Angle adjusting mechanism and ellipsometer with same

Abstract

The utility model relates to the field of optical equipment, in particular to an angle adjusting mechanism and an ellipsometer with the same, and the angle adjusting mechanism comprises a support frame, a first rotating part and a second rotating part; the supporting frame is provided with a first driving part and a second driving part, the first rotating part is used for driving the first rotating part to move along a first path S1, and the second driving part is used for driving the second rotating part to rotate along a second path S2; the first path S1 and the second path S2 are both arranged in an arc shape, the axis A1 of the first path S1 and the axis A2 of the second path S2 are both located between the first path S1 and the second path S2, and the distance between the axis A1 of the first path S1 and the axis A2 of the second path S2 is smaller than the length of the radius R1 of the first path S1 or smaller than the length of the radius R2 of the second path S2. The ellipsometer has the effect of reducing the size of the ellipsometer.

Description

Technical Field

[0001] The present application relates to the field of optical devices, and in particular to an angle adjustment mechanism and an ellipsometer with such a mechanism. Background Art

[0002] An ellipsometer is an optical measurement device used to detect the thickness of thin films, optical constants, and the microstructure of materials. Its working principle is based on the polarization characteristics of light. By measuring the change in the polarization state of the reflected light of the sample to be measured before and after reflection, information about the sample to be measured is extracted. Due to its high precision, non-contact, wide application range, and fast measurement ability, the ellipsometer has become an indispensable measurement tool in thin film material research and industrial production.

[0003] In the existing related technologies, an ellipsometer includes a support frame, a placement table, a polarizer arm, and an analyzer arm. The placement table is used to horizontally place the sample. The placement table is installed on the support frame and is located between the polarizer arm and the analyzer arm. The polarizer arm is rotatably fitted on one side of the support frame and is used to emit detection light to the sample. The analyzer arm is rotatably fitted on the other side of the support frame and is used to receive the detection light reflected from the surface of the sample, so as to obtain the detection information of the sample based on the polarization characteristics of light. Moreover, different-sized samples can be detected by separately rotating the polarizer arm or the analyzer arm, and the applicability is good. Specifically, reference can be made to the utility model patent with the publication number CN 212432965 U, the publication date of January 29, 2021, and the name of an ellipsometer for semiconductor detection.

[0004] Regarding the above related technologies, the ellipsometer has a large volume and is usually placed separately on the detection table for use. It is not convenient to install the ellipsometer on a moving structure (such as a linear module), so that the ellipsometer can detect samples with larger volume and size through the moving structure. Summary of the Invention

[0005] In order to reduce the volume of the ellipsometer, the present application provides an angle adjustment mechanism.

[0006] The angle adjustment mechanism provided by the present application adopts the following technical solution:

[0007] An angle adjustment mechanism includes a support frame, a first rotating member, and a second rotating member. The first rotating member and the second rotating member are respectively used to correspondingly install the polarizer arm and the analyzer arm, or the first rotating member and the second rotating member are respectively used to correspondingly install the analyzer arm and the polarizer arm;

[0008] The support frame is provided with a first driving member and a second driving member. The first driving member is used to drive the first rotating member to move along a first path S1, and the second driving member is used to drive the second rotating member to rotate along a second path S2;

[0009] The first path S1 and the second path S2 are both arranged in an arc shape. The axis A1 of the first path S1 and the axis A2 of the second path S2 are both located between the first path S1 and the second path S2. The distance between the axis A1 of the first path S1 and the axis A2 of the second path S2 is less than or equal to the length dimension of the radius R1 of the first path S1 or the length dimension of the radius R2 of the second path S2.

[0010] By adopting the above technical solution, the first rotating member rotates along the arc-shaped first path S1, and the second rotating member rotates along the second arc-shaped second path S2, so that the distance dimension between the first rotating member and the second rotating member is reduced, reducing the situation where the first rotating member and the second rotating member need to be respectively arranged on both sides of the support frame to facilitate the movement space for the polarizer arm and the analyzer arm, thereby reducing the volume of the ellipsometer.

[0011] Optionally, the type of the first driving member is an arc-shaped motor.

[0012] By adopting the above technical solution, the first driving member selected as an arc-shaped motor has a small volume, which is beneficial to further reducing the volume of the ellipsometer.

[0013] Optionally, the type of the second driving member is an arc-shaped motor.

[0014] By adopting the above technical solution, the second driving member selected as an arc-shaped motor has a small volume, which is beneficial to further reducing the volume of the ellipsometer.

[0015] Optionally, the stroke α1 when the first rotating member moves along the first path S1 is 45° - 90°.

[0016] By adopting the above technical solution, it is beneficial to reduce the volume of the ellipsometer on the premise of ensuring that the ellipsometer can detect large-sized samples.

[0017] Optionally, the stroke α2 when the second rotating member moves along the second path S2 is 45° - 90°.

[0018] By adopting the above technical solution, it is beneficial to further reduce the volume of the ellipsometer on the premise of ensuring that the ellipsometer can detect large-sized samples.

[0019] This application also provides an ellipsometer.

[0020] A kind of angle adjustment mechanism provided by this application adopts the following technical solution:

[0021] An ellipsometer includes the above angle adjustment mechanism.

[0022] Optionally, the ellipsometer further includes a polarizer arm and an analyzer arm;

[0023] The polarizing arm and the analyzing arm are respectively and correspondingly mounted on the first rotating member and the second rotating member;

[0024] Or the polarizing arm and the analyzing arm are respectively and correspondingly mounted on the second rotating member and the first rotating member.

[0025] By adopting the above technical solution, the polarizing arm and the analyzing arm move along with the first rotating member and the second rotating member, reducing the space required for the polarizing arm and the analyzing arm during rotation, thereby facilitating the installation of the ellipsometer on a moving mechanism to detect samples with larger volume and dimensions.

[0026] Optionally, the ellipsometer further includes a collimator, and the collimator is used to detect the perpendicularity of the angle adjusting mechanism.

[0027] By adopting the above technical solution, it is beneficial to ensure the perpendicularity corresponding to the levelness of the polarizing arm and the analyzing arm with respect to the sample, thereby reducing equipment errors and ensuring the detection accuracy of the polarizing arm and the analyzing arm.

[0028] In summary, the present application includes at least one of the following beneficial technical effects:

[0029] 1. The first rotating member rotates along the circular first path S1, and the second rotating member rotates along the second circular second path S2, so that the distance dimension between the first rotating member and the second rotating member is reduced, reducing the situation where the first rotating member and the second rotating member need to be respectively arranged on both sides of the support frame to facilitate making room for the polarizing arm and the analyzing arm, thereby reducing the volume of the ellipsometer;

[0030] 2. The first driving member selected as an arc-shaped motor has a small volume, which is beneficial to further reducing the volume of the ellipsometer;

[0031] 3. The polarizing arm and the analyzing arm move along with the first rotating member and the second rotating member, reducing the space required for the polarizing arm and the analyzing arm during rotation, thereby facilitating the installation of the ellipsometer on a moving mechanism to detect samples with larger volume and dimensions. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is the overall structural schematic diagram of Embodiment 1 of the present application.

[0033] Figure 2 is the distribution schematic diagram of the first path S1 and the second path S2 of Embodiment 1 of the present application.

[0034] Figure 3 is the first overall structural schematic diagram of Embodiment 2 of the present application.

[0035] Figure 4 is the second overall structural schematic diagram of Embodiment 2 of the present application.

[0036] Description of reference numerals: 1, support frame; 11, first driving member; 12, second driving member; 2, first rotating member; 3, second rotating member; 4, polarizing arm; 5, analyzer arm; 6, collimator. Detailed implementation manners

[0037] The following further elaborates on this application Figures 1-4 in conjunction with the accompanying drawings.

[0038] Embodiment 1:

[0039] Embodiment 1 of this application discloses an angle adjustment mechanism. Refer to Figure 1 , the angle adjustment mechanism includes a support frame, a first rotating member, and a second rotating member.

[0040] Refer to Figure 1 , the support frame is provided with a first driving member and a second driving member, and both the first driving member and the second driving member are arranged close to the axis where the geometric center of the support frame is located. In conjunction with Figure 2 , specifically in Embodiment 1 of this application, the plane of the support frame is a geometrically symmetric figure, and the "axis where the geometric center is located" refers to the symmetry axis L of the support frame. The first rotating member is used to drive the geometric center O1 of the first rotating member to move along the first path S1, and the second driving member is used to drive the geometric center O2 of the second rotating member to rotate along the second path S2.

[0041] Specifically in Embodiment 1 of this application, the types of both the first driving member and the second driving member are arc-shaped motors. The stators of the first driving member and the second driving member are fixedly installed on the support frame, and the first rotating member and the second rotating member are respectively installed on the rotors of the first driving member and the second driving member.

[0042] Refer to Figure 2 , both the first path S1 and the second path S2 are arranged in an arc shape. The axis A1 of the first path S1 and the axis A2 of the second path S2 are both located between the first path S1 and the second path S2, and the geometric relationship between the axis A1 and the axis A2 located between the first path S1 and the second path S2 includes: the axis A1 and the axis A2 are respectively close to the first path A1 and the second path A2, the axis A1 and the axis A2 are respectively close to the second path A2 and the first path A1, and the axis A1 coincides with the axis A2. In addition, the distance dimension between the axis A1 and the axis A2 is less than or equal to the length dimension of the radius R1 of the first path S1, or less than or equal to the length dimension of the radius R2 of the second path S2.

[0043] Specifically, in Embodiment 1 of the present application, the length dimension of radius R1 is the same as that of radius R2, and the axis A1, axis A2, and the symmetry axis L coincide with each other, that is, the distance dimension between axis A1 and axis A2 is zero, so as to reduce the space occupied for the rotation of the first rotating member and the second rotating member, thereby reducing the volume of the ellipsometer.

[0044] Referring to Figure 2 , when the first rotating member moves along the first path S1, the stroke α1 is 45° - 90°, and when the second rotating member moves along the second path S2, the stroke α2 is 45° - 90°, so as to reduce the volume of the ellipsometer on the premise of ensuring that the ellipsometer can detect large-sized samples.

[0045] The implementation principle of the angle adjustment mechanism in Embodiment 1 of the present application is as follows: The first driving member makes the first rotating member rotate along the circular arc-shaped first path S1, and the second driving member makes the second rotating member rotate along the second circular arc-shaped second path S2. The first rotating member and the second rotating member are arranged concentratedly close to the axis where the geometric center of the support frame is located, reducing the distance dimension between the first rotating member and the second rotating member, thereby reducing the situation where the first rotating member and the second rotating member need to be respectively arranged on both sides of the support frame to facilitate the movement space for the polarizer arm and the analyzer arm, and further reducing the volume of the ellipsometer, so as to facilitate the installation of the ellipsometer on the motion mechanism, enabling the motion mechanism to drive the ellipsometer to move to detect large-sized samples, such as samples with a specification of 500*500*150 (mm).

[0046] Embodiment 2:

[0047] Embodiment 2 of the present application discloses an ellipsometer, which, in addition to including all the technical features of the angle adjustment mechanism described in Embodiment 1, further includes the following technical features:

[0048] Referring to Figure 3 and Figure 4 , the ellipsometer further includes a polarizer arm, an analyzer arm, and a collimator. The polarizer arm is fixedly installed on the first rotating member through the first connecting frame, and the analyzer arm is fixedly installed on the second rotating member through the second connecting frame, so that the polarizer arm rotates following the first rotating member, and the analyzer arm rotates following the second rotating member, thereby enabling the polarizer arm and the analyzer arm to be adjusted separately according to the shape and size of the sample to ensure the applicability of the ellipsometer.

[0049] The collimator is fixedly installed on the support frame. The collimator is used to detect the perpendicularity of the angle adjustment mechanism, and the collimator is located between the polarizer arm and the analyzer arm. The type of the collimator can be liquid type or optical type, and preferably optical type, to ensure that the support frame, the polarizer arm, and the analyzer arm are in the initial state required for calibration during the calibration of the ellipsometer.

[0050] The above are all preferred embodiments of this application, and the protection scope of this application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of this application shall be covered within the protection scope of this application.

Claims

1. An angle adjustment mechanism, characterized in that: It comprises a support frame, a first rotating member and a second rotating member, wherein the first rotating member and the second rotating member are respectively used for correspondingly installing a polarizing arm and an analyzing arm, or the first rotating member and the second rotating member are respectively used for correspondingly installing a polarizing arm and a polarizing arm; The support frame is equipped with a first driving member and a second driving member, the first rotating member is used to drive the first rotating member to move along a first path S1, and the second driving member is used to drive the second rotating member to rotate along a second path S2; The first path S1 and the second path S2 are both arranged in an arc shape, the axis A1 of the first path S1 and the axis A2 of the second path S2 are both located between the first path S1 and the second path S2, and the distance between the axis A1 of the first path S1 and the axis A2 of the second path S2 is less than the length dimension of the radius R1 of the first path S1 or less than the length dimension of the radius R2 of the second path S2.

2. An angle adjustment mechanism according to claim 1, characterized in that: The first driving member is a curved motor.

3. An angle adjustment mechanism according to claim 1 or 2, characterized in that: The type of the second driving member is an arc motor.

4. The angle adjustment mechanism according to claim 1, characterized in that: The travel α1 of the first rotating member when moving along the first path S1 is 45°-90°.

5. An angle adjustment mechanism according to claim 1 or 4, characterized in that: The travel α2 of the second rotating member when moving along the second path S2 is 45°-90°.

6. An ellipsometer, characterized in that: It includes the angle adjustment mechanism described in any one of claims 1, 2 or 4.

7. An ellipsometer according to claim 6, characterized in that: The ellipsometer also includes a polarizing arm and an analyzing arm; The polarizing arm and the analyzing arm are respectively mounted on the first rotating member and the second rotating member; Or the polarizing arm and the analyzing arm are respectively installed on the second rotating member and the first rotating member.

8. An ellipsometer according to claim 6, characterized in that: The ellipsometer further comprises a collimator, which is used to detect the verticality of the angle adjustment mechanism.

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