Impurity removing device for acidic cleaning solution

Abstract

The utility model discloses an acid cleaning fluid impurity removal device, which relates to the technical field of impurity removal devices and comprises a cleaning fluid delivery pipe, an impurity removal mechanism is fixedly connected to the middle of the cleaning fluid delivery pipe, and a filter support is slidably inserted below the front side of the impurity removal mechanism. Through mutual cooperation of the connecting base, the conduction groove, the collecting barrel, the motor, the rotating disc, the scraping through groove and the filtering support, impurities in the acid cleaning liquid can be filtered through the filtering support, the filtered impurities can be accumulated in the scraping through groove, then the rotating disc can be driven by the motor to rotate, and therefore the impurities in the acid cleaning liquid can be collected. One scraping through groove can be used for scraping impurities in the scraping through grooves, the impurities can fall into a collecting barrel, and meanwhile, the other scraping through groove can be used for conveying the impurities to the top of a filtering bracket, so that normal circulation of cleaning liquid can be ensured while the impurities are cleaned, and the impurity removal efficiency of the acid cleaning liquid cannot be influenced; and the acid cleaning liquid is more convenient to recycle.

Description

Technical Field

[0001] The utility model relates to the technical field of impurity removal devices, and particularly relates to an impurity removal device for acidic cleaning liquid. Background Technique

[0002] In the wafer cleaning process, a mixed solution of sulfuric acid and hydrogen peroxide, which is often used as a cleaning agent for surface organic substances and residual metals in the cleaning process, still contains high concentrations of sulfuric acid and hydrogen peroxide after cleaning. In order to realize the reuse of the acidic cleaning liquid, an impurity removal device is needed to remove impurities in the waste liquid.

[0003] The following problems exist in the prior art:

[0004] When the existing acidic cleaning liquid impurity removal device is in use, impurities are removed by filtration. However, after a long time of filtration, a large amount of impurities will accumulate, causing the filter screen to be blocked. Cleaning it will also take a lot of time, affecting the impurity removal efficiency of the acidic cleaning liquid and being unfavorable for the recycling of the acidic cleaning liquid. Content of the Utility Model

[0005] The utility model provides an impurity removal device for acidic cleaning liquid to solve the problems raised in the above background technique.

[0006] To solve the above technical problems, the technical solution adopted by the utility model is:

[0007] An impurity removal device for acidic cleaning liquid includes a cleaning liquid delivery pipe, a middle part of the cleaning liquid delivery pipe is fixedly connected with an impurity removal mechanism, and a filter support is slidably inserted below the front side of the impurity removal mechanism.

[0008] The impurity removal mechanism includes a connecting seat, the connecting seat is fixedly connected to the middle of the cleaning liquid delivery pipe, a through conduction groove is opened at the front side of the top of the connecting seat and penetrates up and down, the conduction groove is in mutual communication with the cleaning liquid delivery pipe, a collecting cylinder is arranged at the rear side below the connecting seat, a motor is fixedly connected to the middle of the top of the connecting seat, an output shaft of the motor is fixedly connected with a rotating disk, the rotating disk is rotatably connected to the middle of the connecting seat, scraping material through grooves penetrating up and down are opened on both the front and rear sides of the rotating disk, the front scraping material through groove is in mutual communication with the conduction groove, and the bottom end of the rear scraping material through groove is in mutual communication with the top end of the collecting cylinder.

[0009] A further improvement of the technical solution of the utility model lies in that: the collecting cylinder includes a U-shaped right-angle frame, the U-shaped right-angle frame is fixedly connected to the rear side of the bottom of the connecting seat, and a flanged sliding cylinder is slidably inserted on the inner surface of the U-shaped right-angle frame.

[0010] A further improvement of the technical solution of the present utility model lies in that: sliding grooves one are respectively opened on the left and right sides of the inner wall of the U-shaped right-angle frame. A pressing spring is fixedly connected to the inner wall of the sliding groove one. Opposite surfaces of the two pressing springs are respectively fixedly connected with semi-circular clamping plates, and the semi-circular clamping plates are slidably connected inside the sliding groove one and extend to the outer surface of the flanging sliding cylinder.

[0011] A further improvement of the technical solution of the present utility model lies in that: the filter support includes a sliding plug-in frame. A sliding groove two is opened below the front side of the impurity removal mechanism, and the sliding plug-in frame is slidably plugged inside the sliding groove two. A filter screen plate that penetrates up and down is fixedly connected to the rear side of the sliding plug-in frame, and the filter screen plate is arranged at the bottom of the scraping material through groove at the front side.

[0012] A further improvement of the technical solution of the present utility model lies in that: a knob is movably connected to the front side of the sliding plug-in frame. A bevel gear one is fixedly connected to the rear side of the knob. An activity groove is opened at the front side inside the sliding plug-in frame, and the bevel gear one is movably connected inside the activity groove. Bevel gears two are respectively meshed and connected to the left and right sides of the outer surface of the bevel gear one, and a transmission screw rod is fixedly connected to the side of the bevel gear two away from the bevel gear one.

[0013] A further improvement of the technical solution of the present utility model lies in that: sliding grooves three are respectively opened on the left and right sides inside the sliding plug-in frame. One end of the transmission screw rod away from the bevel gear two penetrates into the sliding groove three and is threadedly connected with a sliding plug column on the outer surface. Fixed grooves are respectively opened on the left and right sides of the inner surface of the sliding groove two, and the sliding plug column is slidably connected inside the sliding groove three and extends away from the transmission screw rod into the fixed groove.

[0014] A further improvement of the technical solution of the present utility model lies in that: the sliding plug column includes a sliding column. The sliding column is slidably connected inside the sliding groove three and a threaded hole is opened at one end close to the transmission screw rod. The inner surface of the threaded hole is threadedly connected with the outer surface of the transmission screw rod. Inclined surfaces are respectively arranged on the upper and lower sides of the end of the sliding column away from the threaded hole, and inclined chutes are respectively opened on the two inclined surfaces.

[0015] A further improvement of the technical solution of the present utility model lies in that: an inclined guide rod is fixedly connected to the inner wall of the inclined chute. A connecting slider is slidably connected to the outer surface of the inclined guide rod. Return springs are respectively fixedly connected to the opposite surfaces of the two connecting sliders, and an inclined pressing block is fixedly connected to the side of the connecting slider close to the inclined surface.

[0016] Due to the adoption of the above technical solution, the technical progress achieved by the present utility model compared with the prior art is:

[0017] The utility model provides an impurity removal device for acidic cleaning liquid. Through the mutual cooperation among the connecting seat, the conduction groove, the collecting cylinder, the motor, the rotating disk, the scraping groove and the filtering support, the filtering support can filter the impurities in the acidic cleaning liquid. The filtered impurities will accumulate in the scraping groove. Then, the motor can drive the rotating disk to rotate, so as to scrape the impurities in the scraping groove and make them fall into the collecting cylinder. At the same time, another scraping groove will be transmitted to the top of the filtering support, so as to ensure the normal flow of the cleaning liquid while cleaning the impurities, and thus will not affect the impurity removal efficiency of the acidic cleaning liquid, making the recycling of the acidic cleaning liquid more convenient.

[0018] The utility model provides an impurity removal device for acidic cleaning liquid. Through the mutual cooperation among the sliding plug-in frame, the filter screen plate, the knob, the first bevel gear, the second bevel gear, the transmission screw rod and the sliding plug post, by rotating the knob, the first bevel gear can drive the second bevel gear to rotate, and the transmission screw rod can drive the sliding plug post to slide, so as to control the fixation of the sliding plug-in frame, which facilitates the disassembly and replacement of the filter screen plate. Thus, different filter screen plates can be used according to different impurities, making the removal effect of the impurities in the acidic cleaning liquid better and facilitating the use of the impurity removal device for acidic cleaning liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of the utility model;

[0020] Figure 2 is a schematic structural diagram of the cross-section of the impurity removal mechanism of the utility model;

[0021] Figure 3 is a schematic cross-sectional structural diagram of the collecting cylinder of the utility model;

[0022] Figure 4 is a schematic cross-sectional structural diagram of the filtering support of the utility model;

[0023] Figure 5 is a schematic cross-sectional structural diagram of the sliding plug post of the utility model.

[0024] In the figure: 1. cleaning liquid conveying pipe; 2. impurity removal mechanism; 21. connecting seat; 22. conduction groove; 23. collecting cylinder; 231. U-shaped right-angle frame; 232. flanging sliding cylinder; 233. top spring; 234. semi-circular clamping plate; 24. motor; 25. rotating disk; 26. scraping groove; 3. filtering support; 31. sliding plug-in frame; 32. filter screen plate; 33. knob; 34. first bevel gear; 35. second bevel gear; 36. transmission screw rod; 37. sliding plug post; 371. sliding column; 372. inclined guide rod; 373. connecting slider; 374. return spring; 375. inclined pressing block. Specific Embodiments

[0025] In order to make the technical means, creative features, achieved purposes and functions of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments:

[0026] As Figure 1-2 shown, the present utility model provides an impurity removal device for acidic cleaning liquid, which includes a cleaning liquid delivery pipe 1. A middle part of the cleaning liquid delivery pipe 1 is fixedly connected with an impurity removal mechanism 2. A filter bracket 3 is slidably inserted below the front side of the impurity removal mechanism 2. The impurity removal mechanism 2 includes a connecting seat 21. The connecting seat 21 is fixedly connected to the middle part of the cleaning liquid delivery pipe 1. A through conduction groove 22 penetrating up and down is formed in the front side of the top of the connecting seat 21. The conduction groove 22 is in mutual communication with the cleaning liquid delivery pipe 1. A collection cylinder 23 is arranged at the rear side below the connecting seat 21. A middle part of the top end of the connecting seat 21 is fixedly connected with a motor 24. An output shaft of the motor 24 is fixedly connected with a rotating disk 25. The rotating disk 25 is rotatably connected to the middle part of the connecting seat 21. Scraping material through grooves 26 penetrating up and down are formed on both the front and rear sides of the rotating disk 25. The front scraping material through groove 26 is in mutual communication with the conduction groove 22. A bottom end of the rear scraping material through groove 26 is in mutual communication with a top end of the collection cylinder 23;

[0027] When performing impurity removal treatment on the recycled acidic cleaning liquid, the acidic cleaning liquid can be conveyed into the conduction groove 22 through the cleaning liquid delivery pipe 1. The filter bracket 3 can filter impurities in the acidic cleaning liquid. The filtered impurities will accumulate in the scraping material through groove 26. Then, by starting the motor 24, the rotating disk 25 can be driven to rotate in the middle part of the connecting seat 21, so that the impurities in the scraping material through groove 26 can be scraped off and fall into the interior of the collection cylinder 23. At the same time, the rear scraping material through groove 26 will be transmitted to the top of the filter bracket 3. Thus, while cleaning the impurities, the normal flow of the cleaning liquid can be ensured, making the recycling of the acidic cleaning liquid more convenient.

[0028] As Figure 3 shown, the present utility model provides an impurity removal device for acidic cleaning liquid. The collection cylinder 23 includes a U-shaped right-angle frame 231. The U-shaped right-angle frame 231 is fixedly connected to the rear side of the bottom of the connecting seat 21. A flanged sliding cylinder 232 is slidably inserted into an inner surface of the U-shaped right-angle frame 231. Sliding grooves one are formed on both the left and right sides of the inner wall of the U-shaped right-angle frame 231. A top spring 233 is fixedly connected to an inner wall of the sliding groove one. Opposite surfaces of the two top springs 233 are fixedly connected with semi-circular clamping plates 234. The semi-circular clamping plates 234 are slidably connected inside the sliding groove one and extend to an outer surface of the flanged sliding cylinder 232;

[0029] Insert the flanging slider 232 into the interior of the U-shaped right-angle bracket 231, and use the pressing spring 233 to press against the semi-circular clamping plate 234, so that the semi-circular clamping plate 234 can press against the flanging slider 232, thereby fixing the position of the flanging slider 232, facilitating the collection of impurities through the flanging slider 232. At the same time, through the semi-circular surface of the semi-circular clamping plate 234, the flanging slider 232 can be directly slid out, facilitating the pouring out of impurities.

[0030] As Figure 4 Shown in the figure, the present utility model provides an acidic cleaning solution impurity removal device. The filter bracket 3 includes a sliding plug-in frame 31. A second sliding groove is provided below the front side of the impurity removal mechanism 2. The sliding plug-in frame 31 is slidably inserted into the interior of the second sliding groove. A filter screen plate 32 that penetrates up and down is fixedly connected to the rear side of the sliding plug-in frame 31. The filter screen plate 32 is arranged at the bottom of the scraping through groove 26 on the front side. A knob 33 is movably connected to the front side of the sliding plug-in frame 31. A first bevel gear 34 is fixedly connected to the rear side of the knob 33. An activity groove is provided in the front side of the interior of the sliding plug-in frame 31. The first bevel gear 34 is movably connected to the interior of the activity groove. A second bevel gear 35 is meshed and connected to both the left and right sides of the outer surface of the first bevel gear 34. A transmission screw 36 is fixedly connected to the side of the second bevel gear 35 away from the first bevel gear 34. Third sliding grooves are provided on both the left and right sides of the interior of the sliding plug-in frame 31. One end of the transmission screw 36 away from the second bevel gear 35 penetrates into the interior of the third sliding groove and is threadedly connected to a sliding plug post 37 on its outer surface. Fixed grooves are provided on both the left and right sides of the inner surface of the second sliding groove. The sliding plug post 37 is slidably connected to the interior of the third sliding groove and extends away from the transmission screw 36 into the interior of the fixed groove;

[0031] The filter screen plate 32 can filter impurities in the acidic cleaning solution. By rotating the knob 33, the first bevel gear 34 can be driven to rotate, and the second bevel gear 35 can be driven to rotate, thereby driving the transmission screw 36 to rotate and driving the sliding plug post 37 to slide in the third sliding groove. Thus, by controlling the sliding in and out of the sliding plug post 37 in the fixed groove, the fixing of the sliding plug-in frame 31 can be controlled, facilitating the disassembly and replacement of the filter screen plate 32, so that different filter screen plates 32 can be used according to different impurities, facilitating the use of the acidic cleaning solution impurity removal device.

[0032] As Figure 5As shown in the figure, the present utility model provides an impurity removal device for acidic cleaning liquid. The sliding insertion post 37 includes a sliding post 371. The sliding post 371 is slidably connected inside the third sliding groove, and a threaded hole is provided at one end close to the transmission screw 36. The inner surface of the threaded hole is threadedly connected to the outer surface of the transmission screw 36. Both upper and lower sides of the end of the sliding post 371 away from the threaded hole are provided with inclined surfaces. Oblique sliding grooves are provided on both inclined surfaces. A diagonal guide rod 372 is fixedly connected to the inner wall of the oblique sliding groove. A connecting slider 373 is slidably connected to the outer surface of the diagonal guide rod 372. A return spring 374 is fixedly connected to the opposite surfaces of the two connecting sliders 373. An oblique pressing block 375 is fixedly connected to the side of the connecting slider 373 close to the inclined surface;

[0033] When the sliding insertion post 37 is used to fix the sliding insertion frame 31, the oblique pressing block 375 will first press against the inner wall of the fixing groove. At the same time, through the sliding of the connecting slider 373 on the diagonal guide rod 372, the oblique pressing block 375 can slide to both sides and can press against both sides of the inner wall of the fixing groove, making the fixing effect of the sliding insertion post 37 on the sliding insertion frame 31 better.

[0034] Next, the working principle of the acidic cleaning liquid impurity removal device will be specifically described.

[0035] As Figure 1-5 shown, when the recycled acidic cleaning liquid is subjected to impurity removal treatment, the sliding insertion frame 31 is inserted into the second sliding groove. By rotating the knob 33, the bevel gear one 34 can drive the bevel gear two 35 to rotate, and the transmission screw 36 can drive the sliding insertion post 37 to insert into the inside of the fixing groove, thereby fixing the sliding insertion frame 31. Then, the acidic cleaning liquid can be transported into the conduction groove 22 through the cleaning liquid delivery pipe 1. The filter screen plate 32 can filter the impurities in the acidic cleaning liquid. The filtered impurities will accumulate in the scraping through groove 26. Then, by starting the motor 24, the rotating disk 25 can be driven to rotate in the middle of the connecting seat 21, so that the impurities in the scraping through groove 26 can be scraped off and fall into the inside of the collection cylinder 23. At the same time, the scraping through groove 26 at the rear side will be transmitted to the top of the filter support 3, so that while cleaning the impurities, the normal flow of the cleaning liquid can be ensured, making the recycling of the acidic cleaning liquid more convenient.

[0036] The above text generally describes the present utility model in detail. However, based on the present utility model, some modifications or improvements can be made, which are obvious to those of ordinary skill in the technical field. Therefore, modifications or improvements made without departing from the spirit of the present utility model are within the protection scope of the present utility model.

Claims

1. An acid cleaning liquid impurity removal device, characterized in that: It comprises a cleaning liquid delivery pipe (1), a middle portion of which is fixedly connected to a debris removal mechanism (2), and a filter bracket (3) is slidably plugged into a lower front side of the debris removal mechanism (2); The impurity removal mechanism (2) comprises a connecting seat (21), the connecting seat (21) being fixedly connected to the middle part of the cleaning liquid delivery pipe (1), a conducting groove (22) penetrating from top to bottom being provided at the front side of the top of the connecting seat (21), the conducting groove (22) and the cleaning liquid delivery pipe (1) being in mutual conduction, a collecting cylinder (23) being provided at the lower rear side of the connecting seat (21), a motor (24) being fixedly connected to the middle part of the top of the connecting seat (21), the output shaft of the motor (24) being fixedly connected to a rotating disk (25), the rotating disk (25) being rotatably connected to the middle part of the connecting seat (21), a scraper through groove (26) penetrating from top to bottom being provided at the front and rear sides of the rotating disk (25), the scraper through groove (26) on the front side being in mutual conduction with the conducting groove (22), and the bottom end of the scraper through groove (26) on the rear side being in mutual conduction with the top end of the collecting cylinder (23).

2. The acid cleaning liquid impurity removal device according to claim 1, characterized in that: The collecting cylinder (23) comprises a U-shaped right-angle frame (231), the U-shaped right-angle frame (231) is fixedly connected to the rear side of the bottom of the connecting seat (21), and a flanged sliding cylinder (232) is slidably inserted into the inner surface of the U-shaped right-angle frame (231).

3. The acid cleaning liquid impurity removal device according to claim 2, characterized in that: The inner wall of the U-shaped right angle frame (231) is provided with a sliding groove 1 on both sides, the inner wall of the sliding groove 1 is fixedly connected with a tightening spring (233), and the opposite surfaces of the two tightening springs (233) are fixedly connected with a semicircular clamping plate (234), and the semicircular clamping plate (234) is slidably connected to the inside of the sliding groove 1 and extends to the outer surface of the flange slide cylinder (232).

4. The acid cleaning liquid impurity removal device according to claim 1, characterized in that: The filter bracket (3) comprises a sliding plug-in frame (31), a sliding groove 2 is provided at the lower front side of the impurity removal mechanism (2), the sliding plug-in frame (31) is slidably plugged into the interior of the sliding groove 2, and a filter screen plate (32) penetrating from top to bottom is fixedly connected to the rear side of the sliding plug-in frame (31), and the filter screen plate (32) is arranged at the bottom of the scraper through groove (26) at the front side.

5. The acid cleaning liquid impurity removal device according to claim 4, characterized in that: The front side of the sliding plug-in frame (31) is movably connected to a knob (33), the rear side of the knob (33) is fixedly connected to a bevel gear 1 (34), the inner front side of the sliding plug-in frame (31) is provided with a movable groove, the bevel gear 1 (34) is movably connected inside the movable groove, the outer surface of the bevel gear 1 (34) is meshingly connected to the bevel gear 2 (35) on both left and right sides, and the side of the bevel gear 2 (35) away from the bevel gear 1 (34) is fixedly connected to a transmission screw (36).

6. The acid cleaning liquid impurity removal device according to claim 5, characterized in that: The sliding slot frame (31) is provided with sliding slots three on both sides of the interior thereof; one end of the transmission screw (36) away from the bevel gear (35) penetrates into the interior of the sliding slot three and a sliding plug post (37) is threadedly connected to the outer surface thereof; the inner surface of the sliding slot two is provided with fixed slots on both sides of the interior thereof; the sliding plug post (37) is slidably connected to the interior of the sliding slot three and is away from the transmission screw (36) and penetrates into the interior of the fixed slot.

7. The acid cleaning liquid impurity removal device according to claim 6, characterized in that: The sliding plug (37) comprises a sliding column (371), the sliding column (371) is slidably connected inside the sliding groove three and has a threaded hole at one end close to the transmission screw (36), the inner surface of the threaded hole is threadedly connected to the outer surface of the transmission screw (36), and the sliding column (371) has inclined surfaces on both sides of the upper and lower sides of the end away from the threaded hole, and the inclined surfaces on both sides have inclined sliding grooves.

8. The acid cleaning liquid impurity removal device according to claim 7, characterized in that: An oblique guide rod (372) is fixedly connected to the inner wall of the oblique slide groove, a connecting slider (373) is slidably connected to the outer surface of the oblique guide rod (372), a return spring (374) is fixedly connected to the opposite surfaces of the two connecting sliders (373), and an oblique pressing block (375) is fixedly connected to the side of the connecting slider (373) close to the inclined surface.

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