure 8 and Figure 10 The first cooling channel 10 is also a one-way flow structure design extending from the coolant inlet to the outlet. The first cooling channel 10 extends in a direction close to the outlet, and there is no return path in any part. In this embodiment, the first cooling channel 10 is a one-way spiral extension flow channel design.

[0056] It can be understood that in this embodiment, the first cooling channel 10 and the second cooling channel 410 are both designed for one-way flow, so that the flow path of the coolant is roughly consistent with the flow direction of the gas distribution channel 1110 and the gas outlet channel 414, thereby ensuring that the gas is cooled more evenly in the gas distribution mechanism, and finally achieving a high degree of consistency in the gas temperature output from the output end of each gas outlet component 4 (5, 6, 7). Of course, in other embodiments, if there is only a requirement for the critical value of the distributed gas temperature (such as the temperature is below the threshold), the first cooling channel 10 and the second cooling channel 410 can also be designed as a circuitous arbitrary flow design. When cooling the gas, the coolant is first introduced until the temperature of each part of the gas distribution mechanism drops below the threshold, and then the gas to be distributed is introduced.

[0057] In addition, the first cooling channel 10 and the second cooling channel 410 in this embodiment adopt a unidirectional spiral extension design, which can also increase the cooling contact area of ​​the coolant and improve the cooling efficiency.

[0058] Specifically, please refer to Figures 6 to 10 , the gas distribution component 1 includes: a gas distribution block 11 and a gas distribution sleeve 12 sleeved outside the gas distribution block 11. A first cooling channel 10 is formed between the outer wall of the gas distribution sleeve 12 and the side wall of the gas distribution block 11.

[0059] The gas distribution block 11 includes: a rod-shaped main body 111, a flange 112 provided at the top end of the rod-shaped main body 111, and a gas distribution disc 113 provided at the bottom end of the rod-shaped main body 111. The gas distribution block 11 is of an integral structure. A gas distribution channel 1110 is opened at the axial position of the rod-shaped main body 111. A plurality of gas distribution airways 1131 communicating with the gas distribution channel 1110 are provided in the gas distribution disc 113. The gas distribution airways 1131 are substantially perpendicular to the gas distribution channel 1110. The air outlet component 4 (5, 6, 7) is connected to the gas distribution disc 113, and the air outlet components 4 (5, 6, 7) are symmetrically distributed with the gas distribution disc 113 as the center. The flange 112 is used for an interface for connecting to an external gas source, and the gas distribution disc 113 is used for quickly assembling with a plurality of external air outlet components 4. In this embodiment, both the rod-shaped main body 111 and the gas distribution sleeve 12 are cylindrical.

[0060] A first convex portion 1111 extending in a curve is provided on the side wall of the rod-shaped main body 111. Grooves 1112 are formed between the first convex portions 1111. When the gas distribution sleeve 12 is sleeved on the rod-shaped main body 111, the top surface of the first convex portion 1111 is in sealing contact with the inner wall of the gas distribution sleeve 12, and the first cooling channel 10 is formed between the groove 1112 and the inside of the gas distribution sleeve 12.

[0061] In another embodiment, the top surface of the first convex portion 1111 and the inner wall of the gas distribution sleeve 12 may also be separated. At this time, the flow rate of the coolant in the first cooling channel 10 will increase, and the first convex portion 1111 can be used to increase the contact area and improve the cooling efficiency.

[0062] Among them, a coolant inlet 121 is provided on one side of the gas distribution sleeve 12 close to the flange 112, and a coolant outlet 122 is provided at one end close to the gas distribution disc 113. Both the inlet 121 and the outlet 122 are communicated with the internal first cooling channel 10.

[0063] Please refer to again Figures 2 to 5 , the air outlet component 4 includes: an air outlet block 41 and an air outlet sleeve 42 sleeved outside the air outlet block 41. A second cooling channel 410 is formed between the air outlet sleeve 42 and the outer wall of the air outlet block 41.

[0064] The air outlet block 41 includes: a rod-shaped body 411, an upper flange 413 disposed at the upper end of the rod-shaped body 411, and a lower flange 415 disposed at the lower end of the rod-shaped body 411. The air outlet channel 414 is opened at the central axis of the rod-shaped body 411, and the air outlet block 41 is of an integral structure.

[0065] A second convex portion 4111 extending in a curve is further provided on the side wall of the rod-shaped body 411. Linear grooves 4112 are formed between the second convex portions 4111. When the air outlet sleeve 42 is assembled on the rod-shaped body 411, the top surface of the second convex portion 4111 is hermetically abutted against the inner wall of the air outlet sleeve 42, and the linear grooves 4112 and the inner wall of the air outlet sleeve 42 together enclose the second cooling channel 410.

[0066] Similarly, the second convex portion 4111 and the inner wall of the air outlet sleeve 42 can also be separately provided.

[0067] In order to quickly assemble the air outlet sleeve 42 and the air outlet block 41 in place, an annular limiting platform 412 is further provided on the side wall of the rod-shaped body 411 near the upper flange 413, and the top edge of the air outlet sleeve 42 abuts against the annular limiting platform 412.

[0068] As Figure 4 shown, a coolant inlet 421 and a coolant outlet 422 are further provided on the air outlet sleeve 41. The coolant inlet 421 and the coolant outlet 422 are respectively disposed near the upper flange 413 and the lower flange 415, and are both communicated with the second cooling channel 410.

[0069] Please refer to Figure 1 、 Figure 4 and Figure 9 again. The gas distribution assembly 1 and the air outlet assemblies 4 (5, 6, 7) are both connected and fixed by the quick lock 3. Specifically, a plurality of side flanges 114 are further provided on the outer side wall of the gas distribution disc 113. The side flanges 114 are docked with the upper flange 413, and then the two are connected and fixed from the docking position by the quick lock 3. The quick lock 3 includes an upper buckle and a lower buckle hinged at one end, and a manual bolt rotatably connected to the other end of the upper buckle. A clamping groove adapted to the manual screw is provided at the other end of the lower buckle. The quick lock 3 can quickly assemble the gas distribution assembly 1 and the air outlet assemblies 4 (5, 6, 7). The quick lock 3 is a conventional existing quick locking part and will not be specifically described herein. Using the quick lock 3 to connect the gas distribution assembly 1 and the air outlet assemblies 4 (5, 6, 7) can not only improve the assembly efficiency, but also increase or decrease the number of air outlet assemblies as needed, and is convenient for later maintenance.

[0070] The gas distribution mechanism 100 with a cooling structure in this embodiment can cool the shunted special gas by setting a unidirectional flow cooling channel in the gas distribution component 1 and the gas outlet components 4 (5, 6, 7) and introducing a coolant. The internally arranged cooling channel is arranged to extend spirally in one direction, and the coolant flows unidirectionally, so that all-round cooling treatment can be carried out on each gas distribution channel and gas outlet channel. The pipeline design is simple, and the cooling efficiency is improved at the same time.

[0071] Embodiment 2

[0072] This embodiment also provides a thin film deposition device, which includes the gas distribution mechanism 100 with a cooling structure as described in Embodiment 1.

[0073] The thin film deposition device adopting the gas distribution mechanism 100 with a cooling structure as described in Embodiment 1 can keep the output temperature of the shunted gas consistent, improve the quality and efficiency of thin film deposition, and at the same time adopt a unidirectional cooling circuit design, with a relatively high cooling efficiency.

[0074] The above only further illustrates the technical content of the present invention with embodiments to make it easier for readers to understand, but it does not mean that the implementation manners of the present invention are limited to this. Any technical extension or re-creation based on the present invention is protected by the present invention. The protection scope of the present invention is subject to the claims.

Claims

1. An air distribution mechanism with a cooling structure, characterized in that: include: An air separation component, wherein the air separation component is provided with an air separation channel and a first cooling channel surrounding the air separation channel; At least one gas outlet component, the gas outlet component is connected to the gas separation end of the gas separation component, and the gas outlet component is provided with a gas outlet channel and a second cooling channel surrounding the gas outlet channel; Wherein, the air outlet channels are all connected to the air distribution channels, and the second cooling channels are all connected to the first cooling channels.

2. The air distribution mechanism with a cooling structure according to claim 1, characterized in that: The first cooling channel and / or the second cooling channel is a cooling liquid flow channel extending unidirectionally from a cooling liquid inlet end to an outlet end.

3. The air distribution mechanism with a cooling structure according to claim 1, characterized in that: The first cooling channel and / or the second cooling channel is a cooling liquid channel that is spirally extended in one direction from a cooling liquid inlet end to an outlet end.

4. The air distribution mechanism with a cooling structure according to any one of claims 1 to 3, characterized in that: The gas distribution mechanism with a cooling structure also includes a plurality of connecting tubes, one of which connects the first cooling channel with the second cooling channel of one of the gas distribution components, and the remaining connecting tubes connect the second cooling channels of adjacent gas outlet components in sequence.

5. The air distribution mechanism with a cooling structure according to claim 4, characterized in that: One end of the connecting pipe connecting the second cooling channels in the adjacent gas outlet components is connected to one end of the gas outlet component close to the gas distribution component, and the other end is connected to one end of the gas outlet component away from the gas distribution component.

6. The air distribution mechanism with a cooling structure according to claim 5, characterized in that: The gas separation component includes: an gas separation block and an gas separation sleeve sleeved on the outside of the gas separation block, the gas separation channel is opened along the axial direction of the gas separation block, the gas separation block and the side wall of the gas separation sleeve together enclose the first cooling channel, and the gas separation sleeve is provided with a coolant inlet near the top end and a coolant outlet near the bottom end.

7. The air distribution mechanism with a cooling structure according to claim 6, characterized in that: The gas distribution block includes: a rod-shaped main body, a top flange plate arranged at the top end of the rod-shaped main body, and a gas distribution plate arranged at the bottom end of the rod-shaped main body, wherein the gas distribution plate is provided with a plurality of gas distribution channels connected to the gas distribution channels, the gas outlet components are connected to the gas distribution plate, and the gas outlet components are symmetrically distributed with respect to the gas distribution plate.

8. The air distribution mechanism with a cooling structure according to claim 7, characterized in that: A first protrusion extending in a curve is provided on the side wall of the rod-shaped body, and the top surface of the first protrusion is sealed against the inner wall of the gas separation sleeve, so that the first cooling channel is formed between the gas separation sleeve and the rod-shaped body.

9. The air distribution mechanism with a cooling structure according to claim 4, characterized in that: The air outlet assembly includes: an air outlet block and an air outlet sleeve sleeved outside the air outlet block, the air outlet channel is opened along the axial direction of the air outlet block, and the air outlet block and the side wall of the air outlet sleeve together enclose the second cooling channel.

10. The air distribution mechanism with a cooling structure according to claim 9, characterized in that: The air outlet block includes: a rod-shaped body, an upper flange plate arranged at the top end of the rod-shaped body, a lower flange plate arranged at the lower end of the rod-shaped body, and an annular limit platform arranged on the outer wall of one end of the rod-shaped body close to the upper flange plate, and the top end of the air outlet sleeve abuts against the annular limit platform.

11. The air distribution mechanism with a cooling structure according to claim 10, characterized in that: A second protrusion extending in a curve is provided on the side wall of the rod-shaped body, and the top surface of the second protrusion is sealed against the inner wall of the outlet sleeve, so that the second cooling channel is formed between the outlet sleeve and the rod-shaped body.

12. The air distribution mechanism with a cooling structure according to claim 4, characterized in that: The air inlet end of the air outlet component and the air separation end of the air separation component are connected by a quick lock.

13. A thin film deposition device, characterized in that: It comprises an air distribution mechanism with a cooling structure as described in any one of claims 1 to 12.

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