Spray head and vapor deposition device

Abstract

The utility model provides a spray head and a vapor deposition device.The spray head comprises a spray head body and an adjusting mechanism, the spray head body is provided with a first cooling flow channel, the first cooling flow channel spirally extends from the center of the spray head body to the outer side of the spray head body, and the adjusting mechanism communicates with the first cooling flow channel; the first cooling flow channel is used for adjusting the flowing direction of the cooling medium in the first cooling flow channel within a preset time interval, and the flowing direction of the cooling medium in the first cooling flow channel is changed within the preset time interval, so that the cooling uniformity of the cooling medium on the spray head body is guaranteed, and the whole spray head body is cooled to the preset temperature. And therefore, the generation of metal ALD thin film carbides is reduced, the generation of particles is reduced, and the stability and consistency of the ALD thin film are guaranteed.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and more specifically, relates to a nozzle and a chemical vapor deposition device. Background Art

[0002] With the rapid development of integrated circuits, the gate length and the thickness of the silicon dioxide gate oxide layer are continuously decreasing, and phenomena such as polysilicon gate depletion effect, Fermi level pinning, excessive gate resistance, and severe boron penetration are becoming more and more serious, seriously restricting the further improvement of the characteristics of semiconductor devices. Therefore, in addition to using new high-dielectric constant materials to replace the traditional silicon dioxide gate dielectric layer to improve the effective gate oxide layer thickness, gate leakage current, and reliability, using a metal gate to replace the polysilicon gate electrode is becoming an inevitable trend of development.

[0003] Currently, in the industry, MOS commonly uses metal ALD as the metal gate material, and the desired adjustable threshold voltage can be obtained by controlling the thickness of the thin film. However, during the preparation of the thin film, the nozzle needs to be heated to a set temperature. If the temperature of the nozzle is too high, the carbon-based substance in the precursor used to generate the thin film will react prematurely at the nozzle, forming a deposit at the nozzle, resulting in carbide particles falling off the nozzle. The problem with the above technical solution is that if the temperature of the nozzle cannot be effectively regulated, the thickness of the carbide attached to the inner wall of the nozzle increases, resulting in an increase in the particles generated by the carbide falling off in the thin film, thus affecting the stability and consistency of the thin film. Summary of the Invention

[0004] The purpose of the embodiments of this application is to provide a nozzle and a chemical vapor deposition device to solve the technical problem that the stability and consistency of the metal ALD thin film in the production process of the nozzle in the prior art still need to be improved.

[0005] To achieve the above purpose, the first aspect of this application provides a nozzle, including:

[0006] A nozzle body, provided with a first cooling channel and a plurality of through holes. The first cooling channel extends spirally from the center of the nozzle body to the outside of the nozzle, and the plurality of through holes are arranged at the gaps of the first cooling channel;

[0007] An adjusting mechanism, communicated with the first cooling channel, for adjusting the flow direction of the cooling medium in the first cooling channel at preset time intervals.

[0008] Adopting the above technical solution, the adjustment mechanism is used to control the cooling medium to enter the first cooling channel, and the first cooling channel is used to cool the through hole. When the nozzle is working, since the temperature on the nozzle body is relatively high, therefore, under the heating of the nozzle body, the temperature of the cooling medium at the outlet end of the first cooling channel is higher than that of the cooling medium at the inlet end of the first cooling channel. The adjustment mechanism changes the flow direction of the cooling medium in the first cooling channel at preset time intervals, so as to ensure the uniformity of the cooling of the nozzle body by the cooling medium, so as to cool the whole nozzle body to a preset temperature, thereby reducing the generation of metal ALD film carbide, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film.

[0009] Optionally, the adjustment mechanism includes:

[0010] A reversing valve, which is communicated with the first cooling channel;

[0011] A controller, which is electrically connected to the reversing valve, and the controller is used to control the reversing valve to change the direction of the cooling medium entering the first cooling channel within the preset time interval.

[0012] Adopting the above technical solution, the inlet of the first cooling channel is arranged outside the nozzle body, the outlet of the first cooling channel is arranged inside the nozzle body, and both the inlet and the outlet of the first cooling channel are communicated with the reversing valve. The controller is used to control the reversing valve to reverse according to the preset time set inside it, so that the cooling medium enters the first cooling channel from the inlet and the outlet of the first cooling channel respectively, thereby changing the direction of the cooling medium entering the first cooling channel, so as to cool the nozzle body on the outside and inside of the nozzle body respectively, so as to ensure the uniformity of the cooling of the nozzle body by the cooling medium, so as to cool the whole nozzle body to a preset temperature.

[0013] Optionally, the preset time interval includes a first preset time interval and a second preset time interval, and the first preset time interval and the second preset time interval alternate in sequence;

[0014] The controller controls the cooling medium to flow in the first cooling channel in a first direction within the first preset time interval;

[0015] The controller controls the cooling medium to flow in the first cooling channel in a second direction within the second preset time interval;

[0016] Wherein, the first direction and the second direction are opposite.

[0017] With the above technical solution, when the cooling medium is set to flow in the first cooling channel from the inlet direction of the first cooling channel towards the outlet direction of the cooling channel, it is the first direction, and when the cooling medium flows in the first cooling channel from the outlet direction of the first cooling channel towards the inlet direction of the cooling channel, it is the second direction, and the first direction and the second direction are opposite. Within the first preset time interval, the controller controls the cooling medium to flow into the first cooling channel along the first direction, that is, within the preset first time interval, the cooling medium cools the spray head body from the outside of the spray head body towards the inside of the spray head body; and within the second preset time interval, the controller controls the cooling medium to flow into the first cooling channel along the second direction, that is, within the second preset time interval, the cooling medium cools the spray head body from the inside of the spray head body towards the outside of the spray head body.

[0018] Optionally, the spray head body is further provided with a second cooling channel, and the second cooling channel is arranged at an interval from the first cooling channel;

[0019] The second cooling channel extends spirally from the center of the spray head body towards the outside of the spray head, and the second cooling channel is communicated with the first cooling channel;

[0020] The controller controls the cooling medium to enter the second cooling channel from the first cooling channel along the first direction within the first preset time interval;

[0021] The controller controls the cooling medium to enter the first cooling channel from the second cooling channel along the second direction within the second preset time interval.

[0022] Optionally, the communicating part of the first cooling channel and the second cooling channel is located at the middle part of the spray head body.

[0023] Optionally, the second cooling channel is arranged in parallel with the first cooling channel.

[0024] With the above technical solution, one end of the second cooling channel is connected to the reversing valve, and the other end of the second cooling channel is connected to the first cooling channel. The first cooling channel and the second cooling channel are arranged in parallel and at intervals along the axial direction of the nozzle body within the nozzle body, so as to cool different parts of the nozzle body along the axial direction of the nozzle body. The connection part of the first cooling channel and the second cooling channel is located at the middle part of the nozzle body. Within the first preset time interval, the reversing valve injects the cooling medium from the first cooling channel into the second cooling channel, so that the cooling medium cools the nozzle body from the outside to the inside of the nozzle body at the first cooling channel, and the cooling medium cools the nozzle body from the inside to the outside of the nozzle body at the second cooling channel; within the second preset time interval, the reversing valve injects the cooling medium from the second cooling channel into the first cooling channel, so that the cooling medium cools the nozzle body from the outside to the inside of the nozzle body at the second cooling channel, and the cooling medium cools the nozzle body from the inside to the outside of the nozzle body at the first cooling channel.

[0025] Optionally, the adjusting mechanism further includes:

[0026] A first temperature sensor, connected to the nozzle body and electrically connected to the controller, the first temperature sensor is used to detect the temperature of the nozzle body and transmit the temperature of the nozzle body to the controller;

[0027] When the temperature on the nozzle body is greater than or equal to the first preset temperature, the controller generates a first control signal and transmits the first control signal to the reversing valve, and the reversing valve opens according to the first control signal to inject the cooling medium into the first cooling channel and the second cooling channel.

[0028] With the above technical solution, the first temperature sensor is used to detect the temperature on the nozzle body and transmit the detected temperature information of the nozzle body to the controller. When the temperature on the nozzle body is less than the first preset temperature set on the controller, the reversing valve is in a closed state to prevent the cooling medium from entering the first cooling channel and the second cooling channel. When the temperature on the nozzle body is greater than or equal to the first preset temperature set on the controller, after the controller controls the reversing valve to open according to the first control signal, the reversing valve switches the flow direction of the cooling medium within a preset time interval.

[0029] The beneficial effects of the spray head provided by this application are as follows: Compared with the prior art, the spray head provided by this application includes a spray head body and an adjustment mechanism. Among them, a first cooling channel is provided on the spray head body, and the first cooling channel extends spirally from the center of the spray head body to the outside of the spray head body. The adjustment mechanism is connected to the first cooling channel and is used to adjust the flow direction of the cooling medium in the first cooling channel at preset time intervals. By changing the flow direction of the cooling medium in the first cooling channel at preset time intervals, the uniformity of the cooling of the spray head body by the cooling medium is ensured, so as to cool the entire spray head body to a preset temperature, thereby reducing the generation of metal ALD film carbides, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film.

[0030] In a second aspect, this application provides a chemical vapor deposition device, including:

[0031] A spray head, where the spray head is the spray head described in any one of the above.

[0032] Optionally, it further includes:

[0033] A heating element, spaced parallel to the spray head body, for heating the target wafer.

[0034] Optionally, it further includes:

[0035] A second temperature sensor, connected to the heating element and electrically connected to the controller in the spray head. The second temperature sensor is used to detect the temperature of the heating element and transmit the temperature of the heating element to the controller;

[0036] When the temperature on the heating element is greater than or equal to a second preset temperature, the controller generates a second control signal and transmits the second control signal to the reversing valve in the spray head. The reversing valve opens according to the second control signal to inject the cooling medium into the first cooling channel and the second cooling channel.

[0037] Adopting the above technical solution, since the temperature of the heating element is relatively high, the heat generated on the heating element will be conducted to the spray head body by means of thermal radiation, thereby causing the temperature of the spray head body to rise. The second temperature sensor is used to detect the temperature of the heating element and transmit the detected temperature information of the spray head body to the controller. When the temperature on the heating element is greater than or equal to the second preset temperature set in the controller, the controller controls the reversing valve to open according to the second control signal and switches the flow direction of the cooling medium by the reversing valve at preset time intervals.

[0038] The beneficial effects of the vapor deposition device provided by this application are as follows: Compared with the prior art, the vapor deposition device provided by this application adopts the nozzle provided in any of the above, and the nozzle body of the nozzle is provided with a first cooling channel. The first cooling channel extends spirally from the center of the nozzle body to the outside of the nozzle body. The adjustment mechanism in the nozzle is communicated with the first cooling channel and is used to adjust the flow direction of the cooling medium in the first cooling channel at preset time intervals. By changing the flow direction of the cooling medium in the first cooling channel at preset time intervals, the uniformity of the cooling of the nozzle body by the cooling medium is ensured, so as to cool the whole nozzle body to a preset temperature, thereby reducing the generation of metal ALD film carbide, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0040] Figure 1 It is a top view of the nozzle body provided by the embodiment of this application;

[0041] Figure 2 It is a schematic diagram when the refrigerant medium flows in the first direction in this application;

[0042] Figure 3 It is a schematic diagram when the refrigerant medium flows in the second direction in this application;

[0043] Figure 4 It is a cross-sectional view of the nozzle body provided by another embodiment in this application;

[0044] Figure 5 It is a schematic structural diagram of the vapor deposition device provided by the embodiment of this application.

[0045] Among them, the reference numerals in the drawings are as follows:

[0046] 10. Nozzle body; 11. Through hole; 20. Adjustment mechanism; 21. Direction change valve; 22. Controller; 23. First temperature sensor; 24. Cooling medium storage device; 30. First cooling channel; 31. First air inlet; 32. First air outlet; 40. Second cooling channel; 41. Second air inlet; 42. Second air outlet; 50. Vapor deposition device; 60. Heating element; 61. Second temperature sensor; 70. Target wafer. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0047] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0049] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0050] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality of" means two or more, unless otherwise specifically defined.

[0051] Please refer to Figures 1 to 5 , and now the nozzle and the chemical vapor deposition device provided by the embodiments of the present application will be described.

[0052] The first aspect of the present application is to provide a nozzle, including a nozzle body 10 and an adjusting mechanism 20.

[0053] Please refer to Figures 1 to 3 , the nozzle body 10 is provided with a first cooling channel 30 and a plurality of through holes 11. The first cooling channel 30 extends spirally from the center of the nozzle body 10 to the outside of the nozzle. The first cooling channel 30 has a first air inlet 31 and a first air outlet 32. Among them, the first air inlet 31 is located outside the nozzle body 10, and the first air outlet 32 is located in the middle part of the nozzle body 10.

[0054] A plurality of through holes 11 are arranged at the gaps of the first cooling channel 30. When a cooling medium such as argon is injected into the first cooling channel 30, the first cooling channel 30 is used to cool the through holes 11, reduce the generation of metal ALD film carbide, thereby reducing the thickness of the metal ALD film carbide attached to the inner wall of the through holes 11, and further reducing the generation of particulate matter.

[0055] The adjusting mechanism 20 is communicated with the first air inlet 31 and the first air outlet 32 on the first cooling channel 30, and is used to adjust the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals.

[0056] The adjusting mechanism 20 is used to control the cooling medium to enter the first cooling channel 30, and the first cooling channel 30 is used to cool the through holes 11. When the nozzle is working, since the temperature of the nozzle body 10 is relatively high, therefore, under the heating of the nozzle body 10, the temperature of the cooling medium at the exhaust port end of the first cooling channel 30 is higher than that of the cooling medium at the first air inlet 31 end of the first cooling channel 30. The adjusting mechanism 20 changes the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals, that is, changes the injection of the cooling medium from the first air inlet 31 into the first cooling channel 30 to injecting the cooling medium from the first exhaust port 32 into the first cooling channel 30 at preset time intervals, so as to ensure the uniformity of the cooling of the nozzle body 10 by the cooling medium, cool the whole nozzle body 10 to a preset temperature, thereby reducing the generation of metal ALD film carbide, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film.

[0057] Compared with the prior art, the nozzle provided in the present application includes a nozzle body 10 and an adjusting mechanism 20. Among them, the nozzle body 10 is provided with a first cooling channel 30, and the first cooling channel 30 extends spirally from the center of the nozzle body 10 to the outside of the nozzle body 10. The adjusting mechanism 20 is communicated with the first cooling channel 30 and is used to adjust the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals. By changing the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals, the uniformity of the cooling of the nozzle body 10 by the cooling medium is ensured, the whole nozzle body 10 is cooled to a preset temperature, thereby reducing the generation of metal ALD film carbide, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film.

[0058] In an embodiment of the present application, the adjusting mechanism 20 includes a reversing valve 21 and a controller 22.

[0059] Please refer to Figure 2 and Figure 3, the reversing valve 21 is an electromagnetic reversing valve, such as a two-position four-way electromagnetic reversing valve. The reversing valve 21 is externally connected to a cooling medium storage device 24, such as a cooling medium storage tank. The reversing valve 21 is communicated with a first air inlet 31 and a first air outlet 32 on the first cooling channel 30. The controller 22 is electrically connected to the reversing valve 21, and the controller 22 is used to control the reversing valve 21 to change the direction of the cooling medium entering the first cooling channel 30 at preset time intervals.

[0060] Since the inlet of the first cooling channel 30 is arranged outside the nozzle body 10, the first air outlet 32 of the first cooling channel 30 is arranged in the middle of the nozzle body 10, and both the inlet and the outlet of the first cooling channel 30 are communicated with the reversing valve 21. The controller 22 is used to control the reversing valve 21 to reverse according to the preset time set inside it, so that the cooling medium enters the first cooling channel 30 from the first air inlet 31 and the first air outlet 32 respectively, thereby changing the direction of the cooling medium entering the first cooling channel 30, so as to cool the nozzle body 10 on the outside and the inside of the nozzle body 10 respectively, thereby ensuring the uniformity of the cooling of the nozzle body 10 by the cooling medium, so as to cool the whole nozzle body 10 to a preset temperature.

[0061] In this application, the preset time interval includes a first preset time interval and a second preset time interval, and the first preset time interval and the second preset time interval alternate in sequence. The controller 22 controls the cooling medium to flow in the first cooling channel 30 in the first direction during the first preset time interval. The controller 22 controls the cooling medium to flow in the second direction in the first cooling channel 30 during the second preset time interval. Wherein, the first direction and the second direction are opposite.

[0062] Specifically, please refer to Figure 2 and Figure 3 , it is set that the direction when the cooling medium flows from the first air inlet 31 to the first air outlet 32 is the first direction, and the direction when the cooling medium flows from the first air outlet 32 to the first air inlet 31 is the second direction.

[0063] During the first preset time interval, the controller 22 controls the cooling medium to flow into the first cooling channel 30 in the first direction, that is, during the preset first time interval, the cooling medium cools the nozzle body 10 from the outside of the nozzle body 10 towards the inside of the nozzle body 10; and during the second preset time interval, the controller 22 controls the cooling medium to flow into the first cooling channel 30 in the second direction, that is, during the second preset time interval, the cooling medium cools the nozzle body 10 from the inside of the nozzle body 10 towards the outside of the nozzle body 10.

[0064] In another embodiment of this application, please refer to Figure 4, the nozzle body 10 is further provided with a second cooling channel 40, and the second cooling channel 40 is arranged at an interval from the first cooling channel 30. The second cooling channel 40 extends spirally from the center of the nozzle body 10 to the outside of the nozzle, and the second cooling channel 40 communicates with the first cooling channel 30, and the second cooling channel 40 is arranged parallel to the first cooling channel 30.

[0065] The second cooling channel 40 has a second air inlet 41 and a second air outlet 42. Among them, the second air inlet 41 is located at the middle part of the nozzle body 10, and the second air inlet 41 communicates with the first cooling pipeline and the first exhaust port 32, so that the communicating part of the second cooling channel 40 and the first cooling channel 30 is located at the middle part of the nozzle body 10, and the second air outlet 42 is located at the outside of the nozzle body 10 and communicates with the reversing valve 21.

[0066] The controller 22 controls the cooling medium to enter the first cooling channel 30 from the first air inlet 31 along the first direction within the first preset time interval, and enter the second cooling channel 40 through the second air inlet 41, and then flow out from the second air outlet 42. The controller 22 controls the cooling medium to enter the second cooling channel 40 from the second air outlet 42 along the second direction within the second preset time interval, and enter the first cooling channel 30 from the second air inlet 41, and then flow out from the first air inlet 31.

[0067] By arranging the second cooling channel 40 in the nozzle body 10, and the second cooling channel 40 is arranged at an interval from the first cooling channel 30 along the axial direction of the nozzle body 10, the different parts of the nozzle body 10 are cooled in the axial direction of the nozzle body 10.

[0068] Within the first preset time interval, the reversing valve 21 injects the cooling medium from the first cooling channel 30 into the second cooling channel 40, so that the cooling medium cools the nozzle body 10 from the outside to the inside of the nozzle body 10 at the first cooling channel, and the cooling medium cools the nozzle body 10 from the inside to the outside of the nozzle body 10 at the second cooling channel; within the second preset time interval, the reversing valve 21 injects the cooling medium from the second cooling channel 40 into the first cooling channel 30, so that the cooling medium cools the nozzle body 10 from the outside to the inside of the nozzle body 10 at the second cooling channel, and the cooling medium cools the nozzle body 10 from the inside to the outside of the nozzle body 10 at the first cooling channel.

[0069] In an embodiment of the present application, please refer to Figures 2 to 5 , the adjusting mechanism 20 further includes a first temperature sensor 23.

[0070] The first temperature sensor 23 is connected to the nozzle body 10 and electrically connected to the controller 22. The first temperature sensor 23 is used to detect the temperature of the nozzle body 10 and transmit the temperature of the nozzle body 10 to the controller 22. When the temperature on the nozzle body 10 is greater than or equal to the first preset temperature, the controller 22 generates a first control signal and transmits the first control signal to the reversing valve 21. The reversing valve 21 is opened according to the first control signal to inject a cooling medium into the first cooling channel 30 and the second cooling channel 40.

[0071] Wherein, when the temperature on the nozzle body 10 is less than the first preset temperature set on the controller 22, the reversing valve 21 is in a closed state to prevent the cooling medium from entering the first cooling channel 30 and the second cooling channel 40. When the temperature on the nozzle body 10 is greater than or equal to the first preset temperature set on the controller 22, after the controller 22 controls the reversing valve 21 to open according to the first control signal, the reversing valve 21 is made to switch the flow direction of the cooling medium within a preset time interval.

[0072] In a second aspect, the present application provides a chemical vapor deposition apparatus 50, including a nozzle, and the nozzle is the nozzle provided in any one of the above embodiments.

[0073] In another embodiment of the present application, please refer to Figure 5 and the chemical vapor deposition apparatus 50 further includes a heating element 60.

[0074] The heating element 60 is parallel and spaced apart from the nozzle body 10 and is used to heat the target wafer 70.

[0075] A second temperature sensor 61 is provided on the heating element 60. The second temperature sensor 61 is electrically connected to the controller 22. The second temperature sensor 61 is used to detect the temperature of the heating element 60 and transmit the temperature of the heating element 60 to the controller 22. When the temperature on the heating element 60 is greater than or equal to the second preset temperature, the controller 22 generates a second control signal and transmits the second control signal to the reversing valve 21. The reversing valve 21 is opened according to the second control signal to inject a cooling medium into the first cooling channel 30 and the second cooling channel 40.

[0076] With the above technical solution, since the temperature of the heating element 60 is relatively high, the heat generated on the heating element 60 will be conducted to the nozzle body 10 by means of thermal radiation, thereby causing the temperature on the nozzle body 10 to rise. The second temperature sensor 61 is used to detect the temperature on the heating element 60 and transmit the detected temperature information of the nozzle body 10 to the controller 22. When the temperature on the heating element 60 is greater than or equal to the second preset temperature set in the controller 22, after the controller 22 controls the reversing valve 21 to open according to the second control signal, the reversing valve 21 is made to switch the flow direction of the cooling medium within a preset time interval.

[0077] Compared with the prior art, the vapor deposition device 50 provided in the present application adopts the spray head provided in any one of the above. A first cooling channel 30 is provided on the spray head body 10 in the spray head. The first cooling channel 30 extends spirally from the center of the spray head body 10 to the outside of the spray head body 10. The adjusting mechanism 20 in the spray head is communicated with the first cooling channel 30 and is used to adjust the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals. By changing the flow direction of the cooling medium in the first cooling channel 30 at preset time intervals, the uniformity of the cooling of the spray head body 10 by the cooling medium is ensured, so as to cool the whole spray head body 10 to a preset temperature, thereby reducing the generation of metal ALD film carbides, and further reducing the generation of particulate matter, so as to ensure the stability and consistency of the metal ALD film.

[0078] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A nozzle, characterized in that: include: The nozzle body is provided with a first cooling channel and a plurality of through holes, wherein the first cooling channel is spirally extended from the center of the nozzle body to the outside of the nozzle body, and the plurality of through holes are arranged at the gaps of the first cooling channel; an adjusting mechanism, which is in communication with the first cooling channel and is used to adjust the flow direction of the cooling medium in the first cooling channel within a preset time interval; The regulating mechanism comprises: a reversing valve, connected to the first cooling channel; A controller is electrically connected to the reversing valve, and is used to control the reversing valve to change the direction in which the cooling medium enters the first cooling channel within the preset time interval.

2. The nozzle according to claim 1, characterized in that The preset time interval includes a first preset time interval and a second preset time interval, and the first preset time interval and the second preset time interval are alternated in sequence; The controller controls the cooling medium to flow in the first cooling channel along a first direction within the first preset time interval; The controller controls the cooling medium to flow in the first cooling channel along a second direction within the second preset time interval; The first direction and the second direction are opposite.

3. The nozzle according to claim 2, characterized in that: The nozzle body is further provided with a second cooling channel, and the second cooling channel is spaced apart from the first cooling channel; The second cooling channel extends in a spiral shape from the center of the nozzle body to the outside of the nozzle, and the second cooling channel is connected to the first cooling channel; The controller controls the cooling medium to enter the second cooling channel from the first cooling channel along the first direction within the first preset time interval; The controller controls the cooling medium to enter the first cooling channel from the second cooling channel along the second direction within the second preset time interval.

4. The nozzle according to claim 3, characterized in that The connecting portion between the first cooling channel and the second cooling channel is located in the middle portion of the nozzle body.

5. The nozzle according to claim 4, characterized in that: The second cooling channel is arranged in parallel with the first cooling channel.

6. The nozzle according to claim 5, characterized in that The regulating mechanism also includes: A first temperature sensor is connected to the nozzle body and electrically connected to the controller, wherein the first temperature sensor is used to detect the temperature of the nozzle body and transmit the temperature of the nozzle body to the controller; When the temperature on the nozzle body is greater than or equal to a first preset temperature, the controller generates a first control signal and transmits the first control signal to the reversing valve. The reversing valve opens according to the first control signal to inject the cooling medium into the first cooling channel and the second cooling channel.

7. A vapor deposition device, characterized in that: include: A nozzle, wherein the nozzle is the nozzle according to any one of claims 1 to 6.

8. The vapor deposition apparatus according to claim 7, characterized in that: Also includes: The heating element is parallel and spaced from the shower head body and is used for heating the target crystal plate.

9. The vapor deposition apparatus according to claim 8, characterized in that: Also includes: A second temperature sensor is connected to the heating element and is electrically connected to the controller in the nozzle, the second temperature sensor is used to detect the temperature of the heating element and transmit the temperature of the heating element to the controller; When the temperature on the heating element is greater than or equal to a second preset temperature, the controller generates a second control signal and transmits the second control signal to the reversing valve in the nozzle. The reversing valve opens according to the second control signal to inject cooling medium into the first cooling channel and the second cooling channel in the nozzle.

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