Flower basket sheet guiding device

Abstract

The utility model provides a flower basket wafer guiding device, belongs to the technical field of wafer guiding devices, and aims to solve the problems that when silicon wafers are guided in and replaced, one group of flower basket loaders are fixedly mounted on the surface of the device, the flower basket loaders need to be disassembled and then aligned, the disassembly and the installation are troublesome, and the replacement speed and the replacement efficiency are influenced. One end of the pulling mechanism is inserted into the top plate; the top of the return mechanism is inserted into the top plate; the top of the auxiliary guide-out mechanism is connected with the top plate; according to the utility model, the rubber sheet can be wrinkled after being pulled, the wrinkled part of the rubber sheet protrudes and is in contact with the silicon wafer, a certain extrusion effect on the silicon wafer is achieved, the silicon wafer can be pulled to be led out from the basket loader through the rubber sheet, the flower basket does not need to be disassembled and assembled, and the installation is simple and convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of guide piece devices, and more specifically, particularly relates to a flower basket guide piece device. Background Art

[0002] In the process of semiconductor manufacturing, a silicon wafer carrier is used to protect and transport silicon wafers. Silicon wafers are one of the most critical components in semiconductor manufacturing. A flower basket carrier can ensure that silicon wafers are not damaged or contaminated during the manufacturing process; when the silicon wafers need to be replaced, a guide piece device is required for auxiliary replacement. For traditional guide piece devices, the two ends of two flower baskets need to be aligned to facilitate the introduction of silicon wafers. When replacing, one of the flower basket carriers is fixedly installed on the surface of the device, and the flower basket carrier needs to be disassembled and then aligned. The disassembly and installation are troublesome, affecting the replacement speed and efficiency. Content of the Utility Model

[0003] In order to solve the above technical problems, the utility model provides a flower basket guide piece device to solve the problem that when replacing silicon wafers by guiding, one of the flower basket carriers is fixedly installed on the surface of the device, and the flower basket carrier needs to be disassembled and then aligned. The disassembly and installation are troublesome, affecting the replacement speed and efficiency as mentioned in the above background art.

[0004] A flower basket guide piece device of the utility model is achieved by the following specific technical means:

[0005] A flower basket guide piece device includes: a top plate, a pulling mechanism, a return mechanism, and an auxiliary guiding mechanism; the top plate is an overall cuboid structure with a hollow interior; one end of the pulling mechanism is inserted into the interior of the top plate; the top of the return mechanism is inserted into the interior of the top plate; the top of the auxiliary guiding mechanism is connected to the top plate, and one end of the pulling mechanism and the return mechanism are inserted into the interior of the auxiliary guiding mechanism; the auxiliary guiding mechanism includes: a fixing plate and a slot; the fixing plate is an overall cuboid structure with a hollow interior, the top of the fixing plate is fixedly connected to the top plate, and the distance between the fixing plates is the same as the distance between the silicon wafers; the slot is opened on the surface of the fixing plate.

[0006] In at least some embodiments, the pulling mechanism includes: a rotating rod, a support box, a threaded rotating rod, a lifting rack plate, and a limiting support rod; one end of the rotating rod is rotatably inserted into the interior of the top plate, and a gear is fixedly arranged at the other end of the rotating rod; the support box is an overall cuboid structure with a hollow interior, the support box is fixedly installed on one side of the top plate, and the other end of the rotating rod is rotatably inserted into the interior of the support box; the bottom of the threaded rotating rod is rotatably inserted into the interior of the support box; the lifting rack plate is installed in the interior of the support box, one side of the lifting rack plate is meshed with the gear at the other end of the rotating rod, and the sliding of the lifting rack plate can control the rotation of the rotating rod; the limiting support rod is a T-shaped structure, the limiting support rod is fixedly installed in the interior of the support box, and the limiting support rod is slidably connected to the lifting rack plate, and the limiting support rod can play a role in restricting the offset rotation of the lifting rack plate.

[0007] In at least some embodiments, the return mechanism includes: a sliding carriage, a connecting rod, and a pull rod; the sliding carriage is in an H-shaped structure, and the number of sliding carriages is set to two groups, and the sliding carriages are slidably installed inside the square chute of the top plate; the left and right ends of the connecting rod are fixedly connected to the two groups of sliding carriages; the bottom of the pull rod is slidably inserted into the top plate and fixedly connected to the connecting rod.

[0008] In at least some embodiments, the return mechanism further includes: a control pull rope A, an outer plate, a guiding rod, and a driving pull plate; the top of the control pull rope A is slidably inserted into the top plate and fixedly connected to the connecting rod; one side of the outer plate is fixedly connected to the fixing plate; the guiding rod is in an L-shaped structure, the surface of the guiding rod is fixedly connected to the outer plate, one side of the bottom of the guiding rod is fixedly connected to the fixing plate, and the control pull rope A slides through the guiding rod and is inserted into the fixing plate; the driving pull plate is slidably installed inside the square chute of the fixing plate, and one side of the bottom of the driving pull plate is fixedly connected to the other end of the control pull rope A, and the control pull rope A can start the function of controlling the sliding of the driving pull plate.

[0009] In at least some embodiments, the auxiliary export mechanism further includes an auxiliary insertion plate, a rubber sheet, and a control pull rope B; the auxiliary insertion plate is in a trapezoidal structure, the top of the auxiliary insertion plate is fixedly connected to the fixing plate, and the auxiliary insertion plate can facilitate the insertion of the fixing plate into the middle area of the silicon wafer; the surface of the rubber sheet is provided with particles for increasing friction, the rubber sheet is slidably installed inside the fixing plate, one side of the bottom of the rubber sheet is fixedly connected to the driving pull plate, and the rubber sheet can play a role in assisting in pulling out the silicon wafer; the bottom of the control pull rope B is slidably inserted into the fixing plate and fixedly connected to the rubber sheet, and the control pull rope B is slidably inserted into the top plate and fixedly connected to the rotating rod.

[0010] Compared with the prior art, the present utility model has the following beneficial effects:

[0011] The present utility model is internally provided with a pulling mechanism and an auxiliary export mechanism. After the fixing plate is inserted into the area between the silicon wafers, the rubber sheet inside the auxiliary export mechanism can be pulled by the pulling mechanism. After being pulled, the rubber sheet will be wrinkled, and the raised part of the wrinkled rubber sheet contacts the silicon wafer, exerting a certain squeezing effect on the silicon wafer. The rubber sheet can be used to pull the silicon wafer out of the flower basket carrier, and there is no need to disassemble and install the flower basket, which is simple and convenient to install; a return mechanism is also provided inside the device, and the return mechanism can control the wrinkled rubber sheet to be flattened, facilitating the subsequent export of the next group of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is the main body axonometric view structure schematic diagram of the present utility model.

[0013] Figure 2 is the main body bottom view structure schematic diagram of the present utility model.

[0014] Figure 3It is a schematic cross-sectional structure diagram of the pulling mechanism of the present utility model.

[0015] Figure 4 It is a schematic axonometric view structure diagram of the return mechanism of the present utility model.

[0016] Figure 5 It is a schematic cross-sectional structure diagram of the auxiliary export mechanism of the present utility model.

[0017] In the figure, the corresponding relationship between the component names and the drawing numbers is as follows:

[0018] 1. Top plate; 2. Pulling mechanism; 201. Rotating rod; 202. Support box; 203. Threaded rotating rod; 204. Lifting rack plate; 205. Limit support rod; 3. Return mechanism; 301. Sliding frame; 302. Connecting rod; 303. Pull rod; 304. Control pull rope A; 305. Outer plate; 306. Guide rod; 307. Driving pull plate; 4. Auxiliary export mechanism; 401. Fixed plate; 402. Slot; 403. Auxiliary insertion plate; 404. Rubber sheet; 405. Control pull rope B. Specific implementation mode

[0019] The following further describes in detail the implementation mode of the present utility model in conjunction with the drawings and embodiments.

[0020] Embodiment 1:

[0021] As shown in the attached Figure 1 to the attached Figure 5 shown:

[0022] The present utility model provides a flower basket guide, including: a top plate 1, a pulling mechanism 2, a return mechanism 3, and an auxiliary export mechanism 4; the top plate 1 is an overall cuboid structure with a hollow interior; one end of the pulling mechanism 2 is inserted into the interior of the top plate 1; the top of the return mechanism 3 is inserted into the interior of the top plate 1; the top of the auxiliary export mechanism 4 is connected to the top plate 1, and one end of the pulling mechanism 2 and the return mechanism 3 are inserted into the interior of the auxiliary export mechanism 4; the auxiliary export mechanism 4 includes: a fixed plate 401 and a slot 402; the fixed plate 401 is an overall cuboid structure with a hollow interior, the top of the fixed plate 401 is fixedly connected to the top plate 1, and the distance between the fixed plates 401 is the same as the distance between the silicon wafers; the slot 402 is opened on the surface of the fixed plate 401.

[0023] As Figure 3As shown in the figure, the pulling mechanism 2 includes: a rotating rod 201, a support box 202, a threaded rotating rod 203, a lifting rack plate 204, and a limiting support rod 205; one end of the rotating rod 201 is rotatably inserted into the top plate 1, and a gear is fixedly arranged at the other end of the rotating rod 201; the support box 202 is a cuboid structure with a hollow interior, the support box 202 is fixedly installed on one side of the top plate 1, and the other end of the rotating rod 201 is rotatably inserted into the support box 202; the bottom of the threaded rotating rod 203 is rotatably inserted into the support box 202; the lifting rack plate 204 is installed inside the support box 202, one side of the lifting rack plate 204 is meshed and connected with the gear at the other end of the rotating rod 201, and the sliding of the lifting rack plate 204 can control the rotation of the rotating rod 201; the limiting support rod 205 is a T-shaped structure, the limiting support rod 205 is fixedly installed inside the support box 202, the limiting support rod 205 is slidably connected with the lifting rack plate 204, and the limiting support rod 205 can play a role in restricting the offset rotation of the lifting rack plate 204.

[0024] As Figure 4 shown in the figure, the return mechanism 3 includes: a sliding frame 301, a connecting rod 302, and a pull rod 303; the sliding frame 301 is an H-shaped structure, the number of sliding frames 301 is set to two groups, and the sliding frames 301 are slidably installed inside the square chute of the top plate 1; the left and right ends of the connecting rod 302 are fixedly connected to the two groups of sliding frames 301; the bottom of the pull rod 303 is slidably inserted into the top plate 1 and fixedly connected to the connecting rod 302.

[0025] As Figure 4 shown in the figure, the return mechanism 3 further includes: a control pull rope A304, an outer plate 305, a guiding rod 306, and a driving pull plate 307; the top of the control pull rope A304 is slidably inserted into the top plate 1 and fixedly connected to the connecting rod 302; one side of the outer plate 305 is fixedly connected to the fixing plate 401; the guiding rod 306 is an L-shaped structure, the surface of the guiding rod 306 is fixedly connected to the outer plate 305, one side of the bottom of the guiding rod 306 is fixedly connected to the fixing plate 401, and the control pull rope A304 slides through the guiding rod 306 and is inserted into the fixing plate 401; the driving pull plate 307 is slidably installed inside the square chute of the fixing plate 401, one side of the bottom of the driving pull plate 307 is fixedly connected to the other end of the control pull rope A304, and the control pull rope A304 can play a role in starting to control the sliding of the driving pull plate 307.

[0026] As Figure 5As shown in the figure, the auxiliary export mechanism 4 further includes an auxiliary insertion plate 403, a rubber sheet 404, and a control pull rope B405; the auxiliary insertion plate 403 is of a trapezoidal structure, the top of the auxiliary insertion plate 403 is fixedly connected to the fixed plate 401, and the auxiliary insertion plate 403 can facilitate the insertion of the fixed plate 401 into the middle area of the silicon wafer; the surface of the rubber sheet 404 is provided with particles for increasing friction, the rubber sheet 404 is slidably installed inside the fixed plate 401, one side of the bottom of the rubber sheet 404 is fixedly connected to the driving pull plate 307, and the rubber sheet 404 can play a role in assisting the export of the silicon wafer; the bottom of the control pull rope B405 is slidably inserted into the fixed plate 401 and fixedly connected to the rubber sheet 404, and the control pull rope B405 is slidably inserted into the top plate 1 and fixedly connected to the rotating rod 201.

[0027] Specific usage method and function of this embodiment:

[0028] In the present utility model, during use, the auxiliary insertion plate 403 is aligned with the area between the silicon wafers and inserted. The fixed plate 401 is inserted into the area between the two groups of silicon wafers. Since the distance between the fixed plate 401 and the silicon wafers is the same, after the fixed plate 401 is inserted, the threaded rotating rod 203 can be rotated. During the rotation of the threaded rotating rod 203, the lifting rack plate 204 can be controlled to slide. Since the lifting rack plate 204 is meshed with the gear on one side of the rotating rod 201, the rotating rod 201 will start to rotate under force. When the rotating rod 201 rotates, the rotating rod 201 will pull the control pull rope B405 to be coiled on the surface of the rotating rod 201. As the control pull rope B405 is coiled and slides, the rubber sheet 404 at the other end of the control pull rope B405 will form wrinkles in the slot 402 area under the influence of the pulling force. The rubber sheet 404 will contact the silicon wafer and generate a certain extrusion force. The staff can pull the entire device upward to drive the silicon wafer to rise through the rubber sheet 404 and export the silicon wafer. After inserting it into other flower basket carriers, rotate the threaded rotating rod 203 in the reverse direction. The threaded rotating rod 203 controls the rotating rod 201 to rotate in the reverse direction, and the control pull rope B405 is no longer coiled on the surface of the rotating rod 201. The control pull rope A304 is pulled to slide by the connecting rod 302 and the pull rod 303. The driving pull plate 307 is fixedly arranged at the other end of the control pull rope A304, and the driving pull plate 307 can pull the rubber sheet 404 to be flat again, facilitating the next wafer guiding.

[0029] In this article, the following points need to be noted:

[0030] 1. The drawings of the embodiments of the present disclosure only relate to the structures involved in the embodiments of the present disclosure, and other structures can refer to the general design.

[0031] 2. Without conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0032] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present disclosure can easily think of changes or substitutions, which should all be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims

1. A flower basket guide, comprising: A top plate (1), a pulling mechanism (2), a return mechanism (3) and an auxiliary lead-out mechanism (4); the top plate (1) as a whole is a rectangular parallelepiped structure with a hollow interior; it is characterized in that one end of the pulling mechanism (2) is inserted into the interior of the top plate (1); the top of the return mechanism (3) is inserted into the interior of the top plate (1); the top of the auxiliary lead-out mechanism (4) is connected to the top plate (1), and one end of the pulling mechanism (2) and the return mechanism (3) are inserted into the interior of the auxiliary lead-out mechanism (4); the auxiliary lead-out mechanism (4) comprises: a fixed plate (401) and a slot (402); the top of the fixed plate (401) is fixedly connected to the top plate (1); the slot (402) is opened on the surface of the fixed plate (401).

2. A flower basket guide according to claim 1, characterized in that: The pulling mechanism (2) comprises: a rotating rod (201), a support box (202), a threaded rotating rod (203), a lifting rack plate (204) and a limit support rod (205); one end of the rotating rod (201) is rotatably inserted into the interior of the top plate (1), and the other end of the rotating rod (201) is fixedly provided with a gear; the support box (202) is a rectangular parallelepiped structure with a hollow interior, the support box (202) is fixedly installed on one side of the top plate (1), and the other end of the rotating rod (201) is rotatably inserted into the interior of the top plate (1). The threaded rotating rod (203) is inserted into the supporting box (202); the bottom of the threaded rotating rod (203) is rotated and inserted into the supporting box (202); the lifting rack plate (204) is installed in the supporting box (202), and one side of the lifting rack plate (204) is meshed with the gear at the other end of the rotating rod (201); the limiting support rod (205) is a T-shaped structure, the limiting support rod (205) is fixedly installed in the supporting box (202), and the limiting support rod (205) is slidably connected with the lifting rack plate (204).

3. The flower basket guide according to claim 1, characterized in that: The return mechanism (3) comprises: a sliding frame (301), a connecting rod (302) and a pull rod (303); the sliding frame (301) is an H-shaped structure, the number of the sliding frames (301) is set to two groups, and the sliding frames (301) are slidably installed inside the square sliding groove of the top plate (1); the left and right ends of the connecting rod (302) are fixedly connected to the two groups of sliding frames (301); the bottom of the pull rod (303) is slidably inserted into the inside of the top plate (1) and is fixedly connected to the connecting rod (302).

4. A flower basket guide according to claim 3, characterized in that: The return mechanism (3) further comprises: a control pull rope A (304), an outer plate (305), a guide rod (306) and a driving pull plate (307); the top of the control pull rope A (304) is slidably inserted into the interior of the top plate (1) and is fixedly connected to the connecting rod (302); one side of the outer plate (305) is fixedly connected to the fixed plate (401); the guide rod (306) is an L-shaped structure, the surface of the guide rod (306) is fixedly connected to the outer plate (305), one side of the bottom of the guide rod (306) is fixedly connected to the fixed plate (401), the control pull rope A (304) slides through the guide rod (306) and is inserted into the interior of the fixed plate (401); the driving pull plate (307) is slidably installed in the square slide groove of the fixed plate (401), and one side of the bottom of the driving pull plate (307) is fixedly connected to the other end of the control pull rope A (304).

5. A flower basket guide according to claim 4, characterized in that: The auxiliary export mechanism (4) also includes an auxiliary plug plate (403), a rubber sheet (404) and a control pull rope B (405); the top of the auxiliary plug plate (403) is fixedly connected to the fixed plate (401); the rubber sheet (404) is slidably installed inside the fixed plate (401), and one side of the bottom of the rubber sheet (404) is fixedly connected to the driving pull plate (307), and the rubber sheet (404) can play a role in assisting the pulling of the silicon wafer export; the bottom of the control pull rope B (405) is slidably inserted into the fixed plate (401) and fixedly connected to the rubber sheet (404), and the control pull rope B (405) is slidably inserted into the top plate (1) and fixedly connected to the rotating rod (201).

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