Multifunctional thinning scribing device

Abstract

The utility model provides a multifunctional thinning scribing device, and belongs to the technical field of thinning machines. The multifunctional thinning scribing device comprises a bottom plate, a fixing ring is installed on one side of the top end of the bottom plate, a rotating cylinder is rotationally connected to the inner side of the fixing ring, a rotating disc is installed at the top end of the rotating cylinder, placing tables are installed on the four sides of the top end of the rotating disc, clamping mechanisms are arranged on the two sides of each placing table, and a thinning mechanism is installed on the other side of the top end of the bottom plate. A station switching mechanism is installed on one side of the top end of the bottom plate and comprises a fixing frame, a first motor is installed at the top end of the fixing frame, a rotary drum is sleeved with a gear ring, a gear is installed at the output end of the first motor and meshed with the gear ring, and a positioning mechanism is installed in the middle of the top end of the bottom plate. According to the utility model, the multi-station operation function can be effectively realized, the production efficiency is improved, and the practical value is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of thinning machines, in particular to a multifunctional thinning and scribing device. Background Art

[0002] Thinning and dicing is a wafer processing process that aims to remove a certain thickness by grinding the substrate material on the back of the wafer to improve the heat dissipation of the chip, reduce the package volume, reduce internal stress, and improve electrical performance. In the wafer processing process, the thinning machine is an indispensable processing equipment. The thinning machine thins and dices the wafer through the grinding wheel.

[0003] For example, a Chinese patent with publication number CN116652767A discloses a thinning machine, comprising: a machine base and a wafer table, the machine base is provided with a loading and unloading station and a processing station, the wafer table is slidably arranged on the machine base and reciprocates between the loading and unloading station and the processing station; a grinding mechanism, comprising a driving module, a spindle and a grinding wheel, the grinding wheel is coaxially arranged on the spindle, and the diameters of the spindle and the grinding wheel are adjustable; the driving module is connected to the grinding wheel through the spindle to drive the grinding wheel to rise and fall and rotate at the processing station; the center of the projection circle of the grinding wheel on the wafer table passes through the moving trajectory of the wafer table, and the outer edge of the projection circle passes through the center of the wafer table;

[0004] The technical solution recorded in this proposal is that when the wafer carrier carrying the wafer moves to the processing station, the driving module drives the grinding wheel to descend to the upper surface of the wafer and thins or polishes the wafer. However, when this solution is in use, its functions are relatively single and it does not have multi-station operation functions, which affects production efficiency.

[0005] Therefore, in view of this, the existing structure and defects are studied and improved, and a multifunctional thinning and scribing device is provided to achieve a purpose with greater practical value. Utility Model Content

[0006] The purpose of the utility model is to provide a multifunctional thinning and scribing device to solve the problem that the existing thinning and scribing device mentioned in the above background technology has a single function when in use, does not have a multi-station operation function, and affects production efficiency.

[0007] The utility model is achieved in this way:

[0008] A multifunctional thinning and scribing device, including a bottom plate, on one side of the top end of the bottom plate, a fixing ring is installed, inside the fixing ring, a rotating cylinder is rotatably connected, on the top end of the rotating cylinder, a turntable is installed, on the four sides of the top end of the turntable, placing tables are installed, on both sides of each placing table, a clamping mechanism is provided, on the other side of the top end of the bottom plate, a thinning mechanism is installed, on one side of the top end of the bottom plate, a station switching mechanism is installed, on the top end of the fixed frame, a first motor is installed, outside the rotating cylinder, a toothed ring is sleeved, the output end of the first motor is installed with a gear, the gear meshes with the toothed ring, in the middle of the top end of the bottom plate, a positioning mechanism is installed, inside the turntable, four first electric telescopic rods are installed, on the top end of the placing table, a push plate is embedded, the output end of the first electric telescopic rod is fixedly connected to the bottom end of the push plate.

[0009] Further, the clamping mechanism includes side frames, on one side of the side frames away from the placing table, second electric telescopic rods are installed, on both sides of the top end of the placing table, clamps are provided, the output end of the second electric telescopic rod is fixedly connected to the outside of the clamp.

[0010] Further, the inner side of the clamp is in an arc shape.

[0011] Further, the positioning mechanism includes columns, on the top end of the columns, infrared emitters are installed, on the four sides of the bottom end of the turntable, infrared detectors are installed.

[0012] The beneficial effect of adopting the above further scheme is that through the setting of the infrared emitter and the infrared detector, the rotation positioning function of the turntable is realized.

[0013] Further, inside the rotating cylinder, a conductive slip ring is provided, the conductive slip ring and the second electric telescopic rod are electrically connected through wires.

[0014] The beneficial effect of adopting the above further scheme is that through the provision of a conductive slip ring inside the rotating cylinder, power supply to the second electric telescopic rod is realized.

[0015] Further, the thinning mechanism includes fixed columns, on one side of the fixed columns, a cross plate is installed, on the top end of the cross plate, a third electric telescopic rod is installed, the output end of the third electric telescopic rod is installed with a chassis, inside the top end of the chassis, a rotating shaft is rotatably connected, the bottom end of the rotating shaft penetrates through the bottom end of the chassis, and a grinding wheel is installed at the bottom end of the rotating shaft.

[0016] The beneficial effect of adopting the above further scheme is that through the installation of a chassis at the output end of the third electric telescopic rod, height adjustment of the grinding wheel is realized, and through the installation of a grinding wheel at the bottom end of the rotating shaft, rotation of the rotating shaft can drive the grinding wheel to rotate for grinding.

[0017] Further, a second motor is installed on one side of the chassis. Bevel gears are sleeved on the output end of the second motor and the outer side of the rotating shaft, and the second motor and the rotating shaft are connected by bevel gear transmission.

[0018] The beneficial effect of adopting the above further solution is that by sleeving bevel gears on the output end of the second motor and the outer side of the rotating shaft, the electric rotation of the rotating shaft is realized.

[0019] Further, a control cabinet is installed on one side of the bottom plate, and a control panel is installed on one side of the control cabinet.

[0020] The beneficial effects of the present utility model are as follows: A multifunctional thinning and scribing device obtained by the above design of the present utility model realizes multi-station operation through placing platforms installed on the four sides of the top of the turntable, improving production efficiency. Through the meshing of the gear and the gear ring, the rotation of the gear can drive the rotation of the rotating cylinder, thereby realizing the rotation of the turntable to switch stations. Through clamping mechanisms provided on both sides of the placing platform, the function of quickly clamping the wafer is realized. Through the fixed connection between the output end of the first electric telescopic rod and the bottom end of the push plate, the lifting of the wafer after processing is realized, facilitating the discharging of the wafer. Through the installation of a second electric telescopic rod on the side frame away from the placing platform, the clamping of the wafer by the fixture is realized. Through the setting of the infrared emitter and the infrared detector, the rotation positioning function of the turntable is realized. Through the installation of a conductive slip ring inside the rotating cylinder, the power supply for the second electric telescopic rod is realized. Through the installation of the chassis at the output end of the third electric telescopic rod, the height adjustment of the grinding wheel is realized. Through the installation of the grinding wheel at the bottom end of the rotating shaft, the rotation of the rotating shaft can drive the rotation of the grinding wheel for grinding. Through sleeving bevel gears on the output end of the second motor and the outer side of the rotating shaft, the electric rotation of the rotating shaft is realized. Through the installation of the control panel on one side of the control cabinet, the controllability of the equipment is realized, increasing the convenience of product use. The present utility model can effectively realize the multi-station operation function, improve production efficiency, and has high practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0022] Figure 1 FIG. 1 is one of the three-dimensional structure diagrams of a multifunctional thinning and scribing device provided by the present utility model;

[0023] Figure 2 FIG. 2 is another three-dimensional structure diagram of a multifunctional thinning and scribing device provided by the present utility model;

[0024] Figure 3Exploded perspective view of a multi-functional thinning and scribing device provided by the present utility model;

[0025] Figure 4 A multi-functional thinning and scribing device provided by the present utility model Figure 2 Schematic enlarged view of structure A in

[0026] Figure 5 Cross-sectional view of the chassis of a multi-functional thinning and scribing device provided by the present utility model;

[0027] Figure 6 Partial cross-sectional view of the turntable of a multi-functional thinning and scribing device provided by the present utility model.

[0028] In the figure: 100, bottom plate; 101, fixed ring; 102, rotating cylinder; 103, turntable; 104, placing table; 105, conductive slip ring; 106, station switching mechanism; 10601, fixed frame; 10602, first motor; 10603, gear ring; 10604, gear; 107, thinning mechanism; 10701, fixed column; 10702, cross plate; 10703, third electric telescopic rod; 10704, chassis; 10705, rotating shaft; 10706, grinding wheel; 10707, second motor; 10708, bevel gear; 108, clamping mechanism; 10801, side frame; 10802, second electric telescopic rod; 10803, clamp; 109, control cabinet; 10901, control panel; 110, positioning mechanism; 11001, column; 11002, infrared emitter; 11003, infrared detector; 111, push plate; 112, first electric telescopic rod. Detailed implementation manners

[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0030] Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model to be protected, but merely represents the selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0031] Example 1

[0032] The utility model provides the following technical solutions: As Figures 1-6 shown, a multifunctional thinning and scribing device includes a bottom plate 100. On one side of the top end of the bottom plate 100, a fixed ring 101 is installed. Inside the fixed ring 101, a rotating cylinder 102 is rotatably connected. On the top end of the rotating cylinder 102, a turntable 103 is installed. On the four sides of the top end of the turntable 103, placing platforms 104 are installed. On both sides of each placing platform 104, a clamping mechanism 108 is provided. On the other side of the top end of the bottom plate 100, a thinning mechanism 107 is installed. On one side of the top end of the bottom plate 100, a station switching mechanism 106 is installed. The station switching mechanism 106 includes a fixed frame 10601. On the top end of the fixed frame 10601, a first motor 10602 is installed. A toothed ring 10603 is sleeved outside the rotating cylinder 102. The output end of the first motor 10602 is installed with a gear 10604. The gear 10604 meshes with the toothed ring 10603. In the middle of the top end of the bottom plate 100, a positioning mechanism 110 is installed. Inside the turntable 103, four first electric telescopic rods 112 are installed. A push plate 111 is embedded in the top end of the placing platform 104. The output end of the first electric telescopic rod 112 is fixedly connected to the bottom end of the push plate 111. By installing placing platforms 104 on the four sides of the top end of the turntable 103, multi-station operation is realized, and the production efficiency is improved. By the gear 10604 meshing with the toothed ring 10603, it is realized that the rotation of the gear 10604 can drive the rotation of the rotating cylinder 102, so as to realize the rotation of the turntable 103 to switch stations. By providing clamping mechanisms 108 on both sides of the placing platform 104, the function of quickly clamping the wafer is realized. By the output end of the first electric telescopic rod 112 being fixedly connected to the bottom end of the push plate 111, the lifting of the wafer after processing is realized, which is convenient for the wafer to be discharged.

[0033] Embodiment 2

[0034] Refer to Figures 1-6As shown, the clamping mechanism 108 includes a side frame 10801, and a second electric telescopic rod 10802 is installed on the side of the side frame 10801 away from the placement table 104. Clamps 10803 are provided on both sides of the top of the placement table 104. The output end of the second electric telescopic rod 10802 is fixedly connected to the outer side of the clamp 10803, and the inner side of the clamp 10803 is in an arc shape. The positioning mechanism 110 includes a column 11001, and an infrared transmitter 11002 is installed on the top of the column 11001. Infrared detectors are installed on the four sides of the bottom of the turntable 103. The conductive slip ring 105 is provided inside the rotating drum 102, and the conductive slip ring 105 and the second electric telescopic rod 10802 are electrically connected through a wire. The second electric telescopic rod 10802 is installed on the side away from the placement table 104 through the side frame 10801, so that the clamp 10803 can clamp the wafer. The infrared transmitter 11002 and the infrared detector 11003 are provided to realize the rotation positioning function of the turntable 103. The conductive slip ring 105 is provided inside the rotating drum 102 to realize the power supply of the second electric telescopic rod 10802.

[0035] Embodiment 3

[0036] Reference Figures 1-6 As shown, the thinning mechanism 107 includes a fixed column 10701, a horizontal plate 10702 is installed on one side of the fixed column 10701, a third electric telescopic rod 10703 is installed on the top of the horizontal plate 10702, the output end of the third electric telescopic rod 10703 is installed on a chassis 10704, the top of the inner part of the chassis 10704 is rotatably connected with a rotating shaft 10705, the bottom end of the rotating shaft 10705 passes through the bottom end of the chassis 10704, a grinding wheel 10706 is installed on the bottom end of the rotating shaft 10705, a second motor 10707 is installed on one side of the chassis 10704, the output end of the second motor 10707 and the outer side of the rotating shaft 10705 are both equipped with bevel gears 10708, and the second motor 10707 and the rotating shaft 1070 The control cabinet 109 is installed on one side of the bottom plate 100 through the bevel gear 10708, and the control panel 10901 is installed on one side of the control cabinet 109. The machine box 10704 is installed through the output end of the third electric telescopic rod 10703 to achieve the height adjustment of the grinding wheel 10706. The grinding wheel 10706 is installed at the bottom end of the rotating shaft 10705, so that the rotating shaft 10705 can rotate and grind the grinding wheel 10706. The output end of the second motor 10707 and the outer side of the rotating shaft 10705 are both equipped with bevel gears 10708 to achieve the electric rotation of the rotating shaft 10705. The control panel 10901 is installed on one side of the control cabinet 109 to achieve the controllable equipment and increase the convenience of product use.

[0037] Specifically, the working principle of the multifunctional thinning and dicing device is as follows: When in use, placing tables 104 are installed on the four sides of the top of the turntable 103 to achieve multi-station operation and improve production efficiency. The rotation of the gear 10604 drives the rotation of the rotating cylinder 102 through the engagement of the gear 10604 and the gear ring 10603, thereby realizing the rotation of the turntable 103 to switch workstations. Clamping mechanisms 108 are provided on both sides of the placing table 104 to achieve the function of quickly clamping the wafer. The output end of the first electric telescopic rod 112 is fixedly connected to the bottom end of the push plate 111 to lift the wafer after processing, facilitating the discharging of the wafer. A second electric telescopic rod 10802 is installed on the side frame 10801 on the side away from the placing table 104 to clamp the wafer by the fixture 10803. The rotation positioning function of the turntable 103 is realized through the setting of the infrared emitter 11002 and the infrared detector 11003. A conductive slip ring 105 is provided inside the rotating cylinder 102 to supply power to the second electric telescopic rod 10802. The output end of the third electric telescopic rod 10703 is installed with a chassis 10704 to adjust the height of the grinding wheel 10706. The grinding wheel 10706 is installed at the bottom end of the rotating shaft 10705, and the rotation of the rotating shaft 10705 drives the rotation of the grinding wheel 10706 for grinding. Bevel gears 10708 are sleeved on the output end of the second motor 10707 and the outside of the rotating shaft 10705 to realize the electric rotation of the rotating shaft 10705. A control panel 10901 is installed on one side of the control cabinet 109 to make the equipment controllable and increase the convenience of product use. The utility model can effectively realize the multi-station operation function, improve production efficiency, and has high practical value.

[0038] It should be noted that the specific model specifications of the first motor 10602, the first electric telescopic rod 110, the second electric telescopic rod 10802, the third electric telescopic rod 10703, and the second motor 10707 need to be selected and determined according to the actual specifications of the device. The specific selection calculation method adopts the existing technology in the field, so it will not be elaborated in detail.

[0039] The power supply and its principle of the first motor 10602, the first electric telescopic rod 110, the second electric telescopic rod 10802, the third electric telescopic rod 10703, and the second motor 10707 are clear to those skilled in the art and will not be elaborated here.

[0040] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. For those skilled in the art, various changes and modifications can be made to the present utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A multifunctional thinning and scribing device, characterized in that: The invention comprises a bottom plate (100), a fixing ring (101) is installed on one side of the top of the bottom plate (100), a rotating drum (102) is rotatably connected to the inner side of the fixing ring (101), a rotating disk (103) is installed on the top of the rotating drum (102), a placing table (104) is installed on four sides of the top of the rotating disk (103), a clamping mechanism (108) is provided on both sides of the placing table (104), a thinning mechanism (107) is installed on the other side of the top of the bottom plate (100), a workstation switching mechanism (106) is installed on one side of the top of the bottom plate (100), and the workstation switching mechanism (106) comprises a fixing frame (10601), A first motor (10602) is installed at the top of the fixed frame (10601), a gear ring (10603) is sleeved on the outer side of the rotating drum (102), a gear (10604) is installed at the output end of the first motor (10602), the gear (10604) and the gear ring (10603) are meshed, a positioning mechanism (110) is installed at the middle of the top of the bottom plate (100), four first electric telescopic rods (112) are installed inside the rotating disk (103), a push plate (111) is embedded at the top of the placement table (104), and the output end of the first electric telescopic rod (112) and the top of the push plate (111) are fixedly connected.

2. A multifunctional thinning and scribing device according to claim 1, characterized in that: The clamping mechanism (108) comprises a side frame (10801), a second electric telescopic rod (10802) being installed on a side of the side frame (10801) away from the placement table (104), clamps (10803) being provided on both sides of the top of the placement table (104), and an output end of the second electric telescopic rod (10802) being fixedly connected to the outer side of the clamp (10803).

3. A multifunctional thinning and scribing device according to claim 2, characterized in that: The inner side of the clamp (10803) is in an arc shape.

4. The multifunctional thinning and scribing device according to claim 1, characterized in that: The positioning mechanism (110) comprises a column (11001), an infrared emitter (11002) is installed on the top of the column (11001), and infrared detectors (11003) are installed on four sides of the bottom of the turntable (103).

5. The multifunctional thinning and scribing device according to claim 2, characterized in that: A conductive slip ring (105) is provided inside the rotating drum (102), and the conductive slip ring (105) and the second electric telescopic rod (10802) are electrically connected via a wire.

6. The multifunctional thinning and scribing device according to claim 1, characterized in that: The thinning mechanism (107) comprises a fixed column (10701), a horizontal plate (10702) is installed on one side of the fixed column (10701), a third electric telescopic rod (10703) is installed on the top end of the horizontal plate (10702), a chassis (10704) is installed on the output end of the third electric telescopic rod (10703), a rotating shaft (10705) is rotatably connected to the top end of the chassis (10704), the bottom end of the rotating shaft (10705) passes through the bottom end of the chassis (10704), and a grinding wheel (10706) is installed on the bottom end of the rotating shaft (10705).

7. The multifunctional thinning and scribing device according to claim 6, characterized in that: A second motor (10707) is installed on one side of the chassis (10704); an output end of the second motor (10707) and an outer side of the rotating shaft (10705) are both provided with bevel gears (10708); and the second motor (10707) and the rotating shaft (10705) are connected in transmission via the bevel gears (10708).

8. The multifunctional thinning and scribing device according to claim 1, characterized in that: A control cabinet (109) is installed on one side of the base plate (100), and a control panel (10901) is installed on one side of the control cabinet (109).

Images