High-reflectivity gold-plated optical lens

Abstract

The utility model provides a high-reflectivity gold-plated optical lens. The high-reflectivity gold-plated optical lens comprises an optical glass substrate, and a first connecting layer, a metal reflecting layer, a second connecting layer, a first dielectric layer and a second dielectric layer which are sequentially plated on the surface of the optical glass substrate from bottom to top, wherein the first connecting layer film material Cr enhances the connection stability between the optical glass substrate and the film, the metal reflecting layer film material Au provides basic reflectivity for the coated lens, and the reflectivity is 97%; the reflectivity of the lens is enhanced through superposition of the first connecting layer film material ZnSe, the first dielectric layer YbF3 and the second connecting layer film material ZnSe and the first dielectric layer YbF3, the reflectivity reaches up to 99.6%, the damage resistance threshold value of the coated lens is increased through superposition of the first dielectric layer film material YbF3 and the second dielectric layer film material ZnSe, the lens is more resistant to wiping, and the service life of the lens is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of optical lenses, and particularly relates to a gold-plated optical lens with a high reflectivity. Background Art

[0002] In the optical field, mirrors are used for beam turning, interferometric measurement, imaging or illumination. A polished glass or metal surface is used as the substrate, and the beam is incident on the surface to form specular reflection. In order to obtain as much reflected light as possible, a metal reflective film is usually plated on the substrate. Commonly used materials for the metal film are: aluminum, silver, and gold. The mirror is used for beam turning, interferometric measurement, imaging or illumination. However, there are currently problems in plating a metal reflective film on the substrate:

[0003] 1) The hardness of the metal film layer is insufficient, it is easy to be scratched and not resistant to wiping; 2) When the lens is actually used, the reflectivity is not ideal. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a gold-plated optical lens with a high reflectivity. One is to improve the denseness and adhesion of the film layer, enhance the damage resistance threshold of the lens, and make the lens more resistant to wiping; the other is to make the lens have the advantages of high reflectivity and small polarization effect in a very wide wavelength range.

[0005] In order to achieve the above purpose, the solution of the utility model is: a gold-plated optical lens with a high reflectivity, including: an optical glass substrate, a first connection layer plated on the surface of the optical glass substrate, a metal reflective layer plated on the surface of the first connection layer, a second connection layer plated on the surface of the metal reflective layer, a first dielectric layer plated on the surface of the second connection layer, and a second dielectric layer plated on the surface of the first dielectric layer;

[0006] Among them, the film material used when plating the first connection layer is Cr, the film material used when plating the metal reflective layer is Au, the film material used when plating the second connection layer is ZnSe, the film material used when plating the first dielectric layer is YbF3, and the film material used when plating the second dielectric layer is ZnSe.

[0007] Further, the physical film thickness of the first connection layer is: 30 - 50 nm.

[0008] Further, the physical film thickness of the metal reflective layer > 120 nm.

[0009] Further, the physical film thickness of the second connection layer is 70 - 80 nm.

[0010] Further, the thicknesses of the first dielectric layer and the second dielectric layer are both 1 / 4λ, where λ is the wavelength of the incident light in this layer.

[0011] After adopting the above scheme, the beneficial effects of the present utility model are as follows: The film material Cr of the first connection layer strengthens the connection stability between the optical glass substrate and the thin film. The film material Au of the metal reflection layer provides a basic reflectivity for the coated lens, and the reflectivity is 97%. The film material ZnSe (evaporation rate: 6 Å / s) of the second connection layer and the film material YbF3 (evaporation rate: 2 Å / s) of the first dielectric layer. The superposition of the two film materials strengthens the reflectivity of the lens, and the reflectivity is as high as 99.6%. The superposition of the film materials YbF3 and ZnSe of the first dielectric layer and the second dielectric layer improves the anti-damage threshold of the coated lens, making the lens more resistant to wiping and increasing the service life. Description of the Drawings

[0012] Figure 1 Schematic diagram of a high-reflectivity gold-coated optical lens according to an embodiment of the present utility model;

[0013] Reference numerals: optical glass substrate - 1, first connection layer - 2, metal reflection layer - 3, second connection layer - 4, first dielectric layer - 5, second dielectric layer - 6. Detailed Description of the Invention

[0014] The present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0015] As Figure 1 shown, a high-reflectivity gold-coated optical lens includes: an optical glass substrate 1 (using an optical glass K9 substrate), a first connection layer 2 coated on the surface of the optical glass substrate, a metal reflection layer 3 coated on the surface of the first connection layer 2, a second connection layer 4 coated on the surface of the metal reflection layer 3, a first dielectric layer 5 coated on the surface of the second connection layer 4, and a second dielectric layer 6 coated on the surface of the first dielectric layer 5;

[0016] Among them, the film material used for coating the first connection layer 2 is Cr, the physical film thickness of the first connection layer is: 30 - 50 nm, the film material used for coating the metal reflection layer 3 is Au, the physical film thickness of the metal reflection layer > 120 nm, the film material used for coating the second connection layer 4 is ZnSe, the physical film thickness of the second connection layer is 70 - 80 nm, the film material used for coating the first dielectric layer 5 is YbF3, the film material used for coating the second dielectric layer 6 is ZnSe, and the thicknesses of the first dielectric layer and the second dielectric layer are both 1 / 4λ, where λ is the wavelength of the incident light in this layer.

[0017] In a specific embodiment of the present utility model, the production process is as follows: A box-type vacuum coating machine is used to perform optical coating work under a vacuum condition of 3.0×10-3 Pa. The Kaufman ion source device is adjusted to a suitable state (screen plate: 350v, acceleration: 200, ion beam: 40, neutralization adjusted to: 1 - 1.5 times). Argon is added during the process. After the film material is pre-melted, the temperature is raised to 150 degrees Celsius to reduce internal stress and enhance the denseness of the film layer.

[0018] Coating begins. The film material Cr is used to strengthen the connection stability between the substrate and the thin film. The film material Au provides a basic reflectivity of 97% for the coated lens. During the process, parameters such as the thickness and refractive index of the thin film need to be measured in real time to control the thickness and refractive index of the thin film and ensure the quality of the thin film. The film materials ZnSe (evaporation rate: 6 Å / s) and YbF3 (evaporation rate: 2 Å / s) both enhance the reflectivity of the lens, increasing the anti-damage threshold and extending the service life of the coated lens.

[0019] According to the experimental results, at a fixed film coating rate, methods such as plane reflection evaporation and DC magnetron sputtering are used to repeatedly coat the surface of the lens to form a thin film, maximizing the reflectivity and meeting the requirement of resistance to wiping.

[0020] After testing, for the prepared gold-plated optical lens with high reflectivity, compared with the 97% reflectivity of the gold-plated mirrors on the market, the selection of the substrate, film system design, and arrangement of the film layers of the present utility model result in a gold-plated mirror with a reflectivity as high as 99.6%.

Claims

1. A high reflectivity gold-plated optical lens, characterized in that: include: An optical glass substrate, a first connecting layer plated on the surface of the optical glass substrate, a metal reflective layer plated on the surface of the first connecting layer, a second connecting layer plated on the surface of the metal reflective layer, a first dielectric layer plated on the surface of the second connecting layer, and a second dielectric layer plated on the surface of the first dielectric layer; wherein the film material used for plating the first connecting layer is Cr, the film material used for plating the metal reflective layer is Au, the film material used for plating the second connecting layer is ZnSe, the film material used for plating the first dielectric layer is YbF3, and the film material used for plating the second dielectric layer is ZnSe.

2. The high-reflectivity gold-plated optical lens according to claim 1, characterized in that: The physical film thickness of the first connecting layer is 30-50 nm.

3. The high-reflectivity gold-plated optical lens according to claim 1, characterized in that: The physical film thickness of the metal reflective layer is greater than 120 nm.

4. The high-reflectivity gold-plated optical lens according to claim 1, characterized in that: The physical film thickness of the second connection layer is 70-80 nm.

5. The high-reflectivity gold-plated optical lens according to claim 1, characterized in that: The thickness of the first dielectric layer and the second dielectric layer are both 1 / 4λ, where λ is the wavelength of the incident light of the layer.

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