Gas monitoring equipment
By designing a gas monitoring device that includes complex sampling components, shunt devices, detection devices and industrial computers, the problem that traditional systems cannot achieve instant detection and multi-region monitoring is solved, and high-efficiency continuous multi-point detection is achieved, ensuring the air quality monitoring effect in semiconductor manufacturing.
Patent Information
- Application Number
- CN202421628909.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2023-07-20
- Filing Date
- 2024-07-10
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-07-10
AI Technical Summary
Traditional gas monitoring systems cannot provide immediate detection and are difficult to implement multi-region monitoring management, resulting in low detection efficiency of air molecular pollution during semiconductor manufacturing.
A gas monitoring device is designed, including a complex sampling assembly, a shunt device, a detection device and an industrial computer. Through the selective control of the solenoid valve assembly and the rapid rotation of the shunt device, a rapid detection of multiple gas sources to be detected is achieved.
It realizes high-efficiency continuous multi-point detection, which can quickly detect whether gases in different working areas are abnormal, ensuring the safety of the working environment and the yield of product quality.
Smart Images
Figure CN222965200U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a gas monitoring device, in particular to a technical structure improvement of a gas monitoring device for detecting multiple environments. Background Art
[0002] In the semiconductor manufacturing process, the air quality in the clean room environment, especially the air molecular contamination (AMC), has a great impact on the yield of semiconductors. Specifically, AMC may damage the processing equipment, resulting in high costs, low yield, and poor manufacturing quality; AMC may also contaminate the processed products and may thus change the electrical, optical, and physical properties of the processed products, which also leads to problems such as reduced production and poor manufacturing quality. Therefore, monitoring AMC, such as acids (MA), bases (MB), condensables (MC), and dopants (MD), helps to reduce the above problems. However, due to the extremely large area of the factory building, it takes a lot of time and manpower to move the detector to multiple target areas for sampling, so that the traditional monitoring system cannot provide instant detection, or multiple detectors need to be prepared and placed in multiple target areas respectively. In this way, it is not easy to carry out multi-area monitoring and management, and there are deficiencies that need to be improved urgently.
[0003] Therefore, it is necessary to provide a novel and progressive gas monitoring device to solve the above problems. Summary of the Utility Model
[0004] The main purpose of the utility model is to provide a gas monitoring device that can provide high-efficiency continuous multi-point detection.
[0005] To achieve the above object, the utility model provides a gas monitoring device, including a main body, a plurality of sampling components, a flow splitting device, a detection device, and an industrial computer. The plurality of sampling components are detachably assembled to the main body. Each sampling component includes a plurality of sampling inlets, a solenoid valve assembly, and a sampling outlet. The plurality of sampling inlets are respectively communicated with a plurality of gas sources to be detected. The solenoid valve assembly is communicated between the plurality of sampling inlets and the sampling outlet. The solenoid valve assembly can selectively control the communication between the plurality of sampling inlets and the sampling outlet. The flow splitting device is arranged on the main body and communicated with the sampling outlets of the plurality of sampling components. The detection device is arranged on the main body and communicated with the flow splitting device. The flow splitting device can selectively control the communication between the sampling outlets of the plurality of sampling components and the detection device to detect the gases of each gas source to be detected. The industrial computer is arranged on the main body and communicatively connected to the detection device to transmit the values detected by the detection device to the industrial computer for arithmetic analysis.
[0006] Preferably, the plurality of sampling components are detachably slid on the main body.
[0007] Preferably, as an optimization of the above technical solution, the main body is provided with a plurality of slide rail assemblies, and each sampling assembly is slidably disposed on one of the slide rail assemblies detachably.
[0008] Preferably, as an optimization of the above technical solution, the plurality of sampling inlets of each sampling assembly are exposed outside the main body, and the sampling outlet is hidden inside the main body.
[0009] Preferably, as an optimization of the above technical solution, it further includes a first pump device, and the first pump device is connected to the shunt device to transport the gas from the gas source to be detected to the shunt device through the sampling assembly.
[0010] Preferably, as an optimization of the above technical solution, the shunt device includes a plurality of shunt inlets, and the plurality of shunt inlets are respectively connected to the plurality of sampling outlets.
[0011] Preferably, as an optimization of the above technical solution, each sampling assembly further includes a first purge inlet, the first purge inlet is connected to the solenoid valve assembly, the shunt device further includes a plurality of second purge inlets, and the plurality of first purge inlets and the plurality of second purge inlets are further connected to a purge gas source.
[0012] Preferably, as an optimization of the above technical solution, it further includes a second pump device for transporting the purge gas source to the plurality of first purge inlets and the plurality of second purge inlets.
[0013] Preferably, as an optimization of the above technical solution, it further includes a display screen, and the display screen is disposed outside the main body and communicatively connected to the industrial computer to display the result after the industrial computer performs arithmetic analysis.
[0014] Preferably, as an improvement of the above technical solution, the plurality of sampling inlets of each sampling component are exposed outside the body, and the sampling outlet is hidden inside the body; further included is a first pump device, which is connected to the shunt device to transport the gas from the gas source to be detected to the shunt device through the sampling component; the shunt device includes a plurality of shunt inlets, and the plurality of shunt inlets are respectively connected to the plurality of sampling outlets; each sampling component further includes a first purge inlet, and the first purge inlet is connected to the solenoid valve assembly. The shunt device further includes a plurality of second purge inlets, and the plurality of first purge inlets and the plurality of second purge inlets are further connected to a purge gas source; further included is a second pump device for transporting the purge gas source to the plurality of first purge inlets and the plurality of second purge inlets; further included is a display screen, which is arranged outside the body and is communicatively connected to the industrial computer to display the result after the industrial computer performs arithmetic analysis; further included is a warning device, which is arranged outside the body and is communicatively connected to the industrial computer, and when an abnormal value appears, the warning device issues a warning reminder; the warning device is a lighting device. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following briefly introduces the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.
[0016] Figure 1 is a perspective view of a preferred embodiment of the present invention.
[0017] Figure 2 is a perspective view of a preferred embodiment of the present invention.
[0018] Figure 3 is Figure 2 a partially enlarged view of...
[0019] Figure 4 is Figure 2 another partially enlarged view of...
[0020] Figure 5 is another perspective view of a preferred embodiment of the present invention.
[0021] Among them, 1: main body; 11: slide rail assembly; 2: sampling assembly; 21: sampling inlet; 22: solenoid valve assembly; 23: sampling outlet; 24: first purge inlet; 3: shunt device; 31: shunt inlet; 32: second purge inlet; 4: detection device; 5: industrial computer; 61: first pump device; 62: second pump device; 71: display screen; 72: warning device. Detailed implementation manner
[0022] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0023] Please refer to Figures 1 to 5 , which shows a preferred embodiment of the present utility model. The gas monitoring device of the present utility model includes a main body 1, a plurality of sampling assemblies 2, a shunt device 3, a detection device 4 and an industrial computer 5.
[0024] The plurality of sampling assemblies 2 are detachably assembled to the main body 1. Each sampling assembly 2 includes a plurality of sampling inlets 21, a solenoid valve assembly 22 and a sampling outlet 23. The plurality of sampling inlets 21 are respectively connected to a plurality of gas sources to be detected. In this embodiment, the plurality of gas sources to be detected are the ambient gases in different working areas. The solenoid valve assembly 22 is connected between the plurality of sampling inlets 21 and the sampling outlet 23. The solenoid valve assembly 22 can selectively control the connection between the plurality of sampling inlets 21 and the sampling outlet 23.
[0025] The shunt device 3 is disposed on the main body 1 and is connected to the sampling outlets 23 of the plurality of sampling assemblies 2.
[0026] The detection device 4 is disposed on the main body 1 and is connected to the shunt device 3. The shunt device 3 can selectively control the connection between the sampling outlets 23 of the plurality of sampling assemblies 2 and the detection device 4 to detect the gases of the respective gas sources to be detected.
[0027] The industrial computer 5 is disposed on the main body 1 and communicatively connected to the detection device 4 to transmit the values detected by the detection device 4 to the industrial computer 5 for arithmetic analysis. Thus, through the actuation of the solenoid valve assembly 22 of the plurality of sampling components 2 and the shunt device 3, the gases to be detected in different working areas can be quickly alternated to enter the detection device 4 for detection. The utility model can quickly detect whether the gases to be detected in different working areas are abnormal, so as to maintain the safety of the working environment and ensure the product yield. Moreover, since the plurality of sampling components 2 are detachably assembled to the main body 1, the number of the plurality of sampling components 2 can be increased or decreased according to the actual use environment, and it is convenient to replace and maintain the plurality of sampling components 2.
[0028] Specifically, the plurality of sampling components 2 are detachably slidably disposed on the main body 1. In this embodiment, the main body 1 is provided with a plurality of slide rail assemblies 11, and each of the sampling components 2 is detachably slidably disposed on one of the slide rail assemblies 11 for convenient disassembly and assembly.
[0029] Among them, the plurality of sampling inlets 21 of each of the sampling components 2 are exposed outside the main body 1, and the sampling outlet 23 is hidden inside the main body 1. The plurality of sampling inlets 21 being exposed outside the main body 1 can be distinguished and connected to the plurality of gas sources to be detected through pipelines.
[0030] Preferably, the utility model further includes a first pump device 61, and the first pump device 61 is communicated with the shunt device 3 to convey the gas from the gas source to be detected through the sampling component 2 to the shunt device 3, so as to improve the gas flow efficiency.
[0031] In this embodiment, the shunt device 3 includes a plurality of shunt inlets 31, and the plurality of shunt inlets 31 are respectively communicated with the plurality of sampling outlets 23. The shunt device 3 can respectively control the connection between the plurality of sampling outlets 23 and the detection device 4. And the shunt device 3 can perform pre-sampling operations. After the gas to be detected at one of the shunt inlets 31 is detected, it can be quickly switched to make the gas to be detected at another shunt inlet 31 flow into the detection device 4 for detection; or in other embodiments, the detection device 4 has a plurality of detection modules, and the shunt device 3 can quickly introduce the plurality of gases to be detected into the plurality of detection modules to provide continuous multi-point detection and high efficiency, and is not limited thereto.
[0032] Each of the sampling components 2 further includes a first purge inlet 24, and the first purge inlet 24 is communicated with the solenoid valve assembly 22. The shunt device 3 further includes a plurality of second purge inlets 32, and the plurality of first purge inlets 24 and the plurality of second purge inlets 32 are further communicated with a purge gas source.
[0033] It is worth mentioning that the present utility model further includes a second pump device 62 for delivering the purge gas source (such as inert gas like clean air or nitrogen) to the plurality of first purge inlets 24 and the plurality of second purge inlets 32 to clean the plurality of sampling components 2 and the shunt device 3, so as to avoid the mixing of different gas sources to be detected and the resulting inaccuracy of the detection effect.
[0034] Furthermore, the present utility model further includes a display screen 71 which is arranged on the outer side of the body 1 and is communicatively connected to the industrial computer 5 to display the result after the operation and analysis of the industrial computer 5 for the monitoring personnel to view.
[0035] Preferably, the present utility model further includes a warning device 72 which is arranged on the outer side of the body 1 and is communicatively connected to the industrial computer 5. When an abnormal value appears, the warning device 72 issues a warning reminder. In this embodiment, the warning device 72 is a lighting device to achieve an eye-catching reminder effect.
[0036] Among them, the industrial computer 5 is a terminal device such as a desktop computer, a notebook computer, or a tablet computer sold on the market.
[0037] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present utility model.
Claims
1. A gas monitoring device, characterized in that: include: an entity; A plurality of sampling components are detachably assembled to the body, each of the sampling components comprises a plurality of sampling inlets, a solenoid valve component and a sampling outlet, the plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlet, and the solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlet; A flow dividing device, disposed on the body and connected to the sampling outlets of the plurality of sampling components; A detection device, disposed on the body and connected to the flow dividing device, the flow dividing device can selectively control the connection between the sampling outlets of the plurality of sampling components and the detection device, so as to detect the gas of each of the gas sources to be detected; An industrial computer is arranged on the main body and is communicatively connected to the detection device so as to transmit the value detected by the detection device to the industrial computer for calculation and analysis.
2. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling components are detachably and slidably arranged on the main body.
3. The gas monitoring device according to claim 2, characterized in that: The main body is provided with a plurality of slide rail components, and each sampling component is detachably slidably arranged on one of the slide rail components.
4. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling inlets of each sampling component are exposed from the main body, and the sampling outlets are hidden in the main body.
5. The gas monitoring device according to claim 1, characterized in that: A first pump device is also included, and the first pump device is connected to the flow dividing device to transport the gas of the gas source to be detected to the flow dividing device through the sampling component.
6. The gas monitoring device according to claim 1, characterized in that: The flow splitting device comprises a plurality of flow splitting inlets, and the plurality of flow splitting inlets are respectively connected to the plurality of sampling outlets.
7. The gas monitoring device according to claim 1, characterized in that: Each sampling assembly further comprises a first cleaning inlet, which is connected to the electromagnetic valve assembly. The flow dividing device further comprises a plurality of second cleaning inlets, which are connected to a cleaning gas source.
8. The gas monitoring device according to claim 7, characterized in that: A second pump device is further included, and the second pump device is used to deliver the cleaning gas source to the plurality of first cleaning inlets and the plurality of second cleaning inlets.
9. The gas monitoring device according to claim 1, characterized in that: The device further comprises a display screen, which is arranged outside the body and is connected to the industrial computer for communication so as to display the result of the industrial computer's calculation and analysis.
10. The gas monitoring device according to claim 3, characterized in that: The plurality of sampling inlets of each sampling assembly are exposed on the body, and the sampling outlet is hidden in the body; a first pump device is further included, and the first pump device is connected to the flow dividing device to transport the gas of the gas source to be detected to the flow dividing device through the sampling assembly; the flow dividing device includes a plurality of flow dividing inlets, and the plurality of flow dividing inlets are respectively connected to the plurality of sampling outlets; each sampling assembly further includes a first cleaning inlet, and the first cleaning inlet is connected to the solenoid valve assembly, and the flow dividing device further includes a plurality of second cleaning inlets, and the plurality of first cleaning inlets are connected to the plurality of The second cleaning inlet is further connected to a cleaning gas source; a second pump device is further included, and the second pump device is used to transport the cleaning gas source to the plurality of first cleaning inlets and the plurality of second cleaning inlets; a display screen is further included, and the display screen is arranged on the outside of the body and is connected to the industrial computer for communication to display the results of the industrial computer calculation and analysis; an alarm device is further included, and the alarm device is arranged on the outside of the body and is connected to the industrial computer for communication. When an abnormal value appears, the alarm device issues a warning reminder; the alarm device is a light-emitting device.