Auxiliary tool for measuring roughness of arc target material
By designing an auxiliary tool for the detection of the arc surface roughness of the target material, the problems of unstable placement of the target material sample and low measurement accuracy are solved, and efficient and accurate detection results are achieved.
Patent Information
- Application Number
- CN202422180288.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-05
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-09-05
AI Technical Summary
During the detection of the arc surface roughness of the target material, the target material sample is prone to rolling and unstable placement, and the probe of the measuring instrument cannot be the same plane as the measuring surface, resulting in poor data accuracy and low inspection efficiency.
A circular target roughness measurement auxiliary tool is designed, including a finished fixing frame and a measuring instrument fixing frame. Through a height adjustment mechanism and a horizontal slip assembly, it is convenient for staff to use detection instruments to measure the roughness of the outer circumference of the target arc.
It improves the accuracy and efficiency of target roughness detection, ensures that the measuring instrument is connected to the target surface, and reduces measurement errors and operation difficulty.
Smart Images
Figure CN222964638U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of target processing, and in particular to an auxiliary tool for measuring the roughness of an arc target. Background Art
[0002] A target is the material source for sputtering and depositing thin films, also known as a sputtering target. It is mainly used in advanced surface engineering technologies such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) to generate thin film materials with specific functions, and is the cornerstone of modern thin film preparation technology.
[0003] There are many types of sputtering targets, such as elemental targets, alloy targets, and ceramic targets. According to the shape, they can be divided into arc targets, rectangular targets, and tubular targets. Their application fields are extensive, and they are essential supporting materials in fields such as aerospace, semiconductors, flat panel displays, photovoltaic cells, and industrial molds, playing a crucial role in the field of high-end equipment manufacturing.
[0004] When some cylindrical targets (such as a D50*200mm chromium target) are used for PVD coating, in addition to being connected and fixed to the target position of the coating equipment through threads, the outer cylindrical surface also needs to be sealed and protected to prevent reverse sputtering deposition on the outer cylindrical surface. Therefore, such targets have very high requirements for the surface finish of the outer circle, generally requiring Ra0.4 or higher, and generally need to be measured using a roughness measuring instrument.
[0005] In the prior art, when measuring the surface finish of the arc surface of a target, it is usually necessary for an operator to hold the target firmly with one hand and hold the roughness measuring instrument with the other hand for detection. During the detection of the roughness of the arc surface of the target, there are problems such as the target sample being prone to rolling, being unstable when placed, and the probe of the roughness measuring instrument not being coplanar with the measurement surface. When batch detection is required, the data accuracy is poor and the inspection efficiency is low. Summary of the Utility Model
[0006] In order to facilitate the staff to detect the roughness of the arc surface of the target, this application provides an auxiliary tool for measuring the roughness of an arc target.
[0007] An auxiliary tool for measuring the roughness of an arc target provided by this application adopts the following technical solutions:
[0008] An auxiliary tool for measuring the roughness of an arc-shaped target, comprising a finished product fixing frame and a measuring instrument fixing frame, wherein the finished product fixing frame and the measuring instrument fixing frame are arranged adjacent to each other; the finished product fixing frame includes a base, a first workbench and a second workbench, the first workbench is fixedly arranged on the base, the first workbench is used for placing the target or the second workbench, and the second workbench is provided with a fixing groove for placing the arc surface of the target; the measuring instrument fixing frame includes a mounting frame, a height adjusting mechanism and a first placing plate; the height adjusting mechanism is fixedly arranged on the mounting frame, and the driving end of the height adjusting mechanism moves in the vertical direction, the first placing plate is fixedly arranged on the driving end of the height adjusting mechanism, and the first placing plate is horizontally arranged, and the first placing plate is used for placing a detection instrument, and the detection instrument is used for detecting the roughness of the target.
[0009] By adopting the above technical solution, the staff horizontally places the cylindrical target on the second workbench. Subsequently, the staff drives the height adjusting mechanism, and the driving end of the height adjusting mechanism moves the first placing plate to the upper surface of the target; finally, the staff sets the detection instrument on the first placing plate, so as to facilitate the staff to use the detection instrument to measure the roughness of the outer circumference of the arc of the target.
[0010] Thus, when the staff batch-detects the roughness of the target, the detection accuracy of the roughness of the target can be improved, and the detection efficiency of the roughness of the target can be improved.
[0011] The staff can also separate the second workbench from the first workbench and directly place other shaped targets on the first workbench, and use the measuring instrument fixing frame and the detection instrument to detect the roughness of the target.
[0012] Optionally, a plurality of plugging columns are arranged at intervals on one side of the second workbench close to the first workbench, and a plurality of plugging grooves for the plugging columns to be plugged are opened on the first workbench, and the second workbench and the first workbench are plugged and fixed.
[0013] By adopting the above technical solution, the first workbench and the second workbench are plugged and fixed, so that the stability of the second workbench can be improved during the measurement process when the target is placed on the second workbench.
[0014] Optionally, the fixing groove of the second workbench extends into the vertical projection plane of the first placing plate.
[0015] By adopting the above technical solution, the second workbench is extended to the bottom of the first placing plate, so that the fixing effect of the second workbench on the target can be improved, and the risk of the target falling from the first workbench can be reduced.
[0016] Optionally, the first workbench and the second workbench are made of PVC, rubber or silica gel.
[0017] By adopting the above technical solution, flexible materials such as PVC, rubber or silica gel are used to manufacture the first workbench and the second workbench, so as to reduce the scratching of the target during the detection process.
[0018] Optionally, an anti-slip pad is provided on the first placement board, and the measuring instrument is arranged on the anti-slip pad.
[0019] By adopting the above technical solution, there is a large frictional force between the anti-slip pad and the measuring instrument, thereby reducing the sliding of the measuring instrument during the detection process and improving the measurement accuracy of the measuring instrument.
[0020] Optionally, the measuring instrument fixing frame further includes a horizontal sliding assembly, the horizontal sliding assembly includes a slide rail and a second placement board, at least two slide rails are arranged at intervals, the bottom rail of the slide rail is fixedly connected to the first placement board, and the sliding rail of the slide rail is fixedly connected to the second placement board; the second placement board is horizontally arranged, the second placement board is used for placing the measuring instrument, and the second placement board is used for carrying the measuring instrument to be close to or away from the finished product fixing frame.
[0021] By adopting the above technical solution, the staff uses the slide rail and the second placement board to move the measuring instrument, thereby facilitating the staff to batch-detect the target.
[0022] Optionally, the horizontal sliding assembly further includes a flexible limiting member, the flexible limiting member is arranged on the side of the second placement board away from the first placement board, the flexible limiting member is detachably connected to the second placement board, and the flexible limiting member is provided with a receiving groove for receiving the measuring instrument.
[0023] By adopting the above technical solution, the position of the measuring instrument is restricted by the flexible limiting member, which can reduce the sliding of the measuring instrument.
[0024] Optionally, the horizontal sliding assembly further includes a plurality of limiting columns, the flexible limiting member is provided with a plurality of limiting through holes, the second placement board is provided with a plurality of limiting grooves, the limiting through holes correspond to the limiting grooves, and the limiting columns are sequentially inserted into the limiting through holes and the limiting grooves.
[0025] By adopting the above technical solution, the flexible limiting member and the second placement board are temporarily fixed by the limiting columns, thereby facilitating the operation of the staff.
[0026] In summary, the present application includes at least one of the following beneficial technical effects:
[0027] 1. The staff places the cylindrical target horizontally on the second workbench. Subsequently, the staff drives the height adjustment mechanism, and the driving end of the height adjustment mechanism moves the first placement plate to the upper surface of the target. Finally, the staff sets the detection instrument on the first placement plate, so as to facilitate the staff to use the detection instrument to measure the roughness of the outer arc of the target;
[0028] 2. Use the slide rail and the second placement plate to move the measuring instrument, so as to facilitate the staff to batch-detect the targets;
[0029] 3. Limit the position of the measuring instrument through the flexible limiting member, so that when the staff horizontally pushes the slide rail, the sliding of the measuring instrument can be reduced; thus improving the detection accuracy and detection efficiency of the roughness of the target. Description of the Drawings
[0030] Figure 1 It is a schematic diagram showing the structure of the auxiliary tooling in Embodiment 1.
[0031] Figure 2 It is a schematic diagram showing the structure of the auxiliary tooling in Embodiment 1.
[0032] Figure 3 It is a schematic diagram showing the structure of the finished product fixing frame in Embodiment 2.
[0033] Figure 4 It is a schematic diagram showing the structure of the auxiliary tooling in Embodiment 3.
[0034] Figure 5 It is a schematic diagram showing the horizontal sliding assembly in Embodiment 3.
[0035] Figure 6 It is a cross-sectional view showing the horizontal sliding assembly in Embodiment 3.
[0036] Description of the Reference Numerals: 1, measuring instrument fixing frame; 11, mounting frame; 12, height adjustment mechanism; 13, first placement plate; 2, finished product fixing frame; 21, base; 22, first workbench; 221, insertion groove; 23, second workbench; 231, fixing groove; 232, insertion column; 24, anti-slip pad; 3, target; 4, horizontal sliding assembly; 41, slide rail; 42, second placement plate; 421, limiting groove; 43, flexible limiting member; 431, accommodating groove; 432, limiting through hole; 44, limiting column; 45, anti-slip rib; 5, measuring instrument; 6, first magnetic member; 7, second magnetic member. Detailed Description of the Embodiments
[0037] The following further describes the present application in detail Figure 1-6 with reference to the attached
[0038] This application example discloses an auxiliary tool for measuring the roughness of an arc-shaped target. Refer to Figure 1 As shown in the figure, the auxiliary tool for measuring the roughness of the arc-shaped target includes a measuring instrument fixing frame 1 and a finished product fixing frame 2. The finished product fixing frame 2 is arranged adjacent to the measuring instrument fixing frame. In this example, the target 3 is cylindrical, and the roughness of the arc-shaped outer periphery of the target 3 is detected.
[0039] Refer to Figure 1 As shown in the figure, the measuring instrument fixing frame 1 includes a mounting frame 11, a height adjustment mechanism 12, and a first placement plate 13. The height adjustment mechanism 12 is fixedly arranged on the mounting frame 11, and the driving end of the height adjustment mechanism 12 moves in the vertical direction. The first placement plate 13 is fixedly arranged at the driving end of the height adjustment mechanism 12, and the first placement plate 13 is horizontally arranged. The first placement plate 13 is used to place the detection instrument, and the detection instrument is used to detect the roughness of the target 3.
[0040] Refer to Figure 1 As shown in the figure, the height adjustment mechanism 12 is a manually adjustable or automatically adjustable type. Specifically, the height adjustment mechanism 12 can be a lead screw nut mechanism, a belt drive, a chain drive, etc., or a linear motor, an electric push rod, etc. directly. In this example, it is not limited. In this example, the height adjustment mechanism 12 is a hand-cranked lead screw lifting structure, and the hand-cranked lead screw lifting structure is also commonly used in column-type elevators. The hand-cranked lead screw lifting structure has many applications in the prior art, and this example does not show a specific description of the hand-cranked lead screw lifting structure.
[0041] Refer to Figure 1 As shown in the figure, the finished product fixing frame 2 includes a base 21, a first workbench 22, and a second workbench 23. The first workbench 22 is fixedly arranged on the base 21. The first workbench 22 is used to place the target 3 or the second workbench 23. The second workbench 23 is provided with a fixing groove 231 for placing the arc surface of the target 3. The fixing groove 231 of the second workbench 23 extends into the vertical projection plane of the first placement plate 13, which improves the fixing effect of the second workbench 23 on the target 3 and reduces the risk of the target 3 falling from the first workbench 22.
[0042] Refer to Figure 1 As shown in the figure, the first workbench 22 and the second workbench 23 are made of PVC, rubber, or silicone. Flexible materials such as PVC, rubber, or silicone are used to make the first workbench 22 and the second workbench 23 to reduce the scratching of the target 3 during the detection process. In this implementation, the first workbench 22 and the second workbench 23 are made of PVC material.
[0043] The implementation principle of the auxiliary tool for measuring the roughness of an arc-shaped target in this application example is as follows:
[0044] Refer to Figure 1, the staff horizontally places the cylindrical target 3 on the second workbench 23. Subsequently, the staff drives the height adjustment mechanism 12, and the driving end of the height adjustment mechanism 12 moves the first placement plate 13 to the upper surface of the target 3. Finally, the staff sets the detection instrument on the first placement plate 13, so as to facilitate the staff to use the detection instrument to measure the roughness of the outer arc of the target 3.
[0045] Thus, when the staff batch-detects the roughness of the target 3, the detection accuracy of the roughness of the target 3 can be improved, and the detection efficiency of the roughness of the target 3 can be improved.
[0046] Embodiment 2
[0047] The difference between this Embodiment 2 and Embodiment 1 is that:
[0048] Referring to Figure 2 , an anti-slip pad 24 is provided on the first placement plate 13, and the measuring instrument 5 is set on the anti-slip pad 24. There is a large frictional force between the anti-slip pad 24 and the measuring instrument 5, so as to reduce the sliding of the measuring instrument 5 during the detection process and improve the measuring accuracy of the measuring instrument 5.
[0049] Referring to Figure 3 , a plurality of insertion posts 232 are provided at intervals on one side of the second workbench 23 close to the first workbench 22, and a plurality of insertion grooves 221 for the insertion posts 232 to be inserted are provided on the first workbench 22. The second workbench 23 and the first workbench 22 are fixedly connected by insertion. The first workbench 22 and the second workbench 23 are fixedly connected by insertion, so that the stability of the second workbench 23 can be improved when the target 3 is placed on the second workbench 23 during the measurement process.
[0050] Embodiment 3
[0051] The difference between this Embodiment 3 and Embodiment 1 is that:
[0052] Referring to Figure 4 and Figure 5 , the measuring instrument fixing frame 1 further includes a horizontal sliding assembly 4, and the horizontal sliding assembly 4 includes a slide rail 41, a second placement plate 42, a flexible limiting member 43 and a limiting post 44.
[0053] Referring to Figure 4 and Figure 5 , at least two slide rails 41 are provided at intervals, the bottom rail of the slide rail 41 is fixedly connected to the first placement plate 13, and the sliding rail of the slide rail 41 is fixedly connected to the second placement plate 42; the second placement plate 42 is horizontally arranged, and the second placement plate 42 is used to place the measuring instrument 5, and the second placement plate 42 is used to carry the measuring instrument 5 close to or away from the finished product fixing frame 2. Anti-slip ridges 45 are also provided on the second placement plate 42 to facilitate the staff to move the second placement plate 42.
[0054] Reference Figure 4 and Figure 5 A flexible limiting member 43 is disposed on a side of the second storage plate 42 away from the first storage plate 13. The flexible limiting member 43 is detachably connected to the second storage plate 42, and a receiving groove 431 for receiving the measuring instrument 5 is formed in the flexible limiting member 43.
[0055] Reference Figure 4 and Figure 5 The flexible limiting member 43 is provided with a plurality of limiting through holes 432, and the second storage plate 42 is provided with a plurality of limiting grooves 421. The limiting through holes 432 correspond to the limiting grooves 421, and the limiting posts 44 are sequentially inserted into the limiting through holes 432 and the limiting grooves 421. The flexible limiting member 43 and the second storage plate 42 are temporarily fixed by the limiting posts 44, so as to facilitate the operation of the staff.
[0056] Reference Figure 6 In this embodiment, one end of the insertion post 232 is fixedly provided on the first magnetic member 6, and a second magnetic member 7 is fixedly provided at the bottom of the groove of the limiting groove 421. The first magnetic member 6 and the second magnetic member 7 are magnetically fixed to each other, so as to improve the connection strength between the insertion post 232 and the second storage rack and improve the stability of the flexible limiting member 43 for limiting the measuring instrument 5.
[0057] The implementation principle of an auxiliary tool for measuring the roughness of an arc-shaped target material in an embodiment of the present application is as follows:
[0058] When the staff needs to batch-detect the target material 3 or needs to detect multiple detection points of the target material 3, the measuring instrument 5 can be horizontally moved by using the slide rail 41 and the second storage plate 42. When the staff batch-detects the target material 3, after the staff detects one target material 3, the staff moves the second storage plate 42 away from the finished product fixing frame 2, so that the measuring instrument 5 moves out of the detection position, and the staff can replace the next target material 3; finally, the staff moves the second storage plate 42 toward the side close to the finished product fixing frame 2, so that the measuring instrument 5 returns to the detection position again. The staff uses the slide rail 41 and the second storage plate 42 to move the measuring instrument 5, so as to facilitate the staff to batch-detect the target material 3.
[0059] The position of the measuring instrument 5 is restricted by the flexible limiting member 43, so that when the staff horizontally pushes the slide rail 41, the sliding of the measuring instrument 5 can be reduced; thus, the detection accuracy and detection efficiency of the roughness of the target material 3 are improved.
[0060] The above are all the preferred embodiments of the present application. The protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.
Claims
1. An auxiliary tool for measuring the roughness of an arc target, characterized in that: The invention comprises a finished product fixing frame (2) and a measuring instrument fixing frame (1), wherein the finished product fixing frame (2) is arranged adjacent to the measuring instrument fixing frame; the finished product fixing frame (2) comprises a base (21), a first workbench (22) and a second workbench (23), wherein the first workbench (22) is fixedly arranged on the base (21), the first workbench (22) is used for placing a target material (3) or the second workbench (23), and the second workbench (23) is provided with a fixing groove (231) for placing a circular arc surface of the target material (3) The measuring instrument fixed frame (1) comprises a mounting frame (11), a height adjustment mechanism (12) and a first placement plate (13); the height adjustment mechanism (12) is fixedly mounted on the mounting frame (11), and a driving end of the height adjustment mechanism (12) moves in a vertical direction; the first placement plate (13) is fixedly mounted on the driving end of the height adjustment mechanism (12), and the first placement plate (13) is arranged horizontally; the first placement plate (13) is used to place a detection instrument, and the detection instrument is used to detect the roughness of a target material (3).
2. The arc target roughness measurement auxiliary tooling according to claim 1, characterized in that: A plurality of plug-in columns (232) are arranged at intervals on one side of the second workbench (23) close to the first workbench (22); the first workbench (22) is provided with a plurality of plug-in grooves (221) for the plug-in columns (232) to be plugged in; the second workbench (23) is plugged and fixed to the first workbench (22).
3. The arc target roughness measurement auxiliary tooling according to claim 1, characterized in that: The fixing groove (231) of the second workbench (23) extends into the vertical projection plane of the first storage plate (13).
4. The arc target roughness measurement auxiliary tooling according to claim 1, characterized in that: The first workbench (22) and the second workbench (23) are made of PVC, rubber or silicone.
5. The arc target roughness measurement auxiliary tooling according to claim 1, characterized in that: An anti-slip pad (24) is provided on the first storage plate (13), and the measuring instrument (5) is arranged on the anti-slip pad (24).
6. The arc target roughness measurement auxiliary tooling according to claim 1, characterized in that: The measuring instrument fixed frame (1) further comprises a horizontal sliding assembly (4), the horizontal sliding assembly (4) comprising a slide rail (41) and a second storage plate (42), at least two slide rails (41) are arranged at intervals, the bottom rail of the slide rail (41) is fixedly connected to the first storage plate (13), and the sliding rail of the slide rail (41) is fixedly connected to the second storage plate (42); the second storage plate (42) is arranged horizontally, the second storage plate (42) is used to place the measuring instrument (5), and the second storage plate (42) is used to carry the measuring instrument (5) close to or away from the finished product fixed frame (2).
7. The arc target roughness measurement auxiliary tooling according to claim 6, characterized in that: The horizontal sliding assembly (4) further comprises a flexible stopper (43), the flexible stopper (43) being arranged on a side of the second storage plate (42) away from the first storage plate (13), the flexible stopper (43) being detachably connected to the second storage plate (42), and the flexible stopper (43) being provided with an accommodating groove (431) for accommodating a measuring instrument (5).
8. The arc target roughness measurement auxiliary tooling according to claim 7, characterized in that: The horizontal sliding assembly (4) further comprises a plurality of limiting columns (44), the flexible limiting member (43) is provided with a plurality of limiting through holes (432), the second storage plate (42) is provided with a plurality of limiting grooves (421), the limiting through holes (432) correspond to the limiting grooves (421), and the limiting columns (44) are sequentially inserted into the limiting through holes (432) and the limiting grooves (421).