High-stability dry etching equipment

Abstract

The utility model belongs to the technical field of dry etching equipment, and discloses high-stability dry etching equipment which comprises an etching machine, the bottom of an inner cavity of the etching machine is movably connected with two rotating shafts in a mirror image manner, and two ends of each rotating shaft are fixedly connected with wheels. Through arrangement of structures such as a rotating shaft, a gear, a guide groove and an arc-shaped block, the device has the effects of conveniently moving and fixing the etching machine so as to improve the convenience and stability of the device, a threaded rod is rotated to drive a square plate to move towards the interior of the etching machine, so that two round rods are driven to slide along tracks of the two guide grooves, and the etching efficiency is improved. The two first inclined blocks are driven by the round rod to move oppositely, so that the second inclined blocks and the elastic pieces at the bottoms of the second inclined blocks are extruded to move downwards, the elastic pieces move downwards to drive the arc-shaped blocks to be clamped with the gear, the position of the gear is fixed, the rotating shaft cannot rotate, the overall position of the etching machine is fixed, and the etching machine is kept stable during operation.

Description

Technical Field

[0001] The utility model belongs to the technical field of dry etching equipment, and specifically relates to a dry etching equipment with high stability. Background Technique

[0002] Dry etching equipment is a kind of equipment used in industries such as semiconductor manufacturing, microelectronics, and materials science. It etches the material surface into a specific pattern or shape through plasma or gas chemical reactions. Compared with wet etching, this etching method has higher precision and better control ability.

[0003] When the existing high-stability dry etching equipment is in use, since the dry etching equipment requires extremely high stability during operation to ensure the accuracy and quality of wafer etching, most equipment does not have wheels at the bottom. Because installing wheels may cause slight shaking or movement of the equipment during operation, thus affecting the accuracy of the process. However, not installing wheels will make it more troublesome to adjust the position of the equipment, requiring more manpower and material resources. Therefore, a high-stability dry etching equipment is proposed to solve the problems raised in the background technique. Content of the Utility Model

[0004] To solve the problems raised in the above background technique, the utility model provides a high-stability dry etching equipment, which has the advantages of being convenient to move and fix the dry etching equipment, thereby improving the convenience and stability of the equipment. By setting structures such as a rotating shaft, a gear, a guiding groove, and an arc-shaped block, when the arc-shaped block moves downward, it drives the tooth block to engage with the gear, thereby fixing the position of the gear, making the rotating shaft unable to rotate, and further fixing the overall position of the etching machine, so that the etching machine remains stable during operation.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A high-stability dry etching equipment, including an etching machine. The bottom of the inner cavity of the etching machine is movably connected with two rotating shafts in a mirror image manner. Both ends of the rotating shaft are fixedly connected with wheels. The middle part of the outer surface of the rotating shaft is fixedly connected with a gear. The bottom of the inner cavity of the etching machine is movably connected with a square plate. Two guiding grooves with opposite orientations are opened on the surface of the square plate. The inside of the etching machine is movably connected with a first inclined block and a second inclined block on both sides of the square plate. A round rod is arranged inside the opposite sides of the two first inclined blocks. The bottom of the second inclined block is fixedly connected with an arc-shaped block. The bottom of the arc-shaped block is fixedly connected with a tooth block. One side of the etching machine close to the square plate is threadedly connected with a threaded rod.

[0006] Preferably, the wheels rotate around the rotating shaft as the axis. The arc-shaped block is located directly above the gear. After the arc-shaped block moves downward, it drives the tooth block to engage with the gear.

[0007] Preferably, the two round rods are respectively movably clamped inside the two guiding grooves, and both sides of the square plate are respectively movably inside the two first inclined blocks.

[0008] Preferably, opposite sides of the two first inclined blocks are both bevel-shaped, the top of the second inclined block is bevel-shaped, and the beveled surfaces of the first inclined block and the second inclined block are in mutual contact.

[0009] Preferably, when the square plate moves towards the inside of the etching machine, it drives the two round rods to move in opposite directions along the trajectories of the two guiding grooves respectively. After the round rods move, they squeeze the second inclined block to move downward through the first inclined block.

[0010] Preferably, elastic pieces are fixedly connected to both ends of the second inclined block, and the second inclined block is elastically connected to the etching machine through the elastic pieces.

[0011] Preferably, one end of the threaded rod is movably clamped inside the square plate, and the end of the threaded rod far from the square plate penetrates through the outer wall of the etching machine and extends to the outside of the etching machine.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] By providing structures such as a rotating shaft, a gear, a guiding groove, and an arc-shaped block, the present utility model enables the device to conveniently move and fix the etching machine, thereby improving the convenience and stability of the device. By rotating the threaded rod, it drives the square plate to move towards the inside of the etching machine, thereby driving the two round rods to slide along the trajectories of the two guiding grooves. Furthermore, through the movement of the round rods, it drives the two first inclined blocks to move in opposite directions. Through the movement of the first inclined blocks, the second inclined block and the arc-shaped block at its bottom are squeezed to move downward. The downward movement of the arc-shaped block drives the tooth block to be clamped with the gear, thereby fixing the position of the gear, making the rotating shaft unable to rotate, and further fixing the overall position of the etching machine, so that the etching machine remains stable during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0015] Figure 2 is a schematic diagram of the top-sectional structure of the present utility model;

[0016] Figure 3 is an enlarged partial front-sectional view at the position of the first inclined block of the present utility model;

[0017] Figure 4 is a schematic diagram of the positional relationship among the guiding groove, the first inclined block, the second inclined block, and the arc-shaped block of the present utility model.

[0018] In the figure: 1, etching machine; 2, rotating shaft; 3, wheel; 4, gear; 5, square plate; 6, guiding groove; 7, first inclined block; 8, round rod; 9, second inclined block; 10, elastic sheet; 11, arc-shaped block; 12, tooth block; 13, threaded rod. Detailed implementation manner

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] As Figures 1 to 4 shown, the present invention provides a dry etching device with high stability, including an etching machine 1. Two rotating shafts 2 are movably connected in a mirror image manner at the bottom of the inner cavity of the etching machine 1. Wheels 3 are fixedly connected to both ends of the rotating shaft 2. A gear 4 is fixedly connected to the middle of the outer surface of the rotating shaft 2. A square plate 5 is movably connected to the bottom of the inner cavity of the etching machine 1. Two guiding grooves 6 with opposite orientations are formed on the surface of the square plate 5. A first inclined block 7 and a second inclined block 9 located on both sides of the square plate 5 are movably connected inside the etching machine 1. Round rods 8 are arranged inside the opposite sides of the two first inclined blocks 7. An arc-shaped block 11 is fixedly connected to the bottom of the second inclined block 9. A tooth block 12 is fixedly connected to the bottom of the arc-shaped block 11. A threaded rod 13 is threadedly connected to one side of the etching machine 1 close to the square plate 5.

[0021] Adopting the above solution: By rotating the threaded rod 13, the square plate 5 is driven to move towards the inside of the etching machine 1, so as to drive the two round rods 8 to slide along the trajectories of the two guiding grooves 6, and then drive the two first inclined blocks 7 to move in opposite directions through the round rods 8. By moving the first inclined block 7, the second inclined block 9 and the arc-shaped block 11 at its bottom are squeezed to move downward. The downward movement of the arc-shaped block 11 drives the tooth block 12 to be engaged with the gear 4, thereby fixing the position of the gear 4, making the rotating shaft 2 unable to rotate, and further fixing the overall position of the etching machine 1, so that the etching machine 1 remains stable during operation.

[0022] As Figures 2 to 4 shown, the wheels 3 rotate around the rotating shaft 2 as the axis. The arc-shaped block 11 is located directly above the gear 4. After the arc-shaped block 11 moves downward, the tooth block 12 is driven to be engaged with the gear 4. The two round rods 8 are respectively movably engaged inside the two guiding grooves 6. Both sides of the square plate 5 are movably inside the two first inclined blocks 7. The opposite sides of the two first inclined blocks 7 are both inclined surfaces. The top of the second inclined block 9 is an inclined surface. The inclined surface of the first inclined block 7 is in contact with the inclined surface of the second inclined block 9.

[0023] Adopting the above solution: The wheel 3 rotates around the rotating shaft 2 as the axis. Its function is that when the tooth block 12 is engaged with the gear 4, the rotating shaft 2 inside the gear 4 is fixed at this time, so that the rotating shaft 2 cannot rotate inside the etching machine 1, and then drives the wheels 3 at both ends of the rotating shaft 2 to remain stationary, thereby ensuring that the rotating shaft 2 will not move or shake during the operation of the etching machine 1, and further improving the stability of the device.

[0024] As Figures 2 to 4 shown, when the square plate 5 moves towards the inside of the etching machine 1, it drives the two round rods 8 to move in opposite directions along the trajectories of the two guiding grooves 6 respectively. After the round rods 8 move, they squeeze the second inclined block 9 to move downward through the first inclined block 7. Both ends of the second inclined block 9 are fixedly connected with elastic pieces 10. The second inclined block 9 is elastically connected to the etching machine 1 through the elastic pieces 10. One end of the threaded rod 13 is movably engaged inside the square plate 5, and the end of the threaded rod 13 away from the square plate 5 penetrates the outer wall of the etching machine 1 and extends to the outside of the etching machine 1.

[0025] Adopting the above solution: Through the design of the elastic piece 10, its function is that when the first inclined block 7 squeezes the second inclined block 9 to move downward, the elastic piece 10 is stretched during the downward movement of the second inclined block 9. Subsequently, when the position of the etching machine 1 needs to be changed, at this time, by rotating the threaded rod 13 in the reverse direction, the two first inclined blocks 7 move towards each other under the action of an external force, so as to relieve the extrusion of the second inclined block 9. At this time, the second inclined block 9 moves upward under the pulling force of the elastic piece 10, thereby driving the arc-shaped block 11 and the tooth block 12 to move upward, and releasing the engagement between the tooth block 12 and the gear 4, so that the rotating shaft 2 drives the wheel 3 to rotate again.

[0026] The working principle and usage process of the present utility model: The operator moves the etching machine 1 to a predetermined position, and then rotates the threaded rod 13 so that one end of it rotates inside the square plate 5, and at the same time drives the square plate 5 to move towards the inside of the etching machine 1. While the square plate 5 moves, it drives the two round rods 8 to slide along the trajectories of the two guiding grooves 6 respectively, thereby driving the two first inclined blocks 7 to move in opposite directions through the round rods 8, and then making the first inclined block 7 squeeze the second inclined block 9 to move downward. When the second inclined block 9 moves, it drives the arc-shaped block 11 and the tooth block 12 at its bottom end to move downward. When the round rod 8 abuts against the inner wall of the guiding groove 6, at this time, the tooth block 12 is engaged with the gear 4, so that the gear 4 is fixed, and then the rotating shaft 2 and the wheel 3 cannot rotate. Subsequently, the operator stops rotating the threaded rod 13, thereby fixing the position of the etching machine 1, and further ensuring the stability of the etching machine 1 during operation.

[0027] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0028] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-stability dry etching device, comprising an etcher (1), characterized in that: The bottom of the inner cavity of the etching machine (1) is movably connected to two rotating shafts (2) in a mirror-like manner, both ends of the rotating shafts (2) are fixedly connected to wheels (3), the middle part of the outer surface of the rotating shaft (2) is fixedly connected to a gear (4), the bottom of the inner cavity of the etching machine (1) is movably connected to a square plate (5), the surface of the square plate (5) is provided with two guide grooves (6) facing opposite directions, the interior of the etching machine (1) is movably connected to a first inclined block (7) and a second inclined block (9) located on both sides of the square plate (5), the interior of the two first inclined blocks (7) on opposite sides are both provided with round rods (8), the bottom of the second inclined block (9) is fixedly connected to an arc block (11), the bottom of the arc block (11) is fixedly connected to a toothed block (12), and the side of the etching machine (1) close to the square plate (5) is threadedly connected to a threaded rod (13).

2. The high-stability dry etching equipment according to claim 1, characterized in that: The wheel (3) rotates with the rotating shaft (2) as the axis, and the arc block (11) is located directly above the gear (4). After the arc block (11) moves downward, it drives the tooth clamping block (12) to clamp with the gear (4).

3. The high-stability dry etching equipment according to claim 1, characterized in that: The two round rods (8) are respectively movably clamped inside the two guide grooves (6), and the two sides of the square plate (5) are respectively movably inside the two first inclined blocks (7).

4. The high-stability dry etching equipment according to claim 1, characterized in that: The opposite sides of the two first inclined blocks (7) are both in the shape of an inclined surface, the top of the second inclined block (9) is in the shape of an inclined surface, and the inclined surfaces of the first inclined blocks (7) and the inclined surfaces of the second inclined blocks (9) abut against each other.

5. The high-stability dry etching equipment according to claim 1, characterized in that: When the square plate (5) moves toward the inside of the etching machine (1), it drives the two round rods (8) to move in opposite directions along the tracks of the two guide grooves (6). After the round rods (8) move, they squeeze the second inclined block (9) through the first inclined block (7) and move downward.

6. The high-stability dry etching equipment according to claim 1, characterized in that: Both ends of the second inclined block (9) are fixedly connected with spring sheets (10), and the second inclined block (9) is elastically connected to the etching machine (1) via the spring sheets (10).

7. The high-stability dry etching equipment according to claim 1, characterized in that: One end of the threaded rod (13) is movably clamped inside the square plate (5), and one end of the threaded rod (13) away from the square plate (5) penetrates the outer wall of the etcher (1) and extends to the outside of the etcher (1).

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