Silicon core furnace

Abstract

The utility model discloses a silicon core furnace. Comprising a support, a motor, a crystal rotating mechanism and a lifting mechanism, the crystal rotation mechanism comprises a driving gear and at least two layers of gear sets sequentially arranged in the radial direction of the driving gear, each layer of gear set comprises a plurality of driven gears evenly arranged in the circumferential direction of the driving gear, and all the driven gears in the gear set on the innermost side are meshed with the driving gear. Each driven gear is meshed with one or two driven gears in the gear set adjacent to the driven gear, at least part of the driven gears are used for being connected with seed crystals, the driving gear and the driven gears are rotationally arranged on the support, the driving gear is arranged in the center of the support, and the driven gears are arranged in the center of the support. The driving gear and the driven gear are in coaxial transmission with an output shaft of the motor, and the axis of the driving gear and the axis of the driven gear extend in the vertical direction; the lifting mechanism comprises a lifting machine and a connecting assembly, the connecting assembly is connected with the support, and the lifting machine is connected with the connecting assembly and used for driving the support to ascend and descend. According to the crystal rotation mechanism, the driving gear is arranged in the center of the support, and the multiple layers of gear sets are evenly distributed on the peripheral side of the driving gear in the radial direction of the driving gear, so that the torque of the motor is evenly and stably transmitted to each driven gear through the driving gear, and then the dynamic stability between the whole crystal rotation mechanism and the support is improved.

Description

Technical Field

[0001] The present application relates to the technical field of silicon core production equipment, and in particular to a silicon core furnace. Background Art

[0002] Silicon cores are mainly used in the production of high-purity polysilicon. The silicon cores used in the photovoltaic field are mostly produced by the direct pulling method to first produce multi-wafer rods, and then cut the multi-wafer rods into square silicon cores. At present, in order to improve the production efficiency of silicon cores, the industry has begun to try to pull multiple seed crystals at a time to pull multiple multi-wafer rods in the same furnace.

[0003] During the pulling process, it is necessary to control multiple seed crystals to rotate along their respective central axes, and at the same time, the seed crystals need to be pulled in the vertical direction. During the entire pulling process, it is easy for the rotation or lifting of the seed crystals to be unstable, and it is easy for the seed crystals to vibrate or shake, which in turn affects the yield and drawing efficiency. Utility Model Content

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a silicon core furnace to solve the problem of instability of seed crystals during the pulling process when multiple seed crystals are pulled at one time.

[0005] The present application provides a silicon core furnace, comprising:

[0006] Bracket;

[0007] A motor, mounted on the bracket;

[0008] A crystal rotation mechanism, comprising a driving gear and at least two layers of gear sets arranged in sequence along the radial direction of the driving gear, each layer of the gear sets comprising a plurality of driven gears evenly arranged along the circumference of the driving gear, all the driven gears in the innermost gear set mesh with the driving gear, each of the driven gears meshes with one or two driven gears in the gear sets adjacent thereto, at least part of the driven gears are used to connect with seed crystals, the driving gear and the driven gears are both rotatably arranged on the bracket, the driving gear is arranged at the center of the bracket and is coaxially driven with the output shaft of the motor, and the axes of the driving gear and the driven gear both extend in the vertical direction;

[0009] The lifting mechanism comprises a lifting machine and a connecting assembly, wherein the connecting assembly is connected to the bracket, and the lifting machine is connected to the connecting assembly and is used to drive the bracket to rise and fall.

[0010] By arranging the driving gear at the central position of the bracket and arranging the multi-layer gear set radially and uniformly around the driving gear on the circumferential side of the driving gear, the driving gear can transmit the torque of the motor to each driven gear evenly and stably, thereby improving the dynamic stability between the entire crystal rotation mechanism and the bracket.

[0011] Optionally, the crystal rotation mechanism further includes an external gear ring coaxially arranged with the driving gear. The external gear ring is sleeved outside the outermost gear set and meshes with all the driven gears in the outermost gear set.

[0012] Based on the above setting of the external gear ring, the external gear ring can cooperate with the driving gear to surround all the driven gears between the two, so that all the driving gears, driven gears and the external gear ring are connected and form a whole, thereby improving the smoothness of the driving gear, driven gear and the external gear ring during rotation.

[0013] Optionally, the bracket includes a top plate and a bottom plate arranged up and down. The connecting component is connected to the top plate. The motor is fixedly arranged on the top plate, and the output shaft of the motor passes through the top plate and is in transmission connection with the driving gear; both the driving gear and the driven gears are rotatably arranged between the top plate and the bottom plate; through holes corresponding to the driven gears one by one are formed on the bottom plate.

[0014] Optionally, the bracket further includes a plurality of first connecting columns uniformly arranged along the periphery of the top plate. The top plate and the bottom plate are connected by the plurality of first connecting columns.

[0015] Optionally, the silicon core furnace further includes a plurality of heat insulation plates arranged at intervals vertically below the bracket and a plurality of second connecting columns; the heat insulation plates adjacent to the bracket and the bracket, and between adjacent heat insulation plates are all connected by the second connecting columns; avoidance holes corresponding to the driven gears one by one are provided on the heat insulation plates.

[0016] Based on the above embodiments, by arranging a plurality of heat insulation plates below the bracket through the second connecting columns, the damage to the motor caused by the high temperature in the main furnace chamber can be effectively blocked. The avoidance holes are for the tungsten wire ropes connecting the seed crystals to pass through. The top ends of the tungsten wire ropes are connected to the driven gears, and the bottom ends are connected to the seed crystals; when the driven gears rotate, the tungsten wire ropes can be driven to rotate synchronously, and then the seed crystals can be driven to rotate.

[0017] Optionally, the second connecting columns between the heat insulation plate adjacent to the bracket and the bracket and the second connecting columns between adjacent heat insulation plates are arranged staggeredly in the vertical projection.

[0018] In the above embodiments, the high temperature in the main furnace chamber is gradually transmitted upward through the heat insulation plate and the second connecting columns. By staggering the second connecting columns of each layer, the heat transfer path can be extended by using the staggered arrangement of the second connecting columns, thereby delaying the rate of heat transfer from the heat insulation plate at the bottom layer to the motor located at the central position above the heat insulation plate at the top layer, and thus better protecting the motor. The staggered arrangement of the second connecting columns of each layer can also make the overall structure formed by all the heat insulation plates connected by the second connecting columns more stable. The overall structure formed by connecting all the heat insulation plates has more connection points, and each connection point restricts each other, so that the overall structure formed by connecting all the heat insulation plates through the second connecting columns can also be more stable when following the bracket to move up and down.

[0019] Optionally, the silicon core furnace further includes a limiting plate disposed below the bracket, and the limiting plate is provided with limiting grooves corresponding to the driven gears one by one.

[0020] In the above embodiments, the limiting plate can specifically be made of molybdenum or other high-temperature resistant materials, so that it can not only block the thermal radiation in the crucible, but also fix the molybdenum weights, prevent adjacent molybdenum weights from colliding with each other, and ensure the stability of the relative positions of all molybdenum weights, thereby ensuring the stability of the entire crystal rotation mechanism and the bracket when moving up and down.

[0021] Optionally, all the driven gears have the same size.

[0022] Optionally, the distance between the base circle of the driving gear and the base circles of the driven gears of the innermost gear set is 0.05 mm to 0.3 mm; and / or, the distance between the base circles of the driven gears of adjacent gear sets is 0.05 mm to 0.3 mm.

[0023] Based on the above limitations on the distance between the base circle of the driving gear and the base circle of the adjacent driven gear and the distance between the base circles of two adjacent driven gears, it can not only ensure the normal transmission between the gears, but also effectively prevent the gears from jamming, thereby ensuring the reliability of the silicon core furnace.

[0024] Optionally, the number of the connecting components is three, and the three connecting components are evenly arranged on the bracket along the circumferential direction of the driving gear.

[0025] In the above embodiments, by hoisting the bracket with three connecting components evenly arranged along the circumferential direction of the driving gear, the hoisting is stable and reliable, and thus the bracket can provide stable and reliable support for all the seed crystals.

[0026] Optionally, the gear set is arranged in at least three layers along the radial direction of the driving gear. The driven gears located in the odd layers arranged successively outward along the radial direction of the driving gear are all used to connect the seed crystals, or the driven gears located in the even layers arranged successively outward along the radial direction of the driving gear are all used to connect the seed crystals.

[0027] Through the above arrangement of the driving gear and the driven gears, it can be ensured that all the seed crystals can rotate in the same direction under the drive of the motor. Furthermore, when the sizes of all the driven gears are the same, all the seed crystals can maintain the same rotation speed and the same rotation direction during the drawing process, significantly improving the dynamic stability of the seed crystals in the silicon core furnace.

[0028] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects:

[0029] By arranging the driving gear at the central position of the bracket and arranging the multi-layer gear set evenly along the radial direction of the driving gear on the circumferential side of the driving gear, the driving gear can transmit the torque of the motor evenly and stably to each driven gear, thereby improving the dynamic stability between the entire crystal rotation mechanism and the bracket.

[0030] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Referring to the accompanying drawings, the disclosure of the present application will become more understandable. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the protection scope of the present application. In addition, similar numbers in the figures are used to represent similar components, where:

[0032] Figure 1 is a schematic structural diagram of a silicon core furnace in one embodiment of the present application;

[0033] Figure 2 is a schematic structural diagram of a part between the crystal rotation mechanism and the seed crystal in the silicon core furnace in one embodiment of the present application;

[0034] Figure 3 is a schematic structural diagram of the crystal rotation mechanism and the heat insulation plate in one embodiment of the present application;

[0035] Figure 4 is a schematic structural diagram of the crystal rotation mechanism and the heat insulation plate installed on the bottom plate in one embodiment of the present application;

[0036] Figure 5 is a schematic structural diagram of the crystal rotation mechanism with an external gear ring in one embodiment of the present application;

[0037] Figure 6 This is a schematic diagram of the structure of a limiting plate in one of the embodiments of the present application.

[0038] Description of Reference Numerals

[0039] 1. Bracket; 11. Bottom plate; 12. Top plate; 2. Motor; 3. Crystal transfer mechanism; 31. Driving gear; 32. Driven gear; 33. Outer gear ring; 4. Connecting assembly; 51. Seed crystal; 52. Tungsten wire rope; 53. Molybdenum weight; 61. Heat insulation board; 611. Avoidance hole; 62. Limiting plate; 621. Limiting groove; 71. First connecting column; 72. Second connecting column. DETAILED DESCRIPTION

[0040] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0041] At present, when pulling multiple wafer rods, it is necessary to control the rotation of multiple seed crystals along their respective central axes, and at the same time, the seed crystals need to be pulled in the vertical direction. During the entire pulling process, it is easy for the rotation or lifting of the seed crystals to be unstable, and it is easy for the seed crystals to vibrate or shake, thereby affecting the yield and pulling efficiency.

[0042] Based on this, the present application provides a silicon core furnace, which can enable the driving gear to evenly and stably transmit the torque of the motor to each driven gear by setting a driving gear at the center position of the bracket and arranging the multi-layer gear group evenly on the circumferential side of the driving gear along the radial direction of the driving gear, thereby improving the dynamic stability between the entire crystal rotation mechanism and the bracket.

[0043] The present application will be described in detail below through specific embodiments.

[0044] Reference Figures 1 to 4As shown in the figure, this embodiment provides a silicon core furnace, which includes: a bracket 1, a motor 2, a crystal rotation mechanism 3 and a lifting mechanism; the motor 2 is installed on the bracket 1; the crystal rotation mechanism 3 includes a driving gear 31 and at least two layers of gear sets arranged in sequence along the radial direction of the driving gear 31. Each layer of gear set includes a plurality of driven gears 32 evenly arranged along the circumferential direction of the driving gear 31. All the driven gears 32 in the innermost gear set are meshed with the driving gear 31, and each driven gear 32 is meshed with one or two driven gears 32 in the adjacent gear set. At least some of the driven gears 32 are used to connect the seed crystal 51; it should be noted that the seed crystals 51 need to be evenly arranged along the circumferential direction of the driving gear 31, that is to say, the driven gears 32 located in the same layer for connecting the seed crystals 51 are spaced the same from each other. The driving gear 31 and the driven gears 32 are both rotatably arranged on the bracket 1, and the driving gear 31 is arranged at the central position of the bracket 1; the lifting mechanism includes a lifting machine and a connecting component 4. The connecting component 4 is connected to the bracket 1, and the lifting machine is connected to the connecting component 4 and is used to drive the bracket 1 to lift and lower.

[0045] Specifically, the motor 2 directly drives the driving gear 31 to rotate through the output shaft. The driving gear 31 starts to rotate at the central position of the bracket 1, and then drives all the driven gears 32 in the innermost gear set adjacent to the driving gear 31 to start rotating. All the driven gears 32 in the innermost gear set continue to drive all the driven gears 32 in the adjacent outer layer of gear set along the radial direction of the driving gear 31 to rotate together, and are transmitted outwards in sequence, so as to realize the driving gear 31 driving all the driven gears 32 in all the gear sets to rotate together.

[0046] It should be noted that the bracket 1 can be a plate-like structure or a three-dimensional structure of a regular shape, etc. The driving gear 31 can be specifically coaxially arranged with the bracket 1. The bracket 1 can also be of an irregular shape, as long as it is ensured that the axis of the driving gear 31 passes through the central position of the bracket 1, so that after the driving gear 31 is arranged on the bracket 1, whether the driving gear 31 is in a static state or a rotating state, both of them can jointly maintain a stable state, and there will be no actions such as shaking and swinging perpendicular to the vertical direction. And the driving gear 31 is coaxially driven with the output shaft of the motor 2, and the axes of the driving gear 31 and the driven gears 32 all extend along the vertical direction.

[0047] In the silicon core furnace provided by this application, by arranging the driving gear 31 at the central position of the bracket 1 and arranging multiple layers of gear sets evenly along the radial direction of the driving gear 31 on the circumferential side of the driving gear 31, the driving gear 31 can evenly and stably transmit the torque of the motor 2 to each driven gear 32, thereby improving the dynamic stability between the entire crystal rotation mechanism 3 and the bracket 1.

[0048] Continue to refer to Figure 5As shown, in some embodiments, the crystal rotation mechanism 3 further includes an external gear ring 33 coaxially arranged with the driving gear 31. The external gear ring 33 is sleeved outside the outermost gear set and meshes with all the driven gears 32 in the outermost gear set. It should be understood that the multi-layer gear sets are radially arranged between the outside of the driving gear 31 and the inside of the external gear ring 33. All the driven gears 32 in the innermost gear set mesh with the driving gear 31, and all the driven gears 32 in the outermost gear set mesh with the external gear ring 33.

[0049] Through the arrangement of the external gear ring 33, the external gear ring 33 can cooperate with the driving gear 31 to surround all the driven gears 32 between the two, so that all the driving gears 31, driven gears 32 and the external gear ring 33 are connected and form a whole, thereby improving the smoothness of the driving gear 31, driven gears 32 and the external gear ring 33 during rotation.

[0050] Continue to refer to Figure 1 As shown, in some alternative embodiments, the bracket 1 includes a top plate 12 and a bottom plate 11 arranged up and down. The connecting assembly 4 is connected to the top plate 12. The motor 2 is fixedly arranged on the top plate 12, and the output shaft of the motor 2 passes through the top plate 12 and is in transmission connection with the driving gear 31. The driving gear 31 and the driven gears 32 are both rotatably arranged between the top plate 12 and the bottom plate 11. Through holes corresponding to the driven gears 32 one by one are formed on the bottom plate 11.

[0051] It should be noted that the motor 2 is arranged on the top plate 12, which will not interfere with the arrangement of the seed crystal 51 below the bracket 1, and at the same time is convenient for the arrangement of the motor wires of the motor 2, and the motor wires do not need to pass through the bracket 1 and extend below the bracket 1.

[0052] It should be understood that both the top plate 12 and the bottom plate 11 can have a set gap from the driving gear 31 and the driven gears 32, and both the top plate 12 and the bottom plate 11 are rotatably connected to the rotating shafts of the driving gear 31 and each driven gear 32 to ensure that the driving gear 31 and each driven gear 32 can rotate smoothly, reduce friction, and can also be stably supported by the top plate 12 and the bottom plate 11. Specifically, the rotating shaft of the driving gear 31 is rotatably matched with the top plate 12 and the bottom plate 11 through two bearings respectively, and the rotating shaft of each driven gear 32 is rotatably matched with the top plate 12 and the bottom plate 11 through two bearings respectively.

[0053] In some embodiments, the bracket 1 further includes a plurality of first connecting columns 71 uniformly arranged along the periphery of the top plate 12. The top plate 12 and the bottom plate 11 are connected through the plurality of first connecting columns 71. Further, the first connecting columns 71 extend in the vertical direction.

[0054] The first connecting column 71 can ensure the connection reliability between the top plate 12 and the bottom plate 11, and also ensure the stability of the relative position relationship between the top plate 12 and the bottom plate 11; specifically, the first connecting column 71 can be arranged at the gap between two adjacent driven gears 32; it can also be arranged at the gap between the driving gear 31 and the driven gear 32; it can also be arranged at the gap between the driven gear 32 and the external gear ring 33, so as to reduce the radial dimension of the bracket 1.

[0055] Continue to refer to Figures 1 to 4 As shown, in some embodiments, the silicon core furnace further includes a plurality of heat insulation plates 61 arranged at intervals in the vertical direction below the bracket 1, and a plurality of second connecting columns 72; the heat insulation plates 61 adjacent to the bracket 1 and the adjacent heat insulation plates 61 are connected by the second connecting columns 72.

[0056] By arranging the second connecting columns 72, the stability of the relative position between each layer of heat insulation plates 61 can be ensured, the relative distance between adjacent heat insulation plates 61 can be ensured, and at the same time, all the heat insulation plates 61 can be connected and fixed in series.

[0057] The heat insulation plate 61 is provided with avoidance holes 611 corresponding to the driven gears 32 one by one, and the avoidance holes 611 are for the tungsten wire ropes 52 connecting the seed crystals 51 to pass through. The top end of the tungsten wire rope 52 is connected to the driven gear 32, and the bottom end is connected to the seed crystal 51; when the driven gear 32 rotates, it can drive the tungsten wire rope 52 to rotate synchronously, and then drive the seed crystal 51 to rotate.

[0058] By arranging a plurality of heat insulation plates 61, the heat conduction path can be extended to prevent the motor 2 from being damaged by excessive temperature.

[0059] In some embodiments, as Figure 4 shown, the second connecting columns 72 between the heat insulation plate 61 adjacent to the bracket 1 and the bracket 1 and the second connecting columns 72 between the adjacent heat insulation plates 61 are arranged staggeredly in the vertical projection; it should be noted that the high temperature in the main furnace chamber will gradually transfer upward through the heat insulation plate 61 and the second connecting column 72. By arranging the second connecting columns 72 of each layer staggeredly, the heat transfer path can be extended by using the staggered arrangement of the second connecting columns 72, so as to delay the rate of heat transfer from the bottommost heat insulation plate 61 to the motor 2 located at the central position above the topmost heat insulation plate 61, and thus better protect the motor 2; the staggered arrangement of the second connecting columns 72 of each layer can also make the overall structure formed by all the heat insulation plates 61 connected by the second connecting columns 72 more stable. The overall structure formed by connecting all the heat insulation plates 61 has more connection points, and each connection point restricts each other, so that the overall structure formed by connecting all the heat insulation plates 61 by the second connecting columns 72 can also be more stable when following the bracket 1 to perform the up and down movement.

[0060] Continue to refer to Figure 1 , Figure 2 and Figure 6 As shown, in some embodiments, the silicon core furnace further includes a limiting plate 62 disposed below the bracket 1, and the limiting plate 62 is provided with limiting grooves 621 corresponding to the driven gears 32 one by one.

[0061] It should be noted that the limiting groove 621 is used to limit the molybdenum weight 53 on the tungsten wire rope 52 connecting the seed crystal 51. The molybdenum weight 53 is generally a cylindrical structure, and the limiting groove 621 is a circular through hole matching the windage diameter of the molybdenum weight 53; the limiting plate 62 can specifically be made of molybdenum or other high-temperature resistant materials, so as to not only block the thermal radiation in the crucible, but also fix the molybdenum weight 53, prevent adjacent molybdenum weights 53 from colliding with each other, and ensure the stability of the relative positions of all molybdenum weights 53, thereby ensuring the stability of the entire crystal rotation mechanism 3 and the bracket 1 during ascending and descending.

[0062] Furthermore, the limiting groove 621 at the outer edge of the limiting plate 62 is a semi-circular groove, and the limiting groove 621 in the inner circle is a circular hole groove. Setting the limiting groove 621 at the outer edge of the limiting plate 62 as a semi-circular groove facilitates the connection and separation of the outermost molybdenum weight 53 and the limiting plate 62, and at the same time, the limiting groove 621 at the outer edge can also play a certain limiting effect on the outermost molybdenum weight 53.

[0063] In some embodiments, all the driven gears 32 have the same size; such a setting can ensure that all the driven gears 32 rotate at the same speed, thereby further improving the stability of the bracket 1 and the crystal rotation mechanism 3 when the motor 2 drives the driving gear 31 to rotate. All the seed crystals 51 connected to the driven gears 32 can also rotate at the same speed, further improving the stability of the drawing work in the silicon core furnace.

[0064] In some embodiments, the distance between the base circle of the driving gear 31 and the base circles of the driven gears 32 of the innermost gear set is 0.05 mm to 0.3 mm; and / or, the distance between the base circles of the driven gears 32 of adjacent gear sets is 0.05 mm to 0.3 mm; such a setting can not only ensure the normal transmission between the gears, but also effectively prevent the gears from getting stuck, thereby ensuring the reliability of the silicon core furnace.

[0065] In some embodiments, as Figure 1 shown, the number of the connecting components 4 can be three, and the three connecting components 4 are evenly arranged on the bracket 1 along the circumferential direction of the driving gear 31. By being evenly arranged along the circumferential direction of the driving gear 31, the hoisting is stable and reliable, and thus the bracket 1 itself can provide stable and reliable support for all the seed crystals 51. It can avoid the problem that the bracket 1 cannot maintain a horizontal posture when the hoisting machine drives the connecting component 4 to rise and fall.

[0066] Further, the three connecting components 4 can be respectively connected to the hoisting machine through a tungsten wire rope 52. Each tungsten wire rope 52 can extend in the vertical direction. The three tungsten wire ropes 52 can ensure that the hoisting action of the hoisting machine on the bracket 1 and the crystal rotation mechanism 3 is more stable. It is also possible to twist the three tungsten wire ropes 52 into one tungsten wire rope 52 at positions spaced by the same length from their corresponding connecting components 4, and then extend the one tungsten wire rope 52 formed by twisting the three tungsten wire ropes 52 vertically upward and connect it to the hoisting machine.

[0067] In some embodiments, the gear set is arranged in at least three layers along the radial direction of the driving gear 31. The driven gears 32 located in the odd layers arranged successively outward along the radial direction of the driving gear 31 are all used to connect the seed crystal 51, or the driven gears 32 located in the even layers arranged successively outward along the radial direction of the driving gear 31 are all used to connect the seed crystal 51. Such an arrangement can ensure that all the seed crystals 51 can keep rotating in the same direction under the drive of the motor 2. Furthermore, when the sizes of all the driven gears 32 are the same, it can make all the seed crystals 51 maintain the same rotation speed and the same rotation direction during the drawing process, significantly improving the dynamic stability of the seed crystals 51 in the silicon core furnace.

[0068] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0069] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0070] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limiting the present application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A silicon core furnace, characterized in that: include: Bracket; A motor, mounted on the bracket; A crystal rotation mechanism, comprising a driving gear and at least two layers of gear sets arranged in sequence along the radial direction of the driving gear, each layer of the gear sets comprising a plurality of driven gears evenly arranged along the circumference of the driving gear, all the driven gears in the innermost gear set mesh with the driving gear, each of the driven gears meshes with one or two driven gears in the gear sets adjacent thereto, at least part of the driven gears are used to connect with seed crystals, the driving gear and the driven gears are both rotatably arranged on the bracket, the driving gear is arranged at the center of the bracket and is coaxially driven with the output shaft of the motor, and the axes of the driving gear and the driven gear both extend in the vertical direction; The lifting mechanism comprises a lifting machine and a connecting assembly, wherein the connecting assembly is connected to the bracket, and the lifting machine is connected to the connecting assembly and is used to drive the bracket to rise and fall.

2. The silicon core furnace according to claim 1, characterized in that: The crystal rotation mechanism further includes an outer gear ring coaxially arranged with the driving gear, wherein the outer gear ring is sleeved on the outer side of the outermost gear set and meshes with all driven gears in the outermost gear set.

3. The silicon core furnace according to claim 1, characterized in that: The bracket includes a top plate and a bottom plate arranged up and down, the connecting assembly is connected to the top plate, the motor is fixedly arranged on the top plate, and the output shaft of the motor passes through the top plate and is transmission-connected to the driving gear; the driving gear and the driven gear are both rotatably arranged between the top plate and the bottom plate; and through holes corresponding to the driven gears are opened on the bottom plate.

4. The silicon core furnace according to claim 3, characterized in that: The bracket further includes a plurality of first connection columns uniformly arranged along the periphery of the top plate, and the top plate is connected to the bottom plate via the plurality of first connection columns.

5. The silicon core furnace according to claim 1, characterized in that: The silicon core furnace also includes a plurality of insulation boards arranged vertically at intervals below the bracket, and a plurality of second connecting columns; the insulation boards adjacent to the bracket and the bracket, and adjacent insulation boards are connected through the second connecting columns; and avoidance holes corresponding to the driven gears are provided on the insulation boards.

6. The silicon core furnace according to claim 5, characterized in that: The second connecting columns between the heat insulation board adjacent to the bracket and the bracket, and the second connecting columns between adjacent heat insulation boards are staggered in vertical projection.

7. The silicon core furnace according to claim 1, characterized in that: The silicon core furnace further comprises a limit plate arranged below the bracket, and the limit plate is provided with limit grooves corresponding to the driven gears one by one.

8. The silicon core furnace according to claim 1, characterized in that: All of the driven gears are of the same size.

9. The silicon core furnace according to claim 1, characterized in that: The spacing between the base circle of the driving gear and the base circle of each driven gear of the innermost gear set is 0.05mm-0.3mm; and / or the spacing between the base circles of each driven gear of adjacent gear sets is 0.05mm-0.3mm.

10. The silicon core furnace according to claim 1, characterized in that: The number of the connecting components is three, and the three connecting components are evenly arranged on the bracket along the circumference of the driving gear.

11. The silicon core furnace according to any one of claims 1 to 10, characterized in that: The gear set is arranged in at least three layers along the radial direction of the driving gear, and the driven gears located in odd-numbered layers and arranged sequentially along the radial direction outward of the driving gear are all used to connect the seed crystals, or, the driven gears located in even-numbered layers and arranged sequentially along the radial direction outward of the driving gear are all used to connect the seed crystals.

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