CVD (Chemical Vapor Deposition) tail gas filtering equipment

Abstract

The utility model discloses CVD (Chemical Vapor Deposition) tail gas filtering equipment, which relates to the technical field of tail gas treatment and comprises a treatment box and a gas inlet mechanism, and the gas inlet mechanism is fixed at the bottom end in the treatment box. According to the CVD tail gas filtering equipment, when acid gas in tail gas is neutralized and absorbed through alkaline liquid in a treatment box, the input end of an air inducing pipe communicates with a tail gas discharging pipe of a vapor deposition box through an induced draft fan; and the output end of the air inducing pipe is communicated with the connecting branch pipes corresponding to the air outlet holes in the air outlet disc through the air inlet header pipe, so that tail gas discharged from the vapor deposition box can be in full contact with treatment liquid in the treatment box, the reaction efficiency is improved, the reaction time is shortened, the exhaust holes in the box cover can be used for discharging purified tail gas, and the environment is protected. The device can also be used for supplementing treatment liquid in the treatment box, invalid treatment liquid can be emptied through a drainage valve on the side face of the treatment box, and the device is reasonable in structural design and higher in applicability.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, and particularly relates to a CVD tail gas filtering device. Background Technique

[0002] In the atomization spraying process of a drug balloon catheter, chemical vapor deposition technology is required. Chemical vapor deposition is a method that uses gaseous substances to undergo chemical reactions under vacuum and high temperature and deposit on a solid substrate to form a product. Tail gas will be generated during the process. Since some gaseous components of the chemical composition are not completely deposited, some chemical gases will be mixed in the tail gas, so the tail gas needs to be filtered.

[0003] The traditional method for treating tail gas is to use a filter screen for filtration, and there is also an operation of discharging the tail gas into a liquid for treatment. However, it is impossible to combine the filter screen filtration with the liquid treatment of the tail gas, resulting in the need for separate treatment by staff, which in turn affects the efficiency of tail gas treatment.

[0004] Therefore, in view of this, in view of the deficiencies of the existing structure, research and improvement are carried out, and a CVD tail gas filtering device is proposed. Content of the Utility Model

[0005] The purpose of the utility model is to provide a CVD tail gas filtering device to solve the problems put forward in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A CVD tail gas filtering device includes a treatment box and an air inlet mechanism. The air inlet mechanism is fixed to the bottom end inside the treatment box. The air inlet mechanism includes an air outlet plate, air outlet holes, connecting branch pipes, an air inlet main pipe, and an air guiding pipe. The air outlet plate is fixed to the bottom end inside the treatment box, and air outlet holes are arranged in an array on the top surface of the air outlet plate. Connecting branch pipes are correspondingly connected to the bottoms of the air outlet holes, and the connecting branch pipes are connected to each branch of the air inlet main pipe. The air inlet main pipe is externally connected with an air guiding pipe, and the air guiding pipe is fixed outside the treatment box.

[0007] Further, the input end of the air guiding pipe is connected to the tail gas discharge pipe of the vapor deposition box through an air guiding fan, and the output end of the air guiding pipe is connected to the connecting branch pipes corresponding to the air outlet holes on the air outlet plate through the air inlet main pipe.

[0008] Further, a drain valve is connected to the bottom side of the treatment box, and the top opening of the treatment box is rotatably installed with a box cover through a hinge.

[0009] Further, a handle is welded and fixed in the middle of the box cover, and exhaust holes are arranged on the side surface of the box cover.

[0010] Further, a convex edge with a circular structure is fixed on the side wall of the treatment box, and the height of the convex edge is greater than the height of the top plane of the air outlet plate.

[0011] Further, a filtering component is disposed inside the processing tank. The filtering component includes a connecting rod and a turning handle. The turning handle is fixed to the top of the connecting rod, and the outer edge of the turning handle is closely attached to the bottom plane of the tank cover.

[0012] Further, the filtering component further includes a filter screen and fastening nuts. Three filter screens are arranged at equal intervals along the extending direction of the connecting rod. The mesh numbers of the three filter screens gradually increase from bottom to top, and the three filter screens are all threadedly fixed to the connecting rod through the fastening nuts.

[0013] Compared with the prior art, the present utility model has the following beneficial effects:

[0014] 1. When the present utility model is in use, when the acidic gas in the tail gas is neutralized and absorbed by the alkaline liquid in the processing tank, the input end of the air draft pipe is connected to the tail gas discharge pipe of the vapor deposition tank through a blower, and the output end of the air draft pipe is connected to the connecting branch pipes corresponding to the respective air outlet holes on the air outlet plate through the intake main pipe, so that the tail gas discharged from the vapor deposition tank can be in full contact with the processing liquid in the processing tank, improving the reaction efficiency and shortening the reaction time. The exhaust hole on the tank cover can be used for discharging the purified tail gas and for supplementing the processing liquid in the processing tank, and the ineffective processing liquid can be emptied through the drain valve on the side of the processing tank. The structure design is reasonable and the applicability is stronger.

[0015] 2. When the present utility model is in use, the triple filter screen is fixedly arranged on the connecting rod at equal intervals through the fastening nuts. The mesh numbers of the three filter screens gradually increase from bottom to top, so that different particle size particles are fully filtered during the process that the tail gas passes through the triple filter screen from bottom to top. When in use, the filter screen at the bottom layer is engaged with the convex edge on the inner wall of the processing tank, and the outer edge of the turning handle at the top of the connecting rod is closely attached to the bottom plane of the tank cover, so that the filtering component remains stable when being impacted by the tail gas during the tail gas treatment process. And the detachable design of the filtering component enables the user to conveniently take out the filtering component from the processing tank and clean or replace the blocked filter screen, making the use more convenient. Description of the Drawings

[0016] Figure 1 It is a schematic diagram of the overall external structure of the device of the present utility model;

[0017] Figure 2 It is a schematic diagram of the overall internal structure of the device of the present utility model;

[0018] Figure 3 It is a schematic diagram of the intake mechanism structure of the present utility model.

[0019] In the figure: 1, processing box; 2, intake mechanism; 201, air outlet plate; 202, air outlet hole; 203, connecting branch pipe; 204, intake main pipe; 205, air guiding pipe; 3, drain valve; 4, box cover; 5, handle; 6, exhaust hole; 7, flange; 8, filter assembly; 801, connecting rod; 802, screwing handle; 803, filter screen; 804, fastening nut. Detailed implementation mode

[0020] The following further describes in detail the implementation mode of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0021] As Figures 1 to 3 shown, a CVD tail gas filtering device includes a processing box 1 and an intake mechanism 2. The intake mechanism 2 is fixed at the bottom end inside the processing box 1. The intake mechanism 2 includes an air outlet plate 201, air outlet holes 202, connecting branch pipes 203, an intake main pipe 204 and an air guiding pipe 205. The air outlet plate 201 is fixed at the bottom end inside the processing box 1, and the top surface of the air outlet plate 201 is arrayed with air outlet holes 202. The bottom of the air outlet holes 202 is correspondingly connected with connecting branch pipes 203, and the connecting branch pipes 203 are connected to each branch of the intake main pipe 204. The intake main pipe 204 is externally connected with an air guiding pipe 205, and the air guiding pipe 205 is fixed outside the processing box 1. The input end of the air guiding pipe 205 is connected to the tail gas discharge pipe of the gas deposition box through an induced draft fan, and the output end of the air guiding pipe 205 is connected to the connecting branch pipes 203 corresponding to the air outlet holes 202 on the air outlet plate 201 through the intake main pipe 204;

[0022] The specific operation is as follows: When the acidic gas in the tail gas is neutralized and absorbed by the alkaline liquid in the processing box 1, the input end of the air guiding pipe 205 is connected to the tail gas discharge pipe of the gas deposition box through an induced draft fan, and the output end of the air guiding pipe 205 is connected to the connecting branch pipes 203 corresponding to the air outlet holes 202 on the air outlet plate 201 through the intake main pipe 204, so that the tail gas discharged from the gas deposition box can fully contact the processing liquid in the processing box 1, improving the reaction efficiency and shortening the reaction time. The exhaust hole 6 on the box cover 4 can be used for discharging the purified tail gas and for supplementing the processing liquid in the processing box 1, and the ineffective processing liquid can be emptied through the drain valve 3 on the side of the processing box 1. The structural design is reasonable and the applicability is stronger;

[0023] As Figures 1 to 2As shown in the figure, a drain valve 3 is connected to the bottom side of the treatment box 1, and the top opening of the treatment box 1 is rotatably installed with a box cover 4 through a hinge. A handle 5 is welded and fixed in the middle of the box cover 4, and exhaust holes 6 are provided on the side of the box cover 4. A convex edge 7 with an annular structure is fixed on the side wall of the treatment box 1, and the height of the convex edge 7 is greater than the top plane height of the air outlet plate 201. A filtering component 8 is arranged inside the treatment box 1. The filtering component 8 includes a connecting rod 801 and a turning handle 802. The turning handle 802 is fixed at the top of the connecting rod 801, and the outer edge of the turning handle 802 is closely attached to the bottom plane of the box cover 4. The filtering component 8 further includes a filter screen 803 and a fastening nut 804. Three filter screens 803 are arranged at equal intervals along the extending direction of the connecting rod 801, and the mesh numbers of the three filter screens 803 gradually increase from bottom to top. Moreover, the three filter screens 803 are all thread-fixed to the connecting rod 801 through the fastening nut 804;

[0024] The specific operation is as follows: The triple filter screen 803 is fixed on the connecting rod 801 at equal intervals through the fastening nut 804, and the mesh numbers of the three filter screens 803 gradually increase from bottom to top. When the tail gas passes through the triple filter screen 803 from bottom to top, particulate matters with different particle sizes are fully filtered. When in use, the filter screen 803 at the bottom layer is in butt-joint cooperation with the convex edge 7 on the inner wall of the treatment box 1, and the outer edge of the turning handle 802 at the top of the connecting rod 801 is closely attached to the bottom plane of the box cover 4, so that the filtering component 8 remains stable when being impacted by the tail gas during the tail gas treatment process. Moreover, the detachable design of the filtering component 8 enables the user to conveniently take out the filtering component 8 from the treatment box 1 and clean or replace the blocked filter screen 803, making the use more convenient.

[0025] Working principle: When using this CVD tail gas filtration device, during use, when the acidic gas in the tail gas is neutralized and absorbed by the alkaline liquid in the treatment tank 1, the input end of the air guiding pipe 205 is connected to the tail gas discharge pipe of the chemical vapor deposition chamber through a blower, and the output end of the air guiding pipe 205 is connected to the connecting branch pipes 203 corresponding to the respective air outlet holes 202 on the air outlet tray 201 through the air inlet main pipe 204, so that the tail gas discharged from the chemical vapor deposition chamber can be in full contact with the treatment liquid in the treatment tank 1, improving the reaction efficiency and shortening the reaction time. The exhaust hole 6 on the box cover 4 can be used for discharging the purified tail gas and for supplementing the treatment liquid in the treatment tank 1. The ineffective treatment liquid can be emptied through the drain valve 3 on the side of the treatment tank 1. The structural design is reasonable and the applicability is stronger. The triple filter screen 803 is fixed on the connecting rod 801 at equal intervals through fastening nuts 804. The mesh numbers of the three filter screens 803 gradually increase from bottom to top, so that different particle size particles can be fully filtered during the process of the tail gas passing through the triple filter screen 803 from bottom to top. When in use, the filter screen 803 at the bottom layer is in butt joint with the convex edge 7 on the inner wall of the treatment tank 1, and the outer edge of the turning handle 802 at the top of the connecting rod 801 is in close fit with the bottom plane of the box cover 4, so that the filter assembly 8 remains stable when being impacted by the tail gas during the tail gas treatment process. Moreover, the detachable design of the filter assembly 8 enables the user to conveniently take out the filter assembly 8 from the treatment tank 1 and clean or replace the clogged filter screen 803, making the use more convenient.

[0026] The embodiments of the present invention are given for the purposes of illustration and description, and are not exhaustive or limit the present invention to the disclosed form. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are chosen and described in order to better explain the principles of the present invention and its practical applications, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific purposes.

Claims

1. A CVD tail gas filtration device, characterized in that: The invention comprises a processing box (1) and an air intake mechanism (2), wherein the air intake mechanism (2) is fixed at the bottom of the processing box (1), and the air intake mechanism (2) comprises an air outlet plate (201), air outlet holes (202), a connecting branch pipe (203), an air intake main pipe (204) and an air induced draft pipe (205), wherein the air outlet plate (201) is fixed at the bottom of the processing box (1), and an air outlet hole (202) is arranged in an array on the top of the air outlet plate (201), and the bottom of the air outlet hole (202) is connected to a connecting branch pipe (203) corresponding to the bottom of the air outlet hole (202), and the connecting branch pipe (203) is connected to each branch of the air intake main pipe (204), and the air intake main pipe (204) is externally connected to an air induced draft pipe (205), and the air induced draft pipe (205) is connected to the outside of the air intake main pipe (204). The tube (205) is fixed to the outside of the treatment box (1), and the treatment box (1) has a built-in filter assembly (8), the filter assembly (8) comprises a connecting rod (801) and a screw handle (802), the screw handle (802) is fixed to the top of the connecting rod (801), and the outer edge of the screw handle (802) is tightly fitted with the bottom plane of the box cover (4), the filter assembly (8) also comprises a filter screen (803) and a fastening nut (804), the connecting rod (801) is provided with three filter screens (803) at equal intervals along the extension direction, and the mesh size of the three filter screens (803) gradually increases from bottom to top, and the three filter screens (803) are all threadedly fixed to the connecting rod (801) through the fastening nut (804).

2. A CVD tail gas filtration device according to claim 1, characterized in that: The input end of the induced draft pipe (205) is connected to the exhaust pipe of the vapor deposition box through an induced draft fan, and the output end of the induced draft pipe (205) is connected to the connecting branch pipes (203) corresponding to each outlet hole (202) on the outlet plate (201) through an air intake main pipe (204).

3. The CVD tail gas filtration equipment according to claim 1, characterized in that: The bottom side of the processing box (1) is connected to a drain valve (3), and the top opening of the processing box (1) is rotatably mounted with a box cover (4) via a hinge.

4. A CVD tail gas filtration device according to claim 3, characterized in that: A handle (5) is welded and fixed to the middle of the box cover (4), and an exhaust hole (6) is opened on the side of the box cover (4).

5. The CVD tail gas filtration equipment according to claim 1, characterized in that: A convex edge (7) of an annular structure is fixed to the side wall of the processing box (1), and the height of the convex edge (7) is greater than the height of the top plane of the gas outlet plate (201).

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