Guiding structure insulation installation device and PVD equipment

Abstract

The utility model relates to the technical field of photovoltaic cell manufacturing equipment, and discloses a guide structure insulation installation device and PVD equipment, and the guide structure insulation installation device comprises a supporting assembly, a guide assembly and an insulation assembly. The transition position of the outer surface, connected with the mounting structure, of the gasket is disconnected, a second avoiding part is constructed at the second end of the gasket, a third avoiding part is constructed at the circumferential edge of the first end of the connector, and the transition position of the outer surface, connected with the connector, of the gasket is disconnected; the end, facing the connector, of the head unit of the fastening unit is provided with the fourth avoiding part to disconnect the transition position of the outer surface where the fastening unit and the connector are connected, so that multiple interruptions are formed on the outer surface of the whole guide structure insulation installation device, and multiple insulation is formed; the problem of outer surface communication caused by accumulation of film layers formed on the outer surface of the device can be effectively avoided, and insulation isolation failure between the carrier plate and the equipment body is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing equipment, in particular to a guiding structure insulation installation device and a PVD device. Background Art

[0002] In the manufacturing of photovoltaic cells, a PVD (Physical Vapor Deposition) process needs to be carried out by a PVD device to deposit a transparent conductive film on a silicon wafer. The PVD device is provided with a process chamber, and a carrier plate carrying the silicon wafer can move in the process chamber to realize the transportation of the silicon wafer. To ensure the smoothness of the movement process of the carrier plate, a guiding structure is usually fixedly installed inside the process chamber, and the guiding structure provides guidance for the movement of the carrier plate. The guiding structure is fixed on the side wall of the cavity of the process chamber or other mounting structures such as bases inside the cavity. The carrier plate is usually made of metal. Currently, in PVD devices, insulating sleeves, insulating gaskets and other supporting structures are mainly added between the guiding structure and the cavity of the process chamber to achieve insulation isolation between the carrier plate and the mounting structures such as the cavity.

[0003] However, the existing insulation solutions have insulation effects in the initial stage of use. However, since the guiding structure is installed and arranged in the PVD process chamber, during the production process, as the production time increases, a conductive film layer will inevitably be plated on the surfaces of insulating materials such as insulating sleeves and insulating gaskets, destroying the insulation, so that the outer surfaces of the entire supporting structure are electrically connected, resulting in the failure of the insulation design, that is, the insulation isolation between the carrier plate and the equipment body is likely to fail, and then the carrier plate and the silicon wafer start to spark, affecting the quality of the battery chips. Summary of the Utility Model

[0004] In view of this, the utility model provides a guiding structure insulation installation device and a PVD device to solve the problem that the insulation isolation between the carrier plate and the equipment body is likely to fail.

[0005] In a first aspect, the present utility model provides a guiding structure insulation installation device, comprising: a support assembly, the first end of the support assembly having a connection head; a guiding assembly, disposed at the second end of the support assembly; an insulation assembly, including a gasket and a fastening unit, the first end of the gasket being adapted to abut against an installation structure, and the second end of the gasket abutting against the first end of the connection head, the fastening unit including a head unit and a rod unit, the rod unit being adapted to be connected to the installation structure after sequentially passing through the connection head and the gasket, and the head unit directly or indirectly abutting against the second end of the connection head; a first avoidance portion is configured at the circumferential edge of the first end of the gasket, so that a first partition space is formed between a partial area of the first end of the gasket and the installation structure; a second avoidance portion is configured at the second end of the gasket, a third avoidance portion is configured at the circumferential edge of the first end of the connection head, and a second partition space is formed between a partial area of the first end of the connection head and a partial area of the second end of the gasket; a fourth avoidance portion is configured at the end of the head unit facing the connection head, so that a third partition space is formed between the head unit and the connection head.

[0006] Beneficial effects: The first partition space formed by configuring the first avoidance portion at the circumferential edge of the first end of the gasket enables a certain interval between the surfaces of the gasket in contact with the installation structure, that is, disconnects the outer surface transition position where the gasket is connected to the installation structure. By configuring the second avoidance portion at the second end of the gasket and the third avoidance portion at the circumferential edge of the first end of the connection head, the second partition space formed enables a certain interval between the surfaces of the gasket in contact with the connection head, that is, disconnects the outer surface transition position where the gasket is connected to the connection head. The third partition space formed between the head unit of the fastening unit and the connection head by configuring the fourth avoidance portion at the end of the head unit of the fastening unit facing the connection head enables a certain interval between the surfaces of the head unit of the fastening unit in contact with the connection head, that is, disconnects the outer surface transition position where the fastening unit is connected to the connection head. Thus, multiple discontinuities are formed on the outer surface of the entire guiding structure insulation installation device, and the discontinuities can effectively avoid the problem of outer surface connection caused by the accumulation of film layers splashed onto the outer surface of the device due to long-term production. The multiple discontinuities form multiple insulations between the guiding wheel assembly and the cavity, greatly reducing the probability of outer surface conduction, avoiding the insulation isolation failure between the carrier plate and the device body, thereby ensuring the long-term effectiveness of insulation and effectively extending the continuous production and use time of the guiding structure insulation installation device.

[0007] In an alternative embodiment, a first avoidance ring and a first annular groove are formed at the first end of the gasket. The first avoidance ring is arranged circumferentially around the gasket, and the first avoidance ring is formed by a partial area at the circumferential edge of the first end face of the gasket being recessed towards the direction close to the second end face of the gasket, so as to form a first avoidance face at the first end of the gasket. The first avoidance face and the first end face of the gasket are arranged in a stepped manner, and a first gap is formed between the first avoidance face and the mounting structure; the first avoidance face is annular, and the first annular groove is formed by a partial area on the first avoidance face close to the inner circumferential edge of the annular shape being recessed towards the direction close to the second end face of the gasket. The first gap and the first annular groove form the first partition space.

[0008] Beneficial effects: By constructing the first avoidance ring at the circumferential edge of the first end face of the gasket, a first gap is formed between the gasket and the mounting structure, thereby achieving the partition at the transition position of the outer surface where the gasket is connected to the mounting structure, improving the insulation between the gasket and the mounting structure. At the same time, by constructing the first annular groove between the first avoidance face and the outer circumferential surface of the first cylinder, the first annular groove is arranged around the center line of the gasket for one week and is communicated with the first avoidance ring, so as to disconnect the outer surface of the gasket through the first annular groove, further improving the insulation of the gasket itself. Thus, the first partition space composed of the first gap and the first annular groove can greatly reduce the probability of conduction of the outer surface where the gasket transitions with the mounting structure, ensuring the long-term effectiveness of the insulation isolation between the carrier plate and the equipment body.

[0009] In an alternative embodiment, a second avoidance ring and a second annular groove are formed at the first end of the connector. The second avoidance ring is arranged circumferentially around the connector, and the second avoidance ring is formed by a partial area at the circumferential edge of the first end face of the connector being recessed towards the direction close to the second end face of the connector, so as to form a second avoidance face at the first end of the connector. The second avoidance face and the first end face of the connector are arranged in a stepped manner; the second avoidance face is annular, and the second annular groove is formed by a partial area on the second avoidance face close to the inner circumferential edge of the annular shape being recessed towards the direction close to the second end face of the connector.

[0010] Beneficial effects: By constructing the second avoidance ring at the circumferential edge of the first end face of the connector, a gap is formed between the connector and the gasket, thereby achieving the partition at the transition position of the outer surface where the gasket is connected to the connector, improving the insulation between the connector and the gasket. At the same time, by constructing the second annular groove on the connector, the second annular groove is arranged around the center line of the connector for one week and is communicated with the second avoidance ring, and the outer surface of the connector is disconnected through the second annular groove, further improving the insulation of the connector itself and further improving the insulation of the guiding structure insulation installation device itself.

[0011] In an alternative embodiment, a receiving groove and a third annular groove are formed at the second end of the gasket. The receiving groove is located at the center of the second end face of the gasket. The receiving groove is formed by partial areas on the second end face of the gasket recessing towards the direction close to the first end face of the gasket. The circumferential dimension of the receiving groove is larger than the outer contour dimension of the connector. There is a gap between the inner wall of the receiving groove and the outer peripheral surface of the connector to form a second gap. The first end face of the connector abuts against the bottom surface of the receiving groove. The second relief surface is spaced from the bottom surface of the receiving groove to form a third gap. The third annular groove is arranged around the inner circumferential surface of the receiving groove and is formed by partial areas on the circumferential edge of the bottom surface of the receiving groove recessing towards the direction close to the first end face of the gasket. The second gap, the third annular groove, the third gap and the second annular groove form the second partition space.

[0012] Beneficial effects: By forming a receiving groove at the second end of the gasket and the circumferential dimension of the receiving groove being larger than the outer contour dimension of the connector, when the first end face of the connector abuts against the bottom surface of the receiving groove, a partial section of the connector extends into the receiving groove, and a second gap is formed between the side wall of the receiving groove and the outer peripheral surface of the connector, thereby realizing the nesting of the gasket and the connector and the gap between the inner wall of the receiving groove on the gasket and the circumferential surface of the connector, avoiding direct contact between the two, thereby improving the insulation between the gasket and the connector. At the same time, by forming a third annular groove at the circumferential edge of the bottom surface of the receiving groove, the third annular groove surrounds the bottom surface of the receiving groove for one week, and the side wall of the third annular groove away from the center line of the connector is flush with the inner wall of the receiving groove. By the third annular groove, the direct connection between the bottom surface and the side wall of the receiving groove is disconnected, improving the insulation of the second end of the gasket. Thus, at the position where the gasket and the connector are in contact, the second discontinuous space composed of the second gap, the third annular groove, the third gap and the second annular groove improves the insulation between the gasket and the connector, and further improves the insulation of the guiding structure insulation installation device itself.

[0013] In an alternative embodiment, a third relief ring and a fourth annular groove are formed at the first end of the head unit. The third relief ring is arranged around the circumference of the head unit and is formed by partial areas on the circumferential edge of the first end of the head unit recessing towards the direction close to the second end of the head unit to form a third relief surface at the first end of the head unit. The third relief surface and the first end face of the head unit are arranged in a stepped manner. A fourth gap is formed between the third relief surface and the connector. The third relief surface is annular. The fourth annular groove is formed by partial areas on the third relief surface close to the inner ring edge of the annular shape recessing towards the direction close to the second end of the head unit. The fourth gap and the fourth annular groove form the third partition space.

[0014] Beneficial effects: By constructing a third avoidance ring at the circumferential edge of the first end face of the head unit, a gap is formed between the structure in contact with the first end of the head unit and the head unit, thereby achieving the partition at the transition position of the outer surface where the head unit is connected to the adjacent structure, improving the insulation performance. At the same time, by constructing a fourth annular groove on the head unit, the fourth annular groove is arranged around the center line of the head unit for one week and is communicated with the third avoidance ring, disconnecting the outer surface of the head unit, further improving the insulation performance of the head unit itself, and thus further improving the insulation performance of the guiding structure insulation installation device itself.

[0015] In an alternative embodiment, the support assembly includes a support base, an adjustment rod and a locking member. The support base includes the connecting head and the support rod connected to each other. The adjustment rod is movably connected to the support rod, and the guiding assembly is arranged at one end of the adjustment rod away from the support rod; the locking member can selectively lock the adjustment rod and the support rod.

[0016] Beneficial effects: By arranging that the adjustment rod is movably connected to the support rod and the locking member can selectively lock the adjustment rod and the support rod, the overall length of the support assembly can be adjusted and locked, so that it can be adaptively adjusted according to the size of the carrier plate, with high flexibility and wide applicability.

[0017] In an alternative embodiment, the insulation assembly further includes: an end cover. The first end of the end cover is an open end. The end cover covers the outer peripheral side of the connecting head and at least part of the outer peripheral side of the gasket from the second end of the connecting head. The inner wall of the end cover is spaced from the outer peripheral wall of the connecting head and the outer peripheral wall of the gasket, and the bottom wall of the end cover is clamped between the second end face of the connecting head and the first end face of the head unit.

[0018] Beneficial effects: By arranging that the end cover covers the outer peripheral side of the connecting head and at least part of the outer peripheral side of the gasket, the circumferential dimension of the inner wall of the end cover is larger than the circumferential dimensions of the connecting head and the gasket, realizing the nested arrangement of the connecting head, the gasket and the end cover. And the inner wall of the end cover is spaced from the outer peripheral wall of the connecting head and the outer peripheral wall of the gasket, and a fifth gap is formed between the inner wall of the end cover and the outer peripheral surface of the gasket, avoiding direct contact between the inner wall of the end cover and the gasket and the connecting head, improving the insulation between the end cover and the gasket and the connecting head, and further improving the insulation performance of the guiding structure insulation installation device itself.

[0019] In an alternative embodiment, a first through hole is formed in the connector head, a second through hole corresponding to the first through hole is formed in the gasket, and a third through hole corresponding to the first through hole is formed in the end cover. The rod unit of the fastening unit sequentially passes through the third through hole, the first through hole and the second through hole, and the head unit of the fastening unit abuts against one end of the bottom wall of the end cover away from the connector head; a fourth through hole is further formed in the end cover, and the contour of the fourth through hole is larger than the outer contour of the support rod and smaller than the outer contour of the connector head. The support rod is arranged in the fourth through hole.

[0020] Advantageous effects: By arranging that the rod unit of the fastening unit sequentially passes through the third through hole in the end cover, the first through hole in the connector head and the second through hole in the gasket, and the head unit of the fastening unit abuts against one end of the bottom wall of the end cover away from the connector head, it is realized that the end cover, the connector head and the gasket are pressed together by the fastening unit. And by arranging that the cross-sectional dimension of the fourth through hole in the end cover is larger than the cross-sectional dimension of the support rod and smaller than the cross-sectional dimension of the connector head, the support rod can be arranged in the fourth through hole and the connector head is limited at the first end of the end cover, so as to realize the connection between the support seat and the insulating component, and the sleeved structural form is relatively stable and has high reliability. Herein, the cross section refers to the section perpendicular to the axis.

[0021] In an alternative embodiment, a fifth annular groove is formed in the inner side of the bottom wall of the end cover, the fifth annular groove is arranged around the circumference of the third through hole, the fifth annular groove includes a first groove section and a second groove section connected end to end, the first groove section coincides with a partial section of the circumferential edge of the fourth through hole, and the side wall of one end of the second groove section close to the third through hole is flush with the outer peripheral surface of the connector head.

[0022] Advantageous effects: The fifth annular groove makes the transition position of the outer surface where the bottom wall of the end cover is connected to the connector head discontinuous, further improving the insulation between the end cover and the connector head, and thus further improving the insulation of the guiding structure insulation installation device itself.

[0023] In a second aspect, the present invention further provides a PVD device, including: a process chamber; a carrier plate adapted to move in the process chamber; the above-mentioned guiding structure insulation installation device installed in the process chamber to provide guidance for the movement of the carrier plate. Since the PVD device includes the guiding structure insulation installation device and has the same effects as the guiding structure insulation installation device, it will not be repeated here. Description of the Drawings

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0025] Figure 1 Schematic diagram of a guiding structure insulation installation device according to an embodiment of the present invention;

[0026] Figure 2 For Figure 1 Cross-sectional view of the guiding structure insulation installation device shown;

[0027] Figure 3 For Figure 2 Partial enlarged view of the guiding structure insulation installation device in;

[0028] Figure 4 Schematic diagram of a support seat according to an embodiment of the present invention;

[0029] Figure 5 For Figure 4 Cross-sectional view of the support seat shown;

[0030] Figure 6 Schematic diagram of a gasket according to an embodiment of the present invention;

[0031] Figure 7 For Figure 6 Cross-sectional view of the gasket shown;

[0032] Figure 8 Schematic diagram of an insulating sleeve according to an embodiment of the present invention;

[0033] Figure 9 For Figure 8 Cross-sectional view of the insulating sleeve shown;

[0034] Figure 10 Schematic diagram of an end cap according to an embodiment of the present invention;

[0035] Figure 11 For Figure 10 Cross-sectional view of the end cap shown.

[0036] Explanation of reference numerals:

[0037] 1. Support assembly; 110. Support base; 101. Connector; 1011. Second relief surface; 1012. First through hole; 111. Second relief ring; 112. Second annular groove; 113. Second gap; 102. Support rod; 103. Positioning hole; 120. Adjusting rod; 121. Kidney-shaped hole; 130. Locking member; 2. Guide assembly; 210. Guide wheel shaft; 220. Guide wheel; 3. Insulating assembly; 310. Gasket; 301. First relief surface; 302. Second through hole; 311. First relief ring; 312. First annular groove; 313. Accommodating groove; 314. Third annular groove; 320. Insulating sleeve; 303. Third relief surface; 321. Third relief ring; 322. Fourth annular groove; 323. Fifth through hole; 330. Fastener; 340. End cover; 341. Fifth annular groove; 342. Third through hole; 343. Fourth through hole; 344. Fifth gap; 4. Mounting structure. Detailed implementation manners

[0038] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0039] The following will be combined with Figures 1 to 11 , to describe the embodiments of the present utility model.

[0040] According to an embodiment of the present invention, on the one hand, a guiding structure insulation installation device is provided, including: a support assembly 1, a guiding assembly 2, and an insulation assembly 3. The first end of the support assembly 1 has a connection head 101; the guiding assembly 2 is disposed at the second end of the support assembly 1; the insulation assembly 3 includes a gasket 310 and a fastening unit. The first end of the gasket 310 is adapted to abut against the installation structure 4, and the second end of the gasket 310 abuts against the first end of the connection head 101. The fastening unit includes a head unit and a rod unit. The rod unit is successively passed through the connection head 101 and the gasket 310 and is adapted to be connected to the installation structure 4. The head unit directly or indirectly abuts against the second end of the connection head 101; a first avoidance portion is configured at the circumferential edge of the first end of the gasket 310, so that a first partition space is formed between a partial area of the first end of the gasket 310 and the installation structure 4; a second avoidance portion is configured at the second end of the gasket 310, a third avoidance portion is configured at the circumferential edge of the first end of the connection head 101, and a second partition space is formed between a partial area of the first end of the connection head 101 and a partial area of the second end of the gasket 310; a fourth avoidance portion is configured at the end of the head unit facing the connection head 101, so that a third partition space is formed between the head unit and the connection head 101. Wherein, the first end and the second end are opposite ends on the component. Specifically, the first end refers to the end in the direction of "left" indicated by the arrow in Figures 1 to 2 and the second end refers to the end in the direction of "right" indicated by the arrow in Figures 1 to 2 .

[0041] Applying the guiding structure insulation installation device of this embodiment, the rod unit of the fastening unit passes through the connecting head 101 and the gasket 310 in sequence and then is connected to the installation structure 4, and the head unit abuts against the second end of the connecting head 101, so as to connect the connecting head 101 and the gasket 310 through the fastening unit and press them on the installation structure 4, realizing the fixed connection between the guiding structure insulation installation device and the installation structure 4. And the first partition space formed by constructing the first avoidance portion at the circumferential edge of the first end of the gasket 310 makes there be a certain interval between the surfaces of the gasket 310 in contact with the installation structure 4, that is, disconnecting the outer surface transition position where the gasket 310 is connected to the installation structure 4. By constructing the second avoidance portion at the second end of the gasket 310 and the third avoidance portion at the circumferential edge of the first end of the connecting head 101, the second partition space formed makes there be a certain interval between the surfaces of the gasket 310 in contact with the connecting head 101, that is, disconnecting the outer surface transition position where the gasket 310 is connected to the connecting head 101. The third partition space formed between the head unit of the fastening unit and the connecting head 101 by constructing the fourth avoidance portion at the end of the head unit of the fastening unit facing the connecting head 101 makes there be a certain interval between the surfaces of the head unit of the fastening unit in contact with the connecting head 101, that is, disconnecting the outer surface transition position where the fastening unit is connected to the connecting head 101. Thus, multiple discontinuities are formed on the outer surface of the entire guiding structure insulation installation device. The discontinuity positions can effectively avoid the problem of outer surface connection caused by the accumulation of film layers splashed onto the outer surface of the device due to long-term production. The multiple discontinuities form multiple insulations between the guiding wheel assembly and the cavity, greatly reducing the probability of outer surface conduction, avoiding the insulation isolation failure between the carrier plate and the equipment body, thereby ensuring the long-term effectiveness of insulation and effectively extending the continuous production and use time of the guiding structure insulation installation device.

[0042] It should be noted that the insulation component 3, the support component 1 and the guiding component 2 are connected in sequence, and the insulation component 3 is connected to the installation structure 4, so as to fix the whole guiding structure insulation installation device on the installation structure 4; the guiding structure insulation installation device is installed and arranged in the process cavity of the PVD equipment. The installation structure 4 can be the side wall of the process cavity or other bases in the cavity; the guiding component 2 at the second end of the guiding structure insulation installation device faces the carrier plate and is suitable for guiding the movement of the carrier plate, so as to ensure the smoothness of the carrier plate during the movement in the process cavity.

[0043] In one embodiment, the first end of the gasket 310 is configured with a first avoidance ring 311 and a first annular groove 312. The first avoidance ring 311 is arranged circumferentially around the gasket 310, and the first avoidance ring 311 is formed by a partial area at the circumferential edge of the first end face of the gasket 310 recessing towards the direction close to the second end face of the gasket 310, so as to form a first avoidance face 301 at the first end of the gasket 310. The first avoidance face 301 and the first end face of the gasket 310 are arranged in a stepped manner, and a first gap is formed between the first avoidance face 301 and the mounting structure 4; the first avoidance face 301 is annular, and the first annular groove 312 is formed by a partial area on the first avoidance face 301 close to the inner ring edge of the annular shape recessing towards the direction close to the second end face of the gasket 310. The first gap and the first annular groove 312 form a first partition space. Wherein, the first end face of the gasket 310 refers to the end face of the gasket 310 that abuts against the mounting structure 4; the gasket 310 includes a first cylinder and a first ring body. The first ring body is circumferentially connected to the outer peripheral surface of the first cylinder. The first ring body corresponds to the first avoidance ring 311 along the extending direction of the central axis of the gasket 310. The ring surface where the inner ring of the first ring body is located and the ring surface where the outer peripheral surface of the first cylinder is located are the ring surface where the inner ring of the first avoidance ring 311 is located, and the ring surface where the outer ring of the first ring body is located is the ring surface where the outer ring of the first avoidance ring 311 is located.

[0044] It should be noted that the first avoidance ring 311 is formed at the position where the first end face of the gasket 310 intersects with the circumferential face of the gasket 310. The first gap is the position of the first avoidance ring 311 on the guiding structure insulation mounting device. By constructing the first avoidance ring 311 at the circumferential edge of the first end face of the gasket 310, a first gap is formed between the gasket 310 and the mounting structure 4, thereby realizing the partition at the transition position of the outer surface where the gasket 310 is connected to the mounting structure 4, improving the insulation between the gasket 310 and the mounting structure 4. At the same time, by constructing the first annular groove 312 between the first avoidance face 301 and the outer peripheral surface of the first cylinder, the first annular groove 312 is arranged around the central axis of the gasket 310 for one week, and the first annular groove 312 is communicated with the first avoidance ring 311, realizing the disconnection of the outer surface of the gasket 310 through the first annular groove 312, further improving the insulation of the gasket 310 itself. Thus, the first partition space composed of the first gap and the first annular groove 312 can greatly reduce the probability of the outer surface conduction at the transition between the gasket 310 and the mounting structure 4, ensuring the long-term effectiveness of the insulation isolation between the carrier board and the equipment body.

[0045] In one embodiment, the width of the first annular groove 312 is greater than or equal to 0.3 mm, and the depth is greater than or equal to 0.5 mm. The first annular groove 312 is formed in an annular shape in a cross-section perpendicular to the center line of the gasket 310. The width of the first annular groove 312 refers to the width of the annular ring, and the depth refers to the dimension in the extending direction of the center line of the gasket 310. The width of the first gap is greater than or equal to 0.3 mm. The width of the first gap refers to the distance between the first end face of the gasket 310 and the first avoiding face 301 in the extending direction of the center line of the gasket 310.

[0046] In one embodiment, the first end of the connector 101 is configured with a second avoiding ring 111 and a second annular groove 112. The second avoiding ring 111 is arranged around the circumference of the connector 101, and the second avoiding ring 111 is recessed from a partial area at the circumferential edge of the first end face of the connector 101 towards the direction close to the second end face of the connector 101, so as to form a second avoiding face 1011 at the first end of the connector 101. The second avoiding face 1011 and the first end face of the connector 101 are arranged in a stepped manner. The second avoiding face 1011 is annular, and the second annular groove 112 is recessed from a partial area on the second avoiding face 1011 close to the inner ring edge of the annular shape towards the direction close to the second end face of the connected connector 101. The first end face of the connector 101 refers to the end face of the connector 101 that abuts against the second end of the gasket 310. The connector 101 includes a second cylinder and a second ring body. The second ring body is circumferentially connected to the outer peripheral surface of the second cylinder. The second ring body corresponds to the second avoiding ring 111 along the extending direction of the center line of the connector 101 (i.e., Figure 2 the "left and right" direction indicated by the arrow in the figure). The ring plane where the inner ring of the second ring body is located and the ring plane where the outer peripheral surface of the second cylinder is located are the ring plane where the inner ring of the second avoiding ring 111 is located, and the ring plane where the outer ring of the second ring body is located is the ring plane where the outer ring of the second avoiding ring 111 is located.

[0047] It should be noted that the second avoiding ring 111 is formed at the position where the first end face of the connector 101 intersects with its circumferential face. On the guiding structure insulation installation device, the position where the second avoiding ring 111 is located is the third gap. By constructing the second avoiding ring 111 at the circumferential edge of the first end face of the connector 101, a gap is formed between the connector 101 and the gasket 310, thereby realizing the isolation at the transition position of the outer surface where the gasket 310 is connected to the connector, improving the insulation between the connector 101 and the gasket 310. At the same time, by constructing the second annular groove 112 on the connector 101, the second annular groove 112 is arranged around the center line of the connector 101 for one week, and the second annular groove 112 is communicated with the second avoiding ring 111. By disconnecting the outer surface of the connector 101 through the second annular groove 112, the insulation of the connector 101 itself is further improved, and the insulation of the guiding structure insulation installation device itself is further improved.

[0048] In one embodiment, the width of the second annular groove 112 is greater than or equal to 0.3 mm, and the depth is greater than or equal to 0.5 mm. Wherein, the second annular groove 112 is formed in a ring shape in a cross-section perpendicular to the center line of the connector 101. The width of the second annular groove 112 refers to the width of the ring of this ring shape, and the depth refers to the dimension in the extending direction of the center line of the connector 101; the width of the third gap is greater than or equal to 0.3 mm. Wherein, the width of the third gap refers to the distance between the first end face of the connector 101 and the second avoiding face 1011 in the extending direction of the center line of the connector 101.

[0049] In one embodiment, the second end of the gasket 310 is configured with a receiving groove 313 and a third annular groove 314. The receiving groove 313 is located at the center position of the second end face of the gasket 310. The receiving groove 313 is formed by a partial area on the second end face of the gasket 310 recessing towards the direction close to the first end face of the gasket 310. The circumferential dimension of the receiving groove 313 is greater than the dimension of the outer contour of the connector 101. There is a gap between the inner wall of the receiving groove 313 and the outer peripheral surface of the connector 101 to form a second gap 113; the first end face of the connector 101 abuts against the bottom surface of the receiving groove 313, and the second avoiding face 1011 is spaced from the bottom surface of the receiving groove 313 to form a third gap; the third annular groove 314 is arranged around the inner circumferential surface of the receiving groove 313, and the third annular groove 314 is formed by a partial area of the circumferential edge of the bottom surface of the receiving groove 313 recessing towards the direction close to the first end face of the gasket 310; the second gap 113, the third annular groove 314, the third gap and the second annular groove 112 form a second partition space.

[0050] By constructing a receiving groove 313 at the second end of the gasket 310 and making the circumferential dimension of the receiving groove 313 larger than the outer contour dimension of the connector head, when the first end face of the connector head 101 abuts against the bottom face of the receiving groove 313, a partial section of the connector head 101 extends into the receiving groove 313, and a second gap 113 is formed between the side wall of the receiving groove 313 and the outer peripheral surface of the connector head 101, thereby realizing the nesting of the gasket 310 and the connector head 101 and keeping the inner wall of the receiving groove 313 on the gasket 310 spaced from the circumferential surface of the connector head 101, avoiding direct contact between the two, thus improving the insulation between the gasket 310 and the connector head 101. At the same time, by constructing a third annular groove 314 at the circumferential edge of the bottom face of the receiving groove 313, the third annular groove 314 surrounds the bottom face of the receiving groove 313 for one week, and the side wall of the third annular groove 314 at the end far from the center line of the connector head 101 is flush with the inner wall of the receiving groove 313. By the third annular groove 314, the direct connection between the bottom face and the side wall of the receiving groove 313 is disconnected, improving the insulation of the second end of the gasket 310. Thus, at the position where the gasket 310 contacts the connector head 101, a second discontinuous space composed of the second gap 113, the third annular groove 314, the third gap (i.e., the second avoidance ring 111) and the second annular groove 112 improves the insulation between the gasket 310 and the connector head 101, and further improves the insulation of the guiding structure insulation installation device itself.

[0051] In one embodiment, the width of the third annular groove 314 is greater than or equal to 0.3 mm, and the depth is greater than or equal to 0.5 mm. Wherein, the third annular groove 314 is formed in a ring shape in the cross-section perpendicular to the center line of the gasket 310. The width of the third annular groove 314 refers to the width of the ring of this ring shape, and the depth refers to the dimension in the extending direction of the center line of the gasket 310; the width of the second gap 113 is greater than or equal to 0.3 mm. Wherein, the width of the second gap 113 refers to the distance between the inner wall of the receiving groove 313 and the outer peripheral surface of the connector head 101.

[0052] In one embodiment, a third avoidance ring 321 and a fourth annular groove 322 are constructed at the first end of the head unit. The third avoidance ring 321 is arranged around the circumference of the head unit, and the third avoidance ring 321 is formed by partial areas at the circumferential edge of the first end of the head unit recessing towards the direction close to the second end of the head unit, so as to form a third avoidance surface 303 at the first end of the head unit. The third avoidance surface 303 and the first end face of the head unit are arranged in a stepped manner, and a fourth gap is formed between the third avoidance surface 303 and the connector head 101; the third avoidance surface 303 is in a ring shape, and the fourth annular groove 322 is formed by partial areas at the inner ring edge of the third avoidance surface 303 recessing towards the direction close to the second end of the head unit; the fourth gap and the fourth annular groove 322 form a third partition space. Wherein, the first end of the head unit and the first end of the connector head 101 face the same direction, that is, it refers to the direction towards Figure 2One end in the direction of "left" pointed by the arrow; the first end face of the head unit refers to the surface of the head unit facing the first end.

[0053] It should be noted that the third avoidance ring 321 is formed at the position where the first end face of the head unit intersects with its circumferential face. On the guiding structure insulation mounting device, the position where the third avoidance ring 321 is located is the fourth gap. By constructing the third avoidance ring 321 at the circumferential edge of the first end face of the head unit, a gap is formed between the structure abutting against the first end of the head unit and the head unit, thereby realizing the partition at the transition position of the outer surface where the head unit is connected to the adjacent structure, improving the insulation performance. At the same time, by constructing the fourth ring groove 322 on the head unit, the fourth ring groove 322 is arranged around the center line of the head unit for one week, and the fourth ring groove 322 is communicated with the third avoidance ring 321, disconnecting the outer surface of the head unit, further improving the insulation performance of the head unit itself, and thus further improving the insulation performance of the guiding structure insulation mounting device itself.

[0054] In one embodiment, the width of the fourth ring groove 322 is greater than or equal to 0.3 mm, and the depth is greater than or equal to 0.5 mm. Wherein, the fourth ring groove 322 is formed in a ring shape in the cross-section perpendicular to the center line of the head unit. The width of the fourth ring groove 322 refers to the width of the ring of this ring shape, and the depth refers to the dimension in the extending direction along the center line of the head unit; the width of the fourth gap is greater than or equal to 0.3 mm. Wherein, the width of the fourth gap refers to the distance between the first end face of the head unit and the third avoidance face 303 in the extending direction along the center line of the head unit.

[0055] In one embodiment, the support assembly 1 includes a support base 110, an adjustment rod 120 and a locking member 130. The support base 110 includes a connecting head 101 and a support rod 102 which are connected. The adjustment rod 120 is movably connected to the support rod 102, and a guiding assembly 2 is arranged at the end of the adjustment rod 120 far from the support rod 102; the locking member 130 can selectively lock the adjustment rod 120 and the support rod 102. The adjustment rod 120 can move axially along the support rod 102. By setting that the adjustment rod 120 and the support rod 102 are movably connected and the locking member 130 can selectively lock the adjustment rod 120 and the support rod 102, the overall length of the support assembly 1 can be adjusted and locked, so that it can be adaptively adjusted according to the size of the carrier plate, with high flexibility and wide applicability.

[0056] In one embodiment, a clamping groove adapted to the support base 110 is provided on the adjusting rod 120. The adjusting rod 120 and the support base 110 are positioned through the clamping groove, and the support base 110 can slide in the clamping groove, so as to realize the relative movement between the adjusting rod 120 and the support base 110. A waist-shaped hole 121 penetrating the adjusting rod 120 is formed on the adjusting rod 120, and a positioning hole 103 is formed on the support base 110. The locking member 130 sequentially passes through the waist-shaped hole 121 and the positioning hole 103 and is locked. By correspondingly locking different positions of the waist-shaped hole with the positioning hole 103, the corresponding positions of the adjusting rod 120 and the support base 110 are realized, so as to realize the adjustment of the length of the adjusting support assembly 1.

[0057] In one embodiment, the locking member 130 is a fastening screw, and the positioning hole 103 has an internal thread. The fastening screw is matched with the internal thread to realize locking, and the structure is simple and the operation is convenient.

[0058] Preferably, the number of the waist-shaped holes 121 is two, the number of the locking members 130 is two, and the number of the positioning holes 103 is at least two. The adjusting rod 120 and the support base 110 are locked by the two locking members 130, further improving the structural stability.

[0059] Optionally, the number of the positioning holes 103 is two, and the two positioning holes 103 correspond to the two waist-shaped holes 121 one by one. It can be understood that as an alternative embodiment, the number of the positioning holes 103 can also be three or more. The two waist-shaped holes 121 can be selectively connected to two adjacent positioning holes 103, which can further increase the distance that the adjusting rod 120 can move relative to the support base 110 and further expand the adjustable length of the support base 110.

[0060] In one embodiment, the insulating component 3 further includes: an end cover 340. The first end of the end cover 340 is an open end. The end cover 340 covers the outer peripheral side of the connecting head 101 and at least part of the outer peripheral side of the gasket 310 from the second end of the connecting head 101. The inner wall of the end cover 340 is spaced from the outer peripheral wall of the connecting head 101 and the outer peripheral wall of the gasket 310. The bottom wall of the end cover 340 is clamped between the second end surface of the connecting head 101 and the first end surface of the head unit. Wherein, the first end of the end cover 340 has the same orientation as the first end of the connecting head 101, that is Figures 1 to 2One end in the direction of "left" pointed by the arrow; at least part of the gasket 310 refers to at least part of the gasket 310 along its center line direction. By arranging the end cover 340 to cover the outer peripheral side of the connector 101 and at least part of the outer peripheral side of the gasket 310, the circumferential dimension of the inner wall of the end cover 340 is larger than the circumferential dimensions of the connector 101 and the gasket 310, so as to realize the nested arrangement of the connector 101, the gasket 310 and the end cover 340. Moreover, the inner wall of the end cover 340 is spaced from the outer peripheral wall of the connector 101 and the outer peripheral wall of the gasket 310, and a fifth gap 344 is formed between the inner wall of the end cover 340 and the outer peripheral surface of the gasket 310, avoiding the direct contact between the inner wall of the end cover 340 and the gasket 310 and the connector 101, improving the insulation between the end cover 340 and the gasket 310 and the connector 101, and further improving the insulation of the guiding structure insulation installation device itself.

[0061] It should be noted that when the insulating component 3 includes the end cover 340, the head unit of the fastening unit directly abuts against the end cover 340, that is, the head unit indirectly abuts against the second end of the connector 101 through the bottom surface of the end cover 340; when the insulating component 3 does not include the end cover 340, the head unit directly abuts against the second end of the connector 101. That is, the guiding structure insulation installation device can remove or replace the end cover 340 according to the installation needs, but the complete guiding property and the insulation with the installation structure 4 should be ensured.

[0062] In one embodiment, a first through hole 1012 is formed in the connector 101, a second through hole 302 corresponding to the first through hole 1012 is formed in the gasket 310, and a third through hole 342 corresponding to the first through hole 1012 is formed in the end cover 340. The rod unit of the fastening unit sequentially passes through the third through hole 342, the first through hole 1012 and the second through hole 302, and the head unit of the fastening unit abuts against one end of the bottom wall of the end cover 340 far from the connector 101; a fourth through hole 343 is further formed in the end cover 340. The contour of the fourth through hole 343 is larger than the outer contour of the support rod 102 and smaller than the outer contour of the connector 101, and the support rod 102 is arranged in the fourth through hole 343. It should be noted that along the direction from the first end to the second end of the guiding structure insulation installation device, the gasket 310, the bottom wall of the connector 101 and the end cover 340 are abutted in sequence. The contour dimension of the fourth through hole 343 is the dimension of the cross section of the fourth through hole 343; the outer contour of the support rod 102 refers to the outer contour of the support rod 102 in the cross section perpendicular to its axis; the outer contour of the connector 101 refers to the outer contour of the connector 101 in the cross section perpendicular to its axis.

[0063] By arranging the rod unit of the fastening unit to sequentially pass through the third through hole 342 on the end cover 340, the first through hole 1012 on the connector 101, and the second through hole 302 on the gasket 310, and the head unit of the fastening unit abuts against one end of the bottom wall of the end cover 340 away from the connector 101, the end cover 340, the connector 101, and the gasket 310 are pressed together by the fastening unit. And by setting the cross-sectional dimension of the fourth through hole on the end cover 340 to be larger than the cross-sectional dimension of the support rod 102 and smaller than the cross-sectional dimension of the connector 101, the support rod 102 can be inserted into the fourth through hole 343 and the connector 101 is limited at the first end of the end cover 340, so as to realize the connection between the support seat 110 and the insulating component 3, and the sleeved structural form is relatively stable and has high reliability. Wherein, the cross-section refers to the section perpendicular to the axis.

[0064] In one embodiment, the number of the first through hole 1012, the second through hole 302, and the third through hole 342 is two each. One first through hole 1012, the second through hole 302, and the third through hole 342 form a group. The number of the fastening units is two. Each fastening unit cooperates with a group of the first through hole 1012, the second through hole 302, and the third through hole 342, further improving the stability and reliability of the connection between the structural members.

[0065] In one embodiment, the fastening unit includes an insulating sleeve 320 and a fastener 330. The insulating sleeve 320 includes a head and a rod. The radial dimension of the head of the insulating sleeve 320 is larger than the radial dimension of its rod. The head of the insulating sleeve 320 abuts against one end of the bottom wall of the end cover 340 away from the connector 101. The rod of the insulating sleeve 320 extends into the third through hole 342, the first through hole 1012, and the second through hole 302 and abuts against the inner wall of the through hole. The third avoidance ring 321 and the fourth annular groove 322 are arranged on the head of the insulating sleeve 320; a fifth through hole 323 penetrating along the axial direction is arranged on the insulating sleeve 320. The fastener 330 includes a head and a rod. The radial dimension of the head of the fastener 330 is larger than the dimension of the fifth through hole 323, abuts against one end of the head of the insulating sleeve 320 away from the end cover 340. The rod of the fastener 330 is longer than the rod of the insulating sleeve 320. The rod of the fastener 330 passes through the fifth through hole 323 and is connected to the mounting structure 4.

[0066] Preferably, the fastener 330 is a fastening screw, which has a simple structure and is convenient to install.

[0067] Preferably, the gasket 310, end cap 340, insulating sleeve 320, fastener 330, and support base 110 are all made of insulating materials. It can be understood that as an alternative embodiment, it is also possible to arrange that the gasket 310, end cap 340, insulating sleeve 320, fastener 330, and support base 110 are not all made of conductive materials, but it is necessary to ensure that the guiding structure insulating installation device and the installation structure 4 have electrical insulation after combined installation.

[0068] In one embodiment, a fifth annular groove 341 is formed on the inner side of the bottom wall of the end cap 340. The fifth annular groove 341 is arranged circumferentially around the third through hole 342. The fifth annular groove 341 includes a first groove section and a second groove section that are connected end to end. The first groove section coincides with a partial section of the circumferential edge of the fourth through hole 343, and the side wall of the second groove section near one end of the third through hole 342 is flush with the outer peripheral surface of the connecting head 101. The fifth annular groove 341 makes the transition position of the outer surface of the bottom wall of the end cap 340 connected to the connecting head 101 discontinuous, further improving the insulation between the end cap 340 and the connecting head 101, and thus further improving the insulation of the guiding structure insulating installation device itself.

[0069] In one embodiment, the width of the fifth annular groove 341 is greater than or equal to 0.3 mm, and the depth is greater than or equal to 0.5 mm. Among them, the fifth annular groove 341 is formed in an annular shape in a cross-section perpendicular to the center line of the end cap 340. The width of the fifth annular groove 341 refers to the width of this annular shape, and the depth refers to the dimension in the extending direction of the center line of the end cap 340.

[0070] In one embodiment, the guiding assembly 2 includes a guiding wheel shaft 210 and a guiding wheel 220. The guiding wheel 220 is installed and fixed to the adjusting rod 120 through the guiding wheel shaft 210 and a snap ring. The guiding wheel 220 is in rolling contact with the carrier plate to provide guidance for the movement of the carrier plate.

[0071] In the guiding structure insulation installation device of this embodiment, the gasket 310 is positioned and fitted to the wall surface of the installation structure 4, and there is a first gap formed by the first avoidance ring and a first ring groove 312 between the two; the support base 110 is positioned and installed with the gasket 310, and there is a third gap formed by the second avoidance ring 111, a second gap 113 formed between the inner wall of the receiving groove 313 and the outer peripheral surface of the connecting head 101, a second ring groove 112 and a third ring groove 314 between the two; the end cover 340 covers the connecting head 101 of the support base 110 and the gasket 310, and there is a fifth gap 344 formed between the inner wall of the end cover 340 and the outer peripheral surface of the gasket 310; the insulating sleeve 320 is installed in the third through hole 342, the first through hole 1012 and the second through hole 302, and there is a fourth gap formed by the third avoidance ring 321 and a fourth ring groove 322 between the end face thereof facing the end cover 340 and the end cover 340; there is a fifth ring groove 341 between the inner side of the bottom wall of the end cover 340 and the connecting head 101; by adding multiple grooves to disconnect the outer surface of the device, and at the same time through the installation and nesting combination of components, multiple design gaps are formed, effectively avoiding the outer surface connection caused by the accumulation of the film layer on the outer surface of the device during long-term production. The multiple grooves and gap designs form multiple insulations, greatly reducing the probability of the outer surface of the device being conducted, and effectively extending the continuous production and use time of the device.

[0072] The guiding structure insulation installation device of this embodiment can effectively prevent the connection caused by sputtering on the outer surface during film coating production by adding an insulation component composed of the gasket 310, the end cover 340, and the fastener 330, and making each component assembled to form a groove gap. At the same time, small grooves are opened at the corresponding positions on its surface, so as to ensure the long-term effectiveness of insulation.

[0073] According to an embodiment of the present invention, on the other hand, a PVD device is further provided, including: a process chamber, a carrier plate, and the above-mentioned guiding structure insulation installation device. The carrier plate is adapted to move in the process chamber; the guiding structure insulation installation device is installed in the process chamber to provide guidance for the movement of the carrier plate. One end of the insulation component 3 provided on the guiding structure insulation installation device is fixedly connected to the side wall of the cavity of the process chamber or other bases, and the guiding component 2 at the other end contacts the carrier plate. The guiding component 2 provides guidance for the movement of the carrier plate in the process chamber, ensures the smoothness of the movement process of the carrier plate, and at the same time ensures the insulation between the carrier plate and the equipment body such as the side wall of the cavity.

[0074] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A guide structure insulation installation device, characterized in that: include: A support assembly (1), wherein a first end of the support assembly (1) has a connector (101); A guide assembly (2) arranged at the second end of the support assembly (1); An insulating component (3), comprising a gasket (310) and a fastening unit, wherein a first end of the gasket (310) is suitable for abutting against a mounting structure (4), and a second end of the gasket (310) is abutted against a first end of the connector (101), the fastening unit comprises a head unit and a rod unit, the rod unit is suitable for connecting to the mounting structure (4) after passing through the connector (101) and the gasket (310) in sequence, and the head unit is directly or indirectly abutted against the second end of the connector (101); A first avoidance portion is configured at the circumferential edge of the first end of the gasket (310), so that a first partition space is formed between a partial area of ​​the first end of the gasket (310) and the mounting structure (4); a second avoidance portion is configured at the second end of the gasket (310), and a third avoidance portion is configured at the circumferential edge of the first end of the connector (101), so that a second partition space is formed between a partial area of ​​the first end of the connector (101) and a partial area of ​​the second end of the gasket (310); and a fourth avoidance portion is configured at one end of the head unit facing the connector (101), so that a third partition space is formed between the head unit and the connector (101).

2. The guide structure insulation installation device according to claim 1, characterized in that: The first end of the gasket (310) is configured with a first avoidance ring (311) and a first annular groove (312); the first avoidance ring (311) is arranged around the circumference of the gasket (310); and the first avoidance ring (311) is formed by a partial area at the circumferential edge of the first end face of the gasket (310) being recessed in a direction close to the second end face of the gasket (310), so as to form a first avoidance surface (301) at the first end of the gasket (310); the first avoidance surface (301) and the first end face of the gasket (310) are arranged in a stepped manner, and a first gap is formed between the first avoidance surface (301) and the mounting structure (4); The first avoidance surface (301) is annular, and the first annular groove (312) is formed by a partial area of ​​the first avoidance surface (301) close to the inner ring edge of the annular shape being recessed in a direction close to the second end surface of the gasket (310), and the first gap and the first annular groove (312) constitute the first partition space.

3. The guide structure insulation installation device according to claim 1, characterized in that: The first end of the connector (101) is configured with a second avoidance ring (111) and a second annular groove (112); the second avoidance ring (111) is arranged around the circumference of the connector (101); and the second avoidance ring (111) is formed by a partial area at the circumferential edge of the first end face of the connector (101) being recessed in a direction close to the second end face of the connector (101), so as to form a second avoidance surface (1011) at the first end of the connector (101); the second avoidance surface (1011) and the first end face of the connector (101) are arranged in a stepped manner; the second avoidance surface (1011) is annular, and the second annular groove (112) is formed by a partial area on the second avoidance surface (1011) close to the inner ring edge of the annular shape being recessed in a direction close to the second end face of the connector (101).

4. The guide structure insulation installation device according to claim 3, characterized in that: The second end of the gasket (310) is configured with a receiving groove (313) and a third annular groove (314); the receiving groove (313) is located at the center of the second end surface of the gasket (310); the receiving groove (313) is formed by a partial area on the second end surface of the gasket (310) being recessed in a direction close to the first end surface of the gasket (310); the circumferential dimension of the receiving groove (313) is greater than the dimension of the outer contour of the connector (101); the inner wall of the receiving groove (313) is aligned with the outer contour of the connector (101); The outer circumferential surfaces are spaced apart to form a second gap (113); the first end surface of the connecting head (101) abuts against the bottom surface of the accommodating groove (313), and the second avoidance surface (1011) is spaced apart from the bottom surface of the accommodating groove (313) to form a third gap; the third annular groove (314) is arranged around the inner circumferential surface of the accommodating groove (313), and the third annular groove (314) is formed by a partial area of ​​the circumferential edge of the bottom surface of the accommodating groove (313) being recessed in a direction close to the first end surface of the gasket (310); The second gap (113), the third annular groove (314), the third gap and the second annular groove (112) constitute the second partition space.

5. The guide structure insulation installation device according to claim 1, characterized in that: The first end of the head unit is constructed with a third avoidance ring (321) and a fourth annular groove (322); the third avoidance ring (321) is arranged around the circumference of the head unit, and the third avoidance ring (321) is formed by a partial area at the circumferential edge of the first end of the head unit being recessed toward the direction close to the second end of the head unit, so as to form a third avoidance surface (303) at the first end of the head unit; the third avoidance surface (303) and the first end surface of the head unit are arranged in a stepped manner, and a fourth gap is formed between the third avoidance surface (303) and the connector (101); the third avoidance surface (303) is annular, and the fourth annular groove (322) is formed by a partial area on the third avoidance surface (303) close to the inner ring edge of the annular shape being recessed toward the direction close to the second end of the head unit; the fourth gap and the fourth annular groove (322) constitute the third partition space.

6. The guide structure insulation installation device according to any one of claims 1 to 5, characterized in that: The support assembly (1) comprises a support seat (110), an adjustment rod (120) and a locking member (130); the support seat (110) comprises a connecting head (101) and a support rod (102) connected to each other; the adjustment rod (120) is movably connected to the support rod (102); the guide assembly (2) is provided at one end of the adjustment rod (120) away from the support rod (102); the locking member (130) can selectively lock the adjustment rod (120) and the support rod (102).

7. The guide structure insulation installation device according to claim 6, characterized in that: The insulating component (3) further comprises: an end cover (340), the first end of the end cover (340) being an open end, the end cover (340) being arranged on the outer peripheral side of the connecting head (101) and the outer peripheral side of at least a portion of the gasket (310) by the second end cover of the connecting head (101), the inner wall of the end cover (340) being spaced apart from the outer peripheral wall of the connecting head (101) and the outer peripheral wall of the gasket (310), and the bottom wall of the end cover (340) being sandwiched between the second end face of the connecting head (101) and the first end face of the head unit.

8. The guide structure insulation installation device according to claim 7, characterized in that: The connecting head (101) is provided with a first through hole (1012), the gasket (310) is provided with a second through hole (302) corresponding to the first through hole (1012), the end cover (340) is provided with a third through hole (342) corresponding to the first through hole (1012), the rod unit of the fastening unit passes through the third through hole (342), the first through hole (1012) and the second through hole (302) in sequence, and the head unit of the fastening unit abuts against an end of the bottom wall of the end cover (340) away from the connecting head (101); The end cover (340) is also provided with a fourth through hole (343), the outline of the fourth through hole (343) being larger than the outer outline of the support rod (102) and smaller than the outer outline of the connector (101), and the support rod (102) is inserted into the fourth through hole (343).

9. The guide structure insulation installation device according to claim 8, characterized in that: A fifth annular groove (341) is provided on the inner side of the bottom wall of the end cover (340), and the fifth annular groove (341) is arranged around the circumference of the third through hole (342). The fifth annular groove (341) includes a first groove section and a second groove section connected end to end, the first groove section overlaps with a partial section of the circumferential edge of the fourth through hole (343), and the side wall of the second groove section at one end close to the third through hole (342) is flush with the outer circumferential surface of the connector (101).

10. A PVD device, characterized in that: include: Process cavity; a carrier plate adapted to move within the process chamber; The guide structure insulation installation device described in any one of claims 1 to 9 is installed in the process chamber to provide guidance for the movement of the carrier.

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