Magnetic suspension furnace tube device for chemical vapor deposition

Abstract

The utility model discloses a magnetic suspension furnace tube device for chemical vapor deposition, which comprises an outer furnace tube, an inner furnace tube is movably connected in the outer furnace tube in a penetrating manner, a powder accommodating cavity is arranged on the inner furnace tube, and a magnetic induction driving wheel component and more than two groups of permanent magnet components are fixedly sleeved on the outer side of the inner furnace tube. The magnetic suspension assemblies and the magnetic induction rotation driving assemblies are both located below the outer furnace tube, the magnetic induction rotation driving assemblies correspond to the magnetic induction driving wheel assemblies, the permanent magnet assemblies correspond to the magnetic suspension assemblies in a one-to-one mode, and the magnetic pole directions of the permanent magnet assemblies are the same as the magnetic pole directions of the corresponding magnetic suspension assemblies. The inner furnace tube is coaxially suspended on the center line of the outer furnace tube under the action of magnetic repulsive force between the magnetic suspension assembly and the permanent magnet assembly, and sealing covers with pipe connecting heads are mounted at the two ends of the outer furnace tube. The initial speed is provided for the inner furnace tube through disturbance of an external magnet, the initial speed is kept within a certain rotating speed range after acceleration, and the value of current introduced into the magnetic induction rotating driving assembly is adjusted so that the inner furnace tube can be flexibly adjusted and controlled within the rotating speed range of 100-5000 rmp.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition equipment, in particular to a magnetic levitation furnace tube device for chemical vapor deposition. Background Art

[0002] At present, using chemical vapor deposition preparation technology to prepare a nanomaterial layer on the surface of metal powder is the mainstream preparation method for firing nano-material-coated powder. In the past, researchers solved the bonding problem caused by the long-term accumulation of powder on the lower side of the furnace tube during high-temperature firing by adding a rotation speed to the chemical vapor deposition tube furnace, that is, solved the sealing problem caused by the rotation of the furnace tube while the external devices (such as connecting gas paths, circuits, etc.) do not rotate through magnetic fluid sealing technology. However, the defects of the above method are as follows: the rotation speed of the rotating device generally cannot exceed 100 r / min, so that obvious bonding phenomena still occur between powders during high-temperature firing, and subsequent chemical ultrasonic dispersion or mechanical grinding is still required to eliminate the bonding phenomenon of powders, which will inevitably damage the nano-coating structure deposited on the outer surface of the metal powder by chemical vapor deposition, resulting in a reduction in the physical and chemical properties of the nano-material-coated powder; if the rotation speed of the furnace tube is forcibly increased, it is difficult to ensure the airtightness inside the furnace tube at high rotation speeds, that is, high rotation speed and high airtightness cannot be achieved at the same time. Therefore, the utility model provides a magnetic levitation furnace tube device for chemical vapor deposition in order to solve the above technical problems. Summary of the Invention

[0003] The purpose of the utility model is to overcome the defects existing in the prior art and provide a magnetic levitation furnace tube device for chemical vapor deposition. When in use, metal powder is placed in the powder storage cavity on the inner furnace tube. Through the magnetic repulsive force between the magnetic levitation component and the permanent magnet component, the inner furnace tube is coaxially suspended on the center line of the outer furnace tube, and an initial speed is provided for the inner furnace tube through the disturbance of an external magnet. Then, the magnetic repulsive force between the magnetic induction rotation driving component and the magnetic induction driving wheel component will drive the inner furnace tube to accelerate and maintain within a certain rotation speed range. When the voltage is constant, the rotation speed of the inner furnace tube can also be flexibly adjusted by adjusting the current value passed through the circuit of the magnetic induction rotation driving component, so that its rotation speed can be flexibly adjusted within the rotation speed range of 100 - 5000 rmp; when in use, the outer furnace tube does not rotate, so there is a good sealing effect between the two ends of the outer furnace tube and the corresponding sealing covers, that is, it is ensured that the device of the utility model has a durable and efficient sealing performance; the overall structure design is simple, the preparation and implementation feasibility is high, and the practicability is strong.

[0004] To achieve the above object, the technical solution of the utility model is to design a magnetic levitation furnace tube device for chemical vapor deposition, which includes an outer furnace tube, an inner furnace tube, more than two groups of magnetic levitation components, and a magnetic induction rotation driving component. The inner furnace tube is movably inserted into the inner part of the outer furnace tube. The inner furnace tube is provided with a powder storage cavity. An magnetic induction driving wheel component and more than two groups of permanent magnet components are sleeved and fixed on the outer side of the inner furnace tube. The magnetic levitation components and the magnetic induction rotation driving component are both located below the outer furnace tube. And the magnetic induction rotation driving component corresponds to the magnetic induction driving wheel component. The permanent magnet components correspond to the magnetic levitation components one by one, and the magnetic pole directions of the permanent magnet components and the corresponding magnetic levitation components are the same. The inner furnace tube is coaxially levitated on the center line of the outer furnace tube by the magnetic repulsive force between the magnetic levitation components and the permanent magnet components. Sealing covers are detachably installed at both ends of the outer furnace tube respectively, and connecting pipe heads are arranged on the sealing covers.

[0005] When the magnetic levitation furnace tube device for chemical vapor deposition of the utility model is in use, metal powder is placed in the powder storage cavity on the inner furnace tube. The inner furnace tube is coaxially levitated on the center line of the outer furnace tube by the magnetic repulsive force between the magnetic levitation components and the permanent magnet components. And an initial speed is provided for the inner furnace tube by the disturbance of an external magnet. Then the magnetic repulsive force between the magnetic induction rotation driving component and the magnetic induction driving wheel component will drive the inner furnace tube to accelerate and then maintain within a certain rotational speed range. When the voltage is constant, the rotational speed of the inner furnace tube can also be flexibly adjusted by adjusting the current value passed through the circuit of the magnetic induction rotation driving component, so that the rotational speed can be flexibly adjusted within the range of 100 - 5000 rmp. When in use, the outer furnace tube does not rotate, so there is a good sealing effect between the two ends of the outer furnace tube and the corresponding sealing covers, that is, it is ensured that the device of the utility model has a durable and efficient sealing performance. The overall structure design is simple, the preparation and implementation feasibility is high, and the practicability is strong.

[0006] Preferably, both the permanent magnet assembly and the magnetic levitation assembly include two groups. One group of the permanent magnet assembly is the permanent magnet sleeve one, and the other group of the permanent magnet assembly is the permanent magnet sleeve two. The permanent magnet sleeve one and the permanent magnet sleeve two are correspondingly located at the left and right ends of the inner furnace tube. The magnetic levitation assembly includes a base, and there are two upward-opening slots on the base. A magnetic levitation permanent magnet one is fixedly arranged in one slot, and a magnetic levitation permanent magnet two is fixedly arranged in the other slot. During use, one magnetic levitation assembly is correspondingly located below the permanent magnet sleeve one, and the other magnetic levitation assembly is correspondingly located below the permanent magnet sleeve two. And the magnetic levitation permanent magnet one and the magnetic levitation permanent magnet two on the magnetic levitation assembly cooperate to provide an upward magnetic repulsive force for the corresponding permanent magnet sleeve one or permanent magnet sleeve two. The structure design of the magnetic levitation assembly is simple, and its adaptability to the permanent magnet sleeve is good, ensuring that the magnetic levitation furnace tube device of the present invention can be successfully prepared and implemented; the lifting height of the outer furnace tube can also be adjusted by adjusting the distance between the magnetic levitation permanent magnet one and the magnetic levitation permanent magnet two on the base, ensuring that the magnetic levitation furnace tube device of the present invention has high flexible applicability.

[0007] Further preferably, the magnetic induction driving wheel assembly includes a driving wheel body and a plurality of permanent magnet blocks. The driving wheel body is sleeved and fixedly arranged on the outer peripheral side of one end of the inner furnace tube, and a plurality of the permanent magnet blocks are circumferentially and spacedly inserted and fixedly arranged in the mounting holes on the outer peripheral side of the driving wheel body. The structure design of the magnetic induction driving wheel assembly is ingenious and reasonable. A plurality of permanent magnet blocks are circumferentially and spacedly inserted and fixedly arranged on the outer peripheral side of the driving wheel body, ensuring that the magnetic fields are spacedly distributed on the outer peripheral side of the driving wheel body. Its adaptability to the magnetic induction rotation driving assembly is good. When the magnetic induction rotation driving assembly senses that the magnetic field of the permanent magnet blocks on the driving wheel body approaches, it will feedback a repulsive magnetic field to push the driving wheel body to rotate. In this way, the rotation speed of the driving wheel body gradually increases, so as to ensure that the inner furnace tube can be smoothly accelerated to a stable rotation speed.

[0008] Further preferably, an axial limiting assembly is also provided at the left end or the right end of the inner furnace tube. The axial limiting assembly can keep the axial position of the inner furnace tube unchanged inside the outer furnace tube and only rotate on the axis of the outer furnace tube, ensuring the smoothness of the inner furnace tube during rotation.

[0009] A further preferred technical solution is that the axial limiting component includes a housing, which is composed of a pipe body section and cylinder sections coaxially fixed at both ends of the pipe body section. The cylinder sections have central holes penetrating through the left and right end faces. A permanent magnet limiting ring I is fixedly installed by embedding in the central hole of one cylinder section, and a permanent magnet limiting ring II is fixedly installed by embedding in the central hole of the other cylinder section. Both the permanent magnet limiting ring I and the permanent magnet limiting ring II are movably sleeved on the inner furnace tube, and the permanent magnet limiting ring I and the permanent magnet limiting ring II are located on the left and right sides of the permanent magnet sleeve I or the permanent magnet sleeve II. The pipe body section is correspondingly movably sleeved outside the permanent magnet sleeve I or the permanent magnet sleeve II. Moreover, the magnetic pole directions between the opposite end faces of the permanent magnet limiting ring I and the permanent magnet sleeve I or the permanent magnet sleeve II, and the magnetic pole directions between the opposite end faces of the permanent magnet limiting ring II and the permanent magnet sleeve I or the permanent magnet sleeve II are the same. The structure design of the axial limiting component is simple. Through the action of magnetic repulsion, the permanent magnet sleeve I or the permanent magnet sleeve II floats axially between the permanent magnet limiting ring I and the permanent magnet limiting ring II, ensuring the smoothness when the inner furnace tube rotates.

[0010] A further preferred technical solution is that the magnetic induction rotation driving component includes a U-shaped seat. A plurality of Hall sensing components are fixedly installed on the inner side surface of the U-shaped seat. The inner furnace tube passes through the inside of the U-shaped seat, and the magnetic induction driving wheel component is correspondingly located in the cavity surrounded by the plurality of Hall sensing components. The magnetic induction rotation driving component is a Hall sensing element with strong universality, ensuring the successful preparation and implementation of the magnetic levitation furnace tube of the present utility model.

[0011] A further preferred technical solution is that the U-shaped seat includes a U-shaped bracket I and a U-shaped bracket II arranged in parallel and spaced correspondingly. Grooves are respectively provided on the opposite side surfaces of the U-shaped bracket I and the U-shaped bracket II. The U-shaped bracket I and the U-shaped bracket II are fixedly connected together by a seat plate. One end of the seat plate is fixedly installed by embedding in the groove of the U-shaped bracket I, and the other end is fixedly installed by embedding in the groove of the U-shaped bracket II. The Hall sensing components are fixedly installed on the seat plate. The structure design of the U-shaped seat is simple, and the feasibility of preparation and implementation is high.

[0012] A further preferred technical solution is that the sealing cover is a sealing flange. One end of the outer furnace tube is sealed and installed with a gas input end sealing flange, and the other end is sealed and installed with a gas output end sealing flange. A gas input connecting nozzle is provided on the gas input end sealing flange, and a gas output connecting nozzle is provided on the gas output end sealing flange.

[0013] A further preferred technical solution is that sealing rings are embedded and fixed on the inner sides of the gas input end sealing flange and the gas output end sealing flange. The gas input end sealing flange and the gas output end sealing flange are both installed on the outer side of the end of the outer furnace tube by interference clamping through the sealing rings on their inner sides. The installation or disassembly method of the sealing flange at the end of the outer furnace tube is simple, ensuring the convenience of inserting and installing or disassembling and removing the inner furnace tube inside the outer furnace tube.

[0014] The advantages and beneficial effects of the present utility model are as follows:

[0015] 1. For the magnetic levitation furnace tube device for chemical vapor deposition of the present utility model, during use, the metal powder is placed in the powder storage cavity on the inner furnace tube. Through the magnetic repulsive force between the magnetic levitation component and the permanent magnet component, the inner furnace tube is coaxially levitated on the center line of the outer furnace tube. An initial velocity is provided for the inner furnace tube by the disturbance of an external magnet. Then, the magnetic repulsive force between the magnetic induction rotation driving component and the magnetic induction driving wheel component will drive the inner furnace tube to accelerate and maintain within a certain rotational speed range. When the voltage is constant, the rotational speed of the inner furnace tube can also be flexibly adjusted by adjusting the current value passed through the circuit of the magnetic induction rotation driving component, so that its rotational speed can be flexibly adjusted within the range of 100 - 5000 rmp; during use, the outer furnace tube does not rotate, so there is a good sealing effect between the two ends of the outer furnace tube and the corresponding sealing covers, that is, it ensures that the device of the present utility model has a durable and efficient sealing performance; the overall structure design is simple, the preparation and implementation feasibility is high, and the practicability is strong.

[0016] 2. The structure design of the magnetic levitation component is simple and has good adaptability to the permanent magnet sleeve, ensuring that the magnetic levitation furnace tube device of the present utility model can be successfully prepared and implemented; the lifting height of the outer furnace tube can also be adjusted by adjusting the distance between the magnetic levitation permanent magnet one and the magnetic levitation permanent magnet two on the base, ensuring that the magnetic levitation furnace tube device of the present utility model has high flexible applicability.

[0017] 3. The structure design of the magnetic induction driving wheel component is ingenious and reasonable. A number of permanent magnet blocks are circumferentially spaced and fixedly connected to the outer peripheral side of the driving wheel body, ensuring that there is a magnetic field with spaced distribution on the outer peripheral side of the driving wheel body, and it has good adaptability to the magnetic induction rotation driving component. When the magnetic induction rotation driving component senses the magnetic field of the permanent magnet block on the driving wheel body approaching, it will feedback a repulsive magnetic field to push the driving wheel body to rotate. In this way, the rotational speed of the driving wheel body gradually increases, ensuring that the inner furnace tube can be successfully accelerated to a stable rotational speed.

[0018] 4. An axial limiting component is also provided at the left end or the right end of the inner furnace tube. The axial limiting component can keep the axial position of the inner furnace tube unchanged inside the outer furnace tube and only perform rotational motion on the axis of the outer furnace tube, ensuring the smoothness of the inner furnace tube during rotation.

[0019] 5. The axial limiting component has a simple structure design. Through the action of magnetic repulsion force, the permanent magnet sleeve 1 or the permanent magnet sleeve 2 is axially suspended between the permanent magnet limiting ring 1 and the permanent magnet limiting ring 2, ensuring the smoothness of the inner furnace tube rotation.

[0020] 6. The installation or disassembly method of the sealing flange at the end of the outer furnace tube is simple, ensuring the convenience of the inner furnace tube when it is inserted and installed or disassembled and taken out inside the outer furnace tube. Brief Description of the Drawings

[0021] Figure 1 is a perspective view of the left front side of a magnetic levitation furnace tube device for chemical vapor deposition in Embodiment 1;

[0022] Figure 2 is a perspective view of the left front side of the inner furnace tube;

[0023] Figure 3 is a cross-sectional view of the axial limiting component;

[0024] Figure 4 is a cross-sectional view at the position of the permanent magnet sleeve 1;

[0025] Figure 5 is a cross-sectional view at the position of the magnetic induction rotation drive component;

[0026] Figure 6 is a longitudinal cross-sectional view along the axis of a magnetic levitation furnace tube device for chemical vapor deposition in Embodiment 1;

[0027] Figure 7 is a graph showing the relationship between the rotation speed of the inner furnace tube and the current in the circuit of the magnetic induction rotation drive component in Embodiment 2.

[0028] In the figure: 1. Gas input connection head; 2. Gas output connection head; 3. Gas input end sealing flange; 4. Gas output end sealing flange; 5. Base; 6. Magnetic levitation permanent magnet 1; 7. U-shaped bracket 1; 8. U-shaped bracket 2; 9. Seat plate 1; 10. Hall sensing component 1; 11. Outer furnace tube; 12. Inner furnace tube; 13. Permanent magnet sleeve 1; 14. Powder storage cavity; 15. Driving wheel body; 16. Permanent magnet block; 17. Shell; 17-1. Cylindrical section; 17-2. Tube section; 18. Permanent magnet limiting ring 1; 19. Permanent magnet sleeve 2; 20. Permanent magnet limiting ring 2; 21. Magnetic levitation permanent magnet 2; 22. Seat plate 2; 23. Hall sensing component 2; 24. Seat plate 3; 25. Hall sensing component 3; A. Groove. Detailed Embodiment

[0029] The following combines the drawings and embodiments to further describe the specific implementation manners of the present invention. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and cannot be used to limit the protection scope of the present invention.

[0030] Example 1

[0031] As Figures 1 to 6 shown, the utility model is a magnetic levitation furnace tube device for chemical vapor deposition, which includes an outer furnace tube 11, an inner furnace tube 12, more than two groups of magnetic levitation components, and a magnetic induction rotation driving component. The inner furnace tube 12 is movably inserted into the inner part of the outer furnace tube 11. A powder storage cavity 14 is provided on the inner furnace tube 12. A magnetic induction driving wheel component and more than two groups of permanent magnet components are sleeved and fixedly arranged on the outer side of the inner furnace tube 12. The magnetic levitation component and the magnetic induction rotation driving component are both located below the outer furnace tube 11, and the magnetic induction rotation driving component corresponds to the magnetic induction driving wheel component. The permanent magnet components correspond to the magnetic levitation components one by one, and the magnetic pole directions of the permanent magnet components and the corresponding magnetic levitation components are the same. The inner furnace tube 12 is coaxially levitated on the center line of the outer furnace tube 11 through the magnetic repulsive force between the magnetic levitation component and the permanent magnet component. Sealing covers are detachably installed at both ends of the outer furnace tube 11 respectively, and a connecting pipe head is provided on the sealing cover.

[0032] Preferably, both the permanent magnet component and the magnetic levitation component include two groups. One group of the permanent magnet component is a permanent magnet sleeve one 13, and the other group of the permanent magnet component is a permanent magnet sleeve two 19. The permanent magnet sleeve one 13 and the permanent magnet sleeve two 19 are correspondingly located at the left and right ends of the inner furnace tube 12. The magnetic levitation component includes a base 5. Two upward-opening clamping slots are provided on the base 5. A magnetic levitation permanent magnet one 6 is fixedly arranged in one of the clamping slots, and a magnetic levitation permanent magnet two 21 is fixedly arranged in the other clamping slot. During use, one magnetic levitation component is correspondingly located below the permanent magnet sleeve one 13, and the other magnetic levitation component is correspondingly located below the permanent magnet sleeve two 19. The magnetic levitation permanent magnet one 6 and the magnetic levitation permanent magnet two 21 on the magnetic levitation component cooperate to provide an upward magnetic repulsive force for the corresponding permanent magnet sleeve one 13 or permanent magnet sleeve two 19.

[0033] Further preferably, the magnetic induction driving wheel component includes a driving wheel body 15 and a number of permanent magnet blocks 16. The driving wheel body 15 is sleeved and fixedly arranged on the outer peripheral side of one end of the inner furnace tube 12. A number of the permanent magnet blocks 16 are circumferentially and spacedly inserted and fixedly arranged in the mounting holes located on the outer peripheral side of the driving wheel body 15.

[0034] Further preferably, an axial limiting component is also provided at the left end or the right end of the inner furnace tube 12.

[0035] Further preferably, the axial limiting component includes a housing 17, which is composed of a pipe body section 17-2 and cylindrical sections 17-1 coaxially fixed at both ends of the pipe body section 17-2. The cylindrical section 17-1 has a central hole penetrating through the left and right end faces. A permanent magnet limiting ring one 18 is fixedly installed inside the central hole of one of the cylindrical sections 17-1, and a permanent magnet limiting ring two 20 is fixedly installed inside the central hole of the other cylindrical section 17-1. Both the permanent magnet limiting ring one 18 and the permanent magnet limiting ring two 20 are movably sleeved on the inner furnace tube 12, and the permanent magnet limiting ring one 18 and the permanent magnet limiting ring two 20 are located on the left and right sides of the permanent magnet sleeve one 13 or the permanent magnet sleeve two 19. The pipe body section 17-2 is correspondingly movably sleeved outside the permanent magnet sleeve one 13 or the permanent magnet sleeve two 19. Moreover, the magnetic pole directions between the opposite end faces of the permanent magnet limiting ring one 18 and the permanent magnet sleeve one 13 or the permanent magnet sleeve two 19, and the magnetic pole directions between the opposite end faces of the permanent magnet limiting ring two 20 and the permanent magnet sleeve one 13 or the permanent magnet sleeve two 19 are the same.

[0036] To ensure that the inner furnace tube can rotate freely in the axial limiting component without severe shaking, specifically, the radial clearance size range between the outer peripheral side of the inner furnace tube 12 and the inner peripheral side of the permanent magnet limiting ring one 18 or the inner peripheral side of the permanent magnet limiting ring two 20 is designed to be 1-5 mm.

[0037] Further preferably, the magnetic induction rotation driving component includes a U-shaped seat. A plurality of Hall sensing components are fixedly installed on the inner side surface of the U-shaped seat. The inner furnace tube 12 passes through the inside of the U-shaped seat, and the magnetic induction driving wheel component is correspondingly located in the cavity surrounded by the plurality of Hall sensing components.

[0038] Further preferably, the U-shaped seat includes a U-shaped bracket one 7 and a U-shaped bracket two 8 arranged in parallel at intervals. Grooves A are respectively provided on the opposite side surfaces of the U-shaped bracket one 7 and the U-shaped bracket two 8. The U-shaped bracket one 7 and the U-shaped bracket two 8 are fixedly connected together by a seat plate. One end of the seat plate is fixedly installed inside the groove A of the U-shaped bracket one 7, and the other end is fixedly installed inside the groove A of the U-shaped bracket two 8. The Hall sensing components are fixedly installed on the seat plate.

[0039] Further preferably, the seat plate includes a first seat plate 9, a second seat plate 22, and a third seat plate 24. A set of opposite rear side arms of the first U-shaped bracket 7 and the second U-shaped bracket 8 are fixedly connected together through the first seat plate 9. A set of opposite bottom plates of the first U-shaped bracket 7 and the second U-shaped bracket 8 are fixedly connected together through the second seat plate 22. A set of opposite front side arms of the first U-shaped bracket 7 and the second U-shaped bracket 8 are fixedly connected together through the third seat plate 24. The Hall sensing assembly includes a first Hall sensing assembly 10, a second Hall sensing assembly 23, and a third Hall sensing assembly 25. The first Hall sensing assembly 10 is fixedly installed on the first seat plate 9, the second Hall sensing assembly 23 is fixedly installed on the second seat plate 22, and the third Hall sensing assembly 25 is fixedly installed on the third seat plate 24.

[0040] Further preferably, the sealing cover is a sealing flange. One end of the outer furnace tube 11 is hermetically installed with a gas input end sealing flange 3, and the other end is hermetically installed with a gas output end sealing flange 4. A gas input connection nozzle 1 is provided on the gas input end sealing flange 3, and a gas output connection nozzle 2 is provided on the gas output end sealing flange 4.

[0041] Further preferably, sealing rings are embedded and fixed on the inner sides of the gas input end sealing flange 3 and the gas output end sealing flange 4. The gas input end sealing flange 3 and the gas output end sealing flange 4 are both installed on the outer side surface of the end of the outer furnace tube 11 by interference clamping through the sealing rings on their inner sides.

[0042] The working principle of a magnetically levitated furnace tube device for chemical vapor deposition of the present utility model:

[0043] Remove the gas input end sealing flange 3 or the gas output end sealing flange 4; put a certain amount of metal powder into the powder containing cavity 14 of the inner furnace tube 12, then insert the inner furnace tube 12 into the outer furnace tube 11, and then re-interference fit and install the gas input end sealing flange 3 or the gas output end sealing flange 4 at the end of the outer furnace tube 11; connect the gas input connection head 1 and the gas output connection head 2 to the corresponding gas pipelines, start the working switch through the control system, and at the same time hold a permanent magnet close to the position corresponding to the magnetic induction driving wheel assembly on the upper side of the outer furnace tube 11 and shake it back and forth to provide an initial speed for the inner furnace tube 12. When the magnetic induction rotation driving assembly senses the approaching magnetic field of the permanent magnet block 16 on the driving wheel body 15, it will feedback a repulsive magnetic field to push the driving wheel body 15 to rotate. In this way, the rotation speed of the driving wheel body 15 gradually increases, and the inner furnace tube 12 continuously accelerates until it maintains a stable rotation speed; after the deposition reaction is over, turn off the working switch through the control system, and the rotation speed of the inner furnace tube 12 continuously decreases until it stops. After the temperature of the inner furnace tube 12 drops to room temperature, remove the gas input end sealing flange 3 or the gas output end sealing flange 4, take out the inner furnace tube 12, and remove the metal powder, which can be used for the processing of the next batch of metal powder.

[0044] For a magnetic levitation furnace tube device for chemical vapor deposition of the present utility model, during use, place the metal powder in the powder containing cavity on the inner furnace tube. Due to the magnetic repulsive force between the magnetic levitation assembly and the permanent magnet assembly, the inner furnace tube is coaxially suspended on the center line of the outer furnace tube, and an initial speed is provided for the inner furnace tube by the disturbance of an external magnet. Then, the magnetic repulsive force between the magnetic induction rotation driving assembly and the magnetic induction driving wheel assembly will drive the inner furnace tube to accelerate and then maintain within a certain rotation speed range. When the voltage is constant, the rotation speed of the inner furnace tube can also be flexibly adjusted by adjusting the current value passed through the circuit of the magnetic induction rotation driving assembly, so that its rotation speed can be flexibly adjusted within the range of 100 - 5000 rmp; during use, the outer furnace tube does not rotate, so there is a good sealing effect between the two ends of the outer furnace tube and the corresponding sealing covers, that is, it ensures that the device of the present utility model has a durable and efficient sealing performance; the overall structure design is simple, the preparation and implementation feasibility is high, and the practicability is strong.

[0045] Example 2

[0046] Perform a rotation speed test on the inner furnace tube in a magnetic levitation furnace tube device for chemical vapor deposition in Example 1:

[0047] The total mass of the inner furnace tube 12, the permanent magnet sleeve 1 on its outer peripheral side, the permanent magnet sleeve 2 19, and the magnetic induction drive wheel assembly is 300 g. 100 g of metal powder is added to the powder storage cavity 14. A DC voltage of 12 V is applied to the circuit of the magnetic induction rotary drive assembly. At the start of the test, hold a permanent magnet close to the position corresponding to the magnetic induction drive wheel assembly on the upper side of the outer furnace tube 11 and shake it back and forth to provide an initial speed for the inner furnace tube 12. By adjusting the magnitude of the current value in the circuit of the magnetic induction rotary drive assembly, the maximum rotational speed of the inner furnace tube 12 is tested. The test results are shown in the appendix Figure 7 .

[0048] Figure 7 is the relationship diagram between the rotational speed of the inner furnace tube and the current in the circuit of the magnetic induction rotary drive assembly in Embodiment 2. It can be seen from Figure 7 that under the condition that the DC voltage applied to the circuit of the magnetic induction rotary drive assembly is 12 V, by adjusting the current value in the circuit of the magnetic induction rotary drive assembly from 0 to 2.2 A, the rotational speed range of the inner furnace tube 12 is controlled within 0 to 5000 rpm, and as the applied current value increases, the rotational speed of the inner furnace tube 12 shows a gradually increasing linear trend. Among them: when the current is 12 V and the current is 0.15 A, the rotational speed of the inner furnace tube 12 is stable at 100 ± 7 rpm; when the current is 12 V and the current is 2.21 A, the rotational speed of the inner furnace tube 12 is stable at 5000 ± 275 rpm. That is, under a certain voltage, the rotational speed of the inner furnace tube can be flexibly regulated by adjusting the current value passed through the circuit of the magnetic induction rotary drive assembly, so that its rotational speed can be flexibly regulated within the rotational speed range of 100 to 5000 rmp, achieving the invention purpose.

[0049] The above is only the preferred embodiment of the present utility model. It should be noted that for those of ordinary skill in the art of this technology, without departing from the technical principle of the present utility model, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present utility model.

Claims

1. A magnetic suspension furnace tube device for chemical vapor deposition, characterized in that: The invention comprises an outer furnace tube (11), an inner furnace tube (12), two or more magnetic suspension components, and a magnetic induction rotary drive component. The inner furnace tube (12) is movably connected to the inner part of the outer furnace tube (11). The inner furnace tube (12) is provided with a powder containing cavity (14). The outer side of the inner furnace tube (12) is sleeved and fixedly provided with a magnetic induction drive wheel component and two or more permanent magnet components. The magnetic suspension component and the magnetic induction rotary drive component are both located below the outer furnace tube (11). The magnetic induction rotary drive component corresponds to the magnetic induction drive wheel component. The permanent magnet component corresponds to the magnetic suspension component one by one. The magnetic pole direction of the permanent magnet component is the same as that of the corresponding magnetic suspension component. The inner furnace tube (12) is coaxially suspended on the center line of the outer furnace tube (11) by the magnetic repulsive force between the magnetic suspension component and the permanent magnet component. The two ends of the outer furnace tube (11) are respectively detachably provided with sealing covers, and the sealing covers are provided with pipe connection heads.

2. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 1, characterized in that: The permanent magnet assembly and the magnetic suspension assembly each comprise two groups, one group of the permanent magnet assembly comprises a permanent magnet sleeve 1 (13), and the other group of the permanent magnet assembly comprises a permanent magnet sleeve 2 (19). The permanent magnet sleeve 1 (13) and the permanent magnet sleeve 2 (19) are correspondingly located at the left and right ends of the inner furnace tube (12). The magnetic suspension assembly comprises a base (5), and the base (5) is provided with two upwardly opening slots, one of the slots being fixedly provided with a magnetic suspension permanent magnet 1 (6), and the other of the slots being fixedly provided with a magnetic suspension permanent magnet 2 (21). When in use, one of the magnetic suspension assemblies is correspondingly located below the permanent magnet sleeve 1 (13), and the other of the magnetic suspension assemblies is correspondingly located below the permanent magnet sleeve 2 (19), and the magnetic suspension permanent magnet 1 (6) and the magnetic suspension permanent magnet 2 (21) on the magnetic suspension assembly cooperate with each other to provide an upward magnetic repulsive force for the corresponding permanent magnet sleeve 1 (13) or permanent magnet sleeve 2 (19).

3. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 2, characterized in that: The magnetic induction drive wheel assembly comprises a drive wheel body (15) and a plurality of permanent magnet blocks (16); the drive wheel body (15) is sleeved and fixedly arranged on the outer peripheral side of one end of the inner furnace tube (12); and the plurality of permanent magnet blocks (16) are circumferentially spaced and fixedly arranged in mounting holes located on the outer peripheral side of the drive wheel body (15).

4. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 3, characterized in that: An axial limiting component is also provided at the left end or the right end of the inner furnace tube (12).

5. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 4, characterized in that: The axial limit assembly comprises a shell (17), the shell (17) comprises a tube section (17-2) and a column section (17-1) coaxially fixed at both ends of the tube section (17-2), the column section (17-1) has a central hole passing through the left and right end surfaces, a permanent magnetic limit ring 1 (18) is embedded and fixed in the central hole of one column section (17-1), and a permanent magnetic limit ring 2 (20) is embedded and fixed in the central hole of the other column section (17-1), the permanent magnetic limit ring 1 (18) and the permanent magnetic limit ring The second ring (20) is movably sleeved on the inner furnace tube (12), the first permanent magnetic limit ring (18) and the second permanent magnetic limit ring (20) are located on the left and right sides of the first permanent magnetic sleeve (13) or the second permanent magnetic sleeve (19), and the pipe body section (17-2) is correspondingly movably sleeved on the outside of the first permanent magnetic sleeve (13) or the second permanent magnetic sleeve (19), and the magnetic pole direction between the two opposite end surfaces of the first permanent magnetic limit ring (18) and the first permanent magnetic sleeve (13) or the second permanent magnetic sleeve (19) and the magnetic pole direction between the two opposite end surfaces of the first permanent magnetic limit ring (18) and the first permanent magnetic sleeve (13) or the second permanent magnetic sleeve (19) are the same.

6. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 1, characterized in that: The magnetic induction rotary drive assembly comprises a U-shaped seat, a plurality of Hall sensor assemblies are fixedly arranged on the inner side of the U-shaped seat, the inner furnace tube (12) is connected to the inside of the U-shaped seat, and the magnetic induction drive wheel assembly is correspondingly located in a cavity surrounded by the plurality of Hall sensor assemblies.

7. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 6, characterized in that: The U-shaped seat comprises a U-shaped bracket 1 (7) and a U-shaped bracket 2 (8) which are arranged in parallel and spaced apart from each other. The two opposite side surfaces of the U-shaped bracket 1 (7) and the U-shaped bracket 2 (8) are respectively provided with grooves (A). The U-shaped bracket 1 (7) and the U-shaped bracket 2 (8) are fixedly connected together through a seat plate. One end of the seat plate is embedded and fixedly installed in the groove (A) of the U-shaped bracket 1 (7), and the other end is embedded and fixedly installed in the groove (A) of the U-shaped bracket 2 (8). The Hall sensor component is fixedly installed on the seat plate.

8. The magnetic suspension furnace tube device for chemical vapor deposition according to any one of claims 1 to 7, characterized in that: The sealing cover is a sealing flange. A gas input sealing flange (3) is sealedly installed at one end of the outer furnace tube (11), and a gas output sealing flange (4) is sealedly installed at the other end. A gas input pipe connector (1) is provided on the gas input pipe connector (3), and a gas output pipe connector (2) is provided on the gas output pipe connector (4).

9. The magnetic suspension furnace tube device for chemical vapor deposition according to claim 8, characterized in that: The inner side surfaces of the gas input end sealing flange (3) and the inner side surfaces of the gas output end sealing flange (4) are both embedded with sealing rings, and the gas input end sealing flange (3) and the gas output end sealing flange (4) are both installed on the outer side surface of the end of the outer furnace tube (11) by interference fit through the sealing rings on their inner side surfaces.

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