Follow-up valve

Abstract

The utility model provides a follow-up valve, which relates to the field of follow-up valves, and comprises an oil pressure component, an air pressure component and a diaphragm component, the oil pressure component is used for introducing and discharging hydraulic oil, the air pressure component is used for receiving exhaust gas of a compressor, the oil pressure component is connected with the air pressure component, and the diaphragm component is positioned between the oil pressure component and the air pressure component. The diaphragm assembly has the function of uniformly arranging hydraulic oil and is used for separating the hydraulic oil from gas, the input hydraulic oil can be uniformly distributed between the diaphragm assembly and the oil pressure assembly through the diaphragm assembly, the hydraulic oil is high in flow capacity, oil pressure is uniformly applied to the diaphragm assembly, and the situation that the end face of the diaphragm assembly is pressed unevenly is avoided; and the service life is influenced.

Description

Technical Field

[0001] The utility model relates to the field of servo valves, and in particular to a servo valve. Background Art

[0002] A diaphragm compressor is a reciprocating positive-displacement compressor that completely isolates the hydraulic oil system and the gas compression system through a diaphragm. The gas compression system in the diaphragm cavity is completely sealed from the outside, ensuring no leakage and no pollution of the gas during the gas compression process. Due to its good sealing performance, wide pressure range, and large compression ratio, it is widely used in petrochemical fields such as hydrogen refueling stations to compress and transport various high-purity gases, precious rare gases, toxic and harmful gases, and corrosive gases. The oil pressure and oil temperature in the diaphragm cavity of the compressor need to be controlled. Generally, there are two types of valves for controlling the oil pressure: a pressure regulating valve and a servo valve. The oil pressure of the servo valve is follow-up, that is, when the gas pressure rises, the oil pressure also rises, and when the gas pressure drops, the oil pressure also drops. The existing structures of servo valves all branch a pipeline of the exhaust pipe of the compressor to the gas side end cover. The gas side end cover is connected to the oil side end cover by screws, and a cavity is formed by the mating surfaces of the gas side and oil side end covers. A diaphragm is used to separate the gas and the hydraulic oil. The diaphragm cavity structure of this kind of servo valve is simple, with poor flow capacity, and it cannot uniformly apply pressure to the diaphragm, resulting in uneven pressure on the diaphragm and thus affecting the service life of the diaphragm. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a servo valve to alleviate the technical problems of poor flow capacity of the hydraulic oil inside the servo valve when controlling the oil pressure and the inability to control the opening pressure of the servo valve.

[0004] A servo valve provided by the utility model includes:

[0005] An oil pressure component, a gas pressure component, and a diaphragm component;

[0006] The oil pressure component is used for introducing and discharging hydraulic oil;

[0007] The gas pressure component is used for receiving the exhaust gas of the compressor;

[0008] The oil pressure component is connected to the gas pressure component;

[0009] The diaphragm component is located between the oil pressure component and the gas pressure component. The diaphragm component has the function of evenly arranging the hydraulic oil and is used for separating the hydraulic oil and the gas.

[0010] In an optional embodiment,

[0011] The oil pressure assembly includes an oil-side end cover. One end of the oil-side end cover is provided with a large counterbore for accommodating the diaphragm assembly, and the other end of the oil-side end cover is provided with an oil outlet passage. The oil outlet passage is coaxially arranged with the large counterbore. An oil inlet passage distributed at a ninety-degree angle is also provided inside the oil-side end cover. One end of the oil inlet passage penetrates the outer wall of the oil-side end cover, and the other end of the oil inlet passage communicates with the large counterbore.

[0012] In an alternative embodiment,

[0013] The air pressure assembly includes an air-side end cover. An air inlet passage coaxially arranged with the oil outlet passage is penetrated inside the air-side end cover. A boss is fixedly provided at one end of the air-side end cover close to the oil-side end cover, and the boss is slidably fitted with the large counterbore.

[0014] In an alternative embodiment,

[0015] The diaphragm assembly includes an oil distribution disk fitted inside the large counterbore. A first annular groove is coaxially provided at one end of the oil distribution disk close to the oil-side end cover. A second annular groove is provided at the other end of the oil distribution disk away from the oil-side end cover. The second annular groove divides the end face of the oil distribution disk away from the oil-side end cover into two parts. The central part of the end face of the oil distribution disk away from the oil-side end cover is the oil distribution disk profile. An oil inlet hole is also penetrated inside the oil distribution disk profile. One end of the oil inlet hole away from the air-side end cover communicates with the first annular groove. A circular groove is coaxially provided at one end of the oil distribution disk close to the oil-side end cover. An oil outlet hole is penetrated through the central part of the oil distribution disk profile. One end of the oil outlet hole close to the oil-side end cover communicates with the circular groove. A diaphragm cavity is formed between the oil distribution disk profile and the boss, and a diaphragm for separating gas and liquid is provided in the diaphragm cavity.

[0016] In an alternative embodiment,

[0017] A plurality of connecting screws are threadedly assembled between the air-side end cover and the oil-side end cover.

[0018] In an alternative embodiment,

[0019] At least two groups of the oil inlet holes provided inside the oil distribution disk profile are provided, and each group of the oil inlet holes is circumferentially equidistantly distributed. At least two groups of the oil inlet holes are distributed in concentric circles with different radii. The projection of the port of the oil inlet passage close to the oil distribution disk is completely located inside the first annular groove.

[0020] In an alternative embodiment,

[0021] At least two concentrically distributed oil inlet annular grooves are formed on the surface of the oil distribution disc, and a first communication groove is formed between two adjacent oil inlet annular grooves. A second communication groove is provided between the oil inlet annular groove with the largest radius and the group of oil inlet holes with the smallest radius. The depths of the oil inlet annular groove, the first communication groove, and the second communication groove are the same, and the oil inlet annular grooves are distributed between the oil inlet holes and the oil outlet holes.

[0022] In an alternative embodiment,

[0023] A plurality of oil outlet holes are formed inside the surface of the oil distribution disc, and the plurality of oil outlet holes are equidistantly distributed in a circumferential manner. One end of the oil outlet passage close to the air side end cover is in an inverted conical shape, and the inner diameter of the oil outlet passage close to the air side end cover is the same as the inner diameter of the circular groove.

[0024] In an alternative embodiment,

[0025] The diaphragm is fixed inside the diaphragm cavity, and the diaphragm includes an air side diaphragm, an intermediate diaphragm, and an oil side diaphragm. The intermediate diaphragm is located between the air side diaphragm and the oil side diaphragm. The air side diaphragm is located at one end of the intermediate diaphragm close to the air side end cover, and the oil side diaphragm is located at one end of the intermediate diaphragm close to the oil side end cover. The intermediate diaphragm is provided with a slot hole.

[0026] In an alternative embodiment,

[0027] A vent hole is formed on one side of the air side end cover close to the diaphragm, and a leak detection hole is formed on the outer wall of the oil distribution disc close to the air side end cover.

[0028] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0029] A servo valve provided by the present utility model can evenly distribute the input hydraulic oil between the diaphragm assembly and the oil pressure assembly through the diaphragm assembly, enabling the hydraulic oil to have strong flow capacity and evenly applying hydraulic pressure to the diaphragm assembly, avoiding uneven pressure on the end face of the diaphragm assembly and affecting its service life. Description of the Drawings

[0030] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0031] Figure 1 It is a side sectional view of the air side end cover and the oil side end cover provided by the embodiment of the present utility model;

[0032] Figure 2 Another side sectional view of the air side end cover and the oil side end cover provided by the embodiment of the present utility model;

[0033] Figure 3 Schematic diagram of the oil distribution disk profile structure provided by the embodiment of the present utility model.

[0034] Reference numerals: 1. Air side end cover; 2. Oil side end cover; 3. Oil distribution disk; 4. Connecting screw; 5. Intake passage; 6. Bleed hole; 7. Leak detection hole; 8. Oil outlet passage; 9. Oil inlet passage; 10. Oil inlet hole; 11. Oil inlet ring groove; 12. Oil outlet hole; 13. Diaphragm; 14. Diaphragm cavity; 15. Oil distribution disk profile. Detailed implementation manners

[0035] The technical solutions of the present utility model will be described clearly and completely below with reference to the accompanying drawings. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0036] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0037] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0038] The following will describe the detailed implementation manners of the present utility model in detail with reference to the accompanying drawings. It should be understood that the detailed implementation manners described herein are only used to illustrate and explain the present utility model and are not used to limit the present utility model.

[0039] Embodiment 1

[0040] Please refer toFigure 1 — Figure 3 A servo valve provided in this embodiment includes:

[0041] An oil pressure assembly, a gas pressure assembly, and a diaphragm assembly;

[0042] The oil pressure assembly is used for introducing and discharging hydraulic oil;

[0043] The gas pressure assembly is used for receiving the exhaust gas of the compressor;

[0044] The oil pressure assembly and the gas pressure assembly are connected;

[0045] The diaphragm assembly is located between the oil pressure assembly and the gas pressure assembly. The diaphragm assembly has the function of evenly arranging the hydraulic oil, and the diaphragm assembly is used for separating the hydraulic oil and the gas.

[0046] A servo valve provided by the present utility model can evenly distribute the input hydraulic oil between the diaphragm assembly and the oil pressure assembly through the diaphragm assembly, making the hydraulic oil have strong flow capacity, evenly applying oil pressure to the diaphragm assembly, and avoiding uneven pressure on the end face of the diaphragm assembly, which affects the service life.

[0047] On the basis of the above embodiment, in a servo valve provided in this embodiment, the oil pressure assembly includes an oil-side end cover 2. One end of the oil-side end cover 2 is provided with a large counterbore for accommodating the diaphragm assembly, and the other end of the oil-side end cover 2 is provided with an oil outlet 8. The oil outlet 8 and the large counterbore are coaxially arranged. An oil inlet 9 distributed at a right angle is also provided inside the oil-side end cover 2. One end of the oil inlet 9 penetrates the outer wall of the oil-side end cover 2, and the other end of the oil inlet 9 communicates with the large counterbore;

[0048] A distribution disk 3 can be placed inside the large counterbore. The oil outlet 8 is used for discharging the hydraulic oil. The coaxial arrangement of the oil outlet 8 and the large counterbore makes the discharge of the hydraulic oil smoother. The oil inlet 9 is used for introducing the hydraulic oil.

[0049] The gas pressure assembly includes a gas-side end cover 1. An air inlet 5 coaxially arranged with the oil outlet 8 is penetrated inside the gas-side end cover 1. A boss is fixedly arranged at one end of the gas-side end cover 1 close to the oil-side end cover 2, and the boss is slidably fitted in the large counterbore;

[0050] The inlet end of the air inlet 5 is connected to the exhaust gas of the compressor. The boss is slidably fitted inside the large counterbore to press against the distribution disk 3.

[0051] The diaphragm assembly includes an oil distribution plate 3 installed inside the large counterbore, a first annular groove is coaxially provided at one end of the oil distribution plate 3 close to the oil side end cover 2, a second annular groove is provided at one end of the oil distribution plate 3 away from the oil side end cover 2, the second annular groove divides the end face of the oil distribution plate 3 away from the oil side end cover 2 into two parts, and the central surface of the end of the oil distribution plate 3 away from the oil side end cover 2 is divided into an oil distribution plate profile 15, an oil inlet hole 10 is also penetrated inside the oil distribution plate profile 15, and the end of the oil inlet hole 10 away from the gas side end cover 1 is communicated with the first annular groove, a circular groove is coaxially provided at one end of the oil distribution plate 3 close to the oil side end cover 2, an oil outlet hole 12 is penetrated at the central part of the oil distribution plate profile 15, and the end of the oil outlet hole 12 close to the oil side end cover 2 is communicated with the circular groove, a membrane cavity 14 is formed between the oil distribution plate profile 15 and the boss, and a diaphragm 13 is fixedly provided in the membrane cavity 14 for separating gas and liquid;

[0052] The oil inlet hole 10 and the oil outlet hole 12 opened inside the oil distribution plate 3 are used for the flow in and out of the hydraulic oil. The hydraulic oil introduced by the oil inlet passage 9 enters the oil inlet hole 10 through the first annular groove. The circular groove guides the hydraulic oil discharged from the oil outlet hole 12 and discharges it through the oil outlet passage 8. The opening of the second annular groove makes the oil distribution plate profile 15 convex as a whole. The diaphragm 13 attached to the oil distribution plate profile 15 is pre-deformed due to the convex shape of the oil distribution plate profile 15, which generates an opening pressure on the diaphragm 13.

[0053] A plurality of connecting screws 4 are threadedly assembled between the gas side end cover 1 and the oil side end cover 2;

[0054] The gas side end cover 1 and the oil side end cover 2 are fixedly connected by connecting screws 4, so that the oil distribution plate 3 installed between the gas side end cover 1 and the oil side end cover 2 is fastened.

[0055] There are at least two groups of oil inlet holes 10 opened inside the oil distribution plate profile 15, and each group of oil inlet holes 10 is equidistantly distributed around the circumference, and at least two groups of oil inlet holes 10 are distributed in concentric circles with different radii, and the projection of the oil inlet passage 9 close to one end of the oil distribution plate 3 is completely placed inside the first annular groove;

[0056] The number and distribution of the oil inlet holes 10 can make the hydraulic oil flow into the diaphragm cavity 14 uniformly and apply pressure to the diaphragm 13 uniformly.

[0057] At least two concentrically distributed oil inlet ring grooves 11 are provided on the oil distribution plate profile 15, and a first connecting groove is provided between two adjacent oil inlet ring grooves 11, and a second connecting groove is provided between the oil inlet ring groove 11 with the largest radius and a group of oil inlet holes 10 with the smallest radius. The depths of the oil inlet ring groove 11, the first connecting groove, and the second connecting groove are consistent, and the oil inlet ring groove 11 is distributed between the oil inlet hole 10 and the oil outlet hole 12;

[0058] The oil inlet ring groove 11 communicates with the group of oil inlet holes 10 with the smallest radius, enabling hydraulic oil to flow into the interior of the oil inlet ring groove 11. The first communication groove and the second communication groove achieve the communication between multiple groups of oil inlet ring grooves 11, so that the hydraulic oil can push the diaphragm 13 more evenly, avoiding the situation of serious local deformation of the diaphragm 13, thereby increasing the service life of the diaphragm 13.

[0059] There are several oil outlet holes 12 opened inside the oil distribution disk surface 15, and the several oil outlet holes 12 are evenly distributed in a circular pattern. One end of the oil outlet passage 8 close to the air side end cover 1 is in an inverted conical shape, and the inner diameter of the oil outlet passage 8 close to the air side end cover 1 is the same as the inner diameter of the circular groove.

[0060] The number and distribution positions of the oil outlet holes 12 can promote the faster discharge of hydraulic oil from the interior of the oil distribution disk 3, increasing the flow discharge capacity of the oil distribution disk 3. One end of the oil outlet passage 8 close to the air side end cover 1 is in an inverted conical shape, and at the same time, the inner diameter of the conical end of the oil outlet passage 8 is the same as the inner diameter of the circular groove, enabling the hydraulic oil discharged from the oil outlet holes 12 to accurately enter the interior of the oil outlet passage 8.

[0061] The diaphragm 13 is fixed inside the diaphragm cavity 14, and the diaphragm 13 includes an air side diaphragm, an intermediate diaphragm, and an oil side diaphragm. The intermediate diaphragm is between the air side diaphragm and the oil side diaphragm. The air side diaphragm is located at one end of the intermediate diaphragm close to the air side end cover 1, and the oil side diaphragm is located at one end of the intermediate diaphragm close to the oil side end cover 2. The intermediate diaphragm is provided with a slot hole.

[0062] The diaphragm 13 with multiple hierarchical combinations has higher strength and stronger stability. The diaphragm 13 is a vulnerable part, and fatigue failure will occur after running for a certain period of time, and it needs to be replaced irregularly.

[0063] A vent hole 6 is provided on the side of the air side end cover 1 close to the diaphragm 13, and a leak detection hole 7 is provided on the outer wall of the oil distribution disk 3 close to the air side end cover 1.

[0064] Working principle:

[0065] The hydraulic oil enters from one end of the oil inlet passage 9 close to the outer wall of the oil side end cover 2. The hydraulic oil first flows to the first ring groove communicated with the oil inlet passage 9, then flows into several oil inlet holes 10 communicated with the first ring groove. Then, a part of the hydraulic oil directly flows out of the oil inlet holes 10 and contacts the diaphragm 13, and another part of the hydraulic oil flows to the oil inlet ring groove 11 through the group of oil inlet holes 10 with the smallest radius. Finally, the hydraulic oil flows out of the oil inlet ring groove 11 and contacts the diaphragm 13, so that the hydraulic oil exerts hydraulic pressure on the diaphragm 13.

[0066] The exhaust of the compressor is connected to one end of the intake passage 5 far from the oil distribution disc 3. Immediately afterwards, the gas enters the interior of the oil distribution disc profile 15 through the intake passage 5. Thus, the gas exerts air pressure on the diaphragm 13. Since the diaphragm 13 presses on the convex oil distribution disc profile 15, the diaphragm 13 undergoes pre-deformation, that is, the opening differential pressure of the follow-up valve: p_open. At this time, the force balance of the follow-up valve is: p_open + p_gas = p_oil.

[0067] Only when the oil pressure received by the diaphragm 13 is greater than the air pressure and the opening differential pressure can the diaphragm 13 be pushed open by the hydraulic oil. As the oil pressure increases, the diaphragm 13 is pushed onto the boss of the air-side end cover 1, thereby causing the diaphragm 13 to stop deforming. After the hydraulic oil flows out from the oil inlet hole 10 and the oil inlet ring groove 11, the hydraulic oil flows from the oil outlet hole 12 into the interior of the circular groove, and the hydraulic oil is discharged outward through the oil outlet passage 8 connected to the circular groove. When the oil pressure received by the diaphragm 13 is less than the air pressure and the opening differential pressure, the diaphragm 13 will closely adhere to the oil distribution disc profile 15 and seal the hydraulic oil.

[0068] The opening differential pressure of the follow-up valve is determined by the diameter and the protruding height of the oil distribution disc profile 15. By changing the diameter and the protruding height of the oil distribution disc profile 15, the opening differential pressure of the follow-up valve can be effectively adjusted, and further, the overflow rate of the follow-up valve under the same air pressure can be adjusted. At the same time, it can also avoid the situation that the diaphragm 13 opens in advance, resulting in excessive leakage of the hydraulic oil.

[0069] The diaphragm 13 has three layers. If the oil-side diaphragm is damaged, the hydraulic oil will communicate with the leak detection hole 7 through the slot holes of the intermediate layer diaphragm. The leak detection hole 7 is connected to a pressure sensor, and the pressure sensor will alarm, which can play a role in detecting whether the diaphragm 13 is damaged. Similarly, if the air-side diaphragm is damaged, air will enter the leak detection hole 7, and the change in pressure can also be detected through the pressure sensor, and then the damage situation of the air-side diaphragm can be known.

[0070] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A follow-up valve, characterized in that: include: Oil pressure components, pneumatic components and diaphragm components; The oil pressure assembly is used to introduce and discharge hydraulic oil; The pneumatic assembly is used to receive the exhaust gas of the compressor; The oil pressure component is connected to the gas pressure component; The diaphragm assembly is located between the oil pressure assembly and the gas pressure assembly. The diaphragm assembly has the function of evenly distributing the hydraulic oil, and the diaphragm assembly is used to isolate the hydraulic oil from the gas.

2. The spool valve according to claim 1, characterized in that: The oil pressure assembly comprises an oil side end cover (2), one end of which is provided with a large countersunk hole for accommodating the diaphragm assembly, and the other end of which is provided with an oil outlet passage (8), the oil outlet passage (8) being coaxially arranged with the large countersunk hole, and the interior of the oil side end cover (2) is also provided with an oil inlet passage (9) distributed at a ninety-degree angle, one end of which passes through the outer wall of the oil side end cover (2), and the other end of which is communicated with the large countersunk hole.

3. The spool valve according to claim 2, characterized in that: The pneumatic assembly comprises an air side end cover (1), an air inlet passage (5) coaxial with the oil outlet passage (8) being provided through the interior of the air side end cover (1), a boss being fixedly provided at one end of the air side end cover (1) close to the oil side end cover (2), and the boss being slidably mounted with the large countersunk hole.

4. The spool valve according to claim 3, characterized in that: The diaphragm assembly comprises an oil distribution plate (3) mounted inside the large counterbore, wherein the end of the oil distribution plate (3) close to the oil side end cover (2) is coaxially provided with a first annular groove, and the end of the oil distribution plate (3) away from the oil side end cover (2) is provided with a second annular groove, the second annular groove divides the end surface of the oil distribution plate (3) away from the oil side end cover (2) into two parts, and the central surface of the end of the oil distribution plate (3) away from the oil side end cover (2) is divided into an oil distribution plate profile (15), and the inside of the oil distribution plate profile (15) is also penetrated by an oil inlet. A hole (10) is formed in the oil distribution plate profile (15), and the end of the oil inlet hole (10) away from the gas side end cover (1) is connected to the first annular groove. A circular groove is coaxially formed at the end of the oil distribution plate (3) close to the oil side end cover (2). An oil outlet hole (12) is formed through the center of the oil distribution plate profile (15), and the end of the oil outlet hole (12) close to the oil side end cover (2) is connected to the circular groove. A membrane cavity (14) is formed between the oil distribution plate profile (15) and the boss, and the membrane cavity (14) is provided with a diaphragm (13) that has a gas-liquid separation effect.

5. The spool valve according to claim 4, characterized in that: A plurality of connecting screws (4) are threadedly assembled between the gas side end cover (1) and the oil side end cover (2).

6. The spool valve according to claim 4, characterized in that: The oil inlet holes (10) opened inside the oil distribution plate profile (15) are at least two groups, and each group of the oil inlet holes (10) is equidistantly distributed around the circumference, and at least two groups of the oil inlet holes (10) are distributed in the form of concentric circles with different radii, and the projection of the oil inlet passage (9) close to a port of the oil distribution plate (3) is completely placed inside the first annular groove.

7. The spool valve according to claim 4, characterized in that: At least two concentrically distributed oil inlet ring grooves (11) are provided on the oil distribution plate profile (15), and a first connecting groove is provided between two adjacent oil inlet ring grooves (11), and a second connecting groove is provided between the oil inlet ring groove (11) with the largest radius and a group of the oil inlet holes (10) with the smallest radius. The depths of the oil inlet ring groove (11), the first connecting groove, and the second connecting groove are consistent, and the oil inlet ring groove (11) is distributed between the oil inlet hole (10) and the oil outlet hole (12).

8. The spool valve according to claim 7, characterized in that: The oil distribution plate profile (15) has a plurality of oil outlet holes (12) formed inside thereof, and the plurality of oil outlet holes (12) are equidistantly distributed around the circumference; the end of the oil outlet passage (8) close to the gas side end cover (1) is in the shape of an inverted cone; and the inner diameter of the oil outlet passage (8) close to the gas side end cover (1) is consistent with the inner diameter of the circular groove.

9. The spool valve according to claim 4, characterized in that: The diaphragm (13) is fixed inside the diaphragm cavity (14), and the diaphragm (13) includes an air side diaphragm, an intermediate diaphragm, and an oil side diaphragm. The intermediate diaphragm is between the air side diaphragm and the oil side diaphragm. The air side diaphragm is located at one end of the intermediate diaphragm close to the air side end cover (1), and the oil side diaphragm is located at one end of the intermediate diaphragm close to the oil side end cover (2). The intermediate diaphragm is provided with a slot.

10. The spool valve according to claim 4, characterized in that: A gas leakage hole (6) is provided on a side of the gas side end cover (1) close to the diaphragm (13), and a leak detection hole (7) is provided on an outer wall of the oil distribution plate (3) close to the gas side end cover (1).

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