Slotted quartz grinding disc suitable for tellurium-zinc-cadmium

Abstract

The utility model provides a slotting quartz grinding disc suitable for tellurium zinc cadmium, which comprises a quartz disc main body, the quartz disc main body is provided with a first groove and a second groove, the first groove is radial, the second groove is annular, the first groove and the second groove are connected with each other, and the first groove and the second groove are connected with each other. The inner bottom of the first groove is provided with an inclined face facilitating flow guiding. According to the utility model, the quartz disc is corrosion-resistant, low in cost and environment-friendly; disc repairing is simple and time-saving, and labor cost is reduced; the substrate is almost free of scratches and cracks during grinding; and the grooves facilitate timely liquid drainage, so that the surface quality is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of cadmium zinc telluride crystal processing, in particular to a slotted quartz grinding disc suitable for cadmium zinc telluride. Background Art

[0002] Cadmium zinc telluride (CZT) is not only the best substrate material for liquid phase epitaxial mercury cadmium telluride (HgCdTe) thin films, but also an ideal material for manufacturing room-temperature nuclear radiation detectors. Therefore, high-quality, large-area CZT substrates have always attracted much attention.

[0003] The surface state of CZT wafers has an important impact on their applications as devices and epitaxial substrates. After the CZT ingot is cut, there is a damage layer on the surface of the wafer. The periodicity of the lattice in the surface damage layer is severely damaged, which will cause surface leakage current, thus affecting the performance of the device. The surface state of CZT wafers has an important impact on their applications as devices and epitaxial substrates. With the continuous improvement of the requirements for wafer surface quality in practical applications, the demand for dedicated grinding and polishing is very urgent.

[0004] Defects and shortcomings of the existing technology:

[0005] 1. Currently, the grinding discs used in the industry are mainly alloy discs, resin copper / tin discs and even leather pads. Alloy discs are difficult to make and repair, metal particles in resin grinding discs are easy to scratch the substrate, and leather pads are not environmentally friendly.

[0006] 2. The alloy disc correction takes a long time, which takes up a long processing time and is not conducive to production; the leather pad replacement frequency is high and consumes manpower.

[0007] 3. Metal plates are prone to rust during use, and metal particles falling off during grinding can easily scratch the substrate and destroy the surface flatness; metal particles on the surface of resin plates can easily scratch the substrate and even cause cracks. Utility Model Content

[0008] The utility model aims to provide a slotted quartz grinding disc suitable for cadmium zinc telluride to overcome the above problems or at least partially solve the above problems.

[0009] In order to achieve the above-mentioned purpose, the technical solution of the utility model is specifically implemented as follows:

[0010] The utility model provides a grooved quartz grinding disc suitable for cadmium zinc telluride, comprising a quartz disc main body, on which a first groove and a second groove are provided, wherein the first groove is radial, the second groove is annular, and the first groove and the second groove are connected to each other, and an inner bottom of the first groove is provided with an inclined surface for facilitating flow diversion.

[0011] As a further solution of the utility model, the angle between the inclined surface and the horizontal plane is 30°.

[0012] As a further solution of the present invention, the width of the first groove and the second groove is 2.5 mm.

[0013] The utility model provides a slotted quartz grinding disc suitable for cadmium zinc telluride, which has the following beneficial effects:

[0014] Quartz disks are corrosion-resistant, low-cost and environmentally friendly; disk repair is simple and time-saving, reducing labor costs; substrate grinding is almost scratch-free and crack-free; grooves facilitate timely drainage to ensure surface quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a structural schematic diagram of the utility model.

[0017] Figure 2 It is a cross-sectional view of the utility model.

[0018] In the figure: 1, quartz plate main body; 2, first groove; 3, second groove. DETAILED DESCRIPTION

[0019] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0020] See also Figure 1 and Figure 2 The embodiment of the utility model provides a slotted quartz grinding disk suitable for cadmium zinc telluride, including a quartz disk body 1, on which a first groove 2 and a second groove 3 are formed, the first groove 2 is radial, the second groove 3 is annular, and the first groove 2 and the second groove 3 are connected to each other, and the inner bottom of the first groove 2 is provided with an inclined surface for facilitating flow diversion.

[0021] The angle between the inclined plane and the horizontal plane is 30°.

[0022] The width of the first groove 2 and the second groove 3 is 2.5 mm.

[0023] During the use of the utility model, the overall configuration of the quartz disk main body 1 is a disk made of ordinary quartz material. The surface is provided with grooves combining a ring shape and a radial shape, and the grooves are inclined at an angle of 30° with the horizontal direction. This disk can achieve high-quality and efficient grinding, and is a special grinding disk for cadmium telluride that is convenient for disk repair and environmentally friendly; the base material is quartz, which is simple and convenient to customize, has high hardness, is wear-resistant during use, has extremely small disk surface loss, is not easy to break the edge, and basically does not react with the grinding fluid during production, and is not easy to generate large particles to scratch the substrate; the quartz disk main body 1 can be quickly repaired with any disk repair tool, and it can be corrected in 1 hour; during the substrate grinding, large particles are not easy to fall off, causing deep scratches or even cracks on the substrate surface; during the grinding process, the grinding fluid and substrate debris need to be quickly removed from the disk surface. The groove design provides a certain discharge channel for the grinding fluid and debris, which can be cleaned in time to prevent the stored liquid from damaging the surface.

[0024] First, turn on the grinding machine, place the substrate to be ground on the quartz disk main body 1, set appropriate parameters, and start the grinding machine. The grinding fluid and debris waste will automatically flow into the first groove 2 and the second groove 3. The groove width is 2.5 mm and the depth is 5 mm, which can not only discharge the waste liquid and the like from the disk surface in time, but also have enough space for disk repair; only a cast iron disk repair block needs to be placed at the position to be repaired for 1 hour to correct the disk surface.

[0025] The above are only embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

Claims

1. A slotted quartz grinding disc suitable for cadmium zinc telluride, characterized in that: The invention comprises a quartz plate body (1), wherein the quartz plate body (1) is provided with a first groove (2) and a second groove (3), wherein the first groove (2) is radial, the second groove (3) is annular, the first groove (2) and the second groove (3) are connected to each other, and the inner bottom of the first groove (2) is provided with an inclined surface for facilitating flow diversion.

2. A slotted quartz grinding disc suitable for cadmium zinc telluride according to claim 1, characterized in that: The angle between the inclined surface and the horizontal plane is 30°.

3. A slotted quartz grinding disc suitable for cadmium zinc telluride according to claim 1, characterized in that: The width of the first groove (2) and the second groove (3) is 2.5 mm.

Images