Damping device applied to positioning platform

Abstract

The damping device applied to the positioning platform comprises a supporting piece and a buffering assembly for supporting the supporting piece, the supporting piece moves in the first direction and is provided with a supporting face perpendicular to the first direction, and the supporting piece is connected with a movement module of the positioning platform; the buffer assembly comprises a base, and a first elastic piece, a second elastic piece and a third elastic piece which are arranged on the base; the second elastic piece is arranged at the top of the base and is opposite to the bottom of the supporting piece; the third elastic piece is arranged at the bottom of the base, and the base is connected with the positioning platform through the third elastic piece; the base directly supports the supporting piece through the first elastic piece. The elastic deformation distance of the first elastic piece in the first direction is larger than the distance between the second elastic piece and the bottom of the supporting piece. According to the shock absorber, the three layers of buffer elastic structures are arranged, so that the shock absorption capacity of the shock absorber is effectively enhanced, the vibration amplitude can be reduced to be within an ideal range, and the effective shock absorption effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of damping, in particular to a damping device applied to a positioning platform. Background Art

[0002] In the field of integrated circuit manufacturing, the precision motion stage technology is the core technology of the equipment manufacturing system and has always been highly regarded in the industry. In a precision motion system, the motion stage is often affected by vibrations with a certain amplitude, which will have a greater impact on precision and stability. Especially for motion stages with high-precision and ultra-high-precision requirements, especially those at the nanometer or even sub-nanometer level, the interference caused is huge. Therefore, special devices or measures are needed to reduce the vibration impact on the motion stage as much as possible and improve the positioning accuracy and position stability.

[0003] Generally, a shock absorber is used in a precision motion system to offset the vibration transmission between the motion stage and the outside world or from the outside world to the motion stage. This method is used to block the vibration transmission between the outside world and the motion stage to eliminate the mutual vibration influence. In addition, there are also precision motion systems that use a balance mass component as a reaction force guiding mechanism to offset the vibration influence during the motion process. This measure to eliminate the vibration influence relies on the momentum theorem. Although it can solve the vibration influence with a large amplitude, when the jitter amplitude of the motion stage is large, due to the actual damping effect of the shock absorber having a limit, the vibration amplitude cannot be controlled within the required range.

[0004] In view of the problems existing in the above-mentioned prior art, there is an urgent need to design a damping device to solve the above problems. Summary of the Utility Model

[0005] In order to overcome the technical problems existing in the prior art, the present application provides a damping device applied to a positioning platform, which can solve the problems raised in the above background art.

[0006] The present application provides a damping device applied to a positioning platform, including:

[0007] a support member, and a buffer assembly for supporting the support member;

[0008] The support member moves along a first direction and is provided with a support surface perpendicular to the first direction. The support member is connected to the motion module of the positioning platform;

[0009] The buffer assembly includes a base, and a first elastic member, a second elastic member, and a third elastic member provided on the base;

[0010] The second elastic member is provided at the top of the base and is disposed opposite to the bottom of the support member;

[0011] The third elastic member is disposed at the bottom of the base, and the base is connected to the positioning platform through the third elastic member;

[0012] The base directly supports the support member through the first elastic member;

[0013] The elastic deformation distance of the first elastic member in the first direction is greater than the distance between the second elastic member and the bottom of the support member.

[0014] By providing a three-layer buffer elastic structure, the damping capacity of the damper can be effectively enhanced, so as to effectively reduce the vibration amplitude to an ideal range, thereby achieving an effective damping effect.

[0015] In some embodiments, the second elastic member is correspondingly disposed at the center of the top of the base;

[0016] The first elastic member includes a plurality of support ends, and the plurality of support ends are symmetrically distributed around the center.

[0017] By arranging the support ends of the first elastic member to be symmetrically distributed around the center of the base, the force balance when the damping device is stressed can be effectively ensured, thereby effectively ensuring the stability of the entire damping device and the smoothness of the support.

[0018] In some embodiments, the number of the support ends is two, and the two support ends are respectively correspondingly disposed at both ends of the first elastic member extending out of the base in a direction perpendicular to the first direction, and are correspondingly connected to the support member.

[0019] By correspondingly disposing the two support ends at both ends of the first elastic member extending out of the base, it is effectively ensured that the support ends on the first elastic member are prone to deformation when compressed.

[0020] In some embodiments, the support member includes a top plate and two connecting members. The two connecting members are respectively correspondingly connected to the two ends of the top plate corresponding to the direction perpendicular to the first direction. The bottom of the connecting member is connected to the support end, and the side of the connecting member away from the base is connected to the motion module of the positioning platform.

[0021] By providing two connecting members respectively disposed on two sides of the base, and the motion module of the positioning platform and the side of the connecting member away from the base, so that the energy of the motion module driving the damping device to vibrate is transmitted from the two connecting members, thereby effectively improving the overall stability of the damping device.

[0022] In some embodiments, the base includes a center seat and a support seat. The support seat is connected to the center seat through the first elastic member, and the top of the support seat is connected to the support member through the second elastic member.

[0023] In some embodiments, when the second elastic member is in a free state, there is a gap between the central seat and the top plate.

[0024] By providing a gap between the central seat and the top plate, it is ensured that when the shock absorber receives a downward pressure, the top plate can move downward, thereby ensuring that the second elastic member and the first elastic member can deform, and ensuring the reliability of the shock absorber.

[0025] In some embodiments, the elastic coefficient of the first elastic member is greater than that of the second elastic member.

[0026] By setting the elastic coefficient of the first elastic member to be greater than that of the second elastic member, during the subsequent up and down vibration process, the vibration amplitudes and the degrees of force of the first elastic member and the second elastic member are always different, so that the energy in the overall structure is consumed, achieving the shock absorption effect of reducing the vibration amplitude.

[0027] In some embodiments, the connecting members each include a first connecting portion and a second connecting portion. The first connecting portion and the second connecting portion are connected in a staggered manner to form a Z shape. The first connecting portion is correspondingly connected to the first elastic member, and the second connecting portion is correspondingly connected to the top plate.

[0028] In some embodiments, a card slot is formed in the second connecting portion, and the card slot is correspondingly engaged with the top plate so that the top plate and the second connecting portion can form a flat plane.

[0029] In some embodiments, a first elastic hole is formed on one side of the central seat close to the top plate, and a second elastic hole is correspondingly formed on the top plate. The two ends of the second elastic member are respectively inserted into the first elastic hole and the second elastic hole.

[0030] In some embodiments, there is a gap between the central seat and the first elastic member.

[0031] In some embodiments, the first elastic member is a shrapnel, the second elastic member is a spring member, and the third elastic member is a rubber block.

[0032] The present utility model has at least the following beneficial effects:

[0033] 1. By providing a three-layer buffer elastic structure in this application, the shock absorption ability of the shock absorber is effectively enhanced, and then the vibration amplitude can be reduced to an ideal range, thereby achieving an effective shock absorption effect;

[0034] 2. By arranging the supporting ends of the first elastic member to be symmetrically distributed around the center of the base, the force balance of the shock-absorbing device during force application can be effectively ensured, thereby effectively ensuring the stability of the entire shock-absorbing device and the smoothness of the support. Description of the Drawings

[0035] Figure 1 FIG. is a three-dimensional structural schematic diagram of the damping shock-absorbing device applied to the positioning platform in the embodiment of the present application;

[0036] Figure 2 FIG. is a cross-sectional structural schematic diagram of the damping shock-absorbing device applied to the positioning platform in the embodiment of the present application.

[0037] Description of the Reference Numerals:

[0038] 10: Positioning platform;

[0039] 20: Support base;

[0040] 30: Connecting member; 31: First connecting portion; 32: Second connecting portion;

[0041] 40: Central seat;

[0042] 50: Top plate;

[0043] 60: Third elastic member;

[0044] 70: Second elastic member;

[0045] 80: First elastic member. Detailed Embodiment

[0046] The following specific embodiments illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Although the description of the present application will be introduced in combination with some embodiments, this does not mean that the features of this application are limited to this implementation manner. On the contrary, the purpose of introducing the application in combination with the implementation manner is to cover other alternatives or modifications that may be extended based on the claims of the present application. In order to provide a deep understanding of the present application, many specific details will be included in the following description. The present application can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present application, some specific details will be omitted in the description. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.

[0047] It should be noted that in this specification, similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0048] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0049] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0050] An embodiment of the present application provides a damping shock-absorbing device applied to a positioning platform 10. Please refer to Figures 1 to 2 , which includes a support member and a buffer assembly for supporting the support member. The support member moves in a first direction and is provided with a support surface perpendicular to the first direction. The support member is connected to the motion module of the positioning platform 10; the buffer assembly includes a base, and a first elastic member 80, a second elastic member 70, and a third elastic member 60 provided on the base; the second elastic member 70 is provided on the top of the base and is disposed opposite to the bottom of the support member; the third elastic member 60 is provided at the bottom of the base, and the base is connected to the positioning platform 10 through the third elastic member 60; the base directly supports the support member through the first elastic member 80; the elastic deformation distance of the first elastic member 80 in the first direction is greater than the distance between the second elastic member 70 and the bottom of the support member.

[0051] Specifically, the first direction is the direction in which the support member and the buffer assembly are stacked. When the motion module of the positioning platform 10 is pressed down, it drives the support member to be pressed down together, thereby causing the first elastic member 80 and the second elastic member 70 to deform. The deformation distance of the first elastic member 80 is greater than the deformation distance of the second elastic member 70. As a result, during the pressing-down process, the elastic potential energy converted by the second elastic member 70 is more than the elastic potential energy converted by the first elastic member 80. Thus, in the next period of time, the elastic potential energy of the second elastic member 70 acts on the support member in the opposite direction to become a damping force to offset part of the structural energy, so as to achieve the purpose of reducing the vibration amplitude of the positioning platform 10. In addition, throughout the process, the third elastic member 60 not only always plays a role in fixing the buffer assembly, but also can offset a small amount of the power of the up-and-down vibration.

[0052] In some embodiments, please refer to Figures 1 to 2 , the second elastic member 70 is correspondingly disposed at the center of the top of the base; the first elastic member 80 includes a plurality of supporting ends, and the plurality of supporting ends are symmetrically distributed around the center.

[0053] Specifically, the second elastic member 70 is correspondingly disposed at the center of the top of the base, so that the pressure transmitted by the elastic member can be transmitted from the center of the base to the base, effectively ensuring the stability of the base support. In addition, the first elastic member 80 is provided with a plurality of supporting ends, and at the same time, the plurality of supporting ends are symmetrically distributed around the center of the top of the base, effectively ensuring that the deformation distances of the respective supporting ends are the same when the first elastic member 80 is under pressure, and further effectively ensuring the stability and reliability of the entire shock-absorbing device.

[0054] In some embodiments, please refer to Figure 1 and Figure 2 , the number of the supporting ends is two, and the two supporting ends are respectively correspondingly disposed at both ends of the first elastic member 80 extending out of the base in a direction perpendicular to the first direction, and are correspondingly connected to the supporting member.

[0055] Specifically, the first elastic member 80 may be a long strip, and the supporting ends are respectively disposed at both ends of the long strip and extend out of the base respectively, so that the supporting ends are far from the center of the base, effectively ensuring that the supporting ends on the first elastic member 80 are prone to deformation when pressed.

[0056] In some embodiments, please refer to Figure 1 and Figure 2 , the supporting member includes a top plate 50 and two connecting members 30. The two connecting members 30 are respectively correspondingly connected to the two ends of the top plate 50 corresponding to the direction perpendicular to the first direction. The bottom of the connecting member 30 is connected to the supporting end, and the side of the connecting member 30 away from the base is connected to the moving module of the positioning platform 10.

[0057] Specifically, the top plate 50 is disposed directly above the base, and the two connecting members 30 are disposed on both sides of the top plate 50, that is, the connecting members 30 are correspondingly disposed on both sides of the base. At the same time, the side of the connecting member 30 away from the base is connected to the moving module of the positioning platform 10, so that the moving module of the moving platform transmits the vibration energy to the shock-absorbing device by first pressing the two connecting members 30, and then the force application point of the first elastic member 80 is the supporting end. At the same time, the two connecting members 30 are pressed down to drive the top plate 50 to be pressed down, and then the second elastic member 70 is compressed. When the top plate 50 and the connecting member 30 vibrate up and down in the first direction under the drive of the positioning platform 10, the elastic potential energy of the second elastic member 70 and the third elastic member 60 is converted into damping force to consume the structural energy, thereby achieving the purpose of reducing the vibration amplitude.

[0058] In some embodiments, please refer to Figure 1 and Figure 2, the base includes a central seat 40 and a support seat 20. The support seat 20 is connected to the central seat 40 through a first elastic member 80, and the top of the support seat 20 is connected to the support member through a second elastic member 70.

[0059] Specifically, in a direction perpendicular to the first direction, the width of the central seat 40 is greater than the width of the support seat 20, so as to have sufficient clearance between the first elastic member 80 and the moving platform for the first elastic member 80 to deform. In addition, by arranging the first elastic member 80 between the support seat 20 and the central seat 40, the overall structure of the shock absorption device is made more stable and reliable.

[0060] In some embodiments, please refer to Figure 2 , when the second elastic member 70 is in a free state, there is a clearance between the central seat 40 and the top plate 50.

[0061] Specifically, when the second elastic member 70 is in a free state, there is a clearance between the central seat 40 and the top plate 50 to ensure that when the shock absorption device receives a downward pressure, the top plate 50 can move downward, so as to ensure that the second elastic member 70 and the first elastic member 80 can deform, ensuring the reliability of the shock absorption device.

[0062] In some embodiments, please refer to Figure 1 and Figure 2 , the elastic coefficient of the first elastic member 80 is greater than the elastic coefficient of the second elastic member 70.

[0063] Specifically, the elastic coefficient of the first elastic member 80 is greater than the elastic coefficient of the second elastic member 70, so that when the shock absorption device is stressed, it is easier for the first elastic member 80 to deform than the second elastic member 70. That is to say, the support member in the shock absorption device undergoes a certain displacement in the first direction, and the pressure absorbed by the first elastic member 80 is less than the pressure absorbed by the second elastic member 70. Furthermore, during the subsequent up and down vibration process, there is always a difference in the vibration amplitude and the force-bearing degree between the first elastic member 80 and the second elastic member 70, so that the energy in the overall structure is consumed, achieving the shock absorption effect of reducing the vibration amplitude.

[0064] In some embodiments, please refer to Figure 1 and Figure 2 , the connecting member 30 includes a first connecting portion 31 and a second connecting portion 32. The first connecting portion 31 and the second connecting portion 32 are connected in a staggered manner to form a Z shape. The first connecting portion 31 is correspondingly connected to the first elastic member 80, and the second connecting portion 32 is correspondingly connected to the top plate 50.

[0065] In some embodiments, please refer to Figure 1 and Figure 2, a clamping groove is formed on the second connecting portion 32, and the clamping groove is correspondingly clamped with the top plate 50, so that the top plate 50 and the second connecting portion 32 can form a flat plane.

[0066] Specifically, by forming a clamping groove on the second connecting portion 32 and correspondingly clamping the top plate 50 in the clamping groove, the supporting surface on the top plate 50 and the end surface of the second connecting portion 32 form a flat plane as a whole for docking with an external movable structure.

[0067] In some embodiments, please refer to Figure 2 , a first elastic hole is formed on one side of the central seat 40 close to the top plate 50, a second elastic hole is correspondingly formed on the top plate 50, and two ends of the second elastic member 70 are respectively inserted into the first elastic hole and the second elastic hole.

[0068] Specifically, by respectively forming the first elastic hole and the second elastic hole on the central seat 40 and the top plate 50 for installing the second elastic member 70, it is ensured that the second elastic member 70 will not deviate from its original position during the operation of the shock absorption device, thereby ensuring the structural stability and reliability of the shock absorption device.

[0069] In some embodiments, please refer to Figure 2 , a gap is left between the central seat 40 and the first elastic member 80.

[0070] Specifically, a protruding block is arranged at a position corresponding to the support seat 20 at the bottom of the central seat 40, the cross-sectional area of the protruding block is adapted to the cross-sectional area of the support seat 20, and the first elastic member 80 is installed between the protruding block and the support seat 20, so that a gap is left between the central seat 40 and the first elastic member 80, enabling the first elastic member 80 to have sufficient deformation space for upward movement, thereby ensuring the shock absorption function of the shock absorption device.

[0071] In some embodiments, please refer to Figure 1 , one surface of the first elastic member 80 facing the first connecting portion 31 is adapted to one surface of the first connecting portion 31 facing the first elastic member 80.

[0072] Specifically, the first elastic member 80 is in surface contact with the first connecting portion 31, making the connection between the connecting member 30 and the first elastic member 80 more stable, thereby ensuring that the shock absorption device is more stable and reliable during operation.

[0073] In some embodiments, please refer to Figure 2 , the first elastic member 80 is a spring piece, the second elastic member 70 is a spring member, and the third elastic member 60 is a rubber block.

[0074] Specifically, when the first elastic member 80 and the second elastic member 70 are a shrapnel and a spring member respectively, it can meet the requirement that the deformation range of the first elastic member 80 is larger than that of the second elastic member 70. In addition, the third elastic member 60 is a rubber member, so as to effectively absorb and weaken the vibration of the upper center seat 40 through the molecular structure characteristics of the rubber, thereby effectively improving the shock absorption effect of the shock absorption device.

[0075] Obviously, those skilled in the art can make various changes and deformations to this application without departing from the spirit and scope of this application. Thus, if these modifications and deformations of this application fall within the scope of the claims of this application and their equivalent technologies, this application also intends to include these changes and deformations.

Claims

1. A damping and shock absorbing device applied to a positioning platform, characterized in that: include: A support member, and a buffer assembly supporting the support member; The support member moves along a first direction and is provided with a support surface perpendicular to the first direction, and the support member is connected to a motion module of the positioning platform; The buffer assembly includes a base, and a first elastic member, a second elastic member, and a third elastic member arranged on the base; The second elastic member is disposed on the top of the base and is disposed opposite to the bottom of the support member; The third elastic member is disposed at the bottom of the base, and the base is connected to the positioning platform through the third elastic member; The base directly supports the support member through the first elastic member; The elastic deformation distance of the first elastic member along the first direction is greater than the distance between the second elastic member and the bottom of the support member.

2. The damping and shock absorbing device applied to the positioning platform according to claim 1, characterized in that: The second elastic member is correspondingly arranged at the center of the top of the base; The first elastic member includes a plurality of supporting ends, and the plurality of supporting ends are symmetrically distributed around the center.

3. The damping and shock absorbing device applied to the positioning platform according to claim 2, characterized in that: The number of the supporting ends is two, and the two supporting ends are respectively arranged at two ends of the first elastic member extending out of the base along a direction perpendicular to the first direction, and are correspondingly connected to the supporting member.

4. The damping and shock absorbing device for use in a positioning platform according to claim 3, characterized in that: The support member includes a top plate and two connecting members, the two connecting members are respectively connected to the two ends of the top plate corresponding to the first direction, the bottom of the connecting member is connected to the support end, and the side of the connecting member away from the base is connected to the motion module of the positioning platform.

5. The damping and shock absorbing device for use in a positioning platform according to claim 4, characterized in that: The base includes a central seat and a supporting seat, the supporting seat is connected to the central seat via the first elastic member, and the top of the supporting seat is connected to the supporting member via the second elastic member.

6. The damping and shock absorbing device for use in a positioning platform according to claim 5, characterized in that: When the second elastic member is in a free state, a gap is left between the center seat and the top plate.

7. The damping and shock absorbing device for use in a positioning platform according to claim 6, characterized in that: The elastic coefficient of the first elastic member is greater than the elastic coefficient of the second elastic member.

8. The damping and shock absorbing device applied to a positioning platform according to claim 4, characterized in that: The connecting members each include a first connecting portion and a second connecting portion, the first connecting portion and the second connecting portion are staggered and connected to form a Z shape, the first connecting portion is correspondingly connected to the first elastic member, and the second connecting portion is correspondingly connected to the top plate.

9. The damping and shock absorbing device applied to a positioning platform according to claim 8, characterized in that: The second connecting portion is provided with a slot, and the slot is correspondingly engaged with the top plate, so that the top plate and the second connecting portion can form a flat plane.

10. The damping and shock absorbing device applied to a positioning platform according to claim 9, characterized in that: A first elastic hole is formed on one side of the center seat close to the top plate, a second elastic hole is formed on the top plate correspondingly, and two ends of the second elastic member are respectively inserted into the first elastic hole and the second elastic hole correspondingly.

11. The damping and shock absorbing device applied to a positioning platform according to claim 10, characterized in that: A gap is left between the central seat and the first elastic member.

12. The damping and shock absorbing device applied to a positioning platform according to claim 11, characterized in that: A surface of the first elastic member facing the first connecting portion is matched with a surface of the first connecting portion facing the first elastic member.

13. The damping and shock absorbing device applied to a positioning platform according to claim 12, characterized in that: The first elastic member is a spring, the second elastic member is a spring, and the third elastic member is a rubber block.

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